JP2005272204A - Method of manufacturing glassy carbon-made profiled pipe and glassy carbon-made profiled pipe - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a glassy carbon-made profiled pipe by which a profiled pipe-like glassy carbon product having a profiled cross-section typically composed of an ellipse or a partial circle and a straight line part is relatively easily manufactured with a proper dimensional precision. <P>SOLUTION: The method of manufacturing the glassy carbon-made profiled pipe includes a process for obtaining a thermosetting resin-made cylindrical molding by molding a thermosetting resin, a process for obtaining a thermosetting resin-made profiled pipe by heating and plastically deforming the thermosetting resin-made cylindrical molding and a process for carbonizing resultant thermosetting resin-made profiled pipe. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  TECHNICAL FIELD The present invention relates to a method for producing a glassy carbon deformed tube suitable as a component material used in a high temperature or corrosive environment and a glassy carbon deformed tube, and particularly to a glassy carbon suitable as a chamber of a semiconductor manufacturing apparatus. The present invention relates to a method for manufacturing a modified tube and a glassy carbon modified tube.

  Glassy carbon has a heat resistance of 2000 ° C. or higher in an inert atmosphere, and exhibits excellent corrosion resistance against hydrogen fluoride and fluorine. For this reason, it is considered that the present invention is applied to apparatus parts that handle corrosive gas and are required to generate less impurities, such as semiconductor manufacturing apparatuses, especially CVD apparatuses. This glassy carbon is generally produced by carbonizing and firing a molded body of a thermosetting resin such as a furan resin or a phenol resin at a high temperature. The problems in the manufacturing technology at the time of manufacture are that the thermosetting resin as a raw material has low moldability and shrinkage of about 20% occurs during carbonization firing. Therefore, it is not easy to accurately mold a component having a complicated shape.

  By the way, as illustrated in FIG. 5, the glass-like carbon deformed tube targeted by the present invention is a rectangular shape in which the cross section of the tube 9 (cross section perpendicular to the tube axis direction) has a curvature at four corners, two sides. Are intended for a long hole shape (track shape) or an ellipse shape in parallel.

  If it is a glassy carbon molded body (cylindrical body) with a simple cross section, it can be manufactured according to conventional methods such as centrifugal molding using a thermosetting resin. In order to fabricate with carbon, a deformed tube of the above shape with a non-circular cross section is also required. However, it is impossible in principle to manufacture such a deformed tube by centrifugal molding.

  When manufacturing cylindrical or irregular-shaped glassy carbon parts, a core is generally used to ensure the dimensional accuracy of the product. Here, the core is a part for maintaining the product shape, and at least a part of its dimensions is designed to be approximately equal to a part of the dimension of the product after carbonization, that is, after shrinkage. The And it is inserted and used inside the thermosetting resin molded body before carbonization treatment, and has a function of suppressing the product shape and dimensions within a predetermined range by supporting the product from the inside (Japanese Patent Laid-Open No. 2002-179463 ( See Patent Document 1)).

  For example, when producing cylindrical glassy carbon, a graphite cylinder having an inner diameter smaller than its inner diameter and approximately equal to the inner diameter of the glassy carbon cylinder after carbonization treatment is provided inside the thermosetting resin cylinder. Carbonization is performed with the core inserted.

  JP-A-2000-313666 (Patent Document 2) discloses a glass-like shape in which a thermosetting resin molded body having a shape obtained by dividing a cylinder is made, joined to form a cylindrical molded body, and carbonized. A method for producing a carbon cylinder has been proposed. However, Patent Document 2 does not mention the production of a deformed tube having an elliptical cross section or a partial circle and a straight line. In addition, it is difficult in the first place to manufacture the deformed tube portions with high dimensional accuracy and accurately position and join them in the manner of the proposed manufacturing method. In addition, when using a glassy carbon deformed tube as a chamber, it is desirable that there are as few or no joined portions as possible. This is because the joining line often causes dimensional distortion, residual stress, and dust generation.

