JP2005183002A - Magnetic head for perpendicular recording and magnetic disk apparatus mounting it - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a single magnetic pole head and a magnetic disk apparatus mounting it in which blot is less in recording and decrement of effective track width is prevented, in a single magnetic pole head for perpendicular magnetic recording. <P>SOLUTION: A main magnetic pole is constituted of at least two parts, in a first part 41, width is increased continuously from an upper stream side of a medium movement direction 44 toward a lower stream side, in a second part 42 is formed with the same width as width of the lower stream side of the medium movement direction of the first part, and width is made the same from the upper stream side of a medium movement direction toward the lower stream side. Decrement of a recording magnetic field at a track edge is prevented, as effective track width can be expanded suppressing recording blot, the magnetic disk apparatus of high track density can be provided. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a main magnetic pole structure of a magnetic head for perpendicular magnetic recording, a method for manufacturing the same, and a magnetic disk device on which the main magnetic pole structure is mounted.

In order to improve the surface recording density of the magnetic disk, it is conceivable to use a perpendicular magnetic recording system in place of the conventional in-plane magnetic recording system. Perpendicular magnetic recording has the advantage that the direction of recording magnetization formed on a recording medium is perpendicular to the film surface, and fine recording magnetization is thermally stable. As a magnetic head used for perpendicular magnetic recording, a recording / reproducing separation head can be considered, and a magnetoresistive head is used as the reproducing head, but it is necessary to use a single pole head composed of a main magnetic pole and an auxiliary magnetic pole as the recording head. . In the single-pole head, a magnetic field necessary for recording is generated from the main pole processed according to the recording track width. For this reason, the shape of the main pole on the head surface facing the recording medium greatly affects the recording magnetization distribution. For example, as shown in FIGS. 1A and 1B, when the shape of the main pole 12 is a rectangle defined by the track width and the pole thickness, the direction perpendicular to the recording track 11 and the track width direction of the main pole are formed. When the angle, the so-called yaw angle, is 0 °, recording is performed in accordance with the width of the side on the downstream side of the medium movement direction 15 of the main magnetic pole, and recording blur does not occur. In the case of the corner (b), the recording blur 13 corresponding to the side in the thickness direction of the main magnetic pole is greatly increased. As a method for preventing this, an attempt is made to make the shape of the main magnetic pole 12 trapezoidal as shown in FIGS. That is, the main pole has a structure in which the angle formed by the side on the downstream side in the medium moving direction 15 and the side intersecting with the side is an acute angle.
Regarding this structure, for example, Japanese Patent Application No. 2000-286842, Digests of PMRC 2000 (2000), pages 131 to 132 (Digests of PMRC 2000 (2000) pp 131-132). ).

Japanese Patent Application No. 2000-286842

Digests of PMRC 2000 (2000) pp. 131-132 (Digests of PMRC 2000 (2000) pp131-132)

The above prior art is designed to reduce recording blur when the yaw angle is applied, but the magnetic pole thickness decreases at the track edge, so the closer to the track edge, the higher the recording capability of the head. There is a problem that the effective track width becomes narrow. This hinders improvement in track density. An object of the present invention is to improve the track edge recording capability and prevent the effective track width from being reduced while suppressing recording blur. Another object of the present invention is to provide a magnetic disk drive having an improved track density using such a head.

In order to achieve the above object, the main magnetic pole of the present invention is such that the contour line shape on the air bearing surface is directed from the upstream side (ie, leading side) end in the medium movement direction to the downstream side (ie, trailing side) in the medium movement direction. A first portion whose length in the track width direction continuously increases, and a second portion located on the trailing side of the first portion, and further comprising: The length in the track width direction of the region in contact with the second portion is formed to be the same as or shorter than the length in the track width direction of the second portion at the trailing end.

  By using a magnetic head having such a contoured shape and having a main magnetic pole, it is possible to improve the recording capability of the track edge and prevent the effective track width from being reduced while suppressing the recording blur. Furthermore, a magnetic disk device with improved track density can be provided by mounting a magnetic head having the main magnetic pole of the present invention.

In the magnetic head for perpendicular magnetic recording, the present invention comprises at least two parts, the first part continuously increases in width from the upstream side to the downstream side in the medium moving direction, and the second part is the first part. As a result of using a main pole having a structure having the same width as the downstream width in the medium moving direction of the portion 1 and a substantially equal width from the upstream side to the downstream side in the medium moving direction, recording blur is suppressed. However, it is possible to increase the track edge recording capability and prevent the effective track width from decreasing. By increasing the saturation magnetic flux density of the film forming the second portion, the recording magnetic field gradient becomes steep and the S / N ratio can be improved. Alternatively, by increasing the saturation magnetic flux density of the film forming the first portion, the absolute value of the recording magnetic field is increased, and an effective recording capability can be obtained for a recording medium having a high coercive force.
According to the method for manufacturing a main magnetic pole of the present invention, there is little variation in track width when a large number of elements are manufactured, and the tolerance of track width can be reduced. Furthermore, it is possible to provide a magnetic disk device with an improved track density using such a head.

