JP2006190474A - Manufacturing method of magnetic head for perpendicular recording - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve magnetic field gradient in a part recording a boundary of a bit cell in a recording layer in a profile of a head magnetic field perpendicular component by preventing influence of a leak magnetic field from the parts by considering a convergence part and a convergence position of a single magnetic pole head main magnetic pole for perpendicular recording, and a front plane and a side plane of an arrangement of a main magnetic pole. <P>SOLUTION: A convergence part 26 and a convergence position 39 of a main magnetic pole are arranged in a reading side 25 more than a perpendicular plane 36 being parallel to a track width direction including a trailing end part of a main magnetic pole floating plane, further, a front plane of the trailing side of the main magnetic pole is arranged at the reading side more than the perpendicular plane, and a main magnetic pole side plane crossing to the track width direction of the main magnetic pole is arranged at a track center side more than the perpendicular plane being vertical to the track width including the track end part in an end part of the trailing side of the main magnetic pole floating plane. The magnetic field gradient of the magnetic field perpendicular component in the trailing side of the main magnetic pole and the track both end part side can be made abrupt and higher plane recording density can be realized. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

The present invention relates to a perpendicular recording magnetic head and a magnetic disk drive equipped with the perpendicular recording magnetic head.

In order to increase the recording capacity per unit area of the magnetic disk, it is necessary to reduce the bit length and the track width to reduce the size of the 1-bit cell that is the minimum unit of recorded information. However, in the current in-plane recording system, there is a problem that the recorded signal disappears due to the influence of thermal fluctuation when the bit cell is made small. In order to solve this problem, the perpendicular recording system records signal information by magnetizing a medium in a perpendicular direction.

  In a magnetic disk device, signal information is recorded on a medium by a magnetic head. In the perpendicular recording method, there are a method using a two-layer perpendicular medium having a soft magnetic backing layer and a method using a single-layer perpendicular medium having no backing layer. In a structure in which single magnetic pole heads having the above are combined, a stronger magnetic field can be applied to the medium.

  In the single-pole head, when the cross-sectional area of the main pole is narrowed to the tip, the magnetic flux surrounding the pole is concentrated on the tip of the main pole, and a strong magnetic field can be locally applied to the medium. If a pole tip having a high magnetic permeability is disposed at the tip of the main pole, the flow of magnetic flux at the tip of the main pole can be made smooth, and further, the processing dimensional accuracy of the tip of the main pole can be improved.

  When the main magnetic pole has a pole tip, in the example described in Japanese Patent Application No. 11-275188, the arrangement of the main magnetic pole having the pole tip and the pole tip and the arrangement of the pole tip and the auxiliary magnetic pole are specified. It has been shown that the magnetic field gradient of the head magnetic field vertical component on the ring side can be improved. This avoids the influence of the magnetic field from the surface facing the medium of the main magnetic pole having the pole tip, and no consideration is given to the increase in leakage magnetic flux by narrowing the magnetic flux in the main magnetic pole or pole tip.

Japanese Patent Application No. 11-275188

In the prior art described above, the leakage magnetic field is localized due to the effect of abruptly reducing the magnetic flux at the narrowed portion of the main magnetic pole and pole tip, particularly at the narrowed position where the cross-sectional area of the main magnetic pole is the smallest among the narrowed portions. There is a problem that the magnetic field gradient in the vertical component profile of the head magnetic field is deteriorated. In addition, the leakage magnetic field from the front and side surfaces of the main pole and pole tip similarly has a problem of lowering the magnetic field gradient. In the distribution of the vertical component of the magnetic field of the head magnetic field that records the boundary of the bit cell, the present invention takes into consideration the narrowing portion and the position of the main magnetic pole and pole tip, and the arrangement of the front and side surfaces of the main magnetic pole and pole tip. Improve the magnetic field gradient, that is, the magnetic field gradient on the trailing side of the magnetic field vertical component profile in the head running direction and the magnetic field gradient in the vicinity of both ends of the track in the track width direction. With the goal.

According to the present invention, the narrowed portion or the entire or narrowed portion of the main magnetic pole or pole tip is arranged on the leading side with respect to the vertical plane including the trailing end portion of the main magnetic pole air bearing surface. The magnetic field gradient on the trailing side of the track and further the magnetic field gradient in the vicinity of both ends of the track width are improved. In addition, by arranging the front and side surfaces of the main pole and pole tip closer to the center of the main pole, the magnetic field gradient on the trailing side of the head magnetic field vertical component profile and the magnetic field gradient near both ends of the track width are improved.

According to the present invention, it is possible to reduce the influence of leakage magnetic flux from the narrowing portion and the throttle position of the main pole, the front surface and the side surface of the main pole, and the magnetic field vertical component gradient on the trailing side and both ends of the main pole. It is possible to make it steep, and there is an effect that a higher surface recording density can be realized.

Example 1
Embodiments of the present invention will be described below with reference to the drawings. FIG. 2 shows a schematic diagram of the concept of a magnetic disk device using the present invention (however, the magnification of the drawing is not uniform). The magnetic disk device records and reproduces a magnetization signal on a magnetic disk 11 by a magnetic head 14 attached to a slider 13 fixed to the tip of a suspension arm 12. The direction of the air inflow end 31 of the slider 13 is called the leading side, the direction of the air outflow end 30 is called the trailing side, and the direction defining the geometric track width 5 with respect to the disk rotation direction 17 is called the track width direction 6. . Although not shown, a gimbal is formed at the tip of the suspension arm 12. FIG. 3 shows a schematic diagram of a magnetic disk device.

  FIG. 4 shows a schematic diagram of perpendicular recording. The downstream side in the rotation direction of the perpendicular magnetic recording medium is the trailing side, and the upstream side is the leading side. The magnetic flux 33 emitted from the main magnetic pole 1 passes through the recording layer 19 and the backing layer 20 to form a magnetic circuit that enters the auxiliary magnetic pole 3. The cross-sectional area of the main magnetic pole 1 is made smaller than that of the auxiliary magnetic pole 3, the magnetic flux is concentrated on the tip of the main magnetic pole, and the magnetization pattern is recorded in the portion immediately below the main magnetic pole of the recording layer.

  Schematic diagrams of a head magnetic field vertical component profile 35 in the magnetic disk rotation direction 17 and a head magnetic field vertical component profile 35 in the track width direction 6 by a combination of a double-layer perpendicular medium having a backing layer and a single pole head are shown in FIG. Shown in a) and (b).

  6A and 6B are schematic views of the flow of magnetic flux in the disk rotation direction 17 and the track width direction 6 near the front end of the main magnetic pole, respectively. In the vicinity of the tip of the main magnetic pole, there is a structure in which the area of the cross section parallel to the air bearing surface 28 of the main magnetic pole is reduced, that is, the narrowed portion 26 and the portion where the degree of reduction in the area of the cross section changes, that is, the throttle position 39. Have. The magnetic field profile as shown in FIG. 5 is a magnetic flux that flows from the air bearing surface 28 of the main pole 1 to the recording layer 19 and a magnetic flux that leaks from the narrowed portion 26 and the throttle position 39 of the main pole, and the front surface 40 and the side surface 29 of the main pole. That is, it is formed by the sum of the leakage magnetic flux 34.

