JP2005206435A - Apparatus for generating ozone using light reflection prevention - Google Patents
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本発明は、生成されたオゾン化ガスの光、その中でも紫外線による分解を抑制することができるオゾンの生成方法に関する。さらに、放電空間中で 生成されたオゾン化ガスが放電空間中で分解されることを抑制することができるオゾン管に関する。また、そのオゾン発生管を備えるオゾン発生装置であって、上下水処理、パルプ漂白処理、殺菌処理などに用いることができるオゾン発生装置に関する。とくに、放電空間中で生成されたオゾン化ガスの光、その中でも紫外線による分解を抑制することができるオゾン発生管およびそのオゾン発生管を備えるオゾン発生装置に関する。 The present invention relates to a method for generating ozone that can suppress decomposition of the generated ozonized gas by light, particularly ultraviolet rays. Furthermore, it is related with the ozone tube which can suppress that the ozonized gas produced | generated in discharge space is decomposed | disassembled in discharge space. Moreover, it is an ozone generator provided with the ozone generation pipe | tube, Comprising: It is related with the ozone generator which can be used for a water and sewage process, a pulp bleaching process, a sterilization process, etc. In particular, the present invention relates to an ozone generator tube that can suppress decomposition of the ozonized gas generated in the discharge space, particularly ultraviolet rays, and an ozone generator that includes the ozone generator tube.
オゾンは、殺菌処理、漂白処理などに使用され、その有効性が認められてから、効率的にオゾンを得るよう、その製造技術に検討が加えられていた。たとえば、オゾン発生管においての電極の材料や構造、対向電極間の空間など、あるいはそのオゾン発生管を備えたオゾン発生装置などに関する数多くの研究結果が報告されている。 Ozone has been used for sterilization treatment, bleaching treatment, etc., and after its effectiveness has been confirmed, studies have been made on its production technology to obtain ozone efficiently. For example, many research results have been reported on the material and structure of electrodes in an ozone generation tube, the space between opposing electrodes, and the ozone generation apparatus equipped with the ozone generation tube.
従来から知られているオゾン発生管の一例を図４（ａ）、（ｂ）に示す。
図４（ａ）において、オゾン発生管は、耐オゾン性の高いステンレス鋼で作られた円筒状の接地電極１と、該円筒接地電極１の内周面にライニングしたガラスなどの誘電体層３と、その内側に放電空間６を介して円筒接地電極１に同心配置した中空円筒形のステンレス鋼製高電圧電極２とからなる構成である。
図４（ｂ）において、オゾン発生管は、耐オゾン性の高いステンレス鋼で作られた円筒状の接地電極１と、その内側に放電空間６を介して、ガラスなどの誘電体層３を外周面にライニングした中空円筒形のステンレス鋼製高電圧電極２を上記円筒接地電極１内に同心配置した構成である（たとえば特許文献１を参照）。
かかる構成で、オゾン発生管の円筒高電圧電極２と円筒接地電極１との間に交流高電圧を印加した上で、オゾン発生管に供給された酸素を含んだ原料ガス４は、円筒高電圧電極２と円筒接地電極１との間の放電空間６中で、下記の反応によりオゾン化ガス７を生成する。
An example of a conventionally known ozone generating tube is shown in FIGS. 4 (a) and 4 (b).
In FIG. 4 (a), an ozone generating tube includes a cylindrical ground electrode 1 made of stainless steel having high ozone resistance, and a dielectric layer 3 such as glass lined on the inner peripheral surface of the cylindrical ground electrode 1. And a hollow cylindrical stainless steel high-voltage electrode 2 concentrically arranged on the cylindrical ground electrode 1 with a discharge space 6 inside.
In FIG. 4 (b), the ozone generating tube has a cylindrical ground electrode 1 made of stainless steel having high ozone resistance, and a dielectric layer 3 such as glass on the inside through a discharge space 6 inside. A hollow cylindrical stainless steel high voltage electrode 2 lined on the surface is arranged concentrically in the cylindrical ground electrode 1 (see, for example, Patent Document 1).