(Example 1)
FIG. 18 is a schematic diagram of a magnetic disk device as an example of an embodiment of the present invention. A slider 183 is fixed to the tip of the suspension arm 182 supported by the rotary actuator 181. Although not shown in the figure, a support called a gimbal is attached to the tip of the suspension, and the slider is fixed to the suspension via the gimbal. Information is recorded / reproduced on / from a perpendicular magnetic recording medium 186 rotating in the rotation direction 185 in the figure by a magnetic head element 184 provided at the end of the slider. In the magnetic head element portion 184, a single magnetic pole head was used as the recording head, and a magnetoresistive head was used as the reproducing head. As the rotary actuator 181 rotates, the head element 184 can be moved to a different radial position on the disk for positioning. At this time, concentric recording tracks 187 are formed on the medium. The difference between the radius of one recording track and the radius of the recording track adjacent thereto is the track pitch T. As shown in FIG. 2, the angle formed by the head and the recording track, that is, the yaw angle 28 varies depending on the radial position. The maximum yaw angle is determined by the distance between the center of the rotary actuator's rotation axis and the magnetic head, the distance between the center of the rotary actuator's rotation axis and the rotation center of the magnetic disk medium, and the recording area of the magnetic disk medium. It depends on the radius. 2A shows the case where the yaw angle is 0 °, and FIG. 2B shows the case where the yaw angle is not 0 °.
FIG. 3 is a schematic diagram showing the flow of magnetic flux between the head and the medium in the recording process of perpendicular magnetic recording. A recording head composed of a main magnetic pole 31, an auxiliary magnetic pole 32, and a coil 33, and a perpendicular recording medium having a recording layer 34 and a soft magnetic backing layer 35 are opposed to each other. When current is passed through the coil and excited, a magnetic field in the vertical direction is generated between the tip of the main pole and the soft magnetic backing layer, thereby recording on the recording layer of the perpendicular recording medium. The magnetic flux that flows to the soft magnetic underlayer returns to the auxiliary magnetic pole to create a magnetic circuit. At this time, the recording magnetization distribution is determined by the shape of the main magnetic pole, but it can be seen that recording is performed particularly by the end of the main magnetic pole on the downstream side with respect to the medium moving direction 36. Further, reproduction is performed by a magnetoresistive effect element 38 provided between the auxiliary magnetic pole 32 and the lower shield 37.
FIG. 4 shows the shape of the main pole of the magnetic head used in this embodiment on the surface facing the medium and a schematic diagram of the recording track. FIG. 4A shows a case where the yaw angle is 0 °, and FIG. 4B shows a case where the yaw angle is not 0 °.
As shown in FIG. 4, the main magnetic pole of the present invention has a first portion 41 in which the contour line shape on the air bearing surface continuously increases in length in the track width direction from the leading end to the trailing side. And a second portion 42 located on the trailing side of the first portion, and the length w in the track width direction of the region where the first portion and the second portion are in contact with each other is The second portion at the trailing side end is formed to be the same as or shorter than the length in the track width direction. The change rate (change rate) of the length in the track width direction of the second portion from the leading side to the trailing side is the change in the length in the track width direction from the leading side to the trailing side of the first portion. It is different from the rate.
The angle x formed by the perpendicular of the trailing edge of the second part and the side of the first part on the track edge side is orthogonal to the trailing edge of the second part and in the medium moving direction. It is better to satisfy x ≧ s with respect to the maximum value s of the angle (so-called yaw angle) formed by the direction to be performed. The thickness t of the second portion is the maximum value s of the yaw angle, and when the distance between the center of the recording track and the center of the track adjacent to this recording track is the track pitch T, t ≦ 0.25 · T / It is preferable to satisfy (sin (s)).
In this embodiment, the main magnetic pole is composed of two parts, and the width of the first part 41 corresponding to the upstream side in the medium moving direction 44 is continuously increased from the leading side to the trailing side. The thickness of the portion is 350 nm, and the width w on the trailing side is 250 nm. The second portion 42 corresponding to the downstream side in the medium moving direction 44 is formed with the same width w as the width of the first portion 41 on the trailing side of the medium, and the width is the same from the leading side toward the trailing side. That is, the length of the second portion 42 in the track width direction from the leading side to the trailing side does not change, and the change in the length of the first portion in the track width direction from the leading side to the trailing side does not change. It will be continuous. More specifically, in FIGS. 4A and 4B, in the first portion, the length in the track width direction continuously increases in the direction from the leading side to the trailing side. Therefore, the change rate of the length in the track width direction is a constant value that is not zero. On the other hand, since the length in the track width direction does not change in the second portion, the rate of change in the length in the track width direction of the second portion is zero. The angle x formed by the perpendicular of the trailing edge of the second portion and the side edge of the first portion on the track edge side is 10 °. The maximum yaw angle of the magnetic disk device used in this example was 10 °. This coincides with the angle x. The thickness t of the second part was 100 nm. This satisfies t ≦ 0.25 · T / (sin (s)) when the maximum value of the yaw angle s = 10 ° and the track pitch T = 300 nm.
The cross-sectional area of the main magnetic pole maintains the same cross-sectional area from the surface facing the medium to the position of the distance Ly in the direction toward the inside of the magnetic pole along the normal direction of this surface, and when the distance from the surface exceeds Ly, Increase cross-sectional area. At this time, if Ly of the film forming the first portion is Ly1 and Ly of the film forming the second portion is Ly2, it is preferable to satisfy Ly1 ≦ Ly2. In order to obtain a larger magnetic field strength, the saturation magnetic flux density Bs1 of the film forming the first portion is preferably set to be equal to or higher than the saturation magnetic flux density Bs2 of the film forming the second portion. In order to obtain a larger magnetic field gradient, Bs2 of the film forming the second portion is preferably set to be equal to or higher than Bs1 of the film forming the first portion.
In this embodiment, as shown in FIG. 5, the width w of the main magnetic pole is kept the same width from the surface facing the medium to the position of the distance Ly in the direction toward the inside of the magnetic pole along the normal direction of this surface. When the distance from the surface exceeds Ly, the width is increased. At this time, the first portion and the second portion have the same distance Ly, and Ly = 500 nm in this embodiment. The first portion and the second portion have the same saturation magnetic flux density Bs, and Bs = 1.6T. At this time, FIG. 6 shows the result of estimating the magnetic field strength distribution on a straight line along the track center at a distance of 30 nm from the head surface by computer simulation. For comparison, the contour shape on the air bearing surface of the main pole consists of one part whose width continuously increases from the leading side to the trailing side, the main pole thickness is 450 nm, and the trailing side The calculation was performed for a magnetic head having exactly the same structure except that the width of the magnetic head was 250 nm. Also in this case, the angle x formed by the perpendicular of the trailing edge and the side intersecting this edge is 10 °. The head of this example was about 5% stronger than the head of the comparative example. This was caused by the difference in the cross-sectional areas of the magnetic poles.
FIG. 7 shows the magnetic field strength distribution on a straight line 120 nm away from the track center, that is, at the track end. It can be seen that the magnetic field strength of the head of this example is increased by 18% compared to the comparative example. Since the magnetic field strength at the track edge is increased, the recording capability of the track edge is increased, and the effective track width can be increased. When the effective track width of these heads was estimated, it was 243 nm for the head of this example and 225 nm for the comparative example. By using the head of this example, the S / N ratio was improved by increasing the effective track width, and it was confirmed that the magnetic disk device of this example was operated at a predetermined track density.
(Example 2)
In the same magnetic disk device as in Example 1, the track pitch T = 230 nm and the maximum yaw angle s = 13 °. FIG. 8 shows a schematic diagram of the contour shape on the air bearing surface of the main pole of the single pole head used for this. The width on the trailing side of the first portion 81 whose width continuously increases from the leading side to the trailing side was 190 nm. The thickness of the first part was 350 nm. The width of the second part formed on the trailing side of the first part slightly increased from the leading side to the trailing side. That is, the width of the second portion on the leading side was 190 nm, and the width on the trailing side was 200 nm. Also in this case, the change in the track width direction length of the second portion from the leading side to the trailing side is not the same as the change in the track width direction length from the leading side to the trailing side of the first portion. It is continuous. The thickness t of the second portion 82 was 50 nm. The angle x formed between the perpendicular line of the trailing edge of the second part and the side edge of the first part on the track edge side was 15 °. In this case, the shape of the first portion 81 is almost a triangle. Regarding the length Ly having the same magnetic pole width w, Ly1 of the first portion was 220 nm and Ly2 of the second portion was 500 nm. In this embodiment, the saturation magnetic flux density Bs1 of the first portion film is 1.6T, and the Bs2 of the first portion film is 2.0T. For comparison, a head in which both the first part and the second part have Bs of 1.6T was also examined. At this time, FIG. 9 shows the result of estimating the magnetic field strength distribution on a straight line along the track center at a distance of 30 nm from the head surface by computer simulation. It can be seen that the magnetic field strength is approximately the same for both heads.
FIG. 10 plots the magnetic field strength on the horizontal axis and the magnetic field gradient at that time on the vertical axis in the magnetic field strength distribution on the downstream side in the medium moving direction. In this case, it can be seen that the absolute value of the magnetic field gradient is large in the head in which the Bs2 of the second portion film is 2.0T. By increasing the magnetic field gradient, it is possible to improve the S / N ratio during recording and reproduction.
In the S / N ratio when recording with two heads, when the second layer Bs2 is set to 2.0T, the Bs2 of the second part film is improved by 1.3 dB compared to the case where the Bs2 of the film is 1.6T. It was.
(Example 3)
In the same head as in Example 2, a magnetic head having the same configuration as in Example 2 was examined except that Bs1 of the first part film was 2.0T and Bs2 of the second part film was 1.6T. . FIG. 11 shows the result of estimating the magnetic field strength distribution on a straight line along the track center at a distance of 30 nm from the head surface by computer simulation. For comparison, the result of a head in which both Bs of the first part film and the second part film are 1.6 T is also shown. It can be seen that the magnetic field strength of the head having the Bs of 2.0T in the first portion is increased by about 15%. Thus, sufficient recording can be performed even on a recording medium having a large coercive force. The head of this example showed an overwrite value of 32 dB when recording on a medium having a coercive force of 4.7 kOe at a recording density of 88 kFCI and overwriting at a recording density of 700 kFCI.
Example 4
