JP2005217064A5 - - Google Patents

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Publication number
JP2005217064A5
JP2005217064A5 JP2004020379A JP2004020379A JP2005217064A5 JP 2005217064 A5 JP2005217064 A5 JP 2005217064A5 JP 2004020379 A JP2004020379 A JP 2004020379A JP 2004020379 A JP2004020379 A JP 2004020379A JP 2005217064 A5 JP2005217064 A5 JP 2005217064A5
Authority
JP
Japan
Prior art keywords
control unit
light source
exposure
main control
maintenance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2004020379A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005217064A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004020379A priority Critical patent/JP2005217064A/ja
Priority claimed from JP2004020379A external-priority patent/JP2005217064A/ja
Priority to US11/042,195 priority patent/US7212276B2/en
Publication of JP2005217064A publication Critical patent/JP2005217064A/ja
Publication of JP2005217064A5 publication Critical patent/JP2005217064A5/ja
Withdrawn legal-status Critical Current

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JP2004020379A 2004-01-28 2004-01-28 露光システム Withdrawn JP2005217064A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2004020379A JP2005217064A (ja) 2004-01-28 2004-01-28 露光システム
US11/042,195 US7212276B2 (en) 2004-01-28 2005-01-26 Exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004020379A JP2005217064A (ja) 2004-01-28 2004-01-28 露光システム

Publications (2)

Publication Number Publication Date
JP2005217064A JP2005217064A (ja) 2005-08-11
JP2005217064A5 true JP2005217064A5 (enExample) 2007-03-15

Family

ID=34792606

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004020379A Withdrawn JP2005217064A (ja) 2004-01-28 2004-01-28 露光システム

Country Status (2)

Country Link
US (1) US7212276B2 (enExample)
JP (1) JP2005217064A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4570562B2 (ja) * 2005-12-28 2010-10-27 古河電気工業株式会社 半導体レーザの駆動制御装置及び駆動制御方法
TWI562046B (en) * 2015-06-25 2016-12-11 Wistron Corp Optical touch apparatus and width detecting method thereof
JP7418128B2 (ja) * 2020-03-30 2024-01-19 キヤノン株式会社 光源装置、照明装置、及び露光装置。

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5250797A (en) * 1990-10-05 1993-10-05 Canon Kabushiki Kaisha Exposure method and apparatus for controlling light pulse emission using determined exposure quantities and control parameters
JP2902172B2 (ja) 1991-09-04 1999-06-07 キヤノン株式会社 露光装置
JP3125307B2 (ja) * 1991-01-28 2001-01-15 株式会社ニコン 露光装置及び露光方法
US5097291A (en) * 1991-04-22 1992-03-17 Nikon Corporation Energy amount control device
JPH08167562A (ja) 1994-12-09 1996-06-25 Canon Inc 半導体製造装置およびデバイス製造方法
US5646954A (en) * 1996-02-12 1997-07-08 Cymer, Inc. Maintenance strategy control system and monitoring method for gas discharge lasers
JPH10275951A (ja) * 1997-03-28 1998-10-13 Nikon Corp レーザ光源の寿命判定方法
KR100548203B1 (ko) * 2003-12-24 2006-02-02 삼성전자주식회사 사용환경에 따라 부품교체시기를 결정하는 화상형성장치및 이를 이용한 화상형성방법

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