As for the problem of dimensional accuracy, the core is also a problem. The disadvantage of the method using the core is that the dimensional correction effect by the core is not sufficient because the gap between the core and the thermosetting resin molded product that is the product is large at the time of starting the carbonization treatment. . That is, since the core and the product come into contact with each other when the carbonization treatment is almost completed, it has been difficult to sufficiently correct the dimensions with the core if the product has been greatly deformed until then. Such difficulty becomes remarkable when the product is a deformed pipe.
JP 2002-179463 A JP 2000-313666 A

  The present invention has been made in view of the above circumstances, and its purpose is to provide a deformed tubular glassy carbon part having an irregular cross section, typically consisting of an ellipse, a partial circle and a straight part. It is an object of the present invention to provide a glassy carbon deformed tube manufacturing method and a glassy carbon deformed tube that can be manufactured relatively easily and with high dimensional accuracy.

  In order to achieve the above object, a method for producing a glassy carbon deformed tube according to the present invention (Claim 1) includes a step of forming a thermosetting resin cylindrical molded body by molding a thermosetting resin. And a step of obtaining a thermosetting resin deformed pipe by plastic deformation while heating the thermosetting resin cylindrical molded body and a step of carbonizing the obtained thermosetting resin deformed pipe. .

The method for producing a glassy carbon modified tube according to the present invention (Claim 2) is the method for producing a glassy carbon modified tube according to Claim 1, wherein the thermosetting resin cylindrical molded body is formed of the glass. When the transition point is Tg ° C., the plastic deformation step is performed at a temperature T ° C. that satisfies the following formula (1).
(Tg + 5) ≦ T ≦ (Tg + 100) (1)

  The method for producing a glassy carbon deformed tube according to the present invention (Claim 3) is the method for producing a glassy carbon deformed tube according to claim 1 or 2, wherein the thermosetting resin cylindrical molded body Tg is 25 ° C. or more and 100 ° C. or less.

  The method for producing a glassy carbon deformed tube according to the present invention (Claim 4) is the method for producing a glassy carbon deformed tube according to any one of Claims 1 to 3, further comprising plastically deformed heat. The method includes a step of forming a flange on one or both end faces of the curable resin deformed tube.

  The method for producing a glassy carbon deformed tube according to the present invention (Claim 5) is the method for producing a glassy carbon deformed tube according to any one of Claims 1 to 4, in the carbonization step, A core having substantially the same carbonization shrinkage rate as that of the thermosetting resin deformed tube is arranged in the hollow portion of the deformed tube made of curable resin and carbonized. In this case, it is preferable to use, as the core, a thermosetting resin made of substantially the same material as that of the deformed pipe made of thermosetting resin (Claim 6).

  The method for producing a glassy carbon deformed tube according to the present invention (Claim 7) is the method for producing a glassy carbon deformed tube according to claim 5 or 6, wherein the thermosetting resin deformed tube is: The thermosetting resin deformed pipe having a parallel plane and a curved portion connecting the parallel planes, the core having a side equal to the distance between the parallel planes and extending in the longitudinal direction of the deformed pipe Are arranged at an arbitrary interval between the parallel planes.

  The deformed tube made of glassy carbon according to the present invention (invention 8) is a deformed tube made of glassy carbon and has a structure in which no joint exists in a direction parallel to the longitudinal direction of the tube.

  According to the method for producing a glass-like carbon-shaped deformed tube according to the present invention, a cylindrical molded body of a thermosetting resin is used, and the cross-section is typically formed of an ellipse, a partial circle, and a straight portion. In addition, a deformed tubular glassy carbon part can be manufactured relatively easily and with high dimensional accuracy. Furthermore, a glass-like carbon deformed tube having excellent corrosion resistance and strength is manufactured by using a thermosetting resin cylindrical molded body having no joint line in a direction parallel to the axial direction of the cylindrical molded body. be able to. In addition, the glass-like carbon deformed tube having no joints as described above is superior in corrosion resistance and strength compared to those having joints, and the semiconductor in which the glassy carbon tubes are exposed to a corrosive environment. Easy to apply to chambers of manufacturing equipment.