In the same head as in Example 1, the thickness t of the second portion was set to 100 nm, 200 nm, and 300 nm. In this embodiment, the maximum yaw angle s = 15 °. The angle x formed by the perpendicular line on the trailing edge of the second part and the side edge on the track edge side of the first part was 17 °. When the track pitch T = 300 nm, t ≦ 0.25 · T / (sin (s)) is satisfied when t is 100 nm and 200 nm. At this time, FIG. 12 shows the result of estimating the maximum value of the magnetic field strength on the straight line along the track center at a position of 30 nm from the head surface. The magnetic field strength increased as the thickness of the second part increased. Next, when the amount of recording blur of these heads was estimated, it was as shown in FIG. When the allowable amount of recording blur of the apparatus is 25% of the track pitch, the maximum allowable recording blur amount when the track pitch T = 300 nm is 75 nm. Therefore, when the maximum value of the yaw angle s = 15 °, the allowable maximum value of the thickness of the second portion is 0.25 · T / (sin (s)) = 290 nm. A head with t = 300 nm has a large recording bleeding amount and lacks an off-track margin, so that a track pitch T = 300 nm cannot be realized. That is, the effect of the present invention is effective when t ≦ 0.25 · T / (sin (s)) is satisfied.
(Example 5)
FIG. 14 shows the shape of the main pole of the magnetic head used in this embodiment on the surface facing the medium. The main magnetic pole is composed of three parts, and the width of the first part 141 that is the closest to the leading side continuously increases from the leading side to the trailing side. The thickness of the first part was 350 nm. The width of the first part on the trailing side is 190 nm.
The second portion 142 formed on the trailing side of the first portion has a width on the leading side that is the same as the width on the trailing side of the first portion 141 and is directed from the leading side to the trailing side. The width was slightly increased. The thickness t2 of the second part was 50 nm. Further, the third portion 143 corresponding to the trailing side of the second portion was formed with the same width as the trailing side width of the second portion 142, and the width was the same from the leading side toward the trailing side. This width was 200 nm. The thickness t3 of the third part was 50 nm. In this case, the change in the length in the track width direction from the leading side to the trailing side is discontinuous at the portion where the first portion and the second portion are in contact with each other and the portion where the second portion and the third portion are in contact with each other. It is. The angle x formed by the perpendicular to the trailing edge of the third portion and the side edge of the first portion on the track edge side is 15 °. In this case, when the maximum value s of the yaw angle s = 13 °, the track width w of the third portion is 200 nm, and the track pitch T is 230 nm, the total thickness t of the second portion and the third portion is t. ′ Satisfies t ′ ≦ 0.25 · T / (sin (s)).
In the present embodiment, Ly1 = Ly2 = Ly3 = 500 nm, where Ly of the first part is Ly1, Ly of the second part is Ly2, and Ly of the third part is Ly3. The saturation magnetic flux density Bs of the first part film and the Bs of the second part film were the same, 1.8T, and the Bs of the third part film was 2.0T. The recording blur amount of this head was as small as about 18 nm, and the S / N ratio was further improved by 0.7 dB compared to the head of Example 2.
(Example 6)
The method of manufacturing the main magnetic pole as described in Examples 1 to 5 includes a step of forming a resist pattern on the inorganic insulating film, and anisotropic etching of the inorganic insulating film using the resist pattern as a mask to form a sidewall on the film surface. Forming a groove perpendicular to the substrate, forming a groove whose sidewall is inclined by taper etching, removing the resist pattern, and forming a magnetic film on the inorganic insulating film including the groove; Then, a step of planarizing the magnetic film by chemical mechanical polishing (CMP) or etching is sequentially performed.
Further, in the planarization step, after the magnetic film is removed from the inorganic insulating film until it is depressed, another step of forming another magnetic film and a step of planarizing the upper surface of the magnetic film may be further sequentially performed. . In another method, a step of forming a second inorganic insulating film made of another material on the first inorganic insulating film, a step of forming a resist pattern on the second inorganic insulating film, and the resist Using the pattern as a mask, anisotropically etching the second inorganic insulating film to form a groove whose side wall is perpendicular to the film surface, and forming a groove whose side wall is inclined by taper etching the first inorganic insulating film A step of removing a resist pattern, a step of forming a magnetic film on the inorganic insulating film including the groove, and a magnetic film is formed on the inorganic insulating film by chemical mechanical polishing (CMP) or etching. A step of removing the concave portion, a step of forming another magnetic film, and a step of flattening the upper surface of the magnetic film are sequentially performed.
FIG. 15 shows a schematic diagram of the manufacturing process of the main pole of the magnetic head of the present invention (however, the magnification of the drawing is not uniform). The reproducing head part is omitted. (B) shows a state where a resist pattern 152 is formed on the inorganic insulating film 151 of (a). Conventionally used Al2O3 is used for the inorganic insulating film, but SiC, AlN, Ta2O5, TiC, TiO2, SiO2 or the like can also be used. The resist pattern was exposed using a KrF excimer laser stepper, and a positive resist TDUR-P201 manufactured by Tokyo Ohka Kogyo Co., Ltd. was used as the resist. When a resist film thickness of 0.7 μm was used, 0.2 μm could be resolved. (C) shows the anisotropic etching of the inorganic insulating film using this resist pattern as a mask.
When Al 2 O 3 is used, BCl 3 or a mixed gas of BCl 3 and Cl 2 or BCl 3 and Ar may be used as an etching gas. In addition, when AlN is used, the above chlorine-based gas is preferable. However, when Ta2O5, TiC, TiO2, SiO2, SiC, etc., which are easy to etch, are used, fluorine-based CHF3, CF4, SF6, C4F8, etc. are used. be able to. The etching depth was 0.2 μm. (D) Subsequently, the etching conditions are changed, and taper etching is performed. When etching Al ₂ O ₃ , for example, BCl ₃ added with CHF ₃ can be used.
A portion where the resist is removed after the etching is shown in FIG. (F) Next, the magnetic film 153 is formed. When the plating method is used, electroplating is performed after forming the plating base film. As the magnetic material, CoNiFe, FeNi, CoFeCu, FeCo or the like can be used. Although not shown here, in the post-plating base film post-process, a CMP stopper film can be provided when CMP is used for planarization, and an etching stopper can be provided when etching is performed. In the planarization step, if the controllability of the film thickness is sufficient, the step of forming the stopper film can be omitted.
As a stopper film for CMP, a single layer film such as C, Ta, Mo, Nb, W, Cr, or an alloy film laminated film can be used. This time, C sputtered one was used. Since C is chemically stable, it is not chemically polished, and when mechanically polished, the color of the polishing waste liquid is black, so that the end point of polishing is easy to detect, and the film thickness of the main pole Controllability is improved.
As an etching stopper film, noble metals can be used because they are not reactively etched, and Au, Pt, Pd, Ru, Rh, Cu, Ag, Tc, Re, Os, Ir single layer film, laminated film or alloy film can be used. Good. In addition, Cr, Ni, etc. can be used because they are not reactively etched. These can all be formed by sputtering. Next, the place where the magnetic film is formed is shown in FIG. The formation method may be either plating or sputtering. In the case of electrolytic plating, it is necessary to plate after forming a base film for plating. In the case of the sputtering method, since the aspect ratio of the groove formed in the steps c, d, and e is large, voids are formed in the magnetic film by using a method having good directivity, for example, long throw sputtering, collimation sputtering, or the like. It is necessary not to form. When the electrolytic plating method is used, Fe ₅₅ Ni _{45 having} a saturation magnetic flux density of 1.6T or CoNiFe having a saturation magnetic flux density of 2.2T can be used.
The plating base film may be a magnetic film having the same composition as the plating film or a non-magnetic film. (G) shows a state where the top surface of the magnetic film is planarized to form the main magnetic pole 154. If the polishing method such as CMP is used, the planarization can be controlled by stopping the polishing with a stopper film, so that the film thickness can be controlled and the upper surface can be completely flattened. The following planarization was possible. At this time, the track width was 0.2 μm, which is the same as the resist pattern in the step (b), and the taper angle of the main magnetic pole lower side surface was 10 ° as formed in the step (d). If etching is used in this planarization step, a resist is once applied, and etching is performed using a chlorine-based gas, for example, BCl ₃ or a mixed gas of BCl ₃ and Cl ₂ (that is, so-called etching). Flattening can be performed. In this case, a stopper film made of the above-mentioned noble metals or a stopper film made of Ni, Cr or the like is effective. According to the manufacturing method in the present embodiment, there is an advantage that there is little variation in track width when a large number of elements are manufactured, and the manufacturing accuracy of the track width is increased.
As described above, according to the method for manufacturing a main magnetic pole of the present invention, there is little variation in track width when a large number of elements are manufactured, and the tolerance of track width can be reduced.
(Example 7)
In the present embodiment, the main magnetic pole manufacturing process of the present invention is the same as that of the sixth embodiment, and (a) to (f) are the same as FIG. 15 as shown in FIG. In the step (g), for example, the acidity of the CMP slurry is increased so that the magnetic film is in a recessed shape, that is, a dishing state with respect to the inorganic insulating film. In the step (h), the magnetic film 164 is formed by sputtering, for example. At this time, for example, a material such as FeCo having a saturation magnetic flux density Bs of 2.4 T can be used. By using a material with high saturation density on the upper surface, the magnetic field gradient from the head can be made steeper, and the recording characteristics can be improved. In the step (i), the top surface of the magnetic film was flattened using a slurry different from that in (g), and the main magnetic pole 165 was obtained.
(Example 8)
FIG. 17 shows a schematic diagram of the manufacturing process of the main magnetic pole of the present invention (however, the magnification of the drawing is not uniform). The reproducing head part is omitted. FIG. 4A shows a case where an inorganic insulating film 176 made of another material is formed on the inorganic insulating film 171. When Al ₂ O ₃ is used for the inorganic insulating film 171, for example, SiO ₂ can be used for the inorganic insulating film 176. (B) The resist pattern 172 is formed thereon. (C) shows a state where the inorganic insulating film 176 is etched using the resist pattern 172 as a mask. When SiO ₂ is used for the inorganic insulating film 176, for example, CHF ₃ , CF ₄ or the like can be used as an etching gas, and the side surface shape can be formed vertically. In (d), the inorganic insulating film 171 is etched using, for example, BCl ₃ gas. In this step, the side surface is etched into a tapered shape. Since the inorganic insulating film 171 and the inorganic insulating film 176 are made of different materials, the shape can be easily controlled by changing the etching conditions. In (e), the resist pattern 172 is removed. In (f), the magnetic film 173 is formed. FIG. 16G shows a state where the magnetic film is processed so as to be dished from the inorganic insulating film 176 as in FIG. In (h), the magnetic film 174 is formed. In (i), the upper surface of the magnetic film 174 was flattened to obtain the main magnetic pole 175.
Example 9
The ninth embodiment of the present invention
Forming a resist pattern on the inorganic insulating film; performing anisotropic etching on the inorganic insulating film using the resist pattern as a mask to form a groove whose side wall is substantially perpendicular to the film surface; and side wall by taper etching. Forming a groove having a slope, removing the resist pattern, forming a magnetic film on the inorganic insulating film including the groove, and chemical mechanical polishing (CMP) or etching the magnetic film. A method of manufacturing a single pole head is characterized in that a main pole is formed by sequentially performing a flattening step.

