JP2005279624A - カーボンナノチューブの製造用触媒、製造方法及び製造装置 - Google Patents
カーボンナノチューブの製造用触媒、製造方法及び製造装置 Download PDFInfo
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- JP2005279624A JP2005279624A JP2004127395A JP2004127395A JP2005279624A JP 2005279624 A JP2005279624 A JP 2005279624A JP 2004127395 A JP2004127395 A JP 2004127395A JP 2004127395 A JP2004127395 A JP 2004127395A JP 2005279624 A JP2005279624 A JP 2005279624A
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- catalyst
- carbon nanotubes
- temperature
- producing carbon
- carbon
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 154
- 239000003054 catalyst Substances 0.000 title claims abstract description 135
- 239000002041 carbon nanotube Substances 0.000 title claims abstract description 134
- 229910021393 carbon nanotube Inorganic materials 0.000 title claims abstract description 134
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 42
- 239000000758 substrate Substances 0.000 claims abstract description 51
- 238000006243 chemical reaction Methods 0.000 claims description 33
- 239000002994 raw material Substances 0.000 claims description 20
- 229910052799 carbon Inorganic materials 0.000 claims description 19
- 239000002071 nanotube Substances 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 14
- 229910052751 metal Inorganic materials 0.000 claims description 14
- 150000002736 metal compounds Chemical class 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000000956 alloy Substances 0.000 claims description 4
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 230000001590 oxidative effect Effects 0.000 claims description 4
- 239000011521 glass Substances 0.000 abstract description 34
- 238000000034 method Methods 0.000 abstract description 26
- 230000002194 synthesizing effect Effects 0.000 abstract description 5
- 239000007789 gas Substances 0.000 description 42
- 238000003763 carbonization Methods 0.000 description 20
- 239000002245 particle Substances 0.000 description 11
- 238000000089 atomic force micrograph Methods 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 9
- 238000001878 scanning electron micrograph Methods 0.000 description 9
- 238000003786 synthesis reaction Methods 0.000 description 9
- 229910003481 amorphous carbon Inorganic materials 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 238000000349 field-emission scanning electron micrograph Methods 0.000 description 7
- 238000001069 Raman spectroscopy Methods 0.000 description 5
- 230000003647 oxidation Effects 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- 239000012159 carrier gas Substances 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 238000005240 physical vapour deposition Methods 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- 238000003475 lamination Methods 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 2
- 238000010891 electric arc Methods 0.000 description 2
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 2
- 238000009472 formulation Methods 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- -1 linear Chemical compound 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 150000002902 organometallic compounds Chemical class 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000001237 Raman spectrum Methods 0.000 description 1
- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
- 150000001336 alkenes Chemical class 0.000 description 1
- 150000001345 alkine derivatives Chemical class 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000004050 hot filament vapor deposition Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000002109 single walled nanotube Substances 0.000 description 1
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- Catalysts (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004127395A JP2005279624A (ja) | 2004-03-27 | 2004-03-27 | カーボンナノチューブの製造用触媒、製造方法及び製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004127395A JP2005279624A (ja) | 2004-03-27 | 2004-03-27 | カーボンナノチューブの製造用触媒、製造方法及び製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005279624A true JP2005279624A (ja) | 2005-10-13 |
