JP4527705B2 - Manufacturing method of glassy carbon cylindrical body for semiconductor manufacturing apparatus chamber and glassy carbon cylindrical body for semiconductor manufacturing apparatus chamber obtained by the manufacturing method - Google Patents

Description

TECHNICAL FIELD The present invention relates to a method for producing a glassy carbon cylindrical body for a semiconductor manufacturing apparatus chamber suitable as a component of a semiconductor manufacturing apparatus chamber, and a glassy carbon cylindrical body for a semiconductor manufacturing apparatus chamber obtained by the manufacturing method. It is.

  Glassy carbon has a heat resistance of 2000 ° C. or higher in an inert atmosphere, and exhibits excellent corrosion resistance against hydrogen fluoride and fluorine. For this reason, it is considered that the present invention is applied to apparatus parts that handle corrosive gas and are required to generate less impurities, such as semiconductor manufacturing apparatuses, especially CVD apparatuses. A glassy carbon molded body is generally produced by carbonizing and firing a molded body of a thermosetting resin such as a furan resin or a phenol resin at a high temperature. The problems in the manufacturing technology at the time of manufacture are that the thermosetting resin as a raw material has low moldability and shrinkage of about 20% occurs during carbonization firing. Therefore, it is not easy to accurately mold a component having a complicated shape.

By the way, the cylindrical body made of glassy carbon targeted by the present invention has two straight portions whose cross-sectional shapes perpendicular to the axial direction are parallel, and two arc-shaped portions connecting these straight portions. (See FIGS. 2 and 3).

If the glass-like carbon molded body (cylindrical body) with a simple cross section is used, a thermosetting resin molded body with a circular cross-section and formed into a cylindrical shape according to a conventional method such as centrifugal molding using a thermosetting resin However, in order to manufacture various parts such as for semiconductor film forming equipment with glassy carbon, the cross section is not circular, and the cross section is a racetrack shape and a glass shape. A carbon cylinder is also required. However, when manufacturing the glassy carbon cylindrical body , it is impossible in principle to manufacture a thermosetting resin molded body having a racetrack-shaped cross section and forming a cylindrical shape by centrifugal molding.

When manufacturing a glassy carbon part having a cylindrical body, a core is generally used in order to ensure the dimensional accuracy of the product. Here, the core is a part for maintaining the product shape, and at least a part of its dimensions is designed to be approximately equal to a part of the dimension of the product after carbonization, that is, after shrinkage. The And it is used by being inserted into the thermosetting resin molded body before carbonization treatment, and has a function of suppressing the product shape and dimensions within a predetermined range by supporting the product from the inside (Japanese Patent Laid-Open No. 2002-179463). (See Patent Document 1).

  For example, when manufacturing a cylindrical glassy carbon part, a graphite cylinder having an inner diameter that is smaller than the inner diameter of the thermosetting resin cylinder and approximately equal to the inner diameter of the carbonized carbon cylinder after carbonization. Carbonization is performed in a state where is inserted as a core.

JP-A-2000-313666 (Patent Document 2) discloses a glass in which a thermosetting resin molded body having a shape obtained by dividing a cylinder is made, and these are joined to form a cylindrical molded body, which is carbonized. A method for producing a cylindrical carbon cylinder has been proposed. However, Patent Document 2 does not mention the production of a cylindrical body having an elliptical cross-sectional shape or a partial circle and a straight portion. In addition, it is difficult in the first place to manufacture the divided portions with high dimensional accuracy and accurately position and join them in the manner of the proposed manufacturing method. In addition, when a glassy carbon tubular body having a racetrack shape in cross section is used as a component of a semiconductor manufacturing apparatus chamber , it is desirable that there are as few as possible no joined portions. This is because the joining line often causes dimensional distortion, residual stress, and dust generation.