  A step of forming a resist pattern on the inorganic insulating film; a step of anisotropically etching the inorganic insulating film by using the resist pattern as a mask to form a groove whose side wall is substantially perpendicular to the film surface; and taper etching. Forming a groove having an inclined sidewall, removing the resist pattern, forming a first magnetic film on the inorganic insulating film including the groove, and chemically treating the first magnetic film. Removing the first magnetic film from the inorganic insulating film until it is depressed by mechanical polishing (CMP) or etching; and forming a second on the inorganic insulating film including a groove having the first magnetic film. A main pole is formed by sequentially performing a step of forming a magnetic film and a step of flattening the upper surface of the second magnetic film. There is the law.

Alternatively, a step of forming a second inorganic insulating film made of another material on the first inorganic insulating film, a step of forming a resist pattern on the second inorganic insulating film, and a mask of the resist pattern A step of anisotropically etching the second inorganic insulating film to form a groove whose sidewall is substantially perpendicular to the film surface, and a groove having a sidewall inclined by taper etching of the first inorganic insulating film. A step of removing the resist pattern, a step of forming a first magnetic film on the inorganic insulating film including the grooves, and the first magnetic film by chemical mechanical polishing (CMP) or etching. A step of removing the first magnetic film from the insulative state with respect to the inorganic insulating film; and a step of forming a second magnetic film on the inorganic insulating film including the groove having the first magnetic film. When a method for producing a single-pole head and forming a main pole by sequentially performing the step of planarizing the second magnetic film top surface, in.
(Example 10)
The tenth embodiment of the present invention
A magnetic head having a recording element having a main magnetic pole; a reproducing element; and a slider having an air inflow end and an air outflow end. The main magnetic pole has a first portion and the first portion. A second portion provided on the air outflow end side of the magnetic head, the thickness of the second portion being smaller than the thickness of the first portion, and the contour shape of the first portion on the air bearing surface of the magnetic head Is a shape in which the length in the track width direction continuously increases from the air inflow end side to the air outflow end side.

