JP2005243904A5 - - Google Patents

Download PDF

Info

Publication number
JP2005243904A5
JP2005243904A5 JP2004051442A JP2004051442A JP2005243904A5 JP 2005243904 A5 JP2005243904 A5 JP 2005243904A5 JP 2004051442 A JP2004051442 A JP 2004051442A JP 2004051442 A JP2004051442 A JP 2004051442A JP 2005243904 A5 JP2005243904 A5 JP 2005243904A5
Authority
JP
Japan
Prior art keywords
optical
prism
illumination optical
illumination
optical device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004051442A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005243904A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004051442A priority Critical patent/JP2005243904A/ja
Priority claimed from JP2004051442A external-priority patent/JP2005243904A/ja
Publication of JP2005243904A publication Critical patent/JP2005243904A/ja
Publication of JP2005243904A5 publication Critical patent/JP2005243904A5/ja
Pending legal-status Critical Current

Links

JP2004051442A 2004-02-26 2004-02-26 照明光学装置、露光装置及び露光方法 Pending JP2005243904A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004051442A JP2005243904A (ja) 2004-02-26 2004-02-26 照明光学装置、露光装置及び露光方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004051442A JP2005243904A (ja) 2004-02-26 2004-02-26 照明光学装置、露光装置及び露光方法

Publications (2)

Publication Number Publication Date
JP2005243904A JP2005243904A (ja) 2005-09-08
JP2005243904A5 true JP2005243904A5 (ko) 2008-03-21

Family

ID=35025321

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004051442A Pending JP2005243904A (ja) 2004-02-26 2004-02-26 照明光学装置、露光装置及び露光方法

Country Status (1)

Country Link
JP (1) JP2005243904A (ko)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101532824B1 (ko) 2003-04-09 2015-07-01 가부시키가이샤 니콘 노광 방법 및 장치, 그리고 디바이스 제조 방법
TW201834020A (zh) 2003-10-28 2018-09-16 日商尼康股份有限公司 照明光學裝置、曝光裝置、曝光方法以及元件製造方法
TWI612338B (zh) 2003-11-20 2018-01-21 尼康股份有限公司 光學照明裝置、曝光裝置、曝光方法、以及元件製造方法
TWI412067B (zh) 2004-02-06 2013-10-11 尼康股份有限公司 偏光變換元件、光學照明裝置、曝光裝置以及曝光方法
JP4535260B2 (ja) * 2004-10-19 2010-09-01 株式会社ニコン 照明光学装置、露光装置、および露光方法
KR101455551B1 (ko) 2005-05-12 2014-10-27 가부시키가이샤 니콘 투영 광학계, 노광 장치 및 노광 방법
JP5267029B2 (ja) 2007-10-12 2013-08-21 株式会社ニコン 照明光学装置、露光装置及びデバイスの製造方法
US8379187B2 (en) 2007-10-24 2013-02-19 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US9116346B2 (en) 2007-11-06 2015-08-25 Nikon Corporation Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method
CN102221785A (zh) * 2010-04-14 2011-10-19 上海微电子装备有限公司 一种使用汞灯光源的光刻照明装置
EP2579084B1 (en) * 2010-06-03 2023-11-08 Nikon Corporation Microscope device

Similar Documents

Publication Publication Date Title
TWI445999B (zh) 空間光調變單元、照明光學裝置、曝光裝置以及元件製造方法
ATE288088T1 (de) Projektionsbelichtungsvorrichtung mit katadioptrischem projektionssystem
EP1336898A3 (en) Exposure apparatus and method, and device fabricating method using the same
JP2012155330A5 (ja) 露光装置、露光方法、およびデバイス製造方法
EP1670041A4 (en) METHOD AND APPARATUS FOR EXPOSURE, AND METHOD FOR MANUFACTURING ASSOCIATED DEVICE
JP2005286026A5 (ko)
JP2005268489A5 (ko)
WO2005096098A3 (en) Projection objective, projection exposure apparatus and reflective reticle for microlithography
JP2006523944A5 (ko)
JP2003114387A5 (ko)
JP2012168543A5 (ja) 投影光学系、露光装置、露光方法、およびデバイス製造方法
TW200741328A (en) Illumination optical apparatus, projection exposure apparatus, projection optical system, and device manufacturing method
JP2005236088A5 (ko)
JP2007036016A5 (ko)
JP2005243904A5 (ko)
JP5365982B2 (ja) 照明光学系、露光装置、およびデバイス製造方法
JP2005532680A5 (ko)
JP2010020017A5 (ko)
KR980005336A (ko) 조명장치, 노광장치 및 디바이스제조방법
JP2005141158A5 (ko)
JP2006120675A5 (ko)
JP3491212B2 (ja) 露光装置、照明光学装置、照明光学系の設計方法及び露光方法
JPH01114035A (ja) 露光装置
JP2004158786A5 (ko)
JP2002244035A5 (ko)