JP2005219102A - Laser marking method and laser marking apparatus for electronic component - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a laser marking method and a laser marking apparatus for an electronic component by which an intended marking can be carried out with a high productivity. <P>SOLUTION: A first transfer device sucks an electronic component W in a parts feeder, and transfers it on a short checker 41, and the direction of the electronic component is measured by the short checker. A laser marker performs the marking on the electronic component W following the marking direction determined based on the result of measurement. The laser marker 42 performs the marking of the required data by a galvano-scanning method. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a method and a laser marking apparatus for marking a semiconductor component or an electronic component such as a piezoelectric vibration device such as a crystal resonator or a crystal oscillator with a laser.

 2. Description of the Related Art Electronic components such as semiconductor components and piezoelectric vibration devices have been rapidly reduced in size with the downsizing of electronic devices such as mobile devices. Along with this, a smaller and clearer display is also demanded for printing for performing various displays related to manufacturing on the surface of an electronic component. Conventionally, a display method in which printing ink is engraved on the surface of an electronic component has been used, but in recent years, an apparatus that performs marking using a laser is often used.

  As an example of a laser marking apparatus using such a laser, there is JP-A-2002-263867 (Patent Document 1). In patent document 1, it is a laser marking apparatus using an index table (turn table), an electronic component is supplied to a work storage groove for storing an electronic component in the index table, and laser is emitted by a laser marking apparatus arranged at a predetermined position. A configuration is disclosed in which marking is performed with light and then discharged from an index table.

  As described above, since the apparatus using the index table can sequentially change the work area by rotating the table, it has been widely used in the past. Another conventional example of a laser marking device using such an index table will be described with reference to FIG. FIG. 5 is a diagram showing an outline of a laser marking device using an index table. The electronic component (work) W supplied from the parts feeder 1 is supplied to the supply station I of the index table 3 by the first transfer device. The index table 3 has a mechanism that rotates intermittently. After the first intermittent rotation, the index table 3 is transferred to the short checker 45 by the second transfer device 24. The short checker 45 includes a work pocket 452 for storing electronic components, and the work pocket 452 includes a mechanism that can rotate in a planar manner.

  The short checker 45 is for examining the direction of the electronic component from the external terminal electrode formed on the electronic component. If the state mounted in the work pocket 452 is the forward direction, it remains as it is and is inverted 180 degrees from the forward direction. If it is the reverse direction, it is reversed so as to be in the forward direction by the rotation mechanism, and transferred again to the stage of the index table by the second transfer device. Thereafter, after intermittent rotation of the index table, marking is performed in a predetermined direction with a laser marker. Thereafter, the electronic component is stored in the storage box 44 from the discharge station O by the third transfer device.

  In the above configuration, after removing the electronic component from the index table and checking the direction of the electronic component with a measuring device such as a short checker, if the direction is different from the set direction, it is reversed by the rotation mechanism of the short checker and moved again. It was transferred to the index table by the mounting device. When such a rotation mechanism is added, there is a problem in that mechanical problems increase due to an increase in mechanical operation. In addition, since it takes time to rotate, there is a problem that productivity as a whole is lowered.

Furthermore, there is a problem that the marking position is shifted. That is, when the electronic component is rotated, the center of the rotation mechanism and the center of the electronic component mounted on the electronic component are often different. In such a case, the rotation process is performed when the index table is transferred to the short checker. When transferring from the short checker that has been performed to the index table again, the suction portion of the transfer device is displaced. When the deviation occurs, the transfer state to the index table is displaced, and as a result, in the next laser marking process, marking may be performed with a deviation from a predetermined position.
JP 2002-263867 A

  The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a laser marking method and a laser marking device for an electronic component that are excellent in productivity and capable of performing intended marking.

  The present invention focuses on the function of selecting the printing direction of the laser marker, and has, for example, the function of marking in the direction reversed 180 degrees in addition to the forward marking. By using such a laser marker, an attempt is made to perform marking in an arbitrary direction without rotating the electronic component itself that is the member to be marked.

  Claim 1 is a laser marking method for marking an electronic component with a laser beam, wherein the step of measuring the orientation of the electronic component and the direction of laser marking are determined according to the measured orientation of the electronic component. And a step of performing laser marking on the electronic component with a necessary mark in the determined direction.