With such a configuration, an AC high voltage is applied between the cylindrical high voltage electrode 2 and the cylindrical ground electrode 1 of the ozone generation tube, and then the source gas 4 containing oxygen supplied to the ozone generation tube is a cylindrical high voltage. In the discharge space 6 between the electrode 2 and the cylindrical ground electrode 1, an ozonized gas 7 is generated by the following reaction.
O2 + e → O + O + e
O2 + O + M → O3 + M
なお、式中Ｍは第三体を意味し、具体的にはＡｒ、Ｈｅ、Ｎ２等が挙げられる。
O 2 + e → O + O + e
O 2 + O + M → O 3 + M
In the formula, M means a third body, and specifically includes Ar, He, N 2 and the like.
図５は図４（ａ）、（ｂ）で示した円筒型の対向電極に対して、平板型の対向電極を示したものである（たとえば特許文献２を参照）。図５でのオゾン発生管は、電極形状は異なるが電極に関する基本的構造は同じであり、放電空間内でのオゾン化ガスの挙動も図４と同じことが言える。
すなわち、図５において、このオゾン発生管は、耐オゾン性の高いステンレス鋼で作られた二つの平板電極１０により対向電極を構成し、平板電極１０の一方の対向面には誘電体３が設けられている。
オゾン発生管の二つの平板電極１０間に交流高電圧を印加した上で、オゾン発生管に供給された酸素を含んだ原料ガス４は二つの平板電極１０間の放電空間６中で、上記の反応によりオゾン化ガス７を生成する。
また、図には示していないが、高電圧電極、接地電極の両側に誘電体を配置して、放電空間を生成しているものも、同様のことがいえる。
FIG. 5 shows a plate-type counter electrode with respect to the cylindrical counter electrode shown in FIGS. 4A and 4B (see, for example, Patent Document 2). The ozone generator tube in FIG. 5 has the same electrode structure but the same basic structure regarding the electrode, and it can be said that the behavior of the ozonized gas in the discharge space is the same as in FIG.
That is, in FIG. 5, this ozone generating tube is configured with a counter electrode by two plate electrodes 10 made of stainless steel having high ozone resistance, and a dielectric 3 is provided on one surface of the plate electrode 10. It has been.
After an AC high voltage is applied between the two plate electrodes 10 of the ozone generator tube, the source gas 4 containing oxygen supplied to the ozone generator tube is discharged into the discharge space 6 between the two plate electrodes 10 in the above-described manner. Ozonized gas 7 is generated by the reaction.
Although not shown in the figure, the same can be said for the case where a dielectric is disposed on both sides of the high voltage electrode and the ground electrode to generate a discharge space.
オゾンは、殺菌処理、漂白処理などに使用されるのであるが、オゾン濃度が高いオゾン化ガスを使用すればそれだけ有利であるから、できるだけオゾン濃度が高いオゾン化ガスを得る技術が求められている。
本発明者らは、オゾン濃度が高いオゾン化ガスを得るべく工夫する最中、オゾン化ガスの分解に着目した。すなわち、オゾン化ガスの一部は紫外光等により分解され、酸素分子に戻ることが知られている。その反応は次式のとおりである。
Ozone is used for sterilization treatment, bleaching treatment, etc. However, if an ozonized gas with a high ozone concentration is used, it is advantageous that much. Therefore, a technique for obtaining an ozonized gas with the highest ozone concentration is required. .