Hereinafter, the present invention will be specifically described.
The method for producing a glassy carbon deformed tube according to the present invention includes a step of molding a thermosetting resin to obtain a cylindrical molded body made of thermosetting resin, and plasticity while heating the cylindrical molded body made of thermosetting resin. The method includes a step of obtaining a deformed tube made of thermosetting resin by deforming, and a step of carbonizing the obtained deformed tube made of thermosetting resin.

  In the process of obtaining a cylindrical molded body made of thermosetting resin, the raw material resin is molded into a cylindrical shape. In this case, the molding method is not particularly limited, and known techniques such as a centrifugal molding method, an injection molding method, and an extrusion molding method are used. Can be adopted. Of these molding methods, it is particularly preferable to employ a centrifugal molding method. The reason is that, in the centrifugal molding method, the molten raw material resin is flowed to the inner surface side of the mold by the centrifugal force to be cured, so that the cylindrical product can be easily molded and the dimensional accuracy of the molded body is high. Since the inner surface side is open at the time of molding, it is possible to carry out gas venting well. Further, from the aspect of using a glassy carbon deformed tube as a final product, it is advantageous that the number of joint lines is smaller. In addition, as a raw material resin, well-known thermosetting resins, such as a phenol resin and a furan resin, can be employ | adopted suitably, for example.

  In the step of obtaining the thermosetting resin deformed tube, the thermosetting resin cylindrical molded body obtained above is plastically deformed while being heated, but the means of the plastic deformation is not particularly limited, for example, the deformed tube shape While applying a split mold comprising heating, a load is applied by a press and fitted into the mold, or at least two rod-shaped jigs are provided on the inner peripheral surface of a thermosetting resin cylindrical molded body, A means for pushing the rod-shaped jig in the radial direction can be mentioned. FIG. 1 is an explanatory view showing an embodiment of the latter plastic working method. In the plastic working shown in FIG. 1, two round bar jigs 2 are provided on the inner peripheral surface of a cylindrical body 1 made of a thermosetting resin (see FIG. 1a). Next, the processing is performed by pushing the round bar jig 2 in the radial direction by a push-out means (not shown) while heating the thermosetting resin cylindrical molded body 1 to a predetermined temperature (see FIG. 1 b). FIG. 2 shows a thermosetting resin deformed tube 3 obtained by processing in this way.

The above plastic working will be described in more detail.
In general, it is known that a cylindrical molded body made of a thermosetting resin is not easy to machine because of poor toughness. Therefore, it is not easy to manufacture a compact shaped body (deformed pipe) by joining parts. Therefore, as a result of various studies on the production of deformed pipes of thermosetting resins, the present inventors applied a force by heating the thermosetting resin cylindrical molded body to its glass transition point (hereinafter referred to as Tg) or higher. The present invention has been completed by finding that it can be easily plastically deformed.

  The temperature for plastic deformation is preferably a temperature 5 ° C. higher than Tg. When the temperature difference is smaller than 5 ° C., a large force is required for plastic deformation, and often breaks. The upper limit of the temperature difference is 100 ° C., more preferably 50 ° C. This is because when the temperature exceeds 100 ° C., the curing reaction of the thermosetting resin cylindrical molded body rapidly proceeds and cannot be plastically deformed.

  The cylindrical molded body made of a thermosetting resin subjected to plastic deformation has a Tg of 100 ° C. or lower, preferably 60 ° C. or lower. When Tg is high, it is necessary to heat to a higher temperature for plastic deformation. For this reason, not only is the deformation operation difficult, but also the curing reaction proceeds rapidly during the plastic deformation operation, which makes it difficult to deform. There is no particular lower limit of Tg, and generally a lower one is desirable. However, if it is excessively low, the strength at room temperature is insufficient and handling becomes difficult, so it is desirable to have a Tg of around room temperature or higher and 25 ° C. or higher.

