JP2005237174A - 集積型静電アクチュエータ - Google Patents

集積型静電アクチュエータ Download PDF

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Publication number
JP2005237174A
JP2005237174A JP2004046594A JP2004046594A JP2005237174A JP 2005237174 A JP2005237174 A JP 2005237174A JP 2004046594 A JP2004046594 A JP 2004046594A JP 2004046594 A JP2004046594 A JP 2004046594A JP 2005237174 A JP2005237174 A JP 2005237174A
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JP
Japan
Prior art keywords
thin plate
electrostatic actuator
substrate
plate member
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004046594A
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English (en)
Japanese (ja)
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JP2005237174A5 (enExample
Inventor
Shinji Kaneko
新二 金子
Akira Shimokawabe
明 下河辺
Seiichi Hata
誠一 秦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
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Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP2004046594A priority Critical patent/JP2005237174A/ja
Publication of JP2005237174A publication Critical patent/JP2005237174A/ja
Publication of JP2005237174A5 publication Critical patent/JP2005237174A5/ja
Pending legal-status Critical Current

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  • Micromachines (AREA)
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JP2004046594A 2004-02-23 2004-02-23 集積型静電アクチュエータ Pending JP2005237174A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004046594A JP2005237174A (ja) 2004-02-23 2004-02-23 集積型静電アクチュエータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004046594A JP2005237174A (ja) 2004-02-23 2004-02-23 集積型静電アクチュエータ

Publications (2)

Publication Number Publication Date
JP2005237174A true JP2005237174A (ja) 2005-09-02
JP2005237174A5 JP2005237174A5 (enExample) 2007-03-08

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ID=35019567

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004046594A Pending JP2005237174A (ja) 2004-02-23 2004-02-23 集積型静電アクチュエータ

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JP (1) JP2005237174A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008011506A (ja) * 2006-05-30 2008-01-17 Konica Minolta Opto Inc 光学ユニットおよび撮像装置
JP2009219342A (ja) * 2007-11-30 2009-09-24 Seiko Instruments Inc 振動電流変換装置
JP2010048993A (ja) * 2008-08-21 2010-03-04 Fujinon Corp 積層型カメラモジュールの製造方法および積層型カメラモジュール並びに撮像装置。
CN108502841A (zh) * 2018-05-04 2018-09-07 李扬渊 一种能够实现超声波传感的电子设备及其制造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001009798A (ja) * 1999-06-29 2001-01-16 Tokyo Inst Of Technol 静電マイクロアクチュエータの製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001009798A (ja) * 1999-06-29 2001-01-16 Tokyo Inst Of Technol 静電マイクロアクチュエータの製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008011506A (ja) * 2006-05-30 2008-01-17 Konica Minolta Opto Inc 光学ユニットおよび撮像装置
JP2009219342A (ja) * 2007-11-30 2009-09-24 Seiko Instruments Inc 振動電流変換装置
JP2010048993A (ja) * 2008-08-21 2010-03-04 Fujinon Corp 積層型カメラモジュールの製造方法および積層型カメラモジュール並びに撮像装置。
CN108502841A (zh) * 2018-05-04 2018-09-07 李扬渊 一种能够实现超声波传感的电子设备及其制造方法

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