The present inventors paid attention to the decomposition of the ozonized gas while devising to obtain an ozonized gas having a high ozone concentration. That is, it is known that part of the ozonized gas is decomposed by ultraviolet light or the like and returns to oxygen molecules. The reaction is as follows:
O3 + hν → O2 + O
一方、電極間に交流高電圧が印加され、放電により生じた放電光は放電空間６内をあらゆる方向に進んでいくことになるので、オゾン発生管内の放電空間中で 生成されたオゾン化ガスの一部は放電光の紫外光等により分解され、酸素分子に戻ることが考えられる。とくに、誘電体３を構成する材料が光反射性を有している場合には、放電光は誘電体表面あるいはその内部で反射し、放電空間６中を伝播することとなり、放電空間中に存在する生成されたオゾン化ガスは放電光の紫外光等により分解され、酸素分子に戻ってしまう不安がある。放電空間６に接して存在する誘電体３としてガラスが多用され、しかもガラスはある程度の光反射率があるので、放電空間６内を放電光はあらゆる方向に進み、生成されたオゾン化ガスは放電光の紫外光等により分解され、酸素分子に戻ってしまう恐れがある。
このようにオゾン発生管内で製造されたオゾンは、そのオゾン発生管内で放電光により分解されてしまう。ところが、従来の技術では放電空間６中での光の伝播を防止するような構成は施されていなかった。
そこで、本発明の課題は放電空間中での放電光、とくに紫外光の伝播を防止する技術を提供することにある。また、できるだけオゾン濃度が高いオゾン化ガスを得る技術を提供することでもある。
O 3 + hν → O 2 + O
On the other hand, since an alternating high voltage is applied between the electrodes and the discharge light generated by the discharge travels in all directions in the discharge space 6, the ozonized gas generated in the discharge space in the ozone generation tube It is conceivable that some of them are decomposed by the ultraviolet light of the discharge light and returned to oxygen molecules. In particular, when the material constituting the dielectric 3 has light reflectivity, the discharge light is reflected on the dielectric surface or inside thereof and propagates in the discharge space 6 and exists in the discharge space. There is a concern that the generated ozonized gas is decomposed by the ultraviolet light of the discharge light and returned to oxygen molecules. Glass is often used as the dielectric 3 that exists in contact with the discharge space 6, and glass has a certain degree of light reflectivity. Therefore, the discharge light travels in all directions in the discharge space 6, and the generated ozonized gas is discharged. There is a risk that it will be decomposed by ultraviolet light or the like and returned to oxygen molecules.
Thus, the ozone produced in the ozone generator tube is decomposed by the discharge light in the ozone generator tube. However, the conventional technique has not been configured to prevent light propagation in the discharge space 6.
Accordingly, an object of the present invention is to provide a technique for preventing propagation of discharge light, particularly ultraviolet light, in the discharge space. Moreover, it is also providing the technique which obtains the ozonized gas whose ozone concentration is as high as possible.
上記問題点を解決するために、本発明ではつぎのような工夫を施した。
対向して配置された電極の少なくとも一方に誘電体を配置した構成で、前記電極間に交流高電圧を印加して、前記電極で 生成された空間に放電を発生させ、前記空間中に酸素を含む原料ガスを供給し,オゾン化ガスを発生させるオゾン発生装置において、前記放電空間内に面した誘電体あるいは金属電極表面の少なくとも一方に光反射防止作用を持たせ、とくに紫外光の放電空間内の伝播を防止する。
In order to solve the above problems, the present invention has been devised as follows.
