JP2005190791A - Conductive contactor and inspection device equipped with this conductive contactor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a conductive contactor maintaining a clean environment and securing a stable contact state, and an inspection device having this conductive contactor. <P>SOLUTION: The inspection device 10 has a contactor 1 for performing a conduction inspection by depressing and contacting a work 2. The contactor 1 has a shape in which a rectangular blade spring having conductivity is made annular shape and of which both ends are jointed, and when depressed and contacted to the work 2, is elastically deformed, thereby contact pressure is generated and its contact area is enlarged. Then, when a stress of lateral direction is generated, this stress is absorbed by the elastic deformation of the contactor 1, and horizontal slippage between the work 2 is not generated. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a conductive contact that comes into contact with a contacted portion of an inspection object, and an inspection apparatus including the conductive contact.

  Conventionally, as a conductive contact, a sleeve fitted and held on a pin board or the like of a circuit board inspection device, a pin main body slidably held in the sleeve, and an intermediate between the pin main body and the sleeve. 2. Description of the Related Art A conductive contact pin including a mounted compression spring is known (for example, see Patent Document 1). The conductive contact pin slides the pin body along the sleeve using the spring force of a compression spring that is mounted on the pin body, and presses the contact portion of the pin body against the contacted component.

  However, according to this conductive contact pin, there is a problem that dust is generated due to sliding of the pin body with respect to the sleeve. The generated dust adheres to the contacted parts and causes a problem. In particular, when the conductive contact pin is brought into contact with the contacted component from above, the generated dust falls and adheres to the contacted component as it is. For example, when this type of sliding conductive contact pin is used in the manufacturing process of a flat panel display or the like that requires a very clean environment, dust generated by sliding of the pin body adheres to the contacted part and becomes defective. Incidence is high and product yield is poor.

  Further, when the pin body is pressed against the contacted part, if the pressing direction of the pin body comes into contact with the contacted part from the inclined direction, a deviation occurs between the contact part of the pin body and the contacted part. This will damage the contacted part and cause dust generation. In this case, the contact area of the pin main body with respect to the contacted portion is reduced, and a stable contact state cannot be obtained. Furthermore, according to this type of conductive contact pin, dust is also generated by sliding between the compression spring and the pin body.

  As another conductive contact, a contact of the type in which the tip of a conductive leaf spring is brought into contact with a contacted part is known. In this type of contact, the leaf spring is elastically deformed, and the tip is pressed against the contacted portion by the spring force. The tip of the leaf spring is rounded so as not to damage the contacted part.

Since this type of leaf spring-shaped contact does not have a sliding mechanism above the contacted portion, there is no concern that dust will be generated by sliding between members. However, in this type of contact, since the elastic deformation of the leaf spring is used to ensure an appropriate contact pressure, the leaf spring is elastically deformed after the tip comes into contact with the contacted portion, and the tip of the leaf spring and the covered portion are covered. Deviation occurs between the contact part. When a deviation occurs between the two, as described above, the contacted portion is damaged and dust is generated.
Japanese Utility Model Laid-Open No. 2-129681 (Claim 1, Figure)

  The present invention has been made in view of the above points, and an object thereof is to provide a conductive contact capable of maintaining a clean environment and obtaining a stable contact state, and an inspection apparatus including the conductive contact. There is to do.

  In order to achieve the above object, the conductive contact of the present invention includes an elastically deformable contact portion in which a spring member having conductivity is formed into an annular shape, and a pressing mechanism that presses the contact portion against the contacted portion while elastically deforming the contact portion. And an elastically deformable attachment portion for attaching the contact portion.

  The conductive contact according to the present invention is formed by bonding an elastically deformable contact portion obtained by bending an elongated plate-like spring member having conductivity into a ring shape along the longitudinal direction, and both longitudinal ends of the spring member. And an elastically deformable attachment portion that attaches the contact portion to a pressing mechanism that presses the contact portion against the contacted portion while elastically deforming the contact portion.

