JP2005221368A5 - - Google Patents
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- JP2005221368A5 JP2005221368A5 JP2004029320A JP2004029320A JP2005221368A5 JP 2005221368 A5 JP2005221368 A5 JP 2005221368A5 JP 2004029320 A JP2004029320 A JP 2004029320A JP 2004029320 A JP2004029320 A JP 2004029320A JP 2005221368 A5 JP2005221368 A5 JP 2005221368A5
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Claims (18)
前記光源部から出力された光を前記試料の第１の面に照射したときに、前記第１の面から反射した第１の反射光と、前記第１の面から前記試料内を透過し前記第１の面と第２の面とを含むこれら面の間又は前記第２の面を透過した位置における任意の高さ位置で反射した第２の反射光とを撮像する撮像部と、
前記撮像部により前記第１の反射光を撮像して取得される第１の画像データと前記第２の反射光を撮像して取得される第２の画像データとを演算して少なくとも前記試料の任意の高さ位置における観察画像データを求める画像演算部と、
を具備したことを特徴とする観察装置。
A light source unit that outputs light including a wavelength region that passes through the sample;
When the light output from the light source unit is irradiated onto the first surface of the sample, the first reflected light reflected from the first surface and the inside of the sample from the first surface are transmitted through the sample. An imaging unit that images the second reflected light reflected at an arbitrary height position between these surfaces including the first surface and the second surface or at a position where the second surface is transmitted;
The first image data acquired by imaging the first reflected light and the second image data acquired by imaging the second reflected light are calculated by the imaging unit, and at least the sample is calculated. An image calculation unit for obtaining observation image data at an arbitrary height position;
An observation apparatus comprising:
The observation apparatus according to claim 1, wherein the light source unit outputs light having a wavelength in an infrared region that is transmitted through the sample.
The observation apparatus according to claim 1, further comprising an image storage unit that stores the first image data and the second image data.
The image storage unit includes a plurality of the first positions at a plurality of arbitrary height positions between the surfaces including the first surface and the second surface of the sample or at a position where the second surface is transmitted. The observation apparatus according to claim 6 , wherein the image data of 2 is stored.
前記第１の画像データを取得するときに前記第２の光源から前記可視領域又は前記紫外領域の光を放射し、前記第２の画像データを取得するときに前記第１の光源から前記赤外領域の光を放射することを特徴とする請求項１記載の観察装置。
The light source unit includes a first light source that outputs light having a wavelength in the infrared region, and a second light source that outputs light having a wavelength in the visible region or the ultraviolet region,
When the first image data is acquired, light in the visible region or the ultraviolet region is emitted from the second light source, and when the second image data is acquired, the infrared light is emitted from the first light source. The observation apparatus according to claim 1, wherein the observation apparatus emits light of a region.
前記試料の共焦点画像を検出する共焦点光学系と、
前記光源部から放射された光を前記試料の第１の面に照射したときに、前記共焦点光学系を通して前記第１の面から反射した第１の反射光と、前記第１の面から前記試料内を透過し前記第１の面と他方の第２の面とを含むこれら面又は前記第２の面を透過した位置における任意の高さ位置で反射した第２の反射光とを受光する受光部と、
前記第１の反射光を受光した前記受光部の出力信号から取得された第１の共焦点画像データと、前記第２の反射光を受光した前記受光部の出力信号から取得された第２の共焦点画像データとを演算して少なくとも前記試料の任意の高さ位置における観察画像データを求める画像演算部と、
を具備したことを特徴とする観察装置。
A light source that outputs light of a wavelength that passes through the sample;
A confocal optical system for detecting a confocal image of the sample;
When the first surface of the sample is irradiated with light emitted from the light source unit, the first reflected light reflected from the first surface through the confocal optical system, and the first surface from the first surface Receives the second reflected light that is transmitted through the sample and reflected at an arbitrary height position at a position where the first surface and the other second surface or the second surface is transmitted. A light receiver;
First confocal image data acquired from the output signal of the light receiving unit that has received the first reflected light, and second output acquired from the output signal of the light receiving unit that has received the second reflected light. An image calculation unit that calculates confocal image data and obtains observation image data at an arbitrary height position of the sample;
An observation apparatus comprising:
The observation apparatus according to claim 9 , wherein the light source unit outputs laser light having a wavelength in an infrared region.
The observation apparatus according to claim 9, further comprising an image storage unit that stores the first confocal image data and the second confocal image data.
The image storage unit includes a plurality of the first positions at a plurality of arbitrary height positions between the surfaces including the first surface and the second surface of the sample or at a position where the second surface is transmitted. 15. The observation apparatus according to claim 14, wherein the confocal image data of two is stored.