A schematic diagram of the head slider is shown in FIG. The magnetic head slider 191 includes rails 196 and 197 on the air bearing surface 192 and can be floated by an air flow from the air inflow end 193 to the air outflow end 194 when disposed on the rotating perpendicular magnetic recording medium. A magnetic head element portion 195 is provided at the end on the air outflow end side, and an electrode 198 for inputting / outputting information to / from the magnetic head element is provided.
(Example 11)
The eleventh embodiment of the present invention is
A magnetic head having a recording element having a main magnetic pole, a reproducing element, a slider having an air inflow end and an air outflow end, a suspension supporting the slider, a rotary actuator supporting the suspension, A magnetic disk medium provided opposite to the magnetic head, wherein the main pole includes a first portion and a second portion provided on the air outflow end side of the first portion, The thickness of the second part is smaller than the thickness of the first part, and the contour shape of the first part on the air bearing surface of the magnetic head is such that the length in the track width direction is from the air inflow end side to the air outflow end side. A head disk assembly having a shape that continuously increases toward the side.
20. The head disk assembly according to claim 19, wherein the magnetic disk medium comprises a plurality of recording tracks, the thickness of the second portion of the main pole is t, the maximum value of the yaw angle is s, When the distance between the center of an arbitrary track of the recording tracks and the center of the track adjacent to the recording track is a track pitch T, t ≦ 0.25 · T / (sin (s)) is satisfied. The head disk assembly is characterized.

