JP2005237174A5 - - Google Patents

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Publication number
JP2005237174A5
JP2005237174A5 JP2004046594A JP2004046594A JP2005237174A5 JP 2005237174 A5 JP2005237174 A5 JP 2005237174A5 JP 2004046594 A JP2004046594 A JP 2004046594A JP 2004046594 A JP2004046594 A JP 2004046594A JP 2005237174 A5 JP2005237174 A5 JP 2005237174A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004046594A
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JP2005237174A (ja
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Publication date
Application filed filed Critical
Priority to JP2004046594A priority Critical patent/JP2005237174A/ja
Priority claimed from JP2004046594A external-priority patent/JP2005237174A/ja
Publication of JP2005237174A publication Critical patent/JP2005237174A/ja
Publication of JP2005237174A5 publication Critical patent/JP2005237174A5/ja
Pending legal-status Critical Current

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JP2004046594A 2004-02-23 2004-02-23 集積型静電アクチュエータ Pending JP2005237174A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004046594A JP2005237174A (ja) 2004-02-23 2004-02-23 集積型静電アクチュエータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004046594A JP2005237174A (ja) 2004-02-23 2004-02-23 集積型静電アクチュエータ

Publications (2)

Publication Number Publication Date
JP2005237174A JP2005237174A (ja) 2005-09-02
JP2005237174A5 true JP2005237174A5 (ja) 2007-03-08

Family

ID=35019567

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004046594A Pending JP2005237174A (ja) 2004-02-23 2004-02-23 集積型静電アクチュエータ

Country Status (1)

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JP (1) JP2005237174A (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4972779B2 (ja) * 2006-05-30 2012-07-11 コニカミノルタアドバンストレイヤー株式会社 光学ユニットおよび撮像装置
JP5424379B2 (ja) * 2007-11-30 2014-02-26 セイコーインスツル株式会社 振動電流変換装置
JP2010048993A (ja) * 2008-08-21 2010-03-04 Fujinon Corp 積層型カメラモジュールの製造方法および積層型カメラモジュール並びに撮像装置。
CN108502841A (zh) * 2018-05-04 2018-09-07 李扬渊 一种能够实现超声波传感的电子设备及其制造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3210968B2 (ja) * 1999-06-29 2001-09-25 東京工業大学長 静電マイクロアクチュエータの製造方法

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