  1 and 7 are schematic views of the structure near the tip of the main pole in the embodiment of the present invention. As shown in FIG. 7, the main pole 1 is exposed to the air bearing surface of the main pole to define the track width, that is, the portion where the cross-sectional area becomes smaller as the pole tip 27 and the air bearing surface 28 are approached, In other words, it has a narrowed portion 26 and a portion where the degree of reduction in the cross-sectional area changes, that is, a throttle position 39. In the present invention, as shown in FIG. 1, the narrowed portion 26 and the throttle position 39 are arranged on the leading side 25 with respect to the pole tip 27.

  Using the result calculated by the three-dimensional integral element method, the head magnetic field vertical component profiles of the conventional type and this embodiment are compared. FIG. 8 shows a schematic diagram of a cross section near the tip of the main pole in the head structure used in the calculation. FIG. 8A shows the structure in the vicinity of the tip of the main pole in the conventional head. In FIG. 8B, the front side of the main pole on the trailing side of the main pole in FIG. 8A is inclined so that the narrowed portion 26 and the throttle position 39 of the main pole are aligned in the track width direction including the trailing end of the main pole air bearing surface. The structure of the present invention arranged on the leading side with respect to the parallel vertical plane is shown, and assumed to confirm the effect of the arrangement in the present invention. FIG. 8C shows the structure of the present invention in which the narrowing portion 26 and the throttling position 39 are further retracted and arranged closer to the leading side than the pole tip.

  FIG. 9 shows the distribution of magnetic flux density on the magnetic pole surface of the conventional head shown in FIG. A value obtained by tracing the vertical direction from the air bearing surface at the center of the front surface of the main magnetic pole and normalizing the magnetic flux density component perpendicular to the magnetic pole surface with the vertical component of the magnetic flux density near the center of the bottom surface of the main magnetic pole is indicated by a bold line. As a comparison, similarly, a normalized magnetic flux density component calculated by the finite element method is indicated by a thin line in a two-dimensional head that assumes an in-plane structure in the disk rotation direction and does not consider the narrowed portion and the throttle position. In a head without a narrowing part or a throttling position, the magnetic flux density decreases rapidly as it moves away from the main magnetic pole air bearing surface, but in a three-dimensional head structure, the magnetic flux density that leaks when the magnetic flux is narrowed does not decrease monotonously. There is no maximum near the aperture position. This narrowing increases the magnetic field strength, but on the other hand, the leakage magnetic flux from the vicinity of the throttling position causes a deterioration in the magnetic field gradient that cannot be seen in the throttling portion or the head without the throttling position. Here, the distribution of the magnetic flux density is shown for the magnetic pole surface on the trailing side and the leading side at the narrowed portion and the throttle position, but the same can be said for the magnetic pole surface that intersects the track width direction.

  FIG. 10 shows a normalized head magnetic field vertical component profile 35 in the disk rotation direction 17 at the center of the recording layer in the thickness direction and at the track center 7 in each structure of FIG. At this time, the magnetic spacing from the main pole air bearing surface to the surface of the recording layer 19 is 15 nm, the film thickness of the exposed portion of the main pole or pole tip on the air bearing surface is 400 nm, and the geometric track width. The saturation magnetic flux density of the main pole and pole tip is 1.8 T (tesla). Compared with the conventional type (A), in the structures (B) and (C) of the present invention, the magnetic field strength is reduced at the bottom of the trailing side. This is because the structure of the present invention reduces the influence of the leakage portion of the main magnetic pole, the position of the main magnetic pole, and the leakage magnetic flux from the front surface of the main magnetic pole.

Table 1 shows the trailing-side magnetic field gradient normalized by the maximum magnetic field strength of the head magnetic field vertical component profile 35 in the three structures of FIG. Considering the case of recording on a medium having a coercive force of 5 kOe, the magnetic field gradient of the trailing-side head magnetic field component at a magnetic field strength of 5 kOe is compared. In the structure of the present invention in FIG. In comparison, the normalized magnetic field gradient is improved in the order of (B) and (C). Further, the effect of the head magnetic field vertical component profile 35 on the recording / reproducing characteristics will be compared using the magnetization transition width. Table 1 shows the expected magnetization transition width when each magnetic field profile is assumed. Here, a medium having a coercive force of 5 kOe, a saturation magnetization of 250 emu / cm ³ , and a recording layer thickness of 20 nm was assumed. An outline of the recording / reproduction characteristic prediction tool corresponding to the perpendicular recording method used for the calculation of the magnetization transition width was published in the 23rd Annual Conference of the Japan Society of Applied Magnetics 5aB-6 (1999). As shown in FIG. 11, the magnetization transition width is a variable indicating a transition region of isolated magnetization transition, and it is assumed that a magnetization pattern representing signal information at a predetermined recording density is expressed by linear superposition of isolated magnetization transition. . In order to realize recording and reproduction within a predetermined error rate range, it is considered that the magnetization transition width needs to be equal to or less than the bit length. As shown in Table 1, compared with the conventional type (A), the present invention (B) reduces the magnetization transition width, and the linear recording density capable of recording / reproduction estimated that the magnetization transition width is about the same as the bit length is In terms of the number of magnetization transitions per inch, the improvement is about 100 kFCI (Flux Change per Inch). In the structure (C) of the present invention, since the maximum magnetic field strength is about 1 kOe lower than that in the conventional type (A), the magnetic field gradient before normalization is inferior to that in (B), and the estimated recording / reproduction is possible. The linear recording density is also inferior to that in (B), but (C) is the most effective structure in the normalized magnetic field gradient, and the same maximum magnetic field strength is obtained by fine adjustment of the coil current and the structure near the main pole. Under the conditions, the estimated recording / reproducing linear recording density can be expected more than (B).
In MKSA system units, 1 Oe = 79.6 A / m, 1 emu = 1.257 × 10 ^-7 Wb, 1 inch = 2.54 × 10 ^-2 m.