As for the problem of dimensional accuracy, the core is also a problem. The disadvantage of the method using the core is that the dimensional correction effect by the core is not sufficient because the gap between the core and the molded product made from the thermosetting resin is large at the time of starting carbonization. is there. That is, since the core and the product come into contact with each other at the time when the carbonization treatment is almost completed, it has been difficult to sufficiently correct the dimensions with the core if the product has been greatly deformed until then. Such a difficulty becomes conspicuous when the product is a cylindrical body having a racetrack shape in cross section.
JP 2002-179463 A JP 2000-313666 A

The present invention has been made in view of the above circumstances, and its purpose is suitable as a component of a semiconductor manufacturing apparatus chamber, which is made of glassy carbon and has a cross-sectional shape perpendicular to the axial direction. A manufacturing method of a glassy carbon cylindrical body for a semiconductor manufacturing apparatus chamber, which has a racetrack shape and is excellent in dimensional accuracy, and can be obtained by the manufacturing method. Another object of the present invention is to provide a glassy carbon cylinder for a semiconductor manufacturing apparatus chamber . Here, the semiconductor manufacturing apparatus chamber is used to perform various processes on the semiconductor wafer, and has a function of accommodating the semiconductor wafer therein and maintaining the inside in a predetermined atmosphere (including vacuum). It is what you have.

In order to achieve the above object, the present invention has the following configuration. That is, the invention of claim 1 is a step of forming a thermosetting resin cylindrical molded body by molding a thermosetting resin, and plastically deforming while heating the thermosetting resin cylindrical molded body, A plastic deformation step of obtaining a thermosetting resin cylindrical molded body in which the shape of a cross section perpendicular to the axial direction forms a racetrack shape, and carbonizing the obtained thermosetting resin cylindrical molded body A carbonization step for obtaining a glassy carbon cylindrical body for a semiconductor manufacturing apparatus chamber, wherein, in the plastic deformation step, a glass transition point of the thermosetting resin cylindrical molded body is defined as Tg [° C.]. When the thermosetting resin cylindrical molded body is plastically deformed at a temperature T [° C.] satisfying the relationship of (Tg + 5) ≦ T ≦ (Tg + 100), and in the carbonization step, the thermosetting resin cylinder The cylindrical part made of the thermosetting resin is formed in the hollow part of the molded article. A body and substantially manufacturing method of a semiconductor manufacturing device chamber for the glass-like carbon cylindrical body and performing carbonization by arranging a core made of the same material of the thermosetting resin. The invention of claim 2 is a glassy carbon cylindrical body for a semiconductor manufacturing apparatus chamber manufactured by the manufacturing method of claim 1, which is made of glassy carbon and has a cross section in a direction perpendicular to the axial center line direction. This is a glassy carbon cylinder for a semiconductor manufacturing apparatus chamber, characterized in that the shape is a racetrack shape.

According to the method for manufacturing a glassy carbon cylindrical body for a semiconductor manufacturing apparatus chamber according to the present invention, it is made of glassy carbon having excellent corrosion resistance and strength, and the shape of the cross section in the direction perpendicular to the axial direction is the racetrack shape. None, it is possible to obtain a glassy carbon cylinder for a semiconductor manufacturing apparatus chamber having excellent dimensional accuracy. In addition, the glassy carbon cylindrical body for semiconductor manufacturing apparatus chamber according to the present invention is made of glassy carbon excellent in corrosion resistance and strength, and the cross-sectional shape in the direction perpendicular to the axial direction is a racetrack, It is excellent in dimensional accuracy, and can be used suitably as a component of a semiconductor manufacturing apparatus chamber.

Hereinafter, the present invention will be specifically described. The method for producing a glassy carbon cylindrical body for a semiconductor manufacturing apparatus chamber of the present invention includes a step of molding a thermosetting resin to obtain a thermosetting resin cylindrical molded body, and a thermosetting resin cylindrical body and plastic deformation process section by plastic deformation while heating the molded body to obtain a thermosetting resin cylindrical molded bodies of the race track shape, the resulting the thermosetting resin cylindrical molded body by carbonizing And a carbonization step for obtaining a glassy carbon cylindrical body for a semiconductor manufacturing apparatus chamber .