As described above, plastic deformation is performed by applying a load by a press while applying a thermosetting resin cylindrical molded body using a split mold having a deformed tube shape, or by applying heat to the inner periphery while heating. Although it is performed by a processing means that pushes at least two rod-shaped jigs provided on the surface in the radial direction, the range in which the thermosetting resin cylindrical molded body can be plastically deformed is of course limited. That is, it is a deformation limit that causes defects such as fractures and cracks when plastic deformation is performed beyond the limit. The curvature radii before and after plastic deformation are R, R ′, the ratio (R ′ / R) is t, and the ratio of the wall thickness to the radius R before plastic deformation (wall thickness / R) is w. Assuming that the central part of the wall thickness is neutral with respect to deformation (the dimensions do not change), plastic deformation occurs evenly on the outside and inside, and the change in wall thickness is negligible, the circumference of the outer and inner circumferences The direction length change rates lo and li are expressed by the following equations.
lo = (t + w / 2) / [t (1 + w / 2)]
li = (t−w / 2) / [t (1−w / 2)]

  Generally, it is desirable that the rate of change lo to li is 10% or less, preferably 5% or less, although it varies depending on the properties of the resin. For example, when a part of a cylinder having a center diameter of 320 mm and a thickness of 3 mm is plastically deformed into a deformed pipe having an arc with a center diameter of 60 mm, the rate of change of the outer and inner circumferences is approximately 4%. It becomes.

  As described in the above equation, the rate of change of the outer periphery and inner periphery is also affected by the ratio of wall thickness to R. In short, the greater the wall thickness, the greater the rate of change. In the above example, when the wall thickness is changed from 3 mm to 6 mm, the same deformation causes a change of about twice. That is, it is desirable that the wall thickness be relatively thin as long as there is no problem in designing the parts. When large plastic deformation of 10% or more is caused, there is a high possibility that defects will occur in the resin molded body, which is not preferable. The speed of plastic deformation is not particularly limited, but generally, good results are obtained by applying a load over several minutes to several hours. Sudden deformation may cause deterioration of the resin.

  After plastic deformation in this way, further undesired deformation can be prevented by performing curing (heating for promoting chemical reaction) at a higher temperature. The curing conditions vary depending on the plastic deformation temperature. For example, when a phenol resin is used, the temperature can be set to 180 to 350 ° C. and the time can be set to 10 to 100 hours in the air.

Next, the process of carbonizing the thermosetting resin deformed pipe will be described.
In this carbonization step, the thermosetting resin-made deformed tube obtained in the plastic deformation step is subjected to carbonization to obtain a glassy carbon-shaped deformed tube. As conditions for the carbonization treatment, for example, heat treatment is generally performed at a temperature of 800 to 2500 ° C. in a non-oxygen atmosphere (such as an inert gas atmosphere).

  As described above, a glass-like carbon deformed tube having a desired shape can be obtained. For example, a deformed glassy carbon deformed tube having the same shape as the thermosetting resin deformed tube 3 shown in FIG. 2 can be obtained.

  By the way, in order to obtain the glassy carbon deformed tube with higher dimensional accuracy, it has substantially the same carbonization shrinkage rate as the thermosetting resin deformed tube that is the precursor of the product (glassy carbon deformed tube). It is preferable to use a core. In this case, the dimensions of the core can be substantially the same as at least a part of the inner diameter (inner shape) of the product precursor. This is because the core also undergoes carbonization shrinkage similarly to the product precursor. This core has the effect of maintaining the product shape from the inside until the end of carbonization.

  Here, “substantially the same carbonization shrinkage” means that the dimensional shrinkage (%) before and after carbonization is within about ± 2 points, preferably within 1 point. For example, if a 100 mm thermosetting resin molded body is carbonized, it is carbonized and shrunk to approximately 80% (varies slightly depending on the resin). In this case, the two-point shrinkage rate difference is a dimensional difference of 2 mm. If it is smaller than this difference, the effect as a core is exhibited. If it is large, the effect of supporting the shape may not be sufficient, or the product (glass-like carbon deformed tube) may be damaged.

  Furthermore, not only does the core have the same material and the carbonization shrinkage rate is almost the same as the product, but the core is made from a combination of two or more materials such as graphite and thermosetting resin. The same effect can be obtained by adjusting to the product.