At the same time, according to the invention of FIG. 8, the narrowing portion 26 and the throttling position 39 are arranged on the leading side from the conventional type, so that the head magnetic field vertical component profile in the track width direction 6 near the trailing end of the main pole air bearing surface. Will be improved. FIG. 12 shows a head magnetic field vertical component profile 35 from the track center to the one-side track width direction at the center in the thickness direction of the recording layer immediately below the trailing end of the main pole air bearing surface. Compared with the conventional type (A), it can be seen that the magnetic field intensity at the bottom of the magnetic field profile is smaller in (B), and the influence of the leakage magnetic flux from the narrowed portion 26 and the throttle position 39 is It can also be reduced at the edge, increasing the magnetic field gradient and narrowing the transition region of magnetization. The vertical plane parallel to the track width direction including the leading end of the main pole air bearing surface as shown in FIG. 8C is further limited as compared with the structure of FIG. If it is arranged on the leading side, the magnetic field gradient immediately below the trailing end is further improved, and at the same time, the head magnetic field vertical component profile 35 in the track width direction is improved over the entire main pole air bearing surface.
(Example 2)
13 to 17 list examples of the embodiment of the present invention. FIG. 13 shows a structure when the main pole does not have a pole tip. In FIG. 13A, the trailing side main magnetic pole front surface that intersects the air bearing surface of the main magnetic pole is inclined so that the narrowing portion 26 and the constricting position 39 are included in the track width direction including the trailing end of the main magnetic pole air bearing surface. It is arrange | positioned rather than the vertical plane 36 parallel to the reading side. In FIG. 13B, the main magnetic pole front side on the trailing side is placed on the leading side while leaving the part that defines the track width and the trailing end, so that the narrowing portion 26 and the throttle position 39 are lifted at the same time. It is arranged on the leading side with respect to the vertical plane 36 parallel to the track width direction including the trailing end of the surface. Here, the front surface of the main magnetic pole is retracted stepwise toward the leading side, but a structure in which the front surface of the main magnetic pole is gradually retracted may be used. 13 (1) and 13 (2), the main magnetic pole side surface, the narrowing portion, and the throttle position are all arranged on the leading side, whereas a part of the main magnetic pole side surface, for example, near the throttle position 39 Even if a part of the narrowed-down portion 26 where the magnetic flux tends to concentrate is arranged on the leading side as shown in FIG. 13 (3), the effect can be obtained.

  Further, the arrangement is further limited in FIGS. 13 (1) to 13 (3), and the narrowing portion 26 and the throttling position 39 are read more than the vertical plane parallel to the track width direction including the leading end of the main pole air bearing surface. If it is arranged on the side, it is possible to avoid the influence of leakage magnetic flux from the narrowing portion 26 and the throttling position 39 over the entire main magnetic pole floating surface, and the head magnetic field vertical component profile 35 in the track width direction is Improved throughout.

  13 (1) and 13 (2), the main magnetic pole front surface on the trailing side is also parallel to the track width direction including the trailing edge of the main magnetic pole floating surface. It is arranged on the leading side with respect to the vertical plane 36. That is, the influence of the leakage magnetic flux from the front surface of the main magnetic pole on the trailing side is avoided at the same time as the narrowing portion and the throttle position. Further, in the same manner as FIGS. 13 (1) to 13 (3), as shown in FIGS. 13 (4) and 13 (5), the main magnetic pole side surface that intersects the track width direction is inclined or a portion that defines the track width is defined. By leaving behind and retreating, the track is positioned closer to the track center 39 than the vertical plane 38 perpendicular to the track width direction including the track end of the trailing end of the main pole air bearing surface. The arrangement of the side surface of the main pole intersecting with the track width direction can be combined with each of the structures shown in FIGS.

If there is not one narrowing part or narrowing position here, the effect can be obtained by considering the arrangement described here for any part, but especially near the part near the air bearing surface or where the narrowing angle is large. If you consider the arrangement, a great effect can be obtained.
(Example 3)
14 to 16 show the structure when the main pole has the pole tip 27.
When the pole tip is provided, it is possible to improve the accuracy of the track width in the manufacturing process, control the magnetic domain, 55% Fe-45% Ni with a saturation magnetic flux density of 1.6T, or CoNiFe with a saturation magnetic flux density of 2.2T. Use of the Bs material can be expected to improve the magnetic field strength. Further, the magnetic field strength can be increased by adjusting the distance between the main magnetic pole and the soft magnetic backing layer, or by adjusting the contact area between the pole tip and the main magnetic pole. Similarly, in the case where the main magnetic pole has the pole tip 27, in order to avoid the leakage magnetic field, an arrangement in which the narrowed portion 26 and the throttle position 39 are as far as possible from the trailing end of the pole tip is considered. 14 (1) and 14 (2), the narrowing portion 26 and the narrowing position 39 are arranged on the leading side with respect to the vertical plane 36 parallel to the track width direction including the trailing end portion of the air bearing surface of the pole tip 27. Yes. The arrangement of FIG. 14 (2) can be applied to any of the following examples. As shown in FIG. 14 (3), the positions of the narrowed portion 26 and the throttle position 39 in the main magnetic pole are considered in the same manner.

  Further, when the arrangement is further defined and the narrowed portion 26 and the throttle position 39 are arranged on the leading side with respect to the vertical plane parallel to the track width direction including the leading end of the flying surface of the pole tip, The influence of leakage magnetic flux from the narrowed portion 26 and the throttle position 39 can be avoided over the entire surface, and the head magnetic field vertical component profile 35 in the track width direction is improved over the entire main pole air bearing surface. The For example, FIGS. 14 (1) and 14 (3) satisfy this condition, and the head magnetic field vertical component profile 35 in the track width direction is improved over the entire main pole air bearing surface as compared with FIG. 14 (2). As shown in FIG. 15, even when the pole tip is not a hexahedron, the narrowed portion 26 and the throttle position 39 are arranged on the leading side with respect to the vertical plane parallel to the track width direction including the leading end of the floating surface of the pole tip. Then, the same effect can be obtained over the entire main pole air bearing surface.

  16 (1) and 16 (2), the front side of the pole tip on the trailing side is inclined in the same manner as in FIGS. 13 (1) and 13 (2), and the portion that defines the track width and trailing end. Is disposed on the leading side, and is disposed on the leading side with respect to the vertical plane 36 parallel to the track width direction including the trailing end portion of the air bearing surface of the pole tip. The effect of suppressing the leakage magnetic flux from the front side of the pole tip on the trailing side can also be obtained when the main pole is arranged on the trailing side of the pole tip as shown in FIGS. 16 (3) and (4). Similarly to FIG. 16 (1), the same applies when the front side of the pole tip on the trailing side is inclined. 16 (3) and 16 (4) are particularly effective methods when the main pole is sufficiently separated from the air bearing surface of the pole tip.