  In the step of obtaining the cylindrical body made of the thermosetting resin, the raw material resin is molded into a cylindrical shape, but the molding method in this case is not particularly limited, and known methods such as a centrifugal molding method, an injection molding method, and an extrusion molding method are used. Technology can be adopted. Of these molding methods, it is particularly preferable to employ a centrifugal molding method. The reason is that, in the centrifugal molding method, the molten raw material resin is flowed to the inner surface side of the mold by the centrifugal force to be cured, so that the cylindrical product can be easily molded and the dimensional accuracy of the molded body is high. Since the inner surface side is open at the time of molding, it is possible to carry out gas venting well, and further, from the aspect of the glass-like carbon chamber for semiconductor manufacturing equipment that is the final product, it is advantageous that there are fewer bonding lines. . In addition, as a raw material resin, well-known thermosetting resins, such as a phenol resin and a furan resin, can be employ | adopted suitably, for example.

In the plastic deformation step of obtaining a thermosetting resin cylindrical molded body having a racetrack-shaped cross section, the thermosetting resin cylindrical molded body is plastically deformed while being heated, but the means for the plastic deformation is particularly limited. For example, at least two rod-shaped jigs are attached to the inner peripheral surface of a cylindrical molded body made of a thermosetting resin by applying a load with a press while heating using a split mold having a chamber shape. And a means for pushing the rod-shaped jig in the radial direction while heating. FIG. 1 is an explanatory view showing an embodiment of the latter plastic working method. In the plastic working shown in FIG. 1, two round bar jigs 2 are provided on the inner peripheral surface of a cylindrical body 1 made of a thermosetting resin (see FIG. 1 (a)). Next, while the thermosetting resin cylindrical molded body 1 is heated to a predetermined temperature, the round bar jig 2 is pushed open in the radial direction by a push-opening means (not shown) (see FIG. 1B). Done. FIG. 2 shows a thermosetting resin tubular molded body 3 having a racetrack cross section obtained by processing in this way.

  The plastic working will be described in more detail. In general, it is known that a cylindrical molded body made of a thermosetting resin has poor toughness, so that machining is not easy. Therefore, it is not easy to manufacture a molded body having a complicated shape by joining a plurality of parts. Therefore, as a result of various investigations on the production of a thermosetting resin cylindrical molded body having a racetrack cross section, the present inventors have determined that the thermosetting resin cylindrical molded body has a glass transition point (hereinafter referred to as Tg). It has been found that when a force is applied by heating as described above, it can be easily plastically deformed.

The temperature T for plastic deformation is preferably a temperature 5 ° C. higher than Tg. When the temperature difference is smaller than 5 ° C., a large force is required for plastic deformation, and often breaks. The upper limit of the temperature difference is 100 ° C., more preferably 50 ° C. This is because when the temperature exceeds 100 ° C., the curing reaction of the thermosetting resin cylindrical molded body proceeds rapidly and cannot be plastically deformed.

  The cylindrical body made of thermosetting resin to be subjected to plastic deformation has a Tg of 100 ° C. or lower, preferably 60 ° C. or lower. When Tg is high, it is necessary to heat to a higher temperature for plastic deformation. For this reason, not only is the deformation operation difficult, but also the curing reaction proceeds rapidly during the plastic deformation operation, which makes it difficult to deform. There is no particular lower limit of Tg, and generally a lower one is desirable. However, if it is excessively low, the strength at room temperature is insufficient and handling becomes difficult, so it is desirable to have a Tg of around room temperature or higher and 25 ° C. or higher.