  Further, the conductive contact of the present invention forms a contact portion by bending an elongated plate-like spring member having conductivity along the longitudinal direction, and forms attachment portions by connecting both longitudinal ends of the spring member. It is characterized by that.

  In the conductive contact according to the invention, the annular contact portion is attached to the pressing mechanism via the elastically deformable attachment portion, and is brought into press contact with the contacted portion by the operation of the pressing mechanism. At this time, the annular contact portion is elastically deformed to generate a pressing force and increase the contact area. At this time, the mounting portion elastically deforms and absorbs stress in a direction different from the pressing direction.

  Furthermore, the inspection apparatus according to the present invention is provided with an arm in which the conductive contact is attached to the distal end portion via the attachment portion and a base end portion of the arm, and the contact portion contacts the contacted portion. A rotating shaft positioned and arranged on substantially the same surface as the contact surface, and the arm is rotated about the rotating shaft to press-contact the contact portion with the contacted portion. It is characterized by energizing and inspecting the part.

  According to the inspection apparatus of the above invention, the conductive contact is attached to the tip of the arm, and the rotary shaft of the arm is positioned and arranged on the substantially same surface as the contact surface where the annular contact portion contacts the contacted portion. Thereby, a contact part can be press-contacted from the direction substantially orthogonal to a to-be-contacted part, and the shift | offset | difference between a contact part and a to-be-contacted part can be prevented.

  Since the conductive contact according to the present invention and the inspection apparatus provided with the conductive contact have the above-described configuration and operation, a clean environment can be maintained, and the contact between the contact and the contacted part. A stable contact state can be obtained.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

  FIG. 1 is a schematic front view of an inspection apparatus 10 provided with a conductive contact 1 (hereinafter simply referred to as contact 1) according to an embodiment of the present invention. FIG. 2 is a plan view of the inspection apparatus 10. Further, FIG. 3 is a perspective view for explaining a method for manufacturing the contact 1.

  As shown in FIG. 3, the contact 1 is formed by bending a conductive strip-like rectangular leaf spring 1 a (spring member) (FIG. 3 a) along its longitudinal direction (FIG. 3 b). Both ends in the longitudinal direction are bonded to each other with an adhesive or the like (FIGS. 3c and d). In the present embodiment, a plate spring 1a made of stainless steel having a thickness of about 0.02 mm is prepared, and both ends thereof are bonded to the same surface. In other words, the leaf spring 1a is curved to form a substantially annular elastically deformable contact portion 1b, and both ends of the leaf spring 1a are connected to form an elastically deformable attachment portion 1c. The contact 1 is characterized by being deformable in all directions.

As shown in FIGS. 1 and 2, the inspection apparatus 10 is configured by attaching the contact 1 having the above structure to a pressing mechanism 20.
The inspection apparatus 10 has a mounting table 4 for positioning and mounting a workpiece 2 having a contacted portion that is a target to which the contact 1 comes into contact. At one end of the mounting table 4, a positioning block 6 for fixing the workpiece 2 by contacting the end side of the workpiece 2 is fixed. The mounting surface 4a of the mounting table 4 forms a substantially horizontal surface, and the workpiece 2 is placed in a horizontal state and positioned at a predetermined position. In the following description, the horizontal direction in FIG. 1 along the mounting surface 4a of the mounting table 4 is referred to as a horizontal direction, and the direction perpendicular to the mounting surface 4a is referred to as a height direction.

  The pressing mechanism 20 has an arm 28 in which a first arm 22, a second arm 24, and a shaft 26 are combined. The contact 1 is attached to the tip of the first arm 22 via the attachment portion 1c. Specifically, the contact 1 is screwed and fixed to the distal end of the first arm 22, that is, the distal end of the arm 28 through a screw 31 through a hole (not shown) penetrating the attachment portion 1 c.

  The rear end of the first arm 22 is overlaid on the second arm 24 near the front end and fixed by a screw 32. By adjusting the fixing position by the screw 32, the length of the arm connecting the first arm 22 and the second arm 24 can be adjusted. That is, the lateral position of the contact 1 can be adjusted by adjusting the fixing position by the screw 32.