Such an electronic component can also be applied to a method using a sequential transfer device. For example, according to a second aspect of the present invention, there is provided a laser marking method for performing marking with a laser beam on electronic components that are sequentially or intermittently conveyed sequentially, wherein the electronic components are sequentially or intermittently conveyed sequentially. The step of measuring the direction of the electronic component, the step of determining the direction of laser marking according to the direction of the measured electronic component, and the electronic component that is sequentially or continuously conveyed after the step of measuring On the other hand, the method includes a step of laser marking a predetermined necessary mark in the determined direction.

Furthermore, as shown in claim 3, the present invention can also be applied to a marking method using an index table that is rotationally driven in a plane. That is, a step of measuring the orientation of the electronic component, a step of determining a laser marking direction according to the measured orientation of the electronic component, and a stage provided at a predetermined interval on a planarly rotatable index table And a step of intermittently rotating the index table, sequentially mounting electronic components on the stage at the supply station, and a stage on which the measured electronic components are mounted on the index table. A step of rotating and moving to a laser marking portion provided at a predetermined position; a step of performing laser marking on the electronic component in the determined direction; and a stage on which the electronic component is mounted. Work to rotate and move to the index table discharge station When a laser marking method of the electronic component having the step of transferring in the discharge station the electronic component from the index table in a predetermined storage unit.

As described above, the present invention measures the direction of the electronic component in advance when performing laser marking on the electronic component, and according to the measurement result, the marking direction selection function of the laser marker as described above enables the forward direction. Alternatively, the marking direction is determined in the reverse direction or the other direction, and the marking is executed. Thereby, even when the direction of the electronic component is directed in a direction different from the predetermined direction, a desired laser marking can be performed without using a rotation mechanism as in the prior art. That is, when the electronic component is in the forward direction (predetermined direction), the marking direction of the laser marker is the forward direction, and when the electronic component is reversed 180 degrees, for example, marking is performed from the reverse direction reversed 180 degrees. I do. Even when the angle is reversed by another angle, for example, 90 degrees, the laser marking direction is selected according to the reversed state. Accordingly, it is not necessary to perform a moving operation such as an operation of transferring the electronic component itself to the rotating mechanism before laser marking, an operation of rotating the electronic component by a predetermined angle, and an operation of transferring again from the rotating mechanism to the original position.

According to a fourth aspect of the present invention, the step of measuring the orientation of the electronic component may be completed before being mounted on the index table. The index table rotates intermittently according to the manufacturing operation, for example. For this reason, in the prior art, after mounting on the stage of the index table, it is necessary to take an operation timing with another mechanism of transferring again to the direction measuring unit of the electronic component and then transferring again to the index table. According to the present invention, such a complicated operation system may not be used.

Furthermore, as shown in claim 5, in the laser marking method according to any one of claims 1 to 4, the step of measuring the orientation of the electronic component includes the step of measuring the characteristics of the electronic component. In addition, in the step of performing laser marking, laser marking may be performed on the electronic component in the determined direction with necessary marks and marks indicating the measured characteristics.

As a result, in addition to the manufacturer's planned origin display and the like, the performance and characteristics of the electronic component can be laser-marked according to the orientation of the electronic component.

The present invention also proposes a novel laser marking apparatus corresponding to the laser marking method. That is, as shown in claim 6, a measuring unit for measuring the orientation of the electronic component, an index table having a plurality of stages corresponding to the electronic component, and having a mechanism that rotates in a plane, and the index table A first transfer device that sequentially mounts electronic components on the stage, a laser marker that is set at a predetermined position on the index table and that performs marking with laser light, and an electronic component after laser marking is placed on the index table. A second transfer device for discharging from the discharge station;
The marking direction on the electronic component by the laser marker is determined based on the measurement data by the measurement unit, and marking is performed.

By using the above laser marking device, it is possible to determine the marking method of the laser marker based on the orientation of the electronic component measured in advance by the measuring unit. There is no need to provide a rotation mechanism for correcting the above.

  In the laser marking device configuration, the measuring unit that measures the orientation of the electronic component may be arranged in a stage before the electronic component is mounted on the index table.

  According to the above configuration, the index table rotates intermittently in accordance with the manufacturing operation, for example. For this reason, in the prior art, after mounting on the stage of the index table, it is necessary to take an operation timing with another mechanism of transferring again to the direction measuring unit of the electronic component and then transferring again to the index table. According to the present invention, such a complicated operation system may not be used.