In FIG. 17, in the same manner as in FIGS. 13 (4) and (5), the side surface of the pole tip that intersects the track width direction is inclined, or the pole tip is retracted by leaving a part that defines the track width. The chip is arranged closer to the track center 39 than the vertical plane 38 perpendicular to the track width direction including the track end of the trailing end of the air bearing surface of the chip. The arrangement of the side surface of the main pole intersecting with the track width direction can be combined with each of the structures shown in FIGS. The effect of suppressing the leakage magnetic flux from the side surface intersecting with the track width direction can be obtained also when the narrowing portion and the narrowing position are arranged on the trailing side with respect to the pole tip as shown in FIG.
Example 4
Example 4 shows an embodiment in which a narrowing portion is provided on the pole tip in the main pole. When the pole tip is narrowed down, the track width accuracy in the manufacturing process is improved, the magnetic domain control, 55% Fe-45% Ni with a saturation magnetic flux density of 1.6 T, or the saturation magnetic flux density is the same as in the third embodiment. The use of a high Bs material such as 2.2T CoNiFe can be expected to improve the magnetic field strength. Further, the magnetic field strength can be increased by adjusting the distance between the main magnetic pole and the soft magnetic backing layer, or by adjusting the contact area between the pole tip and the main magnetic pole. Further, the magnetic field strength can be adjusted by the narrowing part of the pole tip. As shown in FIGS. 18 (1) and 18 (2), when the pole tip has the narrowed portion 26 and the throttle position 39, all the concepts shown in FIG. 13 can be applied to the structure of the pole tip. The effect of suppressing the leakage magnetic flux from the front side of the pole tip on the trailing side, the narrowed portion, and the throttle position can also be obtained when the main magnetic pole is arranged on the trailing side of the pole tip as shown in FIG. .
(Example 5)
Next, an embodiment of a method of manufacturing a magnetic head according to the present invention will be described with reference to the drawings. FIG. 19 shows a schematic diagram of the manufacturing process of the present invention (however, the magnification of the drawing is not constant).
(A) shows a cross section in the head running direction, and (B) shows a cross section in the track width direction. An inorganic insulating film 101 is formed on the nonmagnetic substrate 104 made of alumina titanium carbide by sputtering. A magnetic film 102 is formed on the inorganic insulating film by sputtering, and this magnetic film is patterned into a necessary shape to obtain a lower shield. Next, the inorganic insulating film 101 and the reproducing element 105 are formed on the magnetic film 102 serving as a lower shield. Further, the upper shield and the magnetic film 102 serving as the auxiliary magnetic pole are formed. The upper shield and the auxiliary magnetic pole may be separated into two layers with an insulating film interposed therebetween. Next, after forming a coil in an inorganic insulating film, the place which formed the resist pattern on the inorganic insulating film is shown to (a). As the inorganic insulating film, SiC, AlN, Ta ₂ O ₅ , TiC, TiO ₂ , SiO ₂ or the like can be used in addition to conventionally used Al ₂ O ₃ . (B) shows the magnetic film plated. When the electrolytic plating method is used, 55% Fe-45% Ni having a saturation magnetic flux density of 1.6 T, CoNiFe having a saturation magnetic flux density of 2.2 T, or the like can be used. The plating base film may be a magnetic film having the same composition as the plating film or a non-magnetic film. The place where the resist is removed is shown in FIG. (D) An inorganic insulating film is formed and the top surfaces of the inorganic insulating film and the magnetic film are planarized.
For the planarization, a polishing method such as chemical mechanical polishing (CMP) or ion milling may be used. (E) shows the formation of a resist for forming a pole tip. Next, when a magnetic film 102 'serving as a pole tip is formed, it is shown in (f). (f ′) is a cross-sectional view in the track width direction. Here, the shape of the cross section in the track width direction of the magnetic film 102 ′ serving as the pole tip may be the shape shown in FIG. Further, (g) shows that the resist is removed and an inorganic insulating film is formed. In the process of raising the air bearing surface, the air bearing surface may be located on the left side in the figure from the position 103 of the dashed line. With this manufacturing method, the perpendicular recording magnetic head of the present invention having a pole tip can be manufactured.

FIG. 20 shows a schematic diagram of another manufacturing process of the present invention (however, the magnification of the drawing is not constant). (A) shows a cross section in the head running direction, and (B) shows a cross section in the track width direction.
The manufacturing process before forming the coil is the same as that in FIG. 19, and the figure before forming the coil is omitted. (A) shows a state in which a resist pattern is formed on the inorganic insulating film after the coil is formed. (B) shows the magnetic film plated. The place where the resist is removed is shown in FIG. (D) An inorganic insulating film is formed and the top surfaces of the inorganic insulating film and the magnetic film are planarized. For the planarization, a polishing method such as chemical mechanical polishing (CMP) or ion milling may be used. (E) shows the formation of a resist for forming a pole tip. Next, when a magnetic film 102 'serving as a pole tip is formed, it is shown in (f). (f ′) is a cross-sectional view in the track width direction. Here, the shape of the cross section in the track width direction of the magnetic film 102 ′ serving as the pole tip may be the shape shown in FIG. (G) shows a place where a resist pattern is further formed. (h) shows that the magnetic film 102 'is etched using the resist pattern as a mask to form a slope. Moreover, you may make it the shape by which the narrowing part as shown in FIG. 18 (1) is formed in this slope. Thereafter, the resist is removed and an inorganic insulating film is formed. In the process of raising the air bearing surface, the air bearing surface may be located on the left side in the figure from the position 103 of the dashed line. By this manufacturing method, the perpendicular recording magnetic head of the present invention having a pole tip can be manufactured.
(Example 6)
FIG. 21 shows a schematic diagram of another manufacturing process of the present invention (however, the magnification of the drawing is not constant). The figure is a cross section in the head running direction. The manufacturing process before forming the coil is the same as that in FIG. 19, and the figure before forming the coil is omitted. (A) shows a state in which a resist pattern is formed on the inorganic insulating film after the coil is formed. (B) shows the magnetic film plated. The place where the resist is removed is shown in FIG. (D) An inorganic insulating film is formed and the top surfaces of the inorganic insulating film and the magnetic film are planarized. For the planarization, a polishing method such as chemical mechanical polishing (CMP) or ion milling may be used. (E) shows the formation of a resist for forming a pole tip. Next, when a magnetic film 102 'serving as a pole tip is formed, it is shown in (f). Here, the magnetic film 102 ′ serving as the pole tip may have a shape in which a narrowed portion as shown in FIGS. 18 (2) and (3) is formed. Further, the shape of the cross section in the track width direction of the magnetic film 102 ′ serving as a pole tip may be the shape shown in FIG. (G) shows a place where a resist pattern is further formed. (h) shows the magnetic film 102 ″ formed using the resist pattern as a mask. Thereafter, the resist is removed and an inorganic insulating film is formed.
In the process of raising the air bearing surface, the air bearing surface may be located on the left side in the figure from the one-dot chain line position 103. By this manufacturing method, the perpendicular recording magnetic head of the present invention having a pole tip can be manufactured.

  FIG. 22 shows a schematic diagram of another manufacturing process of the present invention (however, the magnification of the drawing is not constant). (A) is a cross section in the head running direction, and (B) is a floating surface view. The manufacturing process before forming the coil is the same as that in FIG. 19, and the figure before forming the coil is omitted. A magnetic film is formed after the coil is formed, an inorganic insulating film is formed, and a resist pattern having a shape as shown in the figure is formed on the inorganic insulating film, as shown in FIG. This is a so-called lift-off method. Next, the place where the inorganic insulating film was sputtered is shown in FIG. (C) shows a state where the resist and the inorganic insulating film adhering thereto are removed after sputtering. (d) shows a place where a resist pattern is formed. (E) shows the magnetic film plated. Here, the magnetic film 102 'serving as the pole tip may have a shape in which a narrowed portion as shown in FIG. 17 is formed. Further, the shape of the cross section in the track width direction of the magnetic film 102 'serving as a pole tip may be the shape shown in FIG. (F) shows that the resist is removed. Thereafter, an inorganic insulating film is formed. In the process of raising the air bearing surface, the air bearing surface may be located on the left side in the figure from the position 103 of the dashed line. By this manufacturing method, the perpendicular recording magnetic head of the present invention having a pole tip can be manufactured.

