JP2010137212A - Apparatus for generating plasma - Google Patents
Apparatus for generating plasma Download PDFInfo
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- JP2010137212A JP2010137212A JP2008336003A JP2008336003A JP2010137212A JP 2010137212 A JP2010137212 A JP 2010137212A JP 2008336003 A JP2008336003 A JP 2008336003A JP 2008336003 A JP2008336003 A JP 2008336003A JP 2010137212 A JP2010137212 A JP 2010137212A
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Abstract
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液体が関与するプラズマ発生方法に関する。特に水処理や廃液処理、液体の関与する材料合成、および処理分野などに適用される。 The present invention relates to a plasma generation method involving a liquid. In particular, it is applied to water treatment, waste liquid treatment, material synthesis involving liquids, and the treatment field.
液体が関与するプラズマ発生方法には大別して次の3つがある。第一に気相放電空間に液滴を供給するもの、第二に液面上の放電、第三に液体中の放電である。本発明は第二および第三に関する。液面上の放電は、気相中で形成されたプラズマと液面との相互配置の工夫により両者が接触して存在する方法が示されている(非特許文献1)。他方液体中の放電は、針状電局に高電界を印可して液を絶縁破壊し、コロナストリームプラズマを誘起させる方法や、液体中に加熱や超音波などで気泡を発生させ、そこへ電磁波を照射してプラズマを誘発させる方法などが提案されている(特許文献1,2)。
排水廃液処理装置として機能および経済性の面から、有害有機化合が排水基準まで分解されること、低コストであること、できる限り小型であること、試薬を使用しないことなどが必要とされている。活性炭、光触媒、過酸化水素、紫外線ランプなどは消耗品である。また超音波や紫外線の発生には多量の電力を消費する。現在紫外線ランプを用いる方法が実用化されているが、上記理由により消耗部材である紫外線ランプを用いず、より低消費電力とすることが課題となっている。 From the viewpoint of function and economy as a wastewater wastewater treatment device, it is required that harmful organic compounds are decomposed to wastewater standards, are low-cost, are as small as possible, and do not use reagents. . Activated carbon, photocatalyst, hydrogen peroxide, ultraviolet lamp, etc. are consumables. In addition, a large amount of power is consumed to generate ultrasonic waves and ultraviolet rays. Currently, a method using an ultraviolet lamp has been put into practical use. However, for the above reason, there is a problem of lower power consumption without using an ultraviolet lamp as a consumable member.
水あるいは液を片方電極とし、誘電体を被覆した対抗電極との間に放電気体を介在させ、両電極間に電界を印加することにより気体中に放電を誘起し、放電空間と接した水あるいは液部位を放電空間に形成された活性種によって化学処理を行う。 Water or liquid is used as one electrode, a discharge gas is interposed between a counter electrode coated with a dielectric, and an electric field is applied between both electrodes to induce discharge in the gas. The liquid part is chemically treated with active species formed in the discharge space.
誘電体バリヤー放電を用いているため放電電流は間欠的であり消費電力は従来の赤外線ランプに比べ大幅に低減することができる。水に接した大気を放電気体として用いることにより酸化力の強いOHラジカルが形成され、水中の有害有機物を効率よく分解除去することができる。また誘電体被覆電極を水、あるいは液中に挿入することにより処理が可能なことから、従来の曝気処理に付加して行うことができる。 Since the dielectric barrier discharge is used, the discharge current is intermittent, and the power consumption can be greatly reduced as compared with the conventional infrared lamp. By using the atmosphere in contact with water as the discharge gas, OH radicals with strong oxidizing power are formed, and harmful organic substances in water can be efficiently decomposed and removed. Further, since the treatment can be performed by inserting the dielectric-coated electrode into water or liquid, it can be performed in addition to the conventional aeration treatment.