According to the present invention, the marking direction is determined based on the direction of the electronic component measured in advance, and thereby laser marking by the laser marker is executed. Therefore, a mechanism for rotating an electronic component is not required in a series of manufacturing processes or manufacturing apparatuses. Therefore, there is no mechanical failure associated with the rotation operation, the marking position is shifted, or there is no mounting error at a predetermined position when transferring to the rotating mechanism or re-transferring from the rotating mechanism, Excellent productivity and intended laser marking.

Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.
Embodiments of the present invention will be described with reference to the drawings by taking a surface-mount type crystal resonator manufacturing apparatus as an example. 1 is a schematic configuration diagram of a manufacturing apparatus according to the present embodiment, FIG. 2 is a diagram illustrating a system configuration of the manufacturing apparatus in FIG. 1, and FIG. 3 is a diagram illustrating an example of an external connection terminal of an electronic component. 4 is a diagram illustrating a marking direction on an electronic component.

In FIG. 1, 1 is a parts feeder, 21 is a first transfer device, 3 is an index table, 41 is a short checker that is a measurement unit, 42 is a laser marker, 43 is an electronic component discharge confirmation unit, 44 is a storage box, Reference numeral 22 denotes a second transfer device.

  The parts feeder 1 is an apparatus for aligning and supplying electronic parts (workpieces) W, which are crystal oscillators, to the discharge port 12, and forms a spiral flow path in a mortar-shaped container 11 (not shown). ), The electronic component W is sequentially pushed out to the discharge port 12 by giving a minute vibration to the container. Instead of the parts feeder, for example, a method of supplying the index table from the pallet may be used.

The electronic component W sent to the discharge port 12 of the parts feeder is taken out by the first transfer device 21. The first transfer device 21 has two arms, a first arm and a second arm, which extend in parallel, and suction ports 211 a and 212 a for sucking the electronic component W are provided at the tip portions of the respective arms. Is formed. The suction mechanism performs suction or suction cancellation by supplying or stopping negative pressure air, for example. The distance between the first arm and the second arm is set equal to the distance between the discharge port 12 and the short checker 41 and between the short checker 41 and a supply station I described later. Each of these arms 211 and 212 can perform a two-dimensional operation in the vertical direction and the vertical direction. As a result, the electronic component W in the discharge port 12 is sucked by the suction port 21a of the arm 21, moved in the upper direction, moved in the vertical direction, further moved in the lower direction, and transferred to the short checker 41. In the first transfer apparatus, the method of picking up the electronic component W is not limited to the above-described suction method, but may be chucking using a gripping mechanism, for example. The same applies to the second transfer device.

The short checker 41 on which the electronic component W is transferred from the parts feeder 1 is a measuring unit that measures the terminal connection state of the electronic component W. For example, as shown in FIG. 3, the electronic component W has a four-terminal configuration, and includes an input terminal, an output terminal, and other ground terminals connected to a crystal diaphragm. Although not shown, the short checker 41 is also provided with electrode terminals corresponding to the terminals. When the electronic component W is mounted on the short checker, each terminal is energized, and the current state of the electronic component W is determined. Can be examined.

  The index table 3 transferred from the short checker 41 by the first transfer device has a disk shape, and stages 31, 32, 33, 34, 35, 36, 37, and 38 are predetermined in the outer peripheral area of the surface. Are provided over the entire circumference at regular intervals. Although not shown, each stage has a work pocket in which the electronic component W is stored. In the index table 3, the place to be transferred from the parts feeder is a supply station I, and a discharge station O is formed on the opposite side of the supply station.

  By the way, the index table 3 can be rotationally driven in a plane, and is configured such that one rotation (forward rotation) and the other rotation (reverse rotation) can be freely performed. The rotation is driven by, for example, a servo motor. The servo motor is driven by a pulse signal from the control unit of the NC device and controls the rotation speed, the rotation amount, and the like, so that the index table 3 can be operated with an arbitrary setting. In the present embodiment, since eight stages are provided, the rotation is intermittently performed by 45 degrees when marking is performed. The amount of rotation can be arbitrarily set depending on the necessary manufacturing man-hours other than marking, and can be adjusted by a control signal to the servo motor.