FIG. 23 shows a schematic diagram of another manufacturing process of the present invention (however, the magnification of the drawing is not constant). (A) is a cross section in the head running direction, and (B) is a floating surface view. The manufacturing process before forming the coil is the same as that in FIG. 19, and the figure before forming the coil is omitted. (A) shows a state where an inorganic insulating film is formed after the coil is formed, and a resist pattern having a shape as shown in the figure is formed on the inorganic insulating film. This is a so-called lift-off method. Next, the place where the inorganic insulating film was sputtered is shown in FIG. (C) shows a state where the resist and the inorganic insulating film adhering thereto are removed after sputtering. (d) shows a place where a resist pattern is formed. (e) shows the magnetic film plated. (f) shows that the resist is removed. Thereafter, an inorganic insulating film is formed. In the process of raising the air bearing surface, the air bearing surface may be located on the left side in the figure from the position 103 of the dashed line. With this manufacturing method, the magnetic head for perpendicular recording of the present invention can be manufactured. Also,
FIG. 24 shows a schematic diagram of another manufacturing process of the present invention (however, the magnification of the drawing is not constant). (A) is a cross section in the head running direction, and (B) is a floating surface view. The manufacturing process before forming the coil is the same as that in FIG. 19, and the figure before forming the coil is omitted. (A) shows a state where an inorganic insulating film is formed after the coil is formed and a resist pattern is formed on the inorganic insulating film. (B) shows the result of etching the inorganic insulating film using this resist pattern as a mask. When Al ₂ O ₃ is used, BCl ₃ or a mixed gas for BCl ₃ and Cl ₂ may be used as an etching gas. In addition, when AlN is used, the above chlorine-based gas is preferable, but when Ta ₂ O ₅ , TiC, TiC ₂ , SiO ₂ , SiO, etc., which are easy to etch, are used, fluorine-based CHF ₃ , CF ₄ , SF ₆ , C ₄ F _{8 and the} like can be used. The state where the resist is removed after the etching is shown in FIG. Further, (d) shows a place where a resist pattern is formed. (e) shows the magnetic film plated. (f) shows that the resist is removed. Thereafter, an inorganic insulating film is formed. In the process of raising the air bearing surface, the air bearing surface may be located on the left side in the figure from the position 103 of the dashed line. With this manufacturing method, the magnetic head for perpendicular recording of the present invention can be manufactured.

Further, the process of forming the magnetic film in the above manufacturing method described with reference to FIGS. 19 to 24 may be a process using a magnetron sputtering method using a photoresist as a mask.
(Example 7)
The invention described in this embodiment includes a magnetic head slider having a recording head having a main magnetic pole and an auxiliary magnetic pole, a reproducing head having a reproducing element, a gimbal for supporting the slider, and the gimbal being fixed. And a suspension. The basic structure of the head assembly of this embodiment is a combination of the suspension arm 12 and the magnetic head slider shown in FIG. Although not shown in the figure, the gimbal is joined to the tip of the suspension arm 12. Therefore, although the gimbal and the suspension arm are separate parts, they may be integrally formed at the tip of the suspension arm 12.

In this way, it is possible to provide a head assembly which mounts the magnetic head described in the first to fourth embodiments and realizes a recording magnetic field profile having a steep gradient.
(Example 8)
As shown in FIG. 3, the magnetic disk device of this embodiment includes a magnetic disk, a magnetic head slider on which a recording / reproducing head is mounted, a disk driving device for rotationally driving the magnetic disk in one direction, and a suspension that supports the slider. And an arm, a rotary actuator for driving the arm, and the like. By configuring the magnetic disk device, recording with a magnetic field profile having a steep gradient can be realized, the linear recording density in the disk rotation direction and the track density in the disk radial direction can be improved, and a high surface recording density can be realized.

1 is a schematic view of a cross section of a single pole head for perpendicular recording in an embodiment of the present invention. 1 is a schematic diagram of a magnetic head for perpendicular recording and a magnetic disk device in an embodiment of the present invention. 1 is a schematic diagram of a magnetic disk device in an embodiment of the present invention. Schematic diagram of perpendicular recording. FIG. 3 is a schematic diagram of a perpendicular recording magnetic head and a head magnetic field perpendicular component profile in (a) disk rotation direction and (b) track width direction. FIG. 4 is a conceptual diagram of the flow of magnetic flux and leakage magnetic flux at the front end of the main magnetic pole in the direction of (a) disk rotation and (b) track width. FIG. 3 is a schematic view of a narrowed portion and a side surface of the main pole in the embodiment of the present invention. Schematic diagram of the structure of the vicinity of the tip of the main pole of the magnetic head for perpendicular recording used in the three-dimensional integral element method simulation, (1) conventional type and (2) the present invention. Distribution of magnetic flux density on the magnetic pole surface near the tip of the main magnetic pole in a conventional head. The head magnetic field perpendicular component profile of the disk rotation direction by the three-dimensional integral element method simulation in the embodiment of the present invention and the conventional head. Schematic of magnetization transition width. The head magnetic field perpendicular component profile of the track width direction by the three-dimensional integral element method simulation in the embodiment of the present invention and the conventional head. The schematic diagram regarding arrangement | positioning of the main magnetic pole narrowing-down part and the main magnetic pole side surface in the main magnetic pole which does not have a pole tip in embodiment of this invention. The schematic diagram regarding arrangement | positioning of the main magnetic pole in the main magnetic pole which has a pole tip in embodiment of this invention. The schematic regarding the arrangement | positioning of the main magnetic pole floating surface and the main pole in the main pole which has a pole tip in embodiment of this invention. The schematic diagram regarding arrangement | positioning of the main pole side surface in the main pole which has a pole tip in embodiment of this invention. FIG. 5 is a schematic diagram regarding the arrangement of the main pole side surface intersecting the track width direction in the main pole having a pole tip in the embodiment of the present invention. The schematic regarding the arrangement | positioning of the main magnetic pole narrowing part and side surface in the pole tip which has a narrowing part in the main magnetic pole which has a pole chip in embodiment of this invention. Schematic of the main magnetic pole formation process in the embodiment of the present invention (however, the magnification is not uniform). Schematic of the main magnetic pole formation process in the embodiment of the present invention (however, the magnification is not uniform). Schematic of the main magnetic pole formation process in the embodiment of the present invention (however, the magnification is not uniform). Schematic of the main magnetic pole formation process in the embodiment of the present invention (however, the magnification is not uniform). Schematic of the main magnetic pole formation process in the embodiment of the present invention (however, the magnification is not uniform). Schematic of the main magnetic pole formation process in the embodiment of the present invention (however, the magnification is not uniform).