誘電体を被覆した棒状の電極を複数本処理すべき水あるいは液中へ大気中から挿入する。電極金属は耐環境性に優れたステンレス鋼が望ましい。電極を被覆する誘電体は高電圧に対して絶縁性の良いものであり、かつ水あるいは液および大気に対して耐環境性の高い材料であることが必要とされることからシリカ系ガラスが望ましい。誘電率は大気への電圧分割と壁電荷蓄積効果との兼ね合いで決定される。水あるいは液中に浸漬される誘電体被覆電極部位の長さは処理時の液面の変動幅より長くすることで常時安定した処理を行うことができる。印加電圧は水あるいは液を基準電位として数Kボルトの交流あるいはパルスであればよく、電圧値、周波数あるいはオンデューティやプラズマ形成と維持期間の分離などの条件は個々のプラズマ形成条件を考慮して決定されることが望ましい。 A plurality of rod-shaped electrodes coated with a dielectric are inserted into the water or liquid to be treated from the atmosphere. The electrode metal is preferably stainless steel with excellent environmental resistance. Silica-based glass is desirable because the dielectric covering the electrode is required to be a material that has good insulation against high voltages and is highly resistant to water, liquid, and air. . The dielectric constant is determined by the balance between the voltage division into the atmosphere and the wall charge accumulation effect. By making the length of the dielectric-coated electrode part immersed in water or liquid longer than the fluctuation range of the liquid level during the treatment, stable treatment can be performed at all times. The applied voltage may be an alternating current or pulse of several kilovolts with water or liquid as a reference potential, and the voltage value, frequency, on-duty, plasma formation and separation of the sustain period, etc., take into account the individual plasma formation conditions It is desirable to be determined.
図1に単電極を具備した処理装置の原理図を示す。▲1▼は金属電極でありガラス▲2▼で被覆されており交番電界▲4▼が印加されている。▲3▼は処理されるべき水もしくは液であり電位は接地されている。▲5▼は放電領域を示しており水あるいは液中との界面で有害有機成分が分解除去される。 FIG. 1 shows a principle diagram of a processing apparatus equipped with a single electrode. (1) is a metal electrode, which is covered with glass (2) and is applied with an alternating electric field (4). (3) is water or liquid to be treated, and the potential is grounded. {Circle over (5)} shows the discharge region, where harmful organic components are decomposed and removed at the interface with water or liquid.
図2は本実施例で用いた剣山状電極を用いた処理装置を示す。▲7▼は複数の棒状電極を束ね保持する絶縁支持体であり、▲6▼は各電極に電圧を供給する共通電極である。このように密に電極を並べることによって液面全体をプラズマで覆うことができる。図3は本実施例で水面に形成された大気プラズマによる発光を示している。本実施例では棒状金属電極として1/4インチ・のSUS304を用い、被覆シリケートガラスの肉厚は0.2mmとした。印加電圧は3KV幅、デューティー50の矩形とし、周波数は1KHとした。液はメチレンブルーを10mg/L含有する市水を用いプラズマによる脱色速度を測定した。図4はその結果を示す。本実施例からメチレンブルー酸化分解除去のエネルギー時間効率を求めると0.1mg/W/分となり、省エネ、高効率性が示唆された。 FIG. 2 shows a processing apparatus using a sword-shaped electrode used in this embodiment. (7) is an insulating support for bundling and holding a plurality of rod-shaped electrodes, and (6) is a common electrode for supplying a voltage to each electrode. By arranging the electrodes densely in this way, the entire liquid surface can be covered with plasma. FIG. 3 shows light emission by atmospheric plasma formed on the water surface in this embodiment. In this example, ¼ inch SUS304 was used as the rod-shaped metal electrode, and the thickness of the coated silicate glass was 0.2 mm. The applied voltage was a rectangle of 3 KV width and duty 50, and the frequency was 1 KH. The liquid used was city water containing 10 mg / L of methylene blue, and the decolorization rate by plasma was measured. FIG. 4 shows the result. The energy time efficiency of methylene blue oxidative decomposition removal was determined from this example to be 0.1 mg / W / min, suggesting energy saving and high efficiency.