In a configuration in which a dielectric is disposed on at least one of the electrodes disposed opposite to each other, an alternating high voltage is applied between the electrodes to generate a discharge in the space generated by the electrodes, and oxygen is generated in the space. In an ozone generator that supplies an ozonized gas by supplying a source gas containing at least one of a dielectric or a metal electrode surface facing the discharge space, has an antireflection effect, particularly in an ultraviolet light discharge space. Prevent propagation of
すなわち、本発明の請求項１に係る発明は、互いに対向するように配置された二つの電極、それら電極の対向する表面の少なくとも一方に誘電体を配置し、前記誘電体、金属電極表面あるいはそれら両方の対向する表面に光反射防止層を設けた対向電極を備えたオゾン発生管を作製し、前記電極間に交流高電圧を印加して前記電極間で放電を発生させると共に前記放電空間中に酸素を含む原料ガスを供給することを特徴とするオゾン化ガスの生成方法である。
請求項２に係る発明は、互いに対向するように配置された二つの電極およびそれら電極の対向する表面の少なくとも一方に誘電体を配置した構成で、前記電極間に交流高電圧を印加して前記電極間で 生成された空間に放電を発生させ、前記放電空間中に酸素を含む原料ガスを供給し、オゾン化ガスを発生させるオゾン発生管において、前記放電空間に面した誘電体、金属電極表面あるいはそれら両方の表面に光反射防止層を配置することを特徴とする。
請求項３に係る発明は、互いに対向するように配置された二つの電極およびそれら電極の対向する表面の少なくとも一方に誘電体を配置した構成で、前記電極間に交流高電圧を印加して前記電極間で 生成された空間に放電を発生させ、前記放電空間中に酸素を含む原料ガスを供給し、オゾン化ガスを発生させるオゾン発生管と、このオゾン発生管を内蔵する筐体とを備えたオゾン発生装置において、前記放電空間に面した誘電体、金属電極表面あるいはそれら両方の表面に光反射防止層を配置することを特徴とする。
That is, in the invention according to claim 1 of the present invention, a dielectric is arranged on at least one of two electrodes arranged so as to face each other and the surfaces of the electrodes facing each other, and the surface of the dielectric, the metal electrode, or these An ozone generating tube having a counter electrode provided with a light reflection preventing layer on both opposing surfaces is produced, and an alternating high voltage is applied between the electrodes to generate a discharge between the electrodes and into the discharge space. An ozonized gas generation method is characterized in that a source gas containing oxygen is supplied.
The invention according to claim 2 is a configuration in which a dielectric is disposed on at least one of two electrodes disposed so as to face each other and surfaces facing each other, and an AC high voltage is applied between the electrodes to In an ozone generator tube that generates a discharge in a space generated between electrodes, supplies a source gas containing oxygen in the discharge space, and generates an ozonized gas, a dielectric facing the discharge space, a metal electrode surface Alternatively, the antireflection layer is disposed on both surfaces.
The invention according to claim 3 is a configuration in which a dielectric is disposed on at least one of two electrodes arranged to face each other and surfaces facing each other, and an AC high voltage is applied between the electrodes to An ozone generating tube that generates a discharge in a space generated between the electrodes, supplies a raw material gas containing oxygen into the discharge space to generate an ozonized gas, and a housing that incorporates the ozone generating tube. The ozone generator is characterized in that a light reflection preventing layer is disposed on the surface of the dielectric facing the discharge space, the surface of the metal electrode, or both.
さらに本発明は、互いに対向するように配置された二つの電極、それら電極の対向する表面の少なくとも一方に誘電体を配置し、前記誘電体、金属電極表面あるいはそれら両方の対向する表面に光反射防止層を設けた対向電極を備えたオゾン発生管と、このオゾン発生管を内蔵する筐体とを備えたオゾン発生装置を作製し、前記電極間に交流高電圧を印加して前記電極間で放電を発生させると共に前記放電空間中に酸素を含む原料ガスを供給することを特徴とするオゾン化ガスの生成方法であり、前記オゾン発生管あるいはオゾン発生装置を冷却することを特徴とするオゾン化ガスの生成方法でもある。 Furthermore, the present invention provides two electrodes arranged so as to face each other, and a dielectric is disposed on at least one of the facing surfaces of the electrodes, and reflects light on the facing surfaces of the dielectric, the metal electrode, or both. An ozone generating device including an ozone generating tube provided with a counter electrode provided with a prevention layer and a housing containing the ozone generating tube is manufactured, and an AC high voltage is applied between the electrodes to An ozonized gas generation method characterized by generating a discharge and supplying a source gas containing oxygen into the discharge space, wherein the ozone generator tube or the ozone generator is cooled. It is also a gas generation method.