  Further, “substantially the same material” means the same resin material. For example, a glass-like carbon-made deformed tube is a phenol resin, and the core can be made of a foamed phenol resin that is inexpensive and has substantially the same carbonization shrinkage.

  The core has the same shape as the hollow portion of the thermosetting resin deformed tube, that is, the cross section is a track shape or a rectangle with R at the corners of the four corners, and in the longitudinal direction of the thermosetting resin deformed tube. Although it may be a substantially rectangular parallelepiped shape, the height is a parallelepiped shape having a distance between parallel planes of the thermosetting resin deformed tube and extending in the longitudinal direction of the thermosetting resin deformed tube having an arbitrary width. In this case, when a plurality of the thermosetting resin-made deformed pipes are arranged in the longitudinal direction of the cross section at an arbitrary interval between the parallel planes, a small amount of resin for the core is required and is taken out after carbonization. This is preferable because it becomes easy.

  In addition, sandwiching a flexible material such as graphite felt or a soft ceramic sheet between the core and the product is to prevent excessive contact between the core and the product, and damage to the core. It is valid.

  In addition, the glass-like carbon deformed tube may have a flange formed on one or both ends of the tube, and the process of forming the flange will be described. A known method, for example, the following three methods can be used for forming the flange.

(1) Press molding or injection molding Using a flange-shaped mold, a thermosetting resin such as a phenol resin is molded under high pressure to mold the flange portion. It is adhered to the tube end of a thermosetting resin deformed tube that has already been plastically deformed.

(2) Centrifugal molding Thermosetting resin (solid or liquid) is centrifugally molded, a resin pipe having the same thickness as the flange is molded, the pipe is opened on a flat surface, and then the same as the plastic deformation while heating. A load is applied under conditions to plastically deform into a flat plate shape. A flange-shaped part is cut out from the flat plate. It is adhered to the tube end of a thermosetting resin deformed tube that has already been plastically deformed.

(3) Cast molding A liquid thermosetting resin is injected into a mold having a cavity in the flange portion, and is thermally cured to form the flange portion. The flange part is bonded to the pipe end of a thermosetting resin deformed pipe that has already been plastically deformed. Alternatively, by inserting a thermosetting resin deformed pipe into the mold and then injecting a liquid thermosetting resin and thermosetting it, the flange is integrated with the pipe end of the thermosetting resin deformed pipe It can also be made.

  Adhesion between the flange part and the thermosetting resin deformed pipe can be achieved by using a liquid thermosetting resin as an adhesive or by filling the joint part with powder resin and heating it while applying a load to melt it. The method can be performed using a known technique. In addition, in any of the above three methods, the flange portion, the thermosetting resin modified tube, and the material of the adhesive material may use different thermosetting resins, respectively, but the shrinkage rate during carbonization is as close as possible. It is desirable to use the same resin. By doing so, the nonuniform change (decrease in precision) of the dimension at the time of carbonization processing can be prevented.

  When a glassy carbon tube is used as a chamber of a semiconductor manufacturing apparatus, the glassy carbon tube is exposed to a corrosive environment. Therefore, when a joint portion exists so far, the corrosion resistance and strength of the portion become a problem. In particular, in the case of a glass-like carbon deformed tube, it is difficult to manufacture so that there is no joint, unlike the case of a circular cross section. However, the glass-like carbon deformed tube manufactured by the above-described manufacturing method of the present invention can have no joining line in a direction parallel to the longitudinal direction of the tube, and therefore has excellent corrosion resistance and strength. In addition, the glass-like carbon-made deformed tube manufactured in the present invention is not limited to a track-shaped cross section, but a shape composed of straight portions and partial circles, for example, a rectangular shape having curvature at four corners (see FIG. 5). Such a shape can be arbitrarily manufactured. Further, it is possible to easily manufacture a deformed pipe having flanges formed on one end face or both ends thereof.