▲1▼・・・金属電極
▲2▼・・・誘電体
▲3▼・・・プラズマ
▲4▼・・・印加電圧
▲5▼・・・非処理液体
▲6▼・・・共通電極
▲7▼・・・剣山型電極基盤(1) ... Metal electrode (2) ... Dielectric material (3) ... Plasma (4) ... Applied voltage (5) ... Non-treatment liquid (6) ... Common electrode (7) ▼ ... Kenyama electrode base
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Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012011301A (en) * | 2010-06-30 | 2012-01-19 | Nagoya Univ | Water treatment method and water treatment apparatus |
CN102487880A (en) * | 2011-12-14 | 2012-06-13 | 苏州超等环保科技有限公司 | Method of preparing plasma aquaculture water |
KR101497591B1 (en) * | 2012-11-30 | 2015-03-02 | 주식회사 스마텍 | Apparatus for treating water using discharge in reactor |
WO2015037565A1 (en) * | 2013-09-10 | 2015-03-19 | Pmディメンションズ株式会社 | Method for synthesizing organic matter and submerged plasma device |
JP2016056167A (en) * | 2014-09-09 | 2016-04-21 | Pmディメンションズ株式会社 | Organic matter synthesis process |
CN108337797A (en) * | 2018-01-19 | 2018-07-27 | 河海大学常州校区 | Gas-liquid two-phase discharge plasma material surface processing unit |
KR20200032368A (en) * | 2018-09-18 | 2020-03-26 | 주식회사 코드스테리 | Activativg apparatus for medium material |
JP2020081227A (en) * | 2018-11-21 | 2020-06-04 | 矢崎エナジーシステム株式会社 | Discharge sterilization method and discharge sterilization device for crop |
KR20210123646A (en) * | 2020-04-03 | 2021-10-14 | 인제대학교 산학협력단 | Atmospheric Pressure Medium Frequency Plasma Processing Equipment |
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2008
- 2008-12-10 JP JP2008336003A patent/JP2010137212A/en active Pending
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012011301A (en) * | 2010-06-30 | 2012-01-19 | Nagoya Univ | Water treatment method and water treatment apparatus |
CN102487880A (en) * | 2011-12-14 | 2012-06-13 | 苏州超等环保科技有限公司 | Method of preparing plasma aquaculture water |
KR101497591B1 (en) * | 2012-11-30 | 2015-03-02 | 주식회사 스마텍 | Apparatus for treating water using discharge in reactor |
WO2015037565A1 (en) * | 2013-09-10 | 2015-03-19 | Pmディメンションズ株式会社 | Method for synthesizing organic matter and submerged plasma device |
US9452979B2 (en) | 2013-09-10 | 2016-09-27 | Pm Dimensions Kabushiki Kaisha | Method for synthesizing organic matter and submerged plasma device |
JP2016056167A (en) * | 2014-09-09 | 2016-04-21 | Pmディメンションズ株式会社 | Organic matter synthesis process |
CN108337797A (en) * | 2018-01-19 | 2018-07-27 | 河海大学常州校区 | Gas-liquid two-phase discharge plasma material surface processing unit |
KR20200032368A (en) * | 2018-09-18 | 2020-03-26 | 주식회사 코드스테리 | Activativg apparatus for medium material |
KR102139692B1 (en) * | 2018-09-18 | 2020-07-30 | 주식회사 코드스테리 | Activativg apparatus for medium material |
JP2020081227A (en) * | 2018-11-21 | 2020-06-04 | 矢崎エナジーシステム株式会社 | Discharge sterilization method and discharge sterilization device for crop |
KR20210123646A (en) * | 2020-04-03 | 2021-10-14 | 인제대학교 산학협력단 | Atmospheric Pressure Medium Frequency Plasma Processing Equipment |
KR102328322B1 (en) * | 2020-04-03 | 2021-11-19 | 인제대학교 산학협력단 | Atmospheric Pressure Medium Frequency Plasma Processing Equipment |
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