As described above, plastic deformation is performed by applying a thermosetting resin cylindrical molded body to a mold by applying a load with a press while heating it using a split mold having a chamber shape, or heating the inner peripheral surface. However, the range in which the thermosetting resin cylindrical molded body can be plastically deformed is of course limited. That is, it is a deformation limit that causes defects such as fractures and cracks when plastic deformation is performed beyond that limit. The curvature radii before and after plastic deformation are R, R ′, the ratio (R ′ / R) is t, and the ratio of the wall thickness to the radius R before plastic deformation (wall thickness / R) is w. Assuming that the central part of the wall thickness is neutral with respect to deformation (the dimensions do not change), plastic deformation occurs evenly on the outside and inside, and the change in wall thickness is negligible, the circumference of the outer and inner circumferences The direction length change rates lo and li are expressed by the following equations.
lo = (t + w / 2) / [t (1 + w / 2)]
li = (t−w / 2) / [t (1−w / 2)]

Generally, it is desirable that the rate of change lo to li is 10% or less, preferably 5% or less, although it varies depending on the properties of the resin. For example, the center diameter of the wall thickness of 320 mm, a part wall thickness of the cylinder of 3 mm, when the center diameter of the wall thickness is plastically deformed into a cylindrical shape having an arc of 60 mm, an outer peripheral, the rate of change of the inner circumference, About 4%.

  As described in the above formula, the rate of change of the outer periphery and inner periphery is also affected by the ratio of the wall thickness to R. In short, the greater the wall thickness, the greater the rate of change. In the above example, when the wall thickness is changed from 3 mm to 6 mm, the same deformation causes a change of about twice. That is, it is desirable that the wall thickness be relatively thin as long as there is no problem in designing the parts. When large plastic deformation of 10% or more is caused, there is a high possibility that defects will occur in the resin molded body, which is not preferable. The speed of plastic deformation is not particularly limited, but generally, good results are obtained by applying a load over several minutes to several hours. Sudden deformation may cause deterioration of the resin.

  After plastic deformation in this way, further undesired deformation can be prevented by performing curing (heating for promoting chemical reaction) at a higher temperature. The curing conditions vary depending on the plastic deformation temperature. For example, when a phenol resin is used, the temperature can be set to 180 to 350 ° C. and the time can be set to 10 to 100 hours in the air.

Next, the process of carbonizing the thermosetting resin tubular molded body having a racetrack cross section will be described. In this carbonization step, the thermosetting resin tubular molded body obtained by plastic deformation is subjected to carbonization to obtain a glassy carbon tubular body for a semiconductor manufacturing apparatus chamber . As conditions for the carbonization treatment, for example, heat treatment is generally performed at a temperature of 800 to 2500 ° C. in a non-oxygen atmosphere (such as an inert gas atmosphere).

In this way, a semiconductor whose cross section shown in FIG. 2 has the same shape as the thermosetting resin cylindrical molded body 3 having a racetrack shape and contracted by carbonization, and whose cross section has a racetrack shape. A glassy carbon cylinder for a manufacturing apparatus chamber can be obtained.

By the way, in order to obtain the glassy carbon cylindrical body for the semiconductor manufacturing apparatus chamber with higher dimensional accuracy, the carbonization shrinkage rate is substantially the same as that of the thermosetting resin cylindrical molded body that is the product precursor. It is preferable to use a core having In this case, the dimensions of the core can be substantially the same as at least a part of the inner diameter (inner shape) of the product precursor. This is because the core also undergoes carbonization shrinkage similarly to the product precursor. This core has the effect of maintaining the product shape from the inside until the end of carbonization.

Here, “substantially the same carbonization shrinkage” means that the dimensional shrinkage (%) before and after carbonization is within about ± 2 points, preferably within 1 point. For example, if a 100 mm thermosetting resin molded body is carbonized, it is carbonized and shrunk to approximately 80% (varies slightly depending on the resin). In this case, the two-point shrinkage rate difference is a dimensional difference of 2 mm. If it is smaller than this difference, the effect as a core is exhibited. If it is large, the effect of supporting the shape may not be sufficient, or the product ( glass-like carbon cylindrical body for semiconductor manufacturing apparatus chamber ) may be damaged.

  Furthermore, not only does the core have the same material and the carbonization shrinkage rate is almost the same as the product, but the core is made from a combination of two or more materials, such as graphite and thermosetting resin. The same effect can be obtained by adjusting to the product.

