JP2002133610A - Magnetic head for perpendicular recording and magnetic disk device mounting the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a magnetic head for perpendicular recording having a main pole shape without the erasure of the adjacent track even when there is a yaw angle, its making method and a magnetic disk device mounting the magnetic head. SOLUTION: The tip of the main pole of the magnetic head for perpendicular recording is made into a shape changing at an angle with respect to the perpendicular direction to a flying surface. This shape is provided by using an etching and a lift-off method. By making the tip of the main pole of the magnetic head for perpendicular recording into the shape changing at the angle with respect to the perpendicular direction to the flying surface, the magnetic head for perpendicular recording without the erasure of the adjacent track is made so that the magnetic field strength of the head does not degrade or increases, and the magnetic disk device using this can be obtained.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a magnetic head for perpendicular recording, a method of manufacturing the same, and a magnetic disk drive equipped with the magnetic head for perpendicular recording.

[0002]

2. Description of the Related Art In a magnetic disk drive, data on a recording medium is read and written by a magnetic head. In order to increase the recording capacity per unit area of the magnetic disk, it is necessary to improve the areal recording density. However, the current in-plane recording method has a problem that when the size of the recording bit is reduced, the recording bit disappears due to thermal fluctuation and the surface recording density cannot be increased. In order to solve this problem, a perpendicular recording method for recording a magnetization signal in a direction perpendicular to the medium is being studied, and research and development are underway.

As the reproducing head, the same head can be used for both the perpendicular recording method and the in-plane recording method, for example, a giant magnetoresistive head (GMR head) or a tunnel magnetoresistive head (TMR head).

On the other hand, the recording head may use the same ring head as that used for in-plane recording. However, since the ring head performs recording using only the vertical component of the magnetic flux circulating from the upper magnetic pole to the lower magnetic pole, the magnetic field strength is reduced. And the magnetic field gradient in the vertical direction is not steep. For this reason,
A single pole head has been proposed as a recording head suitable for perpendicular recording. In the case of a single pole head, as shown in FIG.
The recording magnetic field distribution has a width dependent on the main pole film thickness 4, and the shape of the main pole greatly affects the magnetization pattern of the medium.

[0005]

In order to increase the recording density, it is necessary to increase the track density and the linear recording density. The point is that there is a response to the yaw angle. The yaw angle refers to the inclination of the magnetic head on the magnetic disk with respect to the track traveling direction, and specifically, the track traveling direction at the main magnetic pole position of the recording head and the longitudinal direction of the slider on which the recording head is mounted. And the angle between them.
As shown in FIG. 3A, when the yaw angle is 0 degree, the recording width depends on the geometric track width 5 of the main pole, and the main pole thickness 4
However, when the yaw angle is attached as shown in FIG. 3B, that is, when the yaw angle is other than 0 degrees, the recording width is effectively increased depending on the main magnetic pole film thickness. There is a problem that adjacent tracks are erased.

There is a method of using a two-stage actuator to always keep the yaw angle at zero. However, since the two-stage actuator is expensive, there is a problem of an increase in manufacturing cost.

As a countermeasure against the case where the yaw angle is applied, Japanese Patent Application No. 2000-286842 describes that the main magnetic pole shape as viewed from the flying surface of the head is changed to a trapezoidal shape as shown in FIG. A technique for preventing erasure of an adjacent track by doing so is disclosed. Here, α in FIG.
This is the angle between the hypotenuse of the trapezoid and the track running direction. However, when the shape of the air bearing surface of the main pole is trapezoidal, the recording magnetic field intensity decreases. FIG. 4B shows the relationship between the maximum magnetic field strength of the main pole having the trapezoidal floating surface shape and α. It can be seen that increasing α increases the magnetic field strength. Further, Japanese Patent Application No. 2000-76333 discloses a technique of removing a part of a recording head magnetic pole to reduce the protrusion of the magnetic pole to an adjacent track, thereby preventing erasing of the adjacent track. However, also in this case, the head magnetic field intensity decreases. Since the problem of thermal fluctuation becomes more remarkable as the size of the recording bit decreases, the coercive force of the medium tends to increase as a measure against thermal fluctuation. Since the recording magnetic field of the head is required to have a necessary and sufficient magnitude to enable recording on the medium, a decrease in the recording magnetic field strength is a major obstacle in improving the areal recording density.