It is a schematic diagram showing a conventional main magnetic pole shape and a recording track. 1 is a schematic diagram of a magnetic disk device according to an embodiment of the present invention. It is a schematic diagram which shows the flow of the magnetic flux in the recording process of perpendicular magnetic recording. It is a schematic diagram showing a main magnetic pole shape and a recording track of one embodiment of the present invention. It is the figure which showed the main magnetic pole structure of one Example of this invention. It is the figure which showed magnetic field strength distribution of one Example of this invention. It is the figure which showed magnetic field strength distribution of one Example of this invention. It is a schematic diagram which shows the main magnetic pole structure of one Example of this invention. It is the figure which showed magnetic field strength distribution of one Example of this invention. It is a figure which shows the change of the magnetic field gradient with respect to the magnetic field intensity of one Example of this invention. It is the figure which showed magnetic field strength distribution of one Example of this invention. It is the figure which showed the film thickness dependence of the magnetic field intensity of one Example of this invention. It is the figure which showed the film thickness dependence of the amount of recording bleeding of one Example of this invention. It is a schematic diagram which shows the main magnetic pole structure of one Example of this invention. It is the schematic which shows the manufacturing process of one Example of this invention. It is the schematic which shows the manufacturing process of one Example of this invention. It is the schematic which shows the manufacturing process of one Example of this invention. 1 is a schematic diagram of a magnetic disk device according to an embodiment of the present invention. It is the schematic of the magnetic head slider of one Example of this invention.