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Main magnetic pole, 2 ... Coil, 3 ... Auxiliary magnetic pole, 4 ... Main magnetic pole film thickness, 5 ... Geometric track width, 6 ... Track width direction, 7 ... Track center, 8 ... Bottom shield, 11 ... Magnetic disk, DESCRIPTION OF SYMBOLS 12 ... Suspension arm, 13 ... Slider, 14 ... Magnetic head, 15 ... Rotary actuator, 16 ... Recording head, 17 ... Disc rotation direction, 18 ... Reproduction head, 19 ... Recording layer, 20 ... Backing layer, 24 ... Trailing side , 25 ... leading side, 26 ... restricted portion, 27 ... pole tip, 28 ... floating surface, 29 ... main magnetic pole side surface, 30 ... air outflow end, 31 ... air inflow end, 33 ... magnetic flux, 34 ... leakage magnetic flux, 35 ... Head magnetic field vertical component profile 36... Vertical plane including trailing end of main pole air bearing surface 37. Vertical plane including leading end of main magnetic pole air bearing surface 38. Vertical plane including the track end of the magnetic pole air bearing surface, 39 ... aperture position, 40 ... main magnetic pole front surface, 100 ... resist, 101 ... inorganic insulating film, 102 ... magnetic film, 103 ... air bearing surface processing range, 104 ... substrate, 105 ... reproducing element.

Claims (36)