(Example 1)
A commercially available liquid phenol resin (Regitop PL-4804 manufactured by Gunei Chemical Co., Ltd.) was heat-treated at 100 ° C. under reduced pressure for 1 hour to adjust the moisture content, and used as a raw material for glassy carbon. This raw material was molded by centrifugal molding using a centrifugal mold having an inner diameter of 325 mm and a length of 1600 mm to obtain a phenol resin cylinder having a diameter of 320 mm and a thickness of 3.5 mm. The glass transition point was 65 ° C.

  The cylinder obtained above was cut into a length of 600 mm. As shown in FIG. 1, two stainless tubes (rod-shaped jigs) having an outer diameter of 60 mm and a length of 600 mm were placed inside the cut cylinder. One was placed as a load on the bottom of the cylinder as it supported the cylinder (see FIG. 1a). When heated in this state at 90 ° C. for 5 hours, a deformed cylinder made of phenol resin having a track-like cross section was obtained (see FIG. 1b). Then, after carbonizing the deformed cylinder made of phenol resin by a conventional method, the diameter of the semicircular portion of the cross section is 48 mm, the length of the parallel portion is 340 mm, and the total length is 480 mm. A glass-like carbon-shaped deformed tube having no surface was obtained.

(Example 2) Example in which a flange is joined to a pipe end portion By the same manufacturing method as in Example 1 above, a deformed cylinder made of phenol resin having a track-like cross section was obtained. On the other hand, a phenol resin tube having a thickness of 3 mm was formed by centrifugal molding using the same raw material as in Example 1, and the molded body was cut open to obtain a phenol resin plate having a thickness of 3 mm. From this plate, a track-type donut-shaped resin plate having a width of 86 mm × a length of a parallel portion of 425 mm × a radius of a circular portion of 33 mm and having a hole equal to the outer shape of the track-shaped phenol resin deformed cylinder at the center thereof. Cut out. These two parts were joined with a phenolic resin and carbonized by a conventional method in the same manner as in Example 1 above. The diameter of the cylindrical part of the cross section was 48 mm, the length of the parallel part was 340 mm, the total length was 480 mm, and one end In addition, a glass-like carbon deformed tube having a flange with a width of 8 mm could be obtained.

(Example 3) Example of using a core A commercially available liquid phenol resin (Regitop PL-4804 manufactured by Gunei Chemical Co., Ltd.) is heat-treated at 100 ° C. under reduced pressure for 1 hour to adjust the moisture content, and is glassy. Carbon raw material was used. This raw material was molded by centrifugal molding using a centrifugal mold having an inner diameter of 325 mm and a length of 1600 mm to obtain a phenol resin cylinder having a diameter of 320 mm and a thickness of 3.5 mm.

  The cylinder obtained above was cut into a length of 500 mm. As shown in FIG. 1, two stainless tubes (rod-shaped jigs) having an outer diameter of 60 mm and a length of 600 mm were placed inside the cut cylinder. One was placed as a load on the bottom of the cylinder as it supported the cylinder (see FIG. 1a). In this state, heating was performed at 90 ° C. for 5 hours to obtain a deformed cylinder made of phenol resin having a track-like cross section (see FIG. 1b).

  Eight phenol resin plates having a thickness of 3 mm, a width of 60 mm and a length of 500 mm were inserted into the deformed cylinder made of phenol resin at a predetermined interval as shown in FIG. Thereafter, the deformed cylinder made of phenol resin was heat-treated at 1000 ° C. in an inert atmosphere and carbonized to obtain a deformed tube made of glassy carbon. The obtained glass-like carbon deformed tube was suitable as a semiconductor manufacturing apparatus chamber because the interval between the parallel portions was within ± 0.6 mm with respect to the average value of 48 mm. 3a shows the state before carbonization treatment, and FIG. 3b shows the state after carbonization treatment. In the figure, 4 is a deformed cylinder made of phenol resin, 5 is a phenol resin plate, and 6 is a deformed tube made of glassy carbon.