Explanation of symbols

11, 26, 43, 187 ... recording track, 12, 154, 165, 175 ... main magnetic pole, 13 ... recording blur, 14 ... insufficient recording area, 15, 36, 44 ... medium moving direction, 21, 181 ... rotary actuator , 22, 182 ... suspension arm, 23, 183 ... slider, 24, 184, 195 ... magnetic head element section, 25, 186 ... perpendicular magnetic recording medium, 27, 185 ... disk rotation direction, 28 ... yaw angle, 31 ... main Magnetic pole, 32 ... auxiliary magnetic pole, 33 ... coil, 34 ... recording layer, 35 ... soft magnetic backing layer, 37 ... lower shield, 38 ... magnetoresistance effect element, 41, 81, 141 ... first part of main magnetic pole, 42 , 82, 142 ... second part of the main magnetic pole, 83, 144 ... medium moving direction when the yaw angle is 0 °, 143 ... third part of the main magnetic pole, 151, 161 ... inorganic Edge film, 152, 162, 172 ... resist, 153 ... magnetic film, 163,173 ... first magnetic film, 164,174 ... second magnetic film, 171 ... first inorganic insulating film, 176 ... second film Inorganic insulating film, 191 ... magnetic head slider, 192 ... air bearing surface, 193 ... air inflow end, 194 ... air outflow end, 196, 197 ... rail, 198 ... electrode.

Claims (15)

