JP2005237174A5 - - Google Patents
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- Publication number
- JP2005237174A5 JP2005237174A5 JP2004046594A JP2004046594A JP2005237174A5 JP 2005237174 A5 JP2005237174 A5 JP 2005237174A5 JP 2004046594 A JP2004046594 A JP 2004046594A JP 2004046594 A JP2004046594 A JP 2004046594A JP 2005237174 A5 JP2005237174 A5 JP 2005237174A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004046594A JP2005237174A (ja) | 2004-02-23 | 2004-02-23 | 集積型静電アクチュエータ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004046594A JP2005237174A (ja) | 2004-02-23 | 2004-02-23 | 集積型静電アクチュエータ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005237174A JP2005237174A (ja) | 2005-09-02 |
| JP2005237174A5 true JP2005237174A5 (enExample) | 2007-03-08 |
Family
ID=35019567
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004046594A Pending JP2005237174A (ja) | 2004-02-23 | 2004-02-23 | 集積型静電アクチュエータ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005237174A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4972779B2 (ja) * | 2006-05-30 | 2012-07-11 | コニカミノルタアドバンストレイヤー株式会社 | 光学ユニットおよび撮像装置 |
| JP5424379B2 (ja) * | 2007-11-30 | 2014-02-26 | セイコーインスツル株式会社 | 振動電流変換装置 |
| JP2010048993A (ja) * | 2008-08-21 | 2010-03-04 | Fujinon Corp | 積層型カメラモジュールの製造方法および積層型カメラモジュール並びに撮像装置。 |
| CN108502841A (zh) * | 2018-05-04 | 2018-09-07 | 李扬渊 | 一种能够实现超声波传感的电子设备及其制造方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3210968B2 (ja) * | 1999-06-29 | 2001-09-25 | 東京工業大学長 | 静電マイクロアクチュエータの製造方法 |
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2004
- 2004-02-23 JP JP2004046594A patent/JP2005237174A/ja active Pending