上記光反射防止層としては、放電光とくに紫外光の反射を防止できる機能を有する層であればとくに制限されないのであるが、放電光とくに紫外光を吸収する層であることが好ましい。たとえば、紫外光を吸収することができる顔料、とくに無機顔料自体からなる層、あるいはその顔料をバインダーで結着した層やその顔料を含むガラスあるいはセラミックスからなる層が好ましい。本発明では、誘電体の表面に光反射防止層を設けることが好ましいが、電極表面に光反射防止層を設けてもよい。また、誘電体自体に光反射防止機能を持たせてもよい。上記機能を有する層を形成する手段は一般的な方法を用いればよい。 The light reflection preventing layer is not particularly limited as long as it has a function capable of preventing the reflection of discharge light, particularly ultraviolet light, but is preferably a layer that absorbs discharge light, particularly ultraviolet light. For example, a pigment that can absorb ultraviolet light, particularly a layer made of an inorganic pigment itself, a layer formed by binding the pigment with a binder, or a layer made of glass or ceramics containing the pigment is preferable. In the present invention, it is preferable to provide an antireflection layer on the surface of the dielectric, but an antireflection layer may be provided on the electrode surface. In addition, the dielectric itself may have a light reflection preventing function. A general method may be used as a means for forming the layer having the above function.
本発明で言うオゾン化ガス発生管の構成要素である、対向電極としては、円筒状電極、平板電極など、一般的なものを選んで使用することができる。また、電極表面に設けられる誘電体などもとくに制限されるものではない。さらに、オゾン発生管、それを内蔵する筐体や対向電極間に印加する交流高電圧電源なども一般的なものを使用することができる。
オゾン発生管に供給されるオゾン生成のための原料ガスは酸素を含むガスであればとくに制限されない。具体的には、空気、純酸素、純酸素に窒素、Ａｒ，Ｈｅなどを混入させた混合ガスなどを挙げることができる。
As the counter electrode, which is a constituent element of the ozonized gas generating tube referred to in the present invention, a general electrode such as a cylindrical electrode or a plate electrode can be selected and used. Also, the dielectric provided on the electrode surface is not particularly limited. Furthermore, a general thing can be used also, such as an ozone generator tube, the housing | casing which incorporates it, and the alternating current high voltage power supply applied between counter electrodes.
The raw material gas for generating ozone supplied to the ozone generating tube is not particularly limited as long as it contains oxygen. Specifically, air, pure oxygen, a mixed gas in which pure oxygen is mixed with nitrogen, Ar, He, or the like can be given.
本発明により、オゾン発生管内の放電空間では、放電によって生じた放電光の伝播が抑制され、放電空間中で生成されたオゾンの分解を抑制することができる。これによってオゾン発生装置のオゾン生成特性を向上させることが可能となり、オゾン濃度の高いオゾン化ガスを製造することを可能とする。 According to the present invention, in the discharge space in the ozone generation tube, the propagation of the discharge light generated by the discharge is suppressed, and the decomposition of the ozone generated in the discharge space can be suppressed. This makes it possible to improve the ozone generation characteristics of the ozone generator, and to produce an ozonized gas with a high ozone concentration.
以下、図を用いて本発明を詳しく説明する。
図１は本発明のオゾン発生管の対向電極の一例を示す。
図１（ａ）では、オゾン発生管の対向電極は、円筒接地電極１の放電空間６側に、表面に反射防止膜８を配置した誘電体３を配置し、放電空間６を介して円筒高電圧電極２を同心状に設置した構成である。
前記円筒接地電極と円筒高電圧電極間に交流高電圧を印加して前記電極間で 生成された空間に放電を発生させる。オゾン発生管内に供給される原料ガスは放電空間６内で放電処理され、オゾン化ガスが生成される。
Hereinafter, the present invention will be described in detail with reference to the drawings.
FIG. 1 shows an example of the counter electrode of the ozone generating tube of the present invention.
In FIG. 1 (a), the counter electrode of the ozone generating tube has a dielectric 3 having an antireflection film 8 disposed on the surface on the discharge space 6 side of the cylindrical ground electrode 1, and a cylindrical height through the discharge space 6. The voltage electrode 2 is concentrically installed.