| JP2005279624A5 JP2005279624A5 (enExample) | 2007-06-14 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004127395A Pending JP2005279624A (ja) | 2004-03-27 | 2004-03-27 | カーボンナノチューブの製造用触媒、製造方法及び製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005279624A (enExample) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007161572A (ja) * | 2005-12-13 | 2007-06-28 | Samsung Sdi Co Ltd | カーボンナノチューブの形成方法およびこれを利用した電界放出素子の製造方法 |
| WO2007108050A1 (ja) * | 2006-03-16 | 2007-09-27 | Fujitsu Limited | カーボンナノチューブ構造体、カーボンナノチューブの作製方法、電気的機能装置、カーボンナノチューブ成長用触媒微粒子 |
| JP2007257992A (ja) * | 2006-03-23 | 2007-10-04 | Noritake Co Ltd | 電子放出源及びその製造方法 |
| JP2007261839A (ja) * | 2006-03-27 | 2007-10-11 | Toyota Central Res & Dev Lab Inc | カーボンナノチューブの製造方法 |
| JP2009173497A (ja) * | 2008-01-25 | 2009-08-06 | Mie Univ | 準結晶触媒を用いるカーボンナノチューブ合成法 |
| US20120135224A1 (en) * | 2010-10-28 | 2012-05-31 | Massachusetts Institute Of Technology | Carbon-based nanostructure formation using large scale active growth structures |
| JP2016172255A (ja) * | 2016-05-30 | 2016-09-29 | ニッタ株式会社 | カーボンファイバ成長用Ｆｅ微粒子形成方法 |
| US10087079B2 (en) | 2009-07-31 | 2018-10-02 | Massachusetts Institute Of Technology | Systems and methods related to the formation of carbon-based nanostructures |
| US10195797B2 (en) | 2013-02-28 | 2019-02-05 | N12 Technologies, Inc. | Cartridge-based dispensing of nanostructure films |
| US12319579B2 (en) | 2018-12-14 | 2025-06-03 | Massachusetts Institute Of Technology | Formation and/or growth of carbon-based nanostructures on copper-containing substrates, and related systems and methods |
| US12479728B2 (en) | 2018-12-14 | 2025-11-25 | Massachusetts Institute Of Technology | Fabrication of carbon-based nanostructures on metallic substrates, including aluminum-containing substrates |
-
2004
- 2004-03-27 JP JP2004127395A patent/JP2005279624A/ja active Pending
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007161572A (ja) * | 2005-12-13 | 2007-06-28 | Samsung Sdi Co Ltd | カーボンナノチューブの形成方法およびこれを利用した電界放出素子の製造方法 |
| JP5187193B2 (ja) * | 2006-03-16 | 2013-04-24 | 富士通株式会社 | カーボンナノチューブ構造体、カーボンナノチューブの作製方法、電気的機能装置、カーボンナノチューブ成長用触媒微粒子 |
| WO2007108050A1 (ja) * | 2006-03-16 | 2007-09-27 | Fujitsu Limited | カーボンナノチューブ構造体、カーボンナノチューブの作製方法、電気的機能装置、カーボンナノチューブ成長用触媒微粒子 |
| JPWO2007108050A1 (ja) * | 2006-03-16 | 2010-05-13 | 富士通株式会社 | カーボンナノチューブ構造体、カーボンナノチューブの作製方法、電気的機能装置、カーボンナノチューブ成長用触媒微粒子 |
| US7932510B2 (en) | 2006-03-16 | 2011-04-26 | Fujitsu Limited | Carbon nanotube grown on catalyst and manufacture method |
| JP2007257992A (ja) * | 2006-03-23 | 2007-10-04 | Noritake Co Ltd | 電子放出源及びその製造方法 |
| JP2007261839A (ja) * | 2006-03-27 | 2007-10-11 | Toyota Central Res & Dev Lab Inc | カーボンナノチューブの製造方法 |
| JP2009173497A (ja) * | 2008-01-25 | 2009-08-06 | Mie Univ | 準結晶触媒を用いるカーボンナノチューブ合成法 |
| US10087079B2 (en) | 2009-07-31 | 2018-10-02 | Massachusetts Institute Of Technology | Systems and methods related to the formation of carbon-based nanostructures |
| WO2012091789A1 (en) * | 2010-10-28 | 2012-07-05 | Massachusetts Institute Of Technology | Carbon-based nanostructure formation using large scale active growth structures |
| US9663368B2 (en) | 2010-10-28 | 2017-05-30 | Massachusetts Institute Of Technology | Carbon-based nanostructure formation using large scale active growth structures |
| US20120135224A1 (en) * | 2010-10-28 | 2012-05-31 | Massachusetts Institute Of Technology | Carbon-based nanostructure formation using large scale active growth structures |
| US10195797B2 (en) | 2013-02-28 | 2019-02-05 | N12 Technologies, Inc. | Cartridge-based dispensing of nanostructure films |
| JP2016172255A (ja) * | 2016-05-30 | 2016-09-29 | ニッタ株式会社 | カーボンファイバ成長用Ｆｅ微粒子形成方法 |
| US12319579B2 (en) | 2018-12-14 | 2025-06-03 | Massachusetts Institute Of Technology | Formation and/or growth of carbon-based nanostructures on copper-containing substrates, and related systems and methods |
| US12479728B2 (en) | 2018-12-14 | 2025-11-25 | Massachusetts Institute Of Technology | Fabrication of carbon-based nanostructures on metallic substrates, including aluminum-containing substrates |
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