JP2005223820A5 - - Google Patents

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Publication number
JP2005223820A5
JP2005223820A5 JP2004031980A JP2004031980A JP2005223820A5 JP 2005223820 A5 JP2005223820 A5 JP 2005223820A5 JP 2004031980 A JP2004031980 A JP 2004031980A JP 2004031980 A JP2004031980 A JP 2004031980A JP 2005223820 A5 JP2005223820 A5 JP 2005223820A5
Authority
JP
Japan
Prior art keywords
ultrasonic transducer
lower electrode
resonance tube
tube unit
upper electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004031980A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005223820A (ja
JP4352922B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004031980A priority Critical patent/JP4352922B2/ja
Priority claimed from JP2004031980A external-priority patent/JP4352922B2/ja
Publication of JP2005223820A publication Critical patent/JP2005223820A/ja
Publication of JP2005223820A5 publication Critical patent/JP2005223820A5/ja
Application granted granted Critical
Publication of JP4352922B2 publication Critical patent/JP4352922B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2004031980A 2004-02-09 2004-02-09 超音波トランスデューサ Expired - Fee Related JP4352922B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004031980A JP4352922B2 (ja) 2004-02-09 2004-02-09 超音波トランスデューサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004031980A JP4352922B2 (ja) 2004-02-09 2004-02-09 超音波トランスデューサ

Publications (3)

Publication Number Publication Date
JP2005223820A JP2005223820A (ja) 2005-08-18
JP2005223820A5 true JP2005223820A5 (enExample) 2007-03-15
JP4352922B2 JP4352922B2 (ja) 2009-10-28

Family

ID=34999090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004031980A Expired - Fee Related JP4352922B2 (ja) 2004-02-09 2004-02-09 超音波トランスデューサ

Country Status (1)

Country Link
JP (1) JP4352922B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005354582A (ja) 2004-06-14 2005-12-22 Seiko Epson Corp 超音波トランスデューサ及びこれを用いた超音波スピーカ
JP5103873B2 (ja) 2005-12-07 2012-12-19 セイコーエプソン株式会社 静電型超音波トランスデューサの駆動制御方法、静電型超音波トランスデューサ、これを用いた超音波スピーカ、音声信号再生方法、超指向性音響システム及び表示装置
JP4802998B2 (ja) * 2005-12-19 2011-10-26 セイコーエプソン株式会社 静電型超音波トランスデューサの駆動制御方法、静電型超音波トランスデューサ、これを用いた超音波スピーカ、音声信号再生方法、超指向性音響システム及び表示装置
KR101562828B1 (ko) * 2015-02-17 2015-10-26 한양대학교 산학협력단 음향 블록을 이용한 정전 용량형 초음파 트랜스듀서
KR102075790B1 (ko) * 2018-06-29 2020-02-10 한국기계연구원 비접촉 초음파 트랜스듀서
KR102267074B1 (ko) * 2019-11-11 2021-06-21 재단법인 파동에너지 극한제어 연구단 초음파 트랜스듀서의 음향 초투과형 커버 유닛
CN115442724B (zh) * 2022-09-22 2025-07-29 华中科技大学 一种mems扬声器及其性能提升方法

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