An AC high voltage is applied between the cylindrical ground electrode and the cylindrical high voltage electrode to generate a discharge in the space generated between the electrodes. The raw material gas supplied into the ozone generating tube is discharged in the discharge space 6 to generate ozonized gas.
オゾン発生管の前記放電空間に面した誘電体、金属電極表面あるいはそれら両方の表面に光反射防止層８を配置することができる。反射防止層８は、例えば青色を呈する紫外光を吸収する顔料を含むガラス、セラミックスが良く、より好ましくは黒あるいはダークグレー等の可視光や紫外光を吸収する顔料を含む、ガラスあるいはセラミッスクスなどである。なお、上記誘電体として、上記顔料を含むガラスを使用しても良い。この場合には誘電体は誘電体と反射防止層との二つの役割を担うことになる。 The light reflection preventing layer 8 can be disposed on the surface of the dielectric, the surface of the metal electrode, or both of them facing the discharge space of the ozone generating tube. The antireflection layer 8 is, for example, glass or ceramic containing a pigment that absorbs ultraviolet light that exhibits blue, and more preferably glass or ceramics containing a pigment that absorbs visible light or ultraviolet light such as black or dark gray. . Note that glass containing the pigment may be used as the dielectric. In this case, the dielectric plays two roles of a dielectric and an antireflection layer.
図３は本発明のオゾン発生管の対向電極の一部の拡大図を示す。
放電空間６中の放電により生じた放電光１６は、放電柱（ストリーマ）１５を中心に四方八方へ放出される。原料ガス４の流路方向に対し平行ではない方向に進む放電光は、放電空間６に面した円筒接地電極１の誘電体３の面と円筒高電圧電極２の放電空間６に接する面に入射する。誘電体３の放電空間面側には、反射防止膜８が施されており、照射された光は反射防止膜８により吸収される（反射を抑制）。これにより放電空間中への放電光の伝播を抑制し、放電空間６で生成されたオゾン化ガスの分解を抑制することができる。円筒高電圧電極２の表面にも同様に反射防止膜（図示していない）を生成することにより、放電空間６に接する面全体が反射防止機能を持つこととなり、放電空間６中へのオゾン分解を促進する光の伝播を抑制し、オゾン発生特性を向上させることができる。
FIG. 3 shows an enlarged view of a part of the counter electrode of the ozone generating tube of the present invention.
Discharge light 16 generated by the discharge in the discharge space 6 is emitted in all directions around a discharge column (streamer) 15. Discharge light traveling in a direction not parallel to the flow direction of the source gas 4 is incident on the surface of the dielectric 3 of the cylindrical ground electrode 1 facing the discharge space 6 and the surface of the cylindrical high voltage electrode 2 in contact with the discharge space 6. To do. An antireflection film 8 is provided on the discharge space surface side of the dielectric 3, and irradiated light is absorbed by the antireflection film 8 (reflection is suppressed). Thereby, propagation of discharge light into the discharge space can be suppressed, and decomposition of the ozonized gas generated in the discharge space 6 can be suppressed. Similarly, by forming an antireflection film (not shown) on the surface of the cylindrical high voltage electrode 2, the entire surface in contact with the discharge space 6 has an antireflection function, and ozone decomposition into the discharge space 6 is performed. It is possible to suppress the propagation of light that promotes ozone and improve the ozone generation characteristics.
図１（ｂ）は本発明のオゾン発生管の対向電極の上記と異なる例を示す。
図１（ｂ）では、オゾン発生管の対向電極は、円筒接地電極１と、その放電空間６側に放電空間６を介して反射防止膜８が配置された誘電体３にて円筒高電圧電極２を包むように配置し、しかも円筒高電圧電極２を円筒接地電極１と同心状に設置した構成である。
前記円筒接地電極と円筒高電圧電極間に交流高電圧を印加して前記電極間で生成された空間に放電を発生させる。オゾン発生管内に供給される原料ガスは放電空間６内で放電処理され、オゾン化ガスが生成される。
図１（ｂ）でも、放電空間６に面した反射防止膜８を生成することにより、オゾン分解を促進する光の伝播を抑制し、オゾン発生特性を向上させることができる。
FIG.1 (b) shows the example different from the above of the counter electrode of the ozone generator tube of this invention.