  In the index table, a laser marker 42 is disposed at a position rotated 90 degrees clockwise from the supply station I, and a discharge confirmation unit 43 is disposed at a position rotated 90 degrees clockwise from the discharge station O. .

The laser marker 42 has a configuration in which a CO2 laser, a YAG laser, or the like is used, and at least a head portion for irradiating the laser is positioned immediately above the stage. Further, the scanning of the marking uses a galvano scanning method or the like, and the laser marking can be performed in any direction with respect to the surface of the electronic component W by an operation command from a laser marker control unit (controller). For example, when the electronic component W has a rectangular planar shape and marking is performed along the long side direction, marking can be performed from the forward direction and from the reverse direction rotated in a plane of 180 degrees. Also, marking can be performed in other directions. The marking can include alphanumeric characters, possibly user-defined characters or figures, barcodes, two-dimensional barcodes, and the like. Note that another method may be used as the marking scanning method. In the present embodiment, marking is performed using a model LP-F10R manufactured by Sunkus.
*** Please let us know if there is any appropriate method other than the galvano scanning method. ***

The discharge confirmation unit 43 is provided in the process part of the discharge station, and checks whether the electronic component W laser-marked in the discharge station part is discharged from the work pocket of the stage. Specifically, power is supplied by a configuration similar to the above-described short checker and the presence / absence of the electronic component W is confirmed, or the presence / absence of the electronic component is checked by infrared irradiation or the like.
＊＊＊＊＊ ↑ ↑ ↑ Is the example expression of the discharge confirmation part ok? ↑ ↑ ↑ ＊＊＊＊＊＊

  The second transfer device 22 has a function of transferring the electronic component W sent to the discharge station O of the index table 3 to the storage box. Similarly to the first transfer device, the second transfer device is basically provided with a suction port 221a for sucking the electronic component W at the distal end portion of the arm 221, and the suction mechanism is, for example, a negative pressure. By supplying or stopping the air, suction or suction release is performed. The arm 221 can perform a three-dimensional operation in the vertical and horizontal directions and the vertical direction. As a result, the electronic component W at the discharge station O is sucked by the suction port 221a of the arm 221, moved upward, then vertically and horizontally, and further moved downward to release the suction and the storage box 44 Transfer to a designated location.

  The storage box 44 is made of resin or metal and stores the electronic components W after laser marking. In the present embodiment, the storage box 44 has a pallet configuration in which the storage regions for each electronic component are partitioned in a matrix. The electronic parts W can be arranged and arranged.

  FIG. 2 shows a control system according to this embodiment. The control system in FIG. 2 has a configuration in which a control unit of each mechanism is connected to, for example, a central control unit composed of a CPU, and the first transfer device is connected to the second transfer unit via the first transfer control unit. The loading device is connected to the central control unit via the second transfer control unit. Each transfer control unit controls each transfer device movement operation, movement amount, suction operation, and the like. The index table is connected to the central control unit via the index table drive control unit, and the measurement unit (short checker) is connected to the central control unit via the measurement control unit. Further, the laser marker is connected to the central control unit via the laser marker control unit and the discharge confirmation unit via the discharge confirmation control unit. The laser marker operates according to marking direction data transmitted from the central control unit.

  Next, an example in which laser marking is performed on an electronic component (surface mounted crystal resonator) W using this manufacturing apparatus will be described with reference to FIGS. The electronic component W used here has a rectangular parallelepiped shape as a whole, and has a configuration in which a quartz diaphragm Q having an excitation electrode formed in a ceramic package is stored, and using a joining means such as seam welding with a metal lid. It is the structure which performed airtight sealing. Further, as shown in FIG. 3, external connection terminals E1, E2, E3, and E4 are formed on the bottom surface of the ceramic package including the four corners.

  First, a large number of electronic components W are put into the parts feeder 1, and thereby the electronic components W are sequentially sent to the discharge port 12 by the conveying operation of the parts feeder 1. The first transfer device sucks the electronic component W at the discharge port by the first arm and transfers it to the short checker 41 in accordance with a command from the first transfer control unit.

The short checker (measurement unit) 41 energizes the external connection terminal of the electronic component W according to a command from the measurement control unit, and measures the terminal direction of the electronic component W when mounted on the short checker based on the energization result. ,recognize. The recognized result is sent from the measurement control unit to the central control unit, finally determines the marking direction for the electronic component W, and temporarily stores the data in the memory. After confirming the short checker, the electronic component W is sucked by the second arm 212 of the first transfer control unit and transferred to the work pocket of the stage 31 located at the supply station I of the index table.

