JP2005202933A5 - - Google Patents
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- JP2005202933A5 JP2005202933A5 JP2004344135A JP2004344135A JP2005202933A5 JP 2005202933 A5 JP2005202933 A5 JP 2005202933A5 JP 2004344135 A JP2004344135 A JP 2004344135A JP 2004344135 A JP2004344135 A JP 2004344135A JP 2005202933 A5 JP2005202933 A5 JP 2005202933A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US52571003P | 2003-11-29 | 2003-11-29 | |
| US60/525,710 | 2003-11-29 | ||
| US10/888,526 US7282889B2 (en) | 2001-04-19 | 2004-07-10 | Maintenance unit for a sensor apparatus |
| US10/888,526 | 2004-07-10 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005202933A JP2005202933A (ja) | 2005-07-28 |
| JP2005202933A5 true JP2005202933A5 (pt) | 2011-08-11 |
| JP4874540B2 JP4874540B2 (ja) | 2012-02-15 |
Family
ID=34830427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004344135A Expired - Fee Related JP4874540B2 (ja) | 2003-11-29 | 2004-11-29 | センサー装置を制御する方法及び装置 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP4874540B2 (pt) |
| TW (1) | TWI268429B (pt) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7839124B2 (en) * | 2006-09-29 | 2010-11-23 | Semiconductor Energy Laboratory Co., Ltd. | Wireless power storage device comprising battery, semiconductor device including battery, and method for operating the wireless power storage device |
| US8853995B2 (en) | 2009-06-12 | 2014-10-07 | Qualcomm Incorporated | Devices for conveying wireless power and methods of operation thereof |
| US8547057B2 (en) * | 2009-11-17 | 2013-10-01 | Qualcomm Incorporated | Systems and methods for selective wireless power transfer |
| KR101356623B1 (ko) | 2011-11-10 | 2014-02-03 | 주식회사 스파콘 | 전력전송코일 및 무선 전력전송장치 |
| US9548621B2 (en) * | 2012-05-28 | 2017-01-17 | Panasonic Intellectual Property Management Co., Ltd. | Contactless connector system tolerant of position displacement between transmitter coil and receiver coil and having high transmission efficiency |
| US9356822B2 (en) * | 2012-10-30 | 2016-05-31 | Kla-Tencor Corporation | Automated interface apparatus and method for use in semiconductor wafer handling systems |
| JP5954788B2 (ja) * | 2012-12-28 | 2016-07-20 | セイコーインスツル株式会社 | 電子部品、受電装置、及び給電システム |
| JP2014029860A (ja) * | 2013-08-27 | 2014-02-13 | Advantest Corp | 電源装置および測定用デバイス |
| JP6855774B2 (ja) | 2016-12-13 | 2021-04-07 | Tdk株式会社 | ウエハ搬送容器内雰囲気計測装置、ウエハ搬送容器、ウエハ搬送容器内清浄化装置及びウエハ搬送容器内清浄化方法 |
| JP7467152B2 (ja) | 2020-02-13 | 2024-04-15 | 東京エレクトロン株式会社 | 収容容器及び基板状センサの充電方法 |
| KR102584512B1 (ko) | 2020-12-31 | 2023-10-05 | 세메스 주식회사 | 버퍼 유닛 및 온도 변화가 수반되는 기판 지지 부재의 수평 측정용 기판형 센서의 보관 방법 |
| KR102650610B1 (ko) | 2021-05-31 | 2024-03-26 | 세메스 주식회사 | 기판 처리 장치 및 기판 처리 시스템 |
| KR102594075B1 (ko) * | 2021-05-31 | 2023-10-24 | 세메스 주식회사 | 용기 및 기판 처리 시스템 |
| TW202314938A (zh) | 2021-08-04 | 2023-04-01 | 日商東京威力科創股份有限公司 | 收容容器及基板狀感測器之充電方法 |
| JP7370503B2 (ja) | 2021-11-22 | 2023-10-27 | 三菱電機株式会社 | 送電装置、無線電力伝送システム及び電圧制御装置 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5466614A (en) * | 1993-09-20 | 1995-11-14 | At&T Global Information Solutions Company | Structure and method for remotely measuring process data |
| JPH10142068A (ja) * | 1996-11-14 | 1998-05-29 | Sony Corp | 温度測定装置及びこれを用いた温度測定方法 |
| US6691068B1 (en) * | 2000-08-22 | 2004-02-10 | Onwafer Technologies, Inc. | Methods and apparatus for obtaining data for process operation, optimization, monitoring, and control |
| US7289230B2 (en) * | 2002-02-06 | 2007-10-30 | Cyberoptics Semiconductors, Inc. | Wireless substrate-like sensor |
-
2004
- 2004-11-25 TW TW093136293A patent/TWI268429B/zh active
- 2004-11-29 JP JP2004344135A patent/JP4874540B2/ja not_active Expired - Fee Related