Further, “substantially the same material” means the same resin material. For example, the starting material of the glass-like carbon cylindrical body for a semiconductor manufacturing apparatus chamber is a phenol resin, and the core can be a foamed phenol resin that is inexpensive and has substantially the same carbonization shrinkage.

  The core is a columnar body having the same cross-sectional shape as the hollow portion of the thermosetting resin tubular molded body having a racetrack shape in cross section, and extending in the longitudinal direction of the thermosetting resin cylindrical molded body. There may be a rectangular parallelepiped shape whose height has a distance between parallel planes of the thermosetting resin cylindrical molded body and has an arbitrary width and extends in the longitudinal direction of the thermosetting resin cylindrical molded body When a plurality of the thermosetting resin tubular molded bodies are arranged in the longitudinal direction of the cross section at an arbitrary interval between parallel planes, a small amount of resin for the core is required, and carbonization is performed. Since it becomes easy to take out later, it is preferable.

  In addition, sandwiching a flexible material such as graphite felt or a soft ceramic sheet between the core and the product is to prevent excessive contact between the core and the product, and damage to the core. It is valid.

Moreover, the glass-like carbon cylindrical body for semiconductor manufacturing apparatus chambers may have a flange formed at one end or both ends, and the process of forming the flange will be described. A known method, for example, the following three methods can be used for forming the flange.

(1) Press molding or injection molding Using a flange-shaped mold, a thermosetting resin such as a phenol resin is molded under high pressure to mold the flange portion. It is bonded to the end portion of the thermosetting resin tubular molded body in which the already plastically deformed cross section forms a racetrack shape.

(2) Centrifugal molding Thermosetting resin (granular or liquid) is centrifugally molded to form a resin pipe having the same thickness as the flange, and the pipe is developed on a flat surface. The plate is plastically deformed by applying a load under the following conditions. A flange-shaped part is cut out from the flat plate. It is bonded to the tube end of a thermosetting resin tubular molded body that has already been plastically deformed.

(3) Casting molding A liquid thermosetting resin is injected into a mold having a cavity in the flange portion and thermally cured to form the flange portion. The flange part is bonded to the end portion of the thermosetting resin tubular molded body that has already been plastically deformed. Alternatively, by inserting a thermosetting resin cylindrical molded body into the mold and then injecting a liquid thermosetting resin and thermosetting it, the flange portion becomes the end of the thermosetting resin cylindrical molded body. It can also be integrated into the part.

Adhesion between the flange portion and the thermosetting resin tubular molded body can be achieved by using a liquid thermosetting resin as an adhesive, or by filling the joint with powder resin and heating it while applying a load. It can be performed using a known technique such as a melting method. In any of the above three molding methods, the flange portion, the thermosetting resin cylindrical molded body, and the adhesive may be made of different thermosetting resins, but the shrinkage rate during carbonization is as close as possible. It is desirable to use the same resin. By doing so, the nonuniform change (decrease in precision) of the dimension at the time of carbonization processing can be prevented.

As described above, the glassy carbon cylindrical body for a semiconductor manufacturing apparatus chamber according to the present invention has a racetrack shape in a cross section perpendicular to the axial direction , and has no joint in the cross section. because it is things (those without the cylindrical body longitudinal direction parallel to the welding line), the by section has no joint, the dimensions distortion due to the presence of the junction, the residual stress and dust It will not occur .

( Reference Example 1)
A commercially available liquid phenol resin (Regitop PL-4804 manufactured by Gunei Chemical Co., Ltd.) was heat-treated at 100 ° C. under reduced pressure for 1 hour to adjust the moisture content, and used as a raw material for glassy carbon. This raw material was molded by a centrifugal molding method using a centrifugal molding die having an inner diameter of 325 mm and a length of 1600 mm to obtain a phenol resin cylindrical molded body having a diameter of 320 mm and a thickness of 3.5 mm. The glass transition point was 65 ° C.

