JP2005197444A5 - - Google Patents
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- Publication number
- JP2005197444A5 JP2005197444A5 JP2004001942A JP2004001942A JP2005197444A5 JP 2005197444 A5 JP2005197444 A5 JP 2005197444A5 JP 2004001942 A JP2004001942 A JP 2004001942A JP 2004001942 A JP2004001942 A JP 2004001942A JP 2005197444 A5 JP2005197444 A5 JP 2005197444A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004001942A JP4435580B2 (ja) | 2004-01-07 | 2004-01-07 | 加圧水噴射装置及びそれを用いた基板洗浄装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004001942A JP4435580B2 (ja) | 2004-01-07 | 2004-01-07 | 加圧水噴射装置及びそれを用いた基板洗浄装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005197444A JP2005197444A (ja) | 2005-07-21 |
| JP2005197444A5 true JP2005197444A5 (sv) | 2006-12-07 |
| JP4435580B2 JP4435580B2 (ja) | 2010-03-17 |
Family
ID=34817311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004001942A Expired - Lifetime JP4435580B2 (ja) | 2004-01-07 | 2004-01-07 | 加圧水噴射装置及びそれを用いた基板洗浄装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4435580B2 (sv) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4753757B2 (ja) * | 2006-03-15 | 2011-08-24 | 大日本スクリーン製造株式会社 | 基板処理装置および基板処理方法 |
| JP4592643B2 (ja) * | 2006-05-24 | 2010-12-01 | 大日本スクリーン製造株式会社 | 基板処理装置 |
| JP2010064035A (ja) * | 2008-09-12 | 2010-03-25 | Asahi Sunac Corp | 静電噴出装置 |
| JP5400995B2 (ja) * | 2009-09-05 | 2014-01-29 | 旭サナック株式会社 | 静電塗装スプレーガン |
| JP5894021B2 (ja) * | 2012-06-26 | 2016-03-23 | 旭サナック株式会社 | 噴霧液滴の電荷量測定方法、電荷量測定装置及びそれらを用いた噴霧液滴の電荷量制御装置 |
| KR101856769B1 (ko) * | 2016-09-30 | 2018-06-19 | 세메스 주식회사 | 세정액 분사 장치 및 분사 방법 |
| JP2021064729A (ja) * | 2019-10-16 | 2021-04-22 | 旭サナック株式会社 | 液体噴射装置、および液体噴射方法 |
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2004
- 2004-01-07 JP JP2004001942A patent/JP4435580B2/ja not_active Expired - Lifetime