In a magnetic head having at least a main magnetic pole,
The contour shape of the main pole on the air bearing surface of the magnetic head is
A first portion whose length in the track width direction continuously increases from the leading end to the trailing side, and a second portion located on the trailing side of the first portion,
The length in the track width direction of the trailing side end portion of the second portion is not less than the length in the track width direction at the portion where the first portion and the second portion are in contact with each other,
The rate of change in the length of the second portion in the track width direction with respect to the direction from the leading side to the trailing side is different from the rate of increase in the length of the first portion in the track width direction. The magnetic head is characterized in that the length of the portion in the track running direction is smaller than the length of the first portion in the track running direction. In a magnetic head having at least a main magnetic pole,
The contour shape of the main pole on the air bearing surface of the magnetic head includes a first portion in which the length in the track width direction continuously increases from the leading end portion toward the trailing side, and the tray of the first portion. A second portion located on the ring side,
The length in the track width direction of the trailing side end portion of the second portion is equal to or longer than the length in the track width direction at the portion where the first portion and the second portion are in contact with each other. The length in the truck running direction is smaller than the length in the truck running direction of the first part,
The rate of change of the length in the track width direction at the portion where the first portion and the second portion are in contact differs from the rate of increase in the length of the first portion in the track width direction. head.   2. The magnetic head according to claim 1, wherein a length in a track width direction of an end portion on a trailing side of the second portion is a length in a track width direction at a portion where the first portion and the second portion are in contact with each other. Magnetic head characterized by being equal. 2. The magnetic head according to claim 1, wherein the first portion is a first magnetic film different from the second portion, and the second portion is formed on a trailing side of the first magnetic film. A magnetic head, characterized by being a second magnetic film formed.   4. The magnetic head according to claim 3, wherein the first magnetic film has a first position on the inner side of the main pole where the length in the track width direction is larger than the length in the track width direction on the air bearing surface of the magnetic head. The second magnetic film has a second position on the inner side of the main pole where the length in the track width direction is longer than the length in the track width direction on the air bearing surface. And the second position are different, the distance between the first position and the air bearing surface side end of the first magnetic film is Ly1, and the second position and the air bearing surface side of the second magnetic film are A magnetic head characterized in that Ly2> Ly1, where Ly2 is a distance from the end.   5. The magnetic head according to claim 4, wherein a saturation magnetic flux density Bs2 of a material constituting the second magnetic film is larger than a saturation magnetic flux density Bs1 of a material constituting the first magnetic film. head.   5. The magnetic head according to claim 4, wherein a saturation magnetic flux density Bs1 of a material constituting the first magnetic film is larger than a saturation magnetic flux density Bs2 of a material constituting the second magnetic film. head. In a magnetic disk device comprising at least a magnetic head having a main magnetic pole, a magnetic disk medium, and means for rotationally driving the magnetic disk medium in a fixed direction.
The contour of the main pole on the air bearing surface of the magnetic head has a first portion in which the length in the track width direction continuously increases from the upstream side to the downstream side in the magnetic disk rotation direction, and the first portion A second portion located downstream of the portion with respect to the disk rotation direction,
The length in the track width direction of the trailing side end portion of the second portion is not less than the length in the track width direction at the portion where the first portion and the second portion are in contact with each other,
The change rate of the length of the second portion in the track width direction with respect to the direction from the upstream side to the downstream side in the rotation direction of the magnetic disk medium is a direction from the upstream side to the downstream side in the rotation direction of the magnetic disk medium. Unlike the rate of change of the length of the first portion in the track width direction, the length of the second portion in the track running direction is smaller than the length of the first portion in the track running direction. Magnetic disk unit.   9. The magnetic disk apparatus according to claim 8, wherein the length in the track width direction of the end portion on the downstream side in the rotation direction of the magnetic disk of the second portion is the track width at the portion where the first portion and the second portion are in contact with each other. A magnetic disk drive characterized by being equal in length to a direction. 9. The magnetic disk device according to claim 8, wherein the first part is a first magnetic film different from the second part, and the second part is a rotation direction of the magnetic disk of the first magnetic film. A magnetic disk device, wherein the second magnetic film is formed on the downstream side of the magnetic disk device. 9. The magnetic disk device according to claim 8, further comprising: a magnetic head slider on which the magnetic head is mounted; and a rotary actuator that positions the magnetic head slider at an arbitrary position on the magnetic disk medium;
The contour shape of the first portion on the air bearing surface is such that the length in the track width direction continuously increases from the upstream side to the downstream side in the magnetic disk rotation direction. An angle x formed by a perpendicular to a side on the downstream side in the disk rotation direction and a side on the track width direction side of the first portion is equal to or greater than a maximum yaw angle s.   9. The magnetic disk apparatus according to claim 8, wherein the magnetic disk medium includes a plurality of recording tracks, the film thickness of the second portion is t, the maximum value of the yaw angle is s, of the plurality of recording tracks. A magnetic disk characterized by satisfying t ≦ 0.25 · T / (sin (s)), where a track pitch T is an interval between the center of an arbitrary track and the center of a track adjacent to the recording track. apparatus. 11. The magnetic disk device according to claim 10, wherein the first magnetic film and the second magnetic film have a position where the length in the track width direction is larger than the length in the track width direction in the air bearing surface with respect to the air bearing surface. The distance between the position and the air bearing surface side end of the first magnetic film is Ly1, and the position and the air bearing surface side edge of the second magnetic film A magnetic disk drive characterized in that Ly2> Ly1 when the distance is Ly2.     11. The magnetic disk drive according to claim 10, wherein a saturation magnetic flux density Bs2 of a material constituting the second magnetic film is larger than a saturation magnetic flux density Bs1 of a material constituting the first magnetic film. Magnetic disk unit. 11. The magnetic disk drive according to claim 10, wherein a saturation magnetic flux density Bs1 of a material constituting the first magnetic film is larger than a saturation magnetic flux density Bs2 of a material constituting the second magnetic film. Magnetic disk unit.

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