A magnetic head having a main magnetic pole and an auxiliary magnetic pole, wherein in the main magnetic pole, a narrowed portion that decreases as the cross-sectional area parallel to the air bearing surface approaches the air bearing surface, and a position of the narrowed portion closest to the air bearing surface That is, a part or the whole of the aperture position is arranged on the leading side of the main pole with respect to the vertical plane parallel to the track width direction including the trailing side end of the air bearing surface. Magnetic head for recording. 2. The main magnetic pole of the perpendicular recording head according to claim 1, wherein the narrowing portion or a part or the whole of the throttling position is on the leading side with respect to the vertical plane parallel to the track width direction including the leading end of the flying surface. A magnetic head for perpendicular recording characterized by being arranged in A magnetic head having a main magnetic pole and an auxiliary magnetic pole, wherein a part or all of the front surface on the trailing side of the main magnetic pole intersects the flying surface in the flying height direction as viewed from the flying surface. A magnetic head for perpendicular recording, characterized in that it is arranged on the leading side of a vertical plane parallel to the track width direction including the trailing end of the air bearing surface. A magnetic head having a main magnetic pole and an auxiliary magnetic pole, wherein in the main magnetic pole, a part or the whole of the side surface intersecting the track width direction of the main magnetic pole is in the track width direction including the end of the air bearing surface in the track width direction. A magnetic head for perpendicular recording, characterized in that it is disposed closer to the center of the main pole than a perpendicular vertical plane. A magnetic head having a main magnetic pole and an auxiliary magnetic pole, wherein the main magnetic pole has a portion defining a track width exposed on the air bearing surface, that is, a pole tip, and the main magnetic pole has a cross-sectional area parallel to the air bearing surface. The narrowing portion that decreases as it approaches the air bearing surface, and the position of the narrowing portion closest to the air bearing surface, that is, part or all of the aperture position includes the trailing end of the air bearing surface of the pole tip. A magnetic head for perpendicular recording, wherein the magnetic head is disposed on the leading side of the pole tip with respect to a vertical plane parallel to the magnetic head. 6. The perpendicular recording head according to claim 5, wherein a narrowing portion of the main magnetic pole or a part or the whole of the narrowing position is disposed on the leading side with respect to a vertical plane including the leading end of the air bearing surface of the pole tip. Magnetic head for perpendicular recording characterized by In a thin film magnetic head having a single-pole type perpendicular recording head for recording, the perpendicular recording head has a main pole and an auxiliary pole, and the main pole has a portion that defines the track width by exposing to the air bearing surface, that is, a pole tip. In the pole tip, a part or the whole of the front side of the pole tip on the trailing side that intersects with the floating surface in the flying height direction as viewed from the floating surface of the pole tip is the trailing side of the floating surface of the pole tip. A magnetic head for perpendicular recording, characterized in that the magnetic head is arranged on the leading side with respect to a vertical plane parallel to the track width direction including the end of the recording medium. In a thin film magnetic head having a single-pole type perpendicular recording head for recording, the perpendicular recording head has a main pole and an auxiliary pole, and the main pole has a portion that defines the track width by exposing to the air bearing surface, that is, a pole tip. In the pole tip, a part or the whole of the side surface intersecting with the track width direction is closer to the center side of the pole tip than the vertical plane perpendicular to the track width direction including the end of the pole tip on the air bearing surface in the track width direction. A magnetic head for perpendicular recording characterized by being arranged. In a thin film magnetic head having a single-pole type perpendicular recording head for recording, the perpendicular recording head has a main pole and an auxiliary pole, and the main pole has a portion that defines the track width by exposing to the air bearing surface, that is, a pole tip. In the pole tip, the narrowed portion that becomes smaller as the cross-sectional area parallel to the air bearing surface approaches the air bearing surface, and the position of the narrowed portion closest to the air bearing surface, that is, a part or the whole of the aperture position is A magnetic head for perpendicular recording, characterized in that the magnetic head for perpendicular recording is disposed on the leading side of a vertical plane parallel to the track width direction including the trailing end of the air bearing surface of the chip. 10. The main magnetic pole of a perpendicular recording head according to claim 9, wherein the narrowing portion or a part or all of the throttling position is on the leading side with respect to a vertical plane parallel to the track width direction including the leading end of the flying surface. A magnetic head for perpendicular recording characterized by being arranged in A magnetic head slider having a single magnetic pole type perpendicular recording head and a thin film magnetic head having a reproducing head equipped with a reproducing element; a gimbal that supports the magnetic head slider; and a suspension arm to which the gimbal is fixed, The perpendicular recording head has a main magnetic pole and an auxiliary magnetic pole. In the main magnetic pole, a narrowed portion that becomes smaller as the cross-sectional area parallel to the air bearing surface approaches the air bearing surface, and a position closest to the air bearing surface of the narrowed portion In other words, a part or the whole of the throttle position is disposed on the air inflow end side of the main magnetic pole with respect to the vertical plane parallel to the track width direction including the end on the air outflow end side of the main magnetic pole air bearing surface. Featured head assembly. 12. The main magnetic pole of a perpendicular recording head according to claim 11, wherein the narrowing portion or a part or the whole of the throttling position is more than a vertical plane parallel to the track width direction including the end of the air bearing surface on the air inflow end side. A head assembly arranged on an air inflow end side. A magnetic head slider having a single magnetic pole type perpendicular recording head and a thin film magnetic head having a reproducing head equipped with a reproducing element; a gimbal that supports the magnetic head slider; and a suspension arm to which the gimbal is fixed, The perpendicular recording head has a main magnetic pole and an auxiliary magnetic pole. In the main magnetic pole, a part or the whole of the front surface on the air outflow end side of the main magnetic pole intersecting the air bearing surface in the flying height direction as viewed from the air bearing surface is levitated. A head assembly, wherein the head assembly is arranged on the air inflow end side with respect to a vertical plane parallel to the track width direction including the end portion on the air outflow end side of the surface. A magnetic head slider having a single magnetic pole type perpendicular recording head and a thin film magnetic head having a reproducing head equipped with a reproducing element; a gimbal that supports the magnetic head slider; and a suspension arm to which the gimbal is fixed, The perpendicular recording head has a main magnetic pole and an auxiliary magnetic pole. In the main magnetic pole, a part or the whole of the side surface intersecting the track width direction of the main magnetic pole is in the track width direction including the end of the air bearing surface in the track width direction. A head assembly arranged on the center side of a main magnetic pole with respect to a vertical vertical plane. A magnetic head slider having a single magnetic pole type perpendicular recording head and a thin film magnetic head having a reproducing head equipped with a reproducing element; a gimbal that supports the magnetic head slider; and a suspension arm to which the gimbal is fixed, The perpendicular recording head has a main magnetic pole and an auxiliary magnetic pole, and the main magnetic pole has a portion defining a track width exposed on the air bearing surface, that is, a pole tip, and the main magnetic pole has a cross-sectional area parallel to the air bearing surface. The portion that becomes smaller as it gets closer to the air bearing surface, that is, the narrowed portion, and the position closest to the air bearing surface, that is, part or all of the throttle position of the narrowed portion is the end on the air outflow end side of the air bearing surface of the pole tip. A head assembly arranged on the air inflow end side of the pole tip with respect to a vertical plane parallel to the track width direction. 16. The perpendicular recording head according to claim 15, wherein a narrowing portion or a part or whole of the narrowing position of the main pole is closer to the air inflow end side than the vertical plane including the air inflow end side end of the air bearing surface of the pole tip. A head assembly characterized by being arranged. A magnetic head slider having a single magnetic pole type perpendicular recording head and a thin film magnetic head having a reproducing head equipped with a reproducing element; a gimbal that supports the magnetic head slider; and a suspension arm to which the gimbal is fixed, The perpendicular recording head has a main magnetic pole and an auxiliary magnetic pole, and the main magnetic pole has a part that defines the track width by being exposed on the air bearing surface, that is, a pole tip. Part or all of the front surface on the air outflow end side of the pole tip that intersects the air bearing surface in the height direction is more air inflow than the vertical plane parallel to the track width direction including the air outflow end side end of the air bearing surface. A head assembly arranged on an end side. A magnetic head slider having a single magnetic pole type perpendicular recording head and a thin film magnetic head having a reproducing head equipped with a reproducing element; a gimbal that supports the magnetic head slider; and a suspension arm to which the gimbal is fixed, The perpendicular recording head has a main magnetic pole and an auxiliary magnetic pole, and the main magnetic pole has a portion that defines the track width by being exposed on the air bearing surface, that is, a pole tip, and a part of the side surface of the pole tip that intersects the track width direction. The head assembly is characterized in that the whole is disposed on the center side of the pole tip with respect to the vertical plane perpendicular to the track width direction including the end in the track width direction on the air bearing surface of the pole tip. A magnetic head slider having a single magnetic pole type perpendicular recording head and a thin film magnetic head having a reproducing head equipped with a reproducing element; a gimbal that supports the magnetic head slider; and a suspension arm to which the gimbal is fixed, The perpendicular recording head has a main magnetic pole and an auxiliary magnetic pole, and the main magnetic pole has a part that defines the track width by being exposed on the air bearing surface, that is, a pole tip, and the pole chip has a cross-sectional area parallel to the air bearing surface. The portion where the magnetic flux is narrowed down as it approaches the air bearing surface, that is, the constricted portion, and the position closest to the air bearing surface of the constricted portion, that is, a part or all of the throttling position is the air outflow end of the air bearing surface of the pole tip. The head assembly is arranged on the air inflow end side with respect to a vertical plane parallel to the track width direction including the end on the side. Yellowtail. 