The present invention relates to a perpendicular recording magnetic head having a main pole shape without erasure of an adjacent track even when a yaw angle is applied without reducing the recording magnetic field strength, a method of manufacturing the same, and a perpendicular recording magnetic head. Is provided.

[0009]

SUMMARY OF THE INVENTION The inventors of the present invention have made a single-pole head having a shape in which a slope portion is provided at the tip of a main pole, so that the recording magnetic field intensity is not reduced or increased, and the recording magnetic field intensity is increased. It has been found that erasure of adjacent tracks can be prevented. In the single-pole head according to the present invention, the surface of the main pole located on the upstream side in the rotation direction of the recording medium opposed to the recording head, that is, on the leading side is inclined with respect to the air bearing surface of the main pole. That is, a tapered surface is provided at the tip of the main magnetic pole. By providing the tapered surface in this way, the generated recording magnetic field intensity can be increased as compared with the case where no taper is provided.

By optimizing the manner in which the tapered surface inclines with respect to the air bearing surface of the main pole, not only can the recording magnetic field be strengthened, but also the generated recording magnetic field can be further reduced. Specifically, the angle between the tapered surface and the main magnetic pole air bearing surface (hereinafter referred to as the main magnetic pole tip angle) is set to 45 degrees or more and 75 degrees or less.

The tapered surface may be provided not on the trailing side but on the leading side of the main pole. Also, it may be provided on both the trailing side and the leading side.

There are the following three methods for manufacturing a main pole having such a tapered surface.

In a first manufacturing method, a step of forming a resist pattern on an inorganic insulating film, a step of etching the inorganic insulating film using the resist pattern as a mask to form a slope, and removing the resist pattern A step of forming a resist pattern on the inorganic insulating film, a step of forming a magnetic film on the inorganic insulating film, a step of removing the resist pattern, and a step of flattening the magnetic film by polishing. This is a manufacturing method performed sequentially.

As a polishing method, a chemical mechanical polishing method is generally used, but other appropriate methods may be used.

A second manufacturing method is a method of forming a tapered surface by a so-called lift-off method, in which a resist pattern is formed on an inorganic insulating film, and the inorganic insulating film is sputtered, and the resist pattern and the resist pattern adhered thereto. Removing the inorganic insulating film, forming a slope, forming a resist pattern on the inorganic insulating film, forming a magnetic film on the inorganic insulating film, removing the resist pattern, This is a manufacturing method of sequentially performing a step of flattening the magnetic film by polishing.

The third manufacturing method is a manufacturing method in which a step of forming a resist pattern on a magnetic film and a step of forming a slope by etching the magnetic film using the resist pattern as a mask are sequentially performed.

By manufacturing the main magnetic pole in this way,
It is possible to provide an excellent single-pole head that does not erase adjacent tracks while preventing a decrease in the recording magnetic field strength or increasing the magnetic field strength. In addition, a perpendicular recording medium having a soft magnetic backing layer and a magnetic recording device equipped with this single-pole head provide a magnetic recording device with excellent heat fluctuation and high areal recording density as compared with an in-plane recording method. Can be.

[0018]

(Embodiment 1) Hereinafter, the present invention will be described with reference to the drawings. FIG. 5 is a schematic diagram of a medium-head system of a magnetic disk drive using the present invention (however, the magnification of the drawing is not uniform). The magnetic disk device records and reproduces a magnetization signal on a magnetic disk 11 by a magnetic head 14 attached to a slider 13 fixed to a tip of a suspension arm 12. The magnetic head moves (seeks) the disk in the radial direction by the swing operation of the suspension arm. At this time, a yaw angle S is generated as shown in FIG. In the current magnetic recording device, the range of the yaw angle S is about ± 30 °. FIG. 6 is a schematic diagram showing the relationship between the perpendicular recording / reproducing head and the magnetic disk. The perpendicular recording / reproducing head includes a recording head section 16 and a reproducing head section 17. The recording head is a so-called single-pole head, and the reproducing head has a structure including a reproducing element disposed between a soft magnetic first shield layer and a second shield layer. As a reproducing element, a giant magnetoresistance effect element (G
MR element) and tunnel magnetoresistive element (TMR element)
Are used. FIG. 7 shows a schematic diagram of a perpendicular recording / reproducing head. The magnetic field from the main pole of the single-pole head passes through the recording layer and the backing layer to form a magnetic circuit that enters the upper shield 3, which is the auxiliary pole, and records the magnetization pattern on the recording layer.