The index table is driven by the servo motor in response to an instruction from the index table drive control unit, and is rotated in the clockwise arrow Y direction. When the table 31 moves to the position where the next stage 32 is located, the next electronic component W is transferred from the short checker to the stage 38 of the supply station, and the supply of the electronic components W to the index table is sequentially performed in this way. Done. When the stage 31 moves to the position of the laser marker, laser marking is executed. At this time, data indicating the marking direction stored in the memory is transmitted from the central control unit to the laser marker control unit, and the marking on the electronic component W is performed based on the data. The laser marker marks the required character data using the galvano scanning method.

FIG. 4A shows an example in which the character data “KDS” is marked on the electronic component W in the forward direction. FIG. 4B shows an example in which the character data “KDS” is marked on the electronic component W in the reverse direction rotated by 180 degrees. These can be executed after the measurement by the short checker without giving any rotation operation to the electronic component W, and can be printed by selecting the marking direction by the galvano scanning method.

Thereafter, the marked electronic component W is transported to the discharge station O and stored in the storage box by the second transfer device. The second transfer device operates the arm 221 in accordance with a command from the second transfer control unit, sucks the electronic component W on the stage 31 moved to the discharge station O, and the storage area is divided into a matrix configuration. It is transferred to the pallet-shaped storage box sequentially.

Thereafter, the index table is sequentially rotated, and when the stage 31 moves to the discharge confirmation unit 43, it is checked whether or not the electronic component W remains on the stage according to a command from the discharge confirmation control unit.

Laser marking is advanced by sequentially performing such a series of operations on the electronic component W supplied from the parts feeder 1.

In the above-described embodiment, only the terminal direction of the electronic component W is measured by the short checker 41. At this time, the characteristics of the electronic component W are measured, and the measurement data may be used as the marking target item. That is, in addition to the terminal direction data of the electronic component W, the characteristic data is also sent to the central control unit via the measurement control unit, and stored in the memory together with the terminal direction data (data indicating the marking direction). At the time of laser marking with a laser marker, predetermined data and characteristic data may be laser-marked based on the data indicating the marking direction. According to such an example, since the characteristic data of the electronic component W can be marked in accordance with the terminal direction, there is an advantage that a plurality of data can be easily displayed.

In the above-described embodiment, the short checker (measurement unit) that measures the direction of the electronic component W is set at a stage before mounting the index table, but may be configured to perform measurement after mounting. For example, a terminal electrode may be provided in a work pocket of each stage, the terminal electrode may be energized and measured before the laser marking process, and the laser marking direction may be determined based on the measurement result. ――― → OK?

Another embodiment according to the present invention will be described with reference to FIG. In FIG. 5, 5 is a conveyor which is a conveyor, 51 is a conveyor controller for controlling the operation of the conveyor, 61 is an image recognition apparatus, and 62 is a laser marker. In this embodiment, a disk-shaped index table is not used, and a conveyor that operates intermittently or continuously from one to the other is used for the conveying device, and the direction of the electronic component W is hermetically sealed with the ceramic package. The directionality of the lid used for stopping is measured by image recognition technology.

Electronic components are mounted on the conveyor 5 with a predetermined interval, and operate intermittently in the direction indicated by the arrows (from one to the other). Although mounting on the conveyor is not illustrated, the transfer is performed from the parts feeder or the pallet in which the electronic components are stored by the transfer device described in the above embodiment. The electronic component W is hermetically sealed with a ceramic or metal lid in a ceramic package having a rectangular parallelepiped shape and a square shape in plan view, and a notch C indicating the direction of the electronic component is formed in the lid in advance. . The image recognition device 61 detects (measures) a direction based on the cutout of the electronic component. That is, as is well known, the image recognition device 61 takes an image of an electronic component from above with an electronic camera (not shown), and detects the position where the cutout exists from the obtained electronic image data. The direction data of the electronic component detected here is temporarily stored in a memory in the control unit, and when the electronic component is located immediately below the laser marker, the direction data is read and laser marking is performed. The laser marker has the same configuration as that shown in the above-described embodiment, and uses a CO2 laser, a YAG laser, or the like, and is arranged so that at least the head portion that irradiates the laser is positioned directly above the electronic component It is. The scanning of the marking uses a galvano scanning method or the like, and laser marking can be performed in any direction with respect to the surface of the electronic component by an operation command from a laser marker control unit (controller).