20. The main magnetic pole of a perpendicular recording head according to claim 19, wherein the throttle portion or a part or the whole of the throttle position is inflow of air from a vertical plane parallel to the track width direction including the air inflow end side end of the air bearing surface. A head assembly arranged on an end side. A magnetic head slider having a single magnetic pole type perpendicular recording head and a thin film magnetic head having a reproducing head equipped with a reproducing element, a perpendicular magnetic recording medium having a soft magnetic backing layer, and rotating the perpendicular magnetic recording medium in a certain direction A driving device and a signal processing circuit for processing magnetic information input / output through the recording head or the reproducing head, the perpendicular recording head having a main magnetic pole and an auxiliary magnetic pole. A narrowing portion whose parallel cross-sectional area decreases as it approaches the air bearing surface, and the position of the narrowing portion closest to the air bearing surface, that is, part or all of the aperture position is the trailing end of the main magnetic pole air bearing surface. A magnetic disk device, wherein the magnetic disk device is arranged on the leading side with respect to a vertical plane parallel to the track width direction including the portion. 23. The magnetic disk drive according to claim 21, wherein a narrowing portion or a part or all of the narrowing position of the main pole is on the leading side with respect to a vertical plane parallel to the track width direction including the leading end of the flying surface. A magnetic disk device characterized by being arranged in A magnetic head slider having a single magnetic pole type perpendicular recording head and a thin film magnetic head having a reproducing head equipped with a reproducing element, a perpendicular magnetic recording medium having a soft magnetic backing layer, and rotating the perpendicular magnetic recording medium in a certain direction A drive device and a signal processing circuit for processing magnetic information input / output through the recording head or the reproducing head, the perpendicular recording head having a main magnetic pole and an auxiliary magnetic pole, Part or all of the front side of the main pole on the trailing side of the main pole that intersects the flying surface in the flying height direction is the leading side of the vertical plane parallel to the track width direction including the trailing side end of the flying surface. A magnetic disk device characterized by being arranged in A magnetic head slider having a single magnetic pole type perpendicular recording head and a thin film magnetic head having a reproducing head equipped with a reproducing element, a perpendicular magnetic recording medium having a soft magnetic backing layer, and rotating the perpendicular magnetic recording medium in a certain direction A drive device and a signal processing circuit for processing magnetic information input / output through the recording head or the reproducing head, the perpendicular recording head having a main magnetic pole and an auxiliary magnetic pole, and the main magnetic pole has a track width direction A magnetic disk device characterized in that a part or the whole of the side surface that intersects with the head is disposed closer to the center of the main pole than a vertical plane perpendicular to the track width direction including the end of the air bearing surface in the track width direction. A magnetic head slider having a single magnetic pole type perpendicular recording head and a thin film magnetic head having a reproducing head equipped with a reproducing element, a perpendicular magnetic recording medium having a soft magnetic backing layer, and rotating the perpendicular magnetic recording medium in a certain direction A driving device and a signal processing circuit for processing magnetic information input / output through the recording head or the reproducing head, the perpendicular recording head having a main magnetic pole and an auxiliary magnetic pole, and the main magnetic pole is the perpendicular magnetic recording A portion that defines the track width by exposing to the air bearing surface of the main pole facing the medium, that is, a pole tip, and in the main magnetic pole, the area of the cross section parallel to the air bearing surface becomes smaller as the air bearing surface approaches. And a portion of the throttle portion closest to the air bearing surface, that is, a part or all of the throttle position includes the trailing end of the pole chip air bearing surface. Than vertical plane parallel to the click width direction, the magnetic disk apparatus characterized by being arranged on the leading side. 26. The perpendicular recording head according to claim 25, wherein a narrowing portion of the main magnetic pole or a part or the whole of the narrowing position is arranged on the leading side with respect to a vertical plane including the leading end of the air bearing surface of the pole tip. A magnetic disk device characterized by that. A magnetic head slider having a single magnetic pole type perpendicular recording head and a thin film magnetic head having a reproducing head equipped with a reproducing element, a perpendicular magnetic recording medium having a soft magnetic backing layer, and rotating the perpendicular magnetic recording medium in a certain direction A driving device and a signal processing circuit for processing magnetic information input / output through the recording head or the reproducing head, the perpendicular recording head having a main magnetic pole and an auxiliary magnetic pole, and the main magnetic pole is the perpendicular magnetic recording It has a portion that defines the track width exposed on the air bearing surface of the main pole facing the medium, that is, a pole tip, and the pole tip intersects the air bearing surface in the flying height direction as viewed from the air bearing surface of the pole tip. A part or all of the front surface on the trailing side of the pole chip is parallel to the track width direction including the trailing edge of the air bearing surface of the pole chip. Magnetic disk drive, characterized in that it is arranged on the leading side than the surface. A magnetic head slider having a single magnetic pole type perpendicular recording head and a thin film magnetic head having a reproducing head equipped with a reproducing element, a perpendicular magnetic recording medium having a soft magnetic backing layer, and rotating the perpendicular magnetic recording medium in a certain direction A driving device and a signal processing circuit for processing magnetic information input / output through the recording head or the reproducing head, the perpendicular recording head having a main magnetic pole and an auxiliary magnetic pole, and the main magnetic pole is the perpendicular magnetic recording It has a portion that defines the track width exposed on the air bearing surface of the main pole facing the medium, that is, a pole tip, and part or all of the side surface that intersects the track width direction is on the air bearing surface of the pole tip. Arranged on the center side of the pole tip from the vertical plane perpendicular to the track width direction including the end in the track width direction at the end on the trailing side. Magnetic disk drive, wherein the are. A magnetic head slider having a single magnetic pole type perpendicular recording head and a thin film magnetic head having a reproducing head equipped with a reproducing element, a perpendicular magnetic recording medium having a soft magnetic backing layer, and rotating the perpendicular magnetic recording medium in a certain direction A driving device and a signal processing circuit for processing magnetic information input / output through the recording head or the reproducing head, the perpendicular recording head having a main magnetic pole and an auxiliary magnetic pole, and the main magnetic pole is the perpendicular magnetic recording A portion that defines the track width exposed on the air bearing surface of the main pole facing the medium, that is, a pole tip, in the pole tip, the area of the cross section parallel to the air bearing surface becomes smaller as the air bearing surface approaches. The track width direction in which the part and the whole or part of the narrowed portion closest to the air bearing surface includes the trailing end of the air bearing surface of the pole tip Than parallel vertical planes, the magnetic disk apparatus characterized by being arranged on the leading side. 30. The main magnetic pole of the perpendicular recording head according to claim 29, wherein the narrowing portion or a part or all of the throttling position is from a vertical plane parallel to the track width direction including the leading end of the air bearing surface of the pole tip. Is also arranged on the leading side. Forming a resist pattern on the inorganic insulating film;
Forming a magnetic film to be a main pole on the inorganic insulating film on which the resist pattern is formed;
Removing the resist pattern;
On the magnetic film from which the resist pattern has been removed and on the inorganic insulating film;
Forming a resist pattern;
11. The method according to claim 5, further comprising a step of sequentially performing a step of forming a magnetic film to be the pole tip on the inorganic insulating film on which the resist pattern is formed and the magnetic film. A magnetic head for perpendicular magnetic recording, a method of manufacturing the same, and a magnetic disk device including the magnetic head slider. Forming a resist on the magnetic film to be the pole tip in the manufacturing method according to claim 31;
11. A magnetic head for perpendicular magnetic recording, a method of manufacturing the same, and a method of manufacturing the same, comprising the step of forming a slope on the pole tip using the resist as a mask On-board magnetic disk unit. Forming a resist pattern on the inorganic insulating film;
Forming a magnetic film to be a main pole on the inorganic insulating film on which the resist pattern is formed;
Removing the resist pattern;
Forming a resist pattern after planarizing the magnetic film and the inorganic insulating film from which the resist pattern has been removed;
11. The step of sequentially performing the step of sequentially forming a magnetic film on the magnetic film on which the resist pattern is formed includes a step of repeatedly performing the step twice or more. Magnetic head for perpendicular magnetic recording, method of manufacturing the same, and magnetic disk drive equipped with the same. Forming a resist pattern on the inorganic insulating film;
Forming a magnetic film to be a main pole on the inorganic insulating film on which the resist pattern is formed;
Removing the resist pattern;
After planarizing the magnetic film and the inorganic insulating film from which the resist pattern has been removed, a resist pattern is formed on the magnetic film or on the magnetic film and the inorganic insulating film,
Sputtering an inorganic insulating film, removing the resist pattern and the inorganic insulating film attached thereto, and forming a slope;
Forming a resist pattern;
11. The perpendicular magnetism according to claim 5, comprising a step of forming an inorganic insulating film on which the resist pattern is formed and a magnetic film serving as the pole tip on the magnetic film. A recording magnetic head, a method of manufacturing the same, and a magnetic disk drive equipped with the same. Forming a resist pattern on the inorganic insulating film, sputtering the inorganic insulating film, removing the resist pattern and the inorganic insulating film attached thereto, and forming a slope;
Forming a resist pattern;
5. The magnetic head for perpendicular magnetic recording according to claim 1, wherein the step of forming the inorganic insulating film on which the resist pattern is formed and the magnetic film serving as the main magnetic pole are sequentially performed. Method and magnetic disk drive equipped with the method A resist is formed on the inorganic insulating film,
Forming a slope on the inorganic insulating film using the resist as a mask;
5. The vertical structure according to claim 1, wherein a resist pattern is formed on the inorganic insulating film, and a step of forming a magnetic film on the inorganic insulating film on which the resist pattern is formed is sequentially performed. A magnetic head for magnetic recording, a method of manufacturing the same, and a magnetic disk device having the same mounted thereon.

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