JP2005260080A5 - - Google Patents

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Publication number
JP2005260080A5
JP2005260080A5 JP2004071295A JP2004071295A JP2005260080A5 JP 2005260080 A5 JP2005260080 A5 JP 2005260080A5 JP 2004071295 A JP2004071295 A JP 2004071295A JP 2004071295 A JP2004071295 A JP 2004071295A JP 2005260080 A5 JP2005260080 A5 JP 2005260080A5
Authority
JP
Japan
Prior art keywords
via hole
forming
main surface
wiring layer
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004071295A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005260080A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004071295A priority Critical patent/JP2005260080A/ja
Priority claimed from JP2004071295A external-priority patent/JP2005260080A/ja
Publication of JP2005260080A publication Critical patent/JP2005260080A/ja
Publication of JP2005260080A5 publication Critical patent/JP2005260080A5/ja
Pending legal-status Critical Current

Links

JP2004071295A 2004-03-12 2004-03-12 半導体装置及びその製造方法 Pending JP2005260080A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004071295A JP2005260080A (ja) 2004-03-12 2004-03-12 半導体装置及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004071295A JP2005260080A (ja) 2004-03-12 2004-03-12 半導体装置及びその製造方法

Publications (2)

Publication Number Publication Date
JP2005260080A JP2005260080A (ja) 2005-09-22
JP2005260080A5 true JP2005260080A5 (zh) 2007-04-19

Family

ID=35085498

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004071295A Pending JP2005260080A (ja) 2004-03-12 2004-03-12 半導体装置及びその製造方法

Country Status (1)

Country Link
JP (1) JP2005260080A (zh)

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