In FIG. 5, for convenience, the electronic components are displayed separately as W1, W2, and W3 according to the positions of the cutouts. For example, the electronic component W2 having a cutout in the upper right is in the direction shown at the right end of FIG. The electronic component W1 having the notch C on the upper left is laser marked in the vertical direction. The electronic components that have been marked are transferred to a pallet or the like by a transfer device or the like.

*** Please describe any other examples. ***
In the present embodiment, an example of performing a direction measuring method Short checker or the image recognition device of the electronic components may be used like other methods. In addition, when the direction of a short checker or the like is measured, the quality of the electronic component is determined. For example, in the configuration shown in FIG. 1, the defective product is not transferred to the index table but is shown by the first transfer device. Although not provided, it may be stored in a defective product storage box provided separately so that unnecessary laser marking processing is not performed. In addition to laser marking, other manufacturing processes may be added on the index table.

  In the present embodiment, a manufacturing example of a surface-mount type crystal resonator has been described. However, the present invention may be applied to the manufacture of a surface acoustic wave device, a crystal oscillator, a capacitor, or a semiconductor device, for example.

  It can be applied to mass production of piezoelectric vibration devices such as crystal oscillators and crystal oscillators or other electronic components.

The figure which shows embodiment by this invention The figure which shows embodiment by this invention Diagram showing the configuration of electronic components Diagram showing laser marking The figure which shows other embodiment by this invention. Figure showing a conventional example

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Parts feeders 21 and 24 1st transfer apparatus 22, 25 2nd transfer apparatus 23 3rd transfer apparatus 3 Index table 41 Short checker (measurement part)
42, 62 Laser marker 5 conveyor

Claims (7)

A laser marking method for marking electronic parts with laser light,
Measuring the orientation of the electronic component;
Determining a laser marking direction according to the measured orientation of the electronic component;
A step of laser marking the required mark on the electronic component in the determined direction;
Laser marking method for electronic parts having A laser marking method for marking electronic parts intermittently or continuously with a laser beam,
Measuring the orientation of the electronic components intermittently or continuously conveyed electronic components; and
Determining a laser marking direction according to the measured orientation of the electronic component;
After the step of measuring, a step of performing laser marking in the determined direction with a predetermined mark for electronic components that are sequentially or intermittently conveyed sequentially,
Laser marking method for electronic parts having Measuring the orientation of the electronic component;
Determining a laser marking direction according to the measured orientation of the electronic component;
A step of positioning a stage provided at a predetermined interval on a planar rotatable index table at a supply station;
Intermittently rotating the index table and sequentially mounting electronic components on the stage at the supply station;
Rotating the stage on which the measured electronic component is mounted to a laser marking portion provided at a predetermined position of the index table; and
A step of performing laser marking on the electronic component with a necessary mark in the determined direction;
Rotating the stage on which the electronic component is mounted to an index table discharge station;
A laser marking method for an electronic component, comprising: transferring the electronic component from an index table to a predetermined storage unit at the discharge station. 4. The laser marking method for an electronic component according to claim 3, wherein the step of measuring the orientation of the electronic component is completed before being mounted on the index table. 5. The laser marking method according to claim 1, wherein a step of measuring the characteristics of the electronic component is added to the step of measuring the orientation of the electronic component, and the laser marking is performed. A laser marking method for an electronic component, wherein laser marking is performed on the electronic component with a necessary mark and a mark indicating the measured characteristic in the determined direction. A measuring unit for measuring the orientation of the electronic component;
An index table having a plurality of stages corresponding to the electronic components and having a mechanism that rotates in a plane;
A first transfer device for sequentially mounting electronic components on the stage of the index table;
A laser marker which is set at a predetermined position on the index table and performs marking with a laser beam;
A second transfer device for discharging the electronic parts after laser marking from the index table discharge station;
The marking direction on the electronic component by the laser marker is determined and marked based on the measurement data by the measurement unit. The laser marking device according to claim 5, wherein the measuring unit that measures the orientation of the electronic component is disposed in a stage before the electronic component is mounted on the index table.

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