  The rear end of the second arm 24 is clamped to the middle of the shaft 26 extending in the height direction. Specifically, the rear end of the second arm 24 is clamped to the shaft 26 and tightened with a screw 33. By adjusting the clamp position along the shaft 26 of the second arm 24, the mounting height of the contact 1 can be adjusted.

  A lower end portion of the shaft 26, that is, a rear end portion of the arm 28 is fixed to a block 35 fixed to the rotating shaft 34. Both ends of the rotating shaft 34 are rotatably held by bearing holders 36. As the bearing holder 36, a ball bearing or the like that has little friction with the rotating shaft 34 and hardly generates dust due to sliding contact with the rotating shaft 34 is used.

  The bearing holder 36 is fixed to the frame 11 of the inspection apparatus 10 via an insulating support member 37. The contact 1, the first arm 22, the second arm 24, the shaft 26, the block 35, and the rotating shaft 34 are formed of a conductive material, and the wiring 38 is led out from one end of the rotating shaft 34. The voltage was applied to the work 2 through 1.

  The arm 28 to which the contact 1 is attached is attached to the frame 11 of the inspection apparatus 10 so that the center of the rotating shaft 34 is arranged in substantially the same plane as the contact surface 2a of the work 2 with which the contact portion 1b contacts. It is positioned and attached to it. As a result, when the arm 28 is rotated to bring the contact 1 into contact with the work 2, the pressing direction at the contact position of the contact 1 is substantially perpendicular to the contact surface 2a of the work 2, and the contact 1b is brought into contact. It is possible to prevent a lateral shift from occurring between the surface 2a.

  When the workpiece 2 is set in the inspection apparatus 10 having the above structure, as shown in FIG. 4, the arm 28 of the pressing mechanism 20 is rotated in the clockwise direction indicated by the arrow in the drawing, and the contact 1 is retracted upward. Then, the workpiece 2 is positioned on the mounting surface 4 a of the mounting table 4 by bringing the end of the workpiece 2 into contact with the positioning block 6. Thereafter, as shown in FIG. 5, the arm 28 is rotated in the counterclockwise direction so that the contact portion 1 b of the contact 1 is pressed against the contact surface 2 a of the work 2. At this time, the contact 1 is elastically deformed to generate a pressing force by the reaction force, thereby reliably contacting a predetermined position of the work 2 and enabling highly reliable inspection.

  Here, the effect | action of the contact 1 of this Embodiment mentioned above is demonstrated with reference to FIG. 6 thru | or FIG. FIG. 6 shows the moment when the contact 1 is brought into contact with the contact surface 2a of the workpiece 2, and FIG. 7 shows a state where the contact 1 is pressed against the contact surface 2a with a predetermined pressure. Further, FIG. 8 shows a diagram for explaining the behavior when the contact 1 comes into contact with the contact surface 2a from the inclined direction. For comparison, the case of a conventional conductive contact pin is also shown side by side. It is.

  As shown in FIG. 6, when the arm 28 is rotated and the contact portion 1b of the contact 1 is brought into contact with the contact surface 2a of the workpiece 2, the contact 1 is elastically deformed in both the contact portion 1b and the attachment portion 1c. Therefore, no pressing force is generated between the contact portion 1b and the contact surface 2a.

  When the arm 28 is further rotated counterclockwise from this state, the contact portion 1b of the contact 1 is mainly elastically deformed as shown in FIG. 7, and the contact portion 1b is pressed against the contact surface 2a by the reaction force. Is done. Thereby, while being able to obtain sufficient contact pressure between both, the contact area between both becomes large by elastic deformation of the contact part 1b, and a more reliable contact state can be obtained.