The obtained phenol resin cylindrical molded body was cut to a length of 600 mm. As shown in FIG. 1, two stainless steel tubes (rod-shaped jigs) having an outer diameter of 60 mm and a length of 600 mm were placed inside the cut phenolic cylindrical molded body. As one supported the cylindrical molded body made of phenol resin, the other one was placed as a load on the inner bottom of the cylindrical molded body (see FIG. 1a). In this state, heating was performed at 90 ° C. for 5 hours, and a phenol resin tubular molded body having a cross-section in a racetrack shape was obtained (see FIG. 1B). Thereafter, the phenol resin tubular molded body is carbonized by a conventional method, the radius of the semicircular portion in the cross section is 24 mm, and the length of the parallel portion in the cross section (two linear portions that are parallel) The glassy carbon cylindrical body for a semiconductor manufacturing apparatus chamber was obtained which had a junction of the cross section (no joining line in the length direction) and a length of 340 mm and a total length of 480 mm.

( Reference Example 2) Example in which a flange is joined to the end portion A phenol resin tubular molded body having a racetrack shape in cross section was obtained by the same manufacturing method as in Reference Example 1. On the other hand, using the same raw material as in Reference Example 1, a 3 mm-thick phenolic resin tubular body was formed by centrifugal molding, and this was cut open and expanded to obtain a 3 mm-thick phenolic resin plate-like body. Obtained. From this plate-like body, a width 86 mm × a length of a parallel part 425 mm × a radius of 33 mm of a semicircular part, a hollow part (hole) is formed in the center part, and the peripheral shape of the hollow part is the above-mentioned phenolic resin cylindrical shape A racetrack donut-shaped resin plate having a shape equal to the outer shape of the molded body was cut out. When these two parts were joined with a phenol resin and carbonized by a conventional method in the same manner as in Reference Example 1, the radius of the semicircular part in the cross section was 24 mm, the length of the parallel part in the cross section was 340 mm, and the total length was 480 mm. Thus, a glassy carbon cylindrical body for a semiconductor manufacturing apparatus chamber having a flange with a width of 8 mm at one end could be obtained.

( Example ) Example in which a core is used A commercially available liquid phenol resin (Regitop PL-4804 manufactured by Gunei Chemical Co., Ltd.) is heat-treated at 100 ° C. for 1 hour under reduced pressure to adjust the moisture content, and glassy carbon. As a raw material. This raw material was molded by a centrifugal molding method using a centrifugal molding die having an inner diameter of 325 mm and a length of 1600 mm to obtain a phenol resin cylindrical molded body having a diameter of 320 mm and a thickness of 3.5 mm. The glass transition point was 65 ° C.

  The obtained phenolic resin cylindrical molded body was cut into a length of 500 mm. As shown in FIG. 1, two stainless steel tubes (rod-shaped jigs) having an outer diameter of 60 mm and a length of 600 mm were placed inside the cut phenolic cylindrical molded body. One was placed as a load on the inner bottom of the cylindrical molded body, as one supported the cylindrical molded body made of phenol resin (see FIG. 1 (a)). In this state, heating was performed at 90 ° C. for 5 hours to obtain a phenol resin tubular molded body having a racetrack cross section (see FIG. 1B).

As shown in FIG. 3, eight phenol resin plate-like bodies each having a thickness of 3 mm, a width of 60 mm, and a length of 500 mm were inserted into the tubular molded body made of phenol resin as a core. After that, the phenol resin cylindrical molded body was heat-treated at 1000 ° C. in an inert atmosphere together with these cores and carbonized to obtain a glassy carbon cylindrical body for a semiconductor manufacturing apparatus chamber . The obtained glass-like carbon cylindrical body was suitable as a component of a semiconductor manufacturing apparatus chamber because the interval between the parallel portions was within ± 0.6 mm with respect to the average value of 48 mm. 3A shows the state before the carbonization treatment, and FIG. 3B shows the state after the carbonization treatment. Also, in the figure, 4 is a phenolic resin cylindrical molded body, 5 is a phenolic resin plate (core), and 6 is a glassy carbon cylindrical body for a semiconductor manufacturing apparatus chamber before the core is removed. Indicates.

