JP2005221368A5 - - Google Patents

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Publication number
JP2005221368A5
JP2005221368A5 JP2004029320A JP2004029320A JP2005221368A5 JP 2005221368 A5 JP2005221368 A5 JP 2005221368A5 JP 2004029320 A JP2004029320 A JP 2004029320A JP 2004029320 A JP2004029320 A JP 2004029320A JP 2005221368 A5 JP2005221368 A5 JP 2005221368A5
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JP
Japan
Prior art keywords
image data
light
sample
confocal
light source
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Pending
Application number
JP2004029320A
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English (en)
Japanese (ja)
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JP2005221368A (ja
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Publication date
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Priority to JP2004029320A priority Critical patent/JP2005221368A/ja
Priority claimed from JP2004029320A external-priority patent/JP2005221368A/ja
Publication of JP2005221368A publication Critical patent/JP2005221368A/ja
Publication of JP2005221368A5 publication Critical patent/JP2005221368A5/ja
Pending legal-status Critical Current

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JP2004029320A 2004-02-05 2004-02-05 観察装置及びその観察方法 Pending JP2005221368A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004029320A JP2005221368A (ja) 2004-02-05 2004-02-05 観察装置及びその観察方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004029320A JP2005221368A (ja) 2004-02-05 2004-02-05 観察装置及びその観察方法

Publications (2)

Publication Number Publication Date
JP2005221368A JP2005221368A (ja) 2005-08-18
JP2005221368A5 true JP2005221368A5 (enExample) 2007-03-15

Family

ID=34997122

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004029320A Pending JP2005221368A (ja) 2004-02-05 2004-02-05 観察装置及びその観察方法

Country Status (1)

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JP (1) JP2005221368A (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007240744A (ja) 2006-03-07 2007-09-20 Tecdia Kk 光スイッチ及び光アドドロップマルチプレクサ
KR101178055B1 (ko) * 2009-08-14 2012-08-29 제주대학교 산학협력단 높이차 측정 장치 및 방법
JP2012127682A (ja) 2010-12-13 2012-07-05 Hitachi High-Technologies Corp 欠陥検査方法及びその装置
CN103376259A (zh) * 2012-04-11 2013-10-30 百励科技股份有限公司 元件内部缺陷的检测装置及方法
JP6368623B2 (ja) * 2014-11-06 2018-08-01 東レエンジニアリング株式会社 基板検査装置および方法
EP3474003A1 (en) * 2017-10-20 2019-04-24 Essilor International Method for evaluating cosmetic defects of an optical device
CN112198168B (zh) * 2020-10-29 2025-07-11 深圳市华拓半导体技术有限公司 一种半导体检测装置及方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01221850A (ja) * 1988-02-29 1989-09-05 Shimadzu Corp 赤外線散乱顕微鏡
US5208648A (en) * 1991-03-11 1993-05-04 International Business Machines Corporation Apparatus and a method for high numerical aperture microscopic examination of materials
JPH07294422A (ja) * 1994-04-27 1995-11-10 Mitsubishi Materials Corp 表面近傍結晶欠陥の検出方法およびその装置
JP4105809B2 (ja) * 1998-09-08 2008-06-25 株式会社ルネサステクノロジ 外観検査方法および外観検査装置
JP2005049294A (ja) * 2003-07-31 2005-02-24 Olympus Corp 対象物の観察方法及びその装置

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