  At this time, since the rotation shaft 34 of the arm 28 is disposed on substantially the same surface as the contact surface 2a of the workpiece 2, the direction in which the contact portion 1b presses the contact surface 2a is substantially perpendicular to the contact surface 2a. Become. For this reason, when the contact portion 1b is pressed against the contact surface 2a in a normal state, the annular contact portion 1b is mainly elastically deformed, and the attachment portion 1c extending in the pressing direction is almost elastically deformed. In other words, no lateral displacement occurs between the contact portion 1b and the contact surface 2a.

  On the other hand, even if the contact 1 comes into contact with the contact surface 2a from the direction inclined by the angle θ as shown in FIG. It is possible to prevent the portion 1c from being elastically deformed comparatively and absorbing the stress in the lateral direction to cause a lateral displacement between the contact portion 1b and the contact surface 2a.

  In any case, when the above-described contact 1 of the present embodiment is employed, there is no risk of lateral displacement with respect to the contact surface 2a, no damage to the contact surface 2a, and generation of dust. There is no.

  On the other hand, for example, as shown in FIG. 8D, when the conventional conductive contact pin 41 made of a rigid body comes into contact with the contact surface 2a from the inclined direction, the case shown in FIG. As compared with the above, the contact area is significantly reduced (substantially point contact), and a sufficient contact state cannot be obtained. In addition, a lateral shift occurs between the tip of the contact pin 41 and the contact surface 2a, which damages the contact surface 2a and causes a serious problem of generating dust.

Next, a mechanism for absorbing the lateral displacement generated between the contact 1 and the workpiece 2 by the contact 1 of the present embodiment will be described in more detail with reference to FIGS. 9 and 10.
As shown in FIG. 9, it is assumed that the contact 1 is moved from the position indicated by the solid line in the drawing to the position indicated by the two-dot chain line in the drawing in order to press and contact the contact surface 2a (not shown). L is the distance from the center of the rotating shaft 34 to the contact position where the contact 1 comes into contact with the workpiece 2, and M is the distance from the position where the contact 1 is fixed to the tip of the arm 28 to the contact position. Assuming that the pushing amount of 1 is δ and the displacement amount of the contact 1 in the lateral direction is ε, the lateral displacement amount ε is
ε = L−√ (L ² −δ ² )
It becomes.

Also, as shown in FIG. 10, the pressing force of the contact 1 at that time is P, the force that the contact 1 tries to shift laterally is P ', and the frictional force between the contact portion 1b and the contact surface 2a Where F is the radius of the contact 1 in a state without elastic deformation, r is the radius of friction between the contact 1 and the contact surface 2a, and the lateral displacement force P ′ is
P ′ = 3εEI / M ³
And the pressing force P is
P = δEI / r ³ (π / 4-2 / π)
The frictional force F is
F = μP.

  And, when the contact 1 is brought into press contact with the contact surface 2a, a condition that does not cause a lateral shift between them is F> P ′. In other words, by setting each value of the above equations so as to satisfy F> P ′, it is possible to prevent a lateral shift between the contact 1 and the work 2.

[Example]
The distance L from the center of the rotating shaft 34 to the contact position is set to 65 [mm], the pushing amount δ of the contact 1 is set to 3 [mm], and the distance M from the attachment position of the contact 1 to the contact position is set. Is set to 30 [mm], and the radius of the contact 1 in a state where it is not elastically deformed (in this case, the contact 1 is regarded as a circle) is set to 7 [mm], and the contact 1 is pressed and contacted. When the lateral displacement amount ε with respect to the contact surface 2a was measured, ε was 0.069 [mm]. At this time, since the thickness of the leaf spring 1a of the contact 1 is set to 0.05 [mm] and the width is set to 5 [mm] and made of stainless steel, the force that the contact 1 tends to shift in the lateral direction. P ′ was 8.2 × 10 ⁻⁵ [N].

  On the other hand, the pressing force P with respect to the contact surface 2a of the contact 1 when the above-described conditions are satisfied is 0.63 [N] in the approximate calculation. Further, the frictional force F between the contact 1 and the contact surface 2a at this time was 0.31 [N] because the friction coefficient μ was set to 0.5.