For comparison, a graphite core 7 formed in a rectangular parallelepiped having a thickness of 48 mm, a width of 320 mm, and a length of 400 mm is inserted into the phenol resin tubular molded body 4 as shown in FIG. The phenol resin tubular molded body 4 together with the core made core 7 was heat-treated at 1000 ° C. in an inert atmosphere and carbonized to obtain a glassy carbon tubular molded body 8. Glass-like carbon cylindrical molded body 8 obtained, it is ± 1.6 mm ones variation to the average value of the width of the parallel portion is 45 mm, the point of dimensional accuracy to be used as part of a semiconductor manufacturing apparatus chamber The dimensions were not satisfactory.

In manufacturing a glassy carbon cylindrical body for a semiconductor manufacturing apparatus chamber of the present invention, a thermosetting resin in which a cross-sectional shape forms a racetrack shape by plastic deformation while heating a cylindrical molded body made of a thermosetting resin. It is explanatory drawing which shows the one aspect | mode of the process of obtaining a cylindrical molded object, Comprising: The (a) shows the state before plastic deformation, The (b) shows the state after a composition deformation | transformation. 1 is a perspective view of a thermosetting resin tubular molded body having a racetrack cross section according to the present invention. BRIEF DESCRIPTION OF THE DRAWINGS It is explanatory drawing which shows the one aspect | mode of the carbonization process which obtains the glass-like carbon cylindrical body for semiconductor manufacturing apparatus chambers from the thermosetting resin cylindrical molded body which concerns on this invention, Comprising: (a) is carbonization process. The previous state is shown, and (b) shows the state after the carbonization treatment. It is explanatory drawing which shows the one aspect | mode of the carbonization process for obtaining a glass-like carbon cylindrical molded object from the thermosetting resin cylindrical molded object for demonstrating a comparative example, Comprising: (a) is carbonization process The previous state is shown, and (b) shows the state after the carbonization treatment.

DESCRIPTION OF SYMBOLS 1 ... Thermosetting resin cylindrical molded body 2 ... Round bar jig 3 ... Thermosetting resin cylindrical molded body 4 ... Phenol resin cylindrical molded body 5 ... Phenol resin plate-shaped body (core)
6 ... Glassy carbon cylindrical body for semiconductor manufacturing apparatus chamber before removal of core 7 ... Graphite core 8 ... Glassy carbon cylindrical molded body

Claims (2)

A step of forming a thermosetting resin cylindrical molded body by molding a thermosetting resin, and plastically deforming the thermosetting resin cylindrical molded body while heating, in a direction perpendicular to the axial direction A plastic deformation step for obtaining a thermosetting resin tubular molded body having a racetrack shape in cross section, and a glass shape for a semiconductor manufacturing apparatus chamber obtained by carbonizing the obtained thermosetting resin tubular molded body A carbonization step of obtaining a carbon cylindrical body, and in the plastic deformation step, when the glass transition point of the thermosetting resin cylindrical molded body is Tg [° C.], (Tg + 5) ≦ T ≦ ( Tg + 100) is subjected to plastic deformation at a temperature T [° C.] satisfying the relationship of Tg + 100), and in the carbonization step, the hollow portion of the thermosetting resin cylindrical molded body Thermosetting of substantially the same material as the thermosetting resin tubular molded body The method of manufacturing a semiconductor manufacturing device chamber for the glass-like carbon cylindrical body and performing carbonization by arranging a core made of RESIN. A glassy carbon cylindrical body for a semiconductor manufacturing apparatus chamber manufactured by the manufacturing method according to claim 1, which is made of glassy carbon, and a cross-sectional shape in a direction perpendicular to the axial direction is a racetrack shape. A glass-like carbon cylindrical body for a semiconductor manufacturing apparatus chamber.

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