In FIG. 1 (b), the counter electrode of the ozone generating tube is a cylindrical ground voltage electrode 1 and a cylindrical high voltage electrode made of a dielectric 3 having an antireflection film 8 disposed on the discharge space 6 side through the discharge space 6. 2 and the cylindrical high-voltage electrode 2 is disposed concentrically with the cylindrical ground electrode 1.
An AC high voltage is applied between the cylindrical ground electrode and the cylindrical high voltage electrode to generate a discharge in the space generated between the electrodes. The raw material gas supplied into the ozone generating tube is discharged in the discharge space 6 to generate ozonized gas.
Also in FIG. 1B, by generating the antireflection film 8 facing the discharge space 6, the propagation of light that promotes ozone decomposition can be suppressed, and the ozone generation characteristics can be improved.
図２は、図１とは異なる本発明のオゾン発生管の対向電極を示す。
図２でのオゾン発生管は、電極形状は異なるが電極に関する基本的構造は同じであり、放電空間内でのオゾン化ガスの挙動としても図１と同じことが言える。
FIG. 2 shows a counter electrode of the ozone generating tube of the present invention which is different from FIG.
The ozone generation tube in FIG. 2 has the same basic structure regarding the electrodes although the electrode shape is different, and the behavior of the ozonized gas in the discharge space can be said to be the same as in FIG.
すなわち、図２において、耐オゾン性の高いステンレス鋼で作られた二つの平板電極１０により対向電極を構成し、平板電極１０の一方の対向面には反射防止膜８が配置された誘電体３が設けられている。オゾン発生管の二つの平板電極１０間に交流高電圧電源５にて交流高電圧を印加した上で、オゾン発生管に供給された酸素を含んだ原料ガス４は二つの平板電極１０間の放電空間６中で、上記の反応によりオゾン化ガス７を生成する。放電光は反射防止膜８により吸収され、放電空間を伝播することがなく、この生成されたオゾン化ガスは、上記と同様に放電空間内で放電光の紫外光等により分解されることがない。 That is, in FIG. 2, a counter electrode is constituted by two plate electrodes 10 made of stainless steel having high ozone resistance, and a dielectric 3 in which an antireflection film 8 is disposed on one counter surface of the plate electrode 10. Is provided. An AC high voltage is applied between the two plate electrodes 10 of the ozone generation tube by the AC high voltage power source 5, and the source gas 4 containing oxygen supplied to the ozone generation tube is discharged between the two plate electrodes 10. In the space 6, the ozonized gas 7 is generated by the above reaction. The discharge light is absorbed by the antireflection film 8 and does not propagate through the discharge space, and the generated ozonized gas is not decomposed by the ultraviolet light of the discharge light in the discharge space as described above. .
１．円筒接地電極
２．円筒高電圧電極
３．誘電体
４．原料ガス
５．交流高電圧電源
６．放電空間
７．オゾン化ガス
７．反射防止層
１０．平板電極
１５．放電柱（ストリーマ）
１６．放電光
1. 1. Cylindrical ground electrode 2. Cylindrical high voltage electrode Dielectric 4. 4. Source gas AC high voltage power supply 6. discharge space 6. Ozonized gas Antireflection layer 10. Flat plate electrode 15. Discharge column (streamer)
16. Discharge light
Claims (3)
In a configuration in which a dielectric is disposed on at least one of two electrodes arranged to face each other and the surfaces of the electrodes facing each other, an alternating high voltage is applied between the electrodes to form a space formed between the electrodes In an ozone generator comprising: an ozone generator tube that generates a discharge, supplies a source gas containing oxygen into the discharge space, and generates an ozonized gas; and a housing that contains the ozone generator tube. An ozone generator comprising an antireflection layer disposed on at least one of a dielectric or metal electrode surface facing a space.
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