前記第１の共焦点画像データを取得するときに前記第２の光源から前記可視領域又は前記紫外領域の光を放射し、前記第２の共焦点画像データを取得するときに前記第１の光源から前記赤外領域の光を放射することを特徴とする請求項９記載の観察装置。
The light source unit includes a first light source that outputs laser light having a wavelength in the infrared region, and a second light source that outputs light having a wavelength in the visible region or the ultraviolet region,
The first light source emits light in the visible region or the ultraviolet region from the second light source when obtaining the first confocal image data, and obtains the second confocal image data. The observation apparatus according to claim 9, wherein the infrared device emits light in the infrared region.
前記試料の前記第１の面に光を照射し、前記第１の面から前記試料内を透過し前記第１の面と他方の第２の面とを含むこれら面の間又は前記第２の面を透過した位置における任意の高さ位置で反射した第２の反射光を受光して第２の画像データを取得する工程と、
前記第１の画像データと前記第２の画像データとを演算して少なくとも前記試料の任意の高さ位置における観察画像データを求める工程と、
を有することを特徴とする観察方法。
Irradiating the first surface of the sample with light, receiving reflected light from the first surface, and acquiring first image data;
The first surface of the sample is irradiated with light, transmitted through the sample from the first surface, and between these surfaces including the first surface and the other second surface, or the second surface Receiving second reflected light reflected at an arbitrary height position at a position transmitted through the surface and obtaining second image data; and
Calculating the first image data and the second image data to obtain observation image data at an arbitrary height position of the sample;
An observation method characterized by comprising:
前記第１の面に光を照射し、前記第１の面から前記試料内を透過し前記第１の面と他方の第２の面とを含むこれら面の間又は前記第２の面を透過した位置における任意の高さ位置で反射した第２の反射光を前記共焦点光学系を通して受光して第２の共焦点画像データを取得する工程と、
前記第１の共焦点画像データと前記第２の共焦点画像データとを演算して少なくとも前記試料内の任意の面の観察画像データを取得する工程と、
を有することを特徴とする観察方法。
Irradiating a first surface of the sample with light, receiving reflected light from the first surface through a confocal optical system, and acquiring first confocal image data;
The first surface is irradiated with light, transmitted through the sample from the first surface, and transmitted between these surfaces including the first surface and the other second surface or through the second surface. Receiving the second reflected light reflected at an arbitrary height position at the selected position through the confocal optical system and obtaining second confocal image data;
Calculating the first confocal image data and the second confocal image data to obtain observation image data of at least an arbitrary surface in the sample;
An observation method characterized by comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004029320A JP2005221368A (en) | 2004-02-05 | 2004-02-05 | Observation device and observation method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004029320A JP2005221368A (en) | 2004-02-05 | 2004-02-05 | Observation device and observation method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005221368A JP2005221368A (en) | 2005-08-18 |
| JP2005221368A5 true JP2005221368A5 (en) | 2007-03-15 |
Family
ID=34997122
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004029320A Pending JP2005221368A (en) | 2004-02-05 | 2004-02-05 | Observation device and observation method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005221368A (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007240744A (en) | 2006-03-07 | 2007-09-20 | Tecdia Kk | Optical switch and optical add/drop multiplexer |
| KR101178055B1 (en) * | 2009-08-14 | 2012-08-29 | 제주대학교 산학협력단 | Device and method for measuring height between top and bottom of sample |
| JP2012127682A (en) | 2010-12-13 | 2012-07-05 | Hitachi High-Technologies Corp | Defect inspection method and device therefor |
| CN103376259A (en) * | 2012-04-11 | 2013-10-30 | 百励科技股份有限公司 | Device and method for detecting internal defects of element |
| JP6368623B2 (en) * | 2014-11-06 | 2018-08-01 | 東レエンジニアリング株式会社 | Substrate inspection apparatus and method |
| EP3474003A1 (en) * | 2017-10-20 | 2019-04-24 | Essilor International | Method for evaluating cosmetic defects of an optical device |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01221850A (en) * | 1988-02-29 | 1989-09-05 | Shimadzu Corp | Infrared scatter microscope |
| US5208648A (en) * | 1991-03-11 | 1993-05-04 | International Business Machines Corporation | Apparatus and a method for high numerical aperture microscopic examination of materials |
| JPH07294422A (en) * | 1994-04-27 | 1995-11-10 | Mitsubishi Materials Corp | Detecting method for surface vicinity crystal defect and device therefor |
| JP4105809B2 (en) * | 1998-09-08 | 2008-06-25 | 株式会社ルネサステクノロジ | Appearance inspection method and appearance inspection apparatus |
| JP2005049294A (en) * | 2003-07-31 | 2005-02-24 | Olympus Corp | Method and apparatus for observing target matter |
-
2004
- 2004-02-05 JP JP2004029320A patent/JP2005221368A/en active Pending
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