  That is, when the set value of the present embodiment is adopted, the force P ′ that the contact 1 tries to shift in the lateral direction is much smaller than the frictional force F between the contact 1 and the contact surface 2a. When the child 1 is pressed against the contact surface 2a, no lateral displacement occurs between them.

  As described above, according to the present embodiment, by adopting the contact 1 having a simple structure in which the leaf spring 1a is annular and both ends are joined, there is a concern that dust may be generated due to sliding contact between members. Therefore, a clean environment can be maintained, a sufficient pressing force can be obtained by utilizing the elastic deformation of the contact 1, and a stable contact state can be obtained by expanding the contact area.

  Note that the present invention is not limited to the above-described embodiment as it is, and can be embodied by modifying the constituent elements without departing from the scope of the invention in the implementation stage. Various inventions can be formed by appropriately combining a plurality of constituent elements disclosed in the above-described embodiments. For example, you may delete some components from all the components shown by embodiment mentioned above.

  For example, in the above-described embodiment, the contact 1 having a structure in which the rectangular leaf spring 1a is annular and the same surface is joined is described. However, the present invention is not limited to this, and the annular contact 1b and the attachment 1c are separated. It may be a contact.

The front view which shows schematic structure of the inspection apparatus provided with the contactor which concerns on embodiment of this invention. The top view of the inspection apparatus of FIG. The figure for demonstrating the manufacturing process of the contactor integrated in the inspection apparatus of FIG. Operation | movement explanatory drawing for demonstrating the method to set a workpiece | work to the inspection apparatus of FIG. Operation | movement explanatory drawing which shows the state which made the contactor contact the workpiece | work set in FIG. The figure which shows the moment when the contactor was made to contact a workpiece | work. The figure which shows the state which made the contactor press-contact a workpiece | work and was elastically deformed. The figure which shows the behavior of a contact child in the case of making a contact child contact from the direction inclined with respect to the contact surface of a workpiece | work compared with the conventional conductive contact pin. The figure for demonstrating the mechanism which absorbs the horizontal shift between a contactor and a workpiece | work. The figure for demonstrating the mechanism which absorbs the horizontal shift between a contactor and a workpiece | work.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Contact, 1a ... Leaf spring, 1b ... Contact part, 1c ... Mounting part, 2 ... Workpiece, 2a ... Contact surface, 4 ... Mounting stand, 6 ... Positioning block, 10 ... Inspection apparatus, 11 ... Frame, 20 ... Pressing mechanism, 28... Arm, 34.

Claims (7)

An elastically deformable contact portion in which a spring member having conductivity is formed into a ring;
An elastically deformable attachment portion for attaching the contact portion to a pressing mechanism that presses against the contacted portion while elastically deforming the contact portion;
A conductive contact comprising:   2. The conductive contact according to claim 1, wherein the attachment portion is formed of a spring member having conductivity extending in a direction of pressing the contact portion against the contacted portion. An elastically deformable contact portion formed by bending an elongated plate-like spring member having conductivity into a ring shape along the longitudinal direction;
An elastically deformable mounting portion that is formed by bonding the longitudinal ends of the spring member and attaches the contact portion to a pressing mechanism that presses against the contacted portion while elastically deforming the contact portion;
A conductive contact comprising:   The conductive contact according to claim 3, wherein the spring member is an elongated strip-like rectangular leaf spring.   The conductive contact according to claim 4, wherein the attachment portion is formed by bonding the same surface of the leaf spring at both ends.   A conductive contact having a contact portion formed by bending an elongated plate-like spring member having conductivity along a longitudinal direction, and an attachment portion is formed by connecting both ends of the spring member in the longitudinal direction. An arm having the conductive contact according to any one of claims 1 to 5 attached to a tip portion via the attachment portion;
A rotating shaft provided near the base end of the arm, and the contact portion positioned and arranged on substantially the same surface as the contact surface that contacts the contacted portion;
An inspection apparatus comprising: rotating the arm around the rotation shaft to bring the contact portion into press contact with the contacted portion; and energizing and inspecting the contact portion and the contacted portion.

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