JP2005197444A5 - - Google Patents

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Publication number
JP2005197444A5
JP2005197444A5 JP2004001942A JP2004001942A JP2005197444A5 JP 2005197444 A5 JP2005197444 A5 JP 2005197444A5 JP 2004001942 A JP2004001942 A JP 2004001942A JP 2004001942 A JP2004001942 A JP 2004001942A JP 2005197444 A5 JP2005197444 A5 JP 2005197444A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004001942A
Other languages
Japanese (ja)
Other versions
JP4435580B2 (ja
JP2005197444A (ja
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Publication date
Application filed filed Critical
Priority to JP2004001942A priority Critical patent/JP4435580B2/ja
Priority claimed from JP2004001942A external-priority patent/JP4435580B2/ja
Publication of JP2005197444A publication Critical patent/JP2005197444A/ja
Publication of JP2005197444A5 publication Critical patent/JP2005197444A5/ja
Application granted granted Critical
Publication of JP4435580B2 publication Critical patent/JP4435580B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2004001942A 2004-01-07 2004-01-07 加圧水噴射装置及びそれを用いた基板洗浄装置 Expired - Lifetime JP4435580B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004001942A JP4435580B2 (ja) 2004-01-07 2004-01-07 加圧水噴射装置及びそれを用いた基板洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004001942A JP4435580B2 (ja) 2004-01-07 2004-01-07 加圧水噴射装置及びそれを用いた基板洗浄装置

Publications (3)

Publication Number Publication Date
JP2005197444A JP2005197444A (ja) 2005-07-21
JP2005197444A5 true JP2005197444A5 (ko) 2006-12-07
JP4435580B2 JP4435580B2 (ja) 2010-03-17

Family

ID=34817311

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004001942A Expired - Lifetime JP4435580B2 (ja) 2004-01-07 2004-01-07 加圧水噴射装置及びそれを用いた基板洗浄装置

Country Status (1)

Country Link
JP (1) JP4435580B2 (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4753757B2 (ja) * 2006-03-15 2011-08-24 大日本スクリーン製造株式会社 基板処理装置および基板処理方法
JP4592643B2 (ja) * 2006-05-24 2010-12-01 大日本スクリーン製造株式会社 基板処理装置
JP2010064035A (ja) * 2008-09-12 2010-03-25 Asahi Sunac Corp 静電噴出装置
JP5400995B2 (ja) * 2009-09-05 2014-01-29 旭サナック株式会社 静電塗装スプレーガン
JP5894021B2 (ja) * 2012-06-26 2016-03-23 旭サナック株式会社 噴霧液滴の電荷量測定方法、電荷量測定装置及びそれらを用いた噴霧液滴の電荷量制御装置
KR101856769B1 (ko) * 2016-09-30 2018-06-19 세메스 주식회사 세정액 분사 장치 및 분사 방법
JP2021064729A (ja) * 2019-10-16 2021-04-22 旭サナック株式会社 液体噴射装置、および液体噴射方法

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