  For comparison, a graphite core 7 formed in a rectangular parallelepiped having a thickness of 48 mm, a width of 320 mm, and a length of 400 mm is inserted into the deformed cylinder 4 made of phenol resin as shown in FIG. In the same manner as above, the deformed cylinder 4 made of phenol resin was heat-treated at 1000 ° C. in an inert atmosphere and carbonized to obtain a deformed tube 8 made of glassy carbon. The obtained glassy carbon deformed tube 8 had a variation of ± 1.6 mm with respect to the average value of the parallel part width of 45 mm, and was not satisfactory for use as a semiconductor manufacturing apparatus chamber.

It is explanatory drawing which shows the one aspect | mode of the plastic deformation process which obtains the thermosetting resin-made deformed pipe | tube from the thermosetting resin cylindrical molded object which concerns on this invention, Comprising: a is the state before plastic deformation, b is after composition deformation | transformation It is a state. 1 is a perspective view of a thermosetting resin deformed pipe according to the present invention. BRIEF DESCRIPTION OF THE DRAWINGS It is explanatory drawing which shows the one aspect | mode of the carbonization process which obtains the glassy carbon modified tube from the thermosetting resin modified tube based on this invention, Comprising: a is the state before carbonization processing, b is after carbonization processing. State. It is explanatory drawing which shows the one aspect | mode of the carbonization process which obtains the glassy carbon modified tube from the thermosetting resin modified tube of a comparative example, Comprising: a is the state before carbonization treatment, b is the state after carbonization treatment It is. It is sectional drawing which shows the example of a cross-sectional shape of the thermosetting resin irregular pipe which concerns on this invention, Comprising: When a is a rectangular shape which has a curvature in four corners, b is a long hole shape (track shape) with which two sides are parallel. Is the case.

Explanation of symbols

1: Thermosetting resin cylindrical molded body 2: Round bar jig 3: Thermosetting resin deformed tube 4: Phenolic resin deformed cylinder 5: Phenolic resin plate 6: Glassy carbon deformed tube 7: Graphite Core 8: Glass-like carbon irregular tube 9: Tube

Claims (8)

  A step of forming a thermosetting resin cylindrical molded body by molding a thermosetting resin, and a step of obtaining a thermosetting resin deformed tube by plastic deformation while heating the thermosetting resin cylindrical molded body; And a step of carbonizing the obtained thermosetting resin-made deformed tube, and a method for producing a glassy carbon-shaped deformed tube. 2. The glass according to claim 1, wherein when the cylindrical molded body made of the thermosetting resin has a glass transition point of Tg ° C., the plastic deformation step is performed at a temperature T ° C. that satisfies the following formula (1). Of carbon-shaped deformed tube.
(Tg + 5) ≦ T ≦ (Tg + 100) (1)   3. The method for producing a glassy carbon deformed pipe according to claim 1, wherein Tg of the thermosetting resin cylindrical molded body is 25 ° C. or more and 100 ° C. or less.   The method for producing a glassy carbon deformed pipe according to any one of claims 1 to 3, further comprising a step of forming a flange on one or both end faces of the deformed thermosetting resin deformed pipe.   In the carbonization step, the hollow portion of the thermosetting resin deformed tube is carbonized by disposing a core having substantially the same carbonization shrinkage rate as the thermosetting resin deformed tube. Item 5. A method for producing a glassy carbon deformed tube according to any one of Items 1 to 4.   6. The method for producing a glassy carbon deformed tube according to claim 5, wherein the core is made of a thermosetting resin made of substantially the same material as the thermosetting resin deformed tube.   The deformable pipe made of thermosetting resin has a parallel plane and a curved portion connecting the parallel planes, and the core is a rectangular parallelepiped having sides equal to the distance between the parallel planes and extending in the longitudinal direction of the deformed pipe. The method for producing a glassy carbon deformed tube according to claim 5 or 6, wherein a plurality of the deformable tubes made of the thermosetting resin are arranged at an arbitrary interval between parallel planes. A glass-like carbon deformed tube, which is a deformed tube having a cross-section made of glassy carbon, and has no joint in a direction parallel to the longitudinal direction of the tube.

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