FIG. 8 shows the main pole shape of the magnetic head of the present invention. The leading magnetic pole located on the upstream side in the disk rotation direction was inclined at an angle on the air bearing surface side. FIG. 1 shows the relationship between the tip angle q and the maximum magnetic field strength in this case, and the relationship between the half-width of the recording magnetic field distribution generated from the main pole in the disk rotation direction and the tip angle. The magnetic field intensity increases until the tip angle is around 45 degrees, and then decreases. However, a larger magnetic field intensity is obtained from around 0 to 75 degrees when the tip of the main pole is not angled. . It is considered that the magnetic flux is likely to concentrate on the sharp portion of the magnetic body, and this is probably because the amount of the magnetic flux flowing from the corner of the main magnetic pole to the backing layer is reduced.

Further, from the relationship between the half-width in the disk rotation direction and the tip angle of the recording magnetic field distribution generated from the main magnetic pole shown in FIG. 1, the half-width of the magnetic field in the disk rotation direction decreases, that is, the recording magnetic field converges more. It is understood that it is done. This is presumably because the provision of the tapered surface reduced the air bearing surface exposed main magnetic pole film thickness 22. The half width decreases sharply until the tip angle becomes about 45 degrees, and the change thereafter is small. As described above, in order to obtain the recording magnetic field convergence effect, it is effective to set the tip angle q in the range of 45 degrees or more and 75 degrees or less.

FIG. 9 shows the recording magnetic field distribution in the disk rotation direction of the single pole head according to the present invention and the conventional single pole head having a tip angle of 0 °. Compared to conventional technology,
It can be seen that the single pole head of the present invention has a larger maximum magnetic field strength and a smaller recording magnetic field width. At this time, the magnetic field gradient on the trailing side, which greatly affects the recording magnetization pattern, has not deteriorated. Therefore, even when the yaw angle is applied, the recording width does not increase, and erasure of the adjacent track can be prevented.

(Embodiment 2) In the first embodiment, a tapered surface is provided on the leading side of the tip of the main pole. However, a tapered surface may be provided on the trailing side of the main pole. FIG. 10A shows the shape of a single pole head in which the trailing main pole located on the downstream side in the disk rotation direction is inclined at an angle on the air bearing surface side of the main pole. Even in this case, the magnetic field width in the disk rotation direction can be narrowed without deteriorating or increasing the magnetic field strength. The present invention can provide a magnetic head for perpendicular recording without erasing.

(Embodiment 3) In Embodiment 3, FIG.
As shown in (1), tapered surfaces were provided on both the leading and trailing sides of the main pole tip. The angles on the leading and trailing sides may be set independently. Even in this case, the magnetic field width in the disk rotation direction can be reduced without deteriorating or increasing the magnetic field strength even if the shape of the main magnetic pole is inclined at the air bearing surface side and the yaw angle is added. However, it is possible to provide a magnetic head for perpendicular recording in which the degree of increase in the recording width is suppressed more than the geometrical track width and the adjacent track is not erased.

(Embodiment 4) Embodiment 4 is an embodiment in which the tapered surface provided at the tip of the main pole is a curved surface. In the manufacturing process, the tapered surface may be a curved surface instead of a flat surface, but the same effect can be obtained even if the tapered surface is a curved surface.

FIG. 11 is a sectional view of the single pole head viewed from the track width direction. In this case, the tapered surface provided at the tip of the main pole is a curved surface. In FIG. 11, the length indicated by h is the projected length of the curve formed by the curved tapered surface when the tip of the main pole is viewed from the track direction in the flying height direction, and the length indicated by W is The length of the curved surface formed by the curved tapered surface with respect to the air bearing surface.

Even in this case, the angle q defined by the inverse tangent of W / h, that is, q = arcTan
When (W / h) is in the range of 45 degrees or more and 75 degrees or less, the same effect as when the tip angle is specified in the range of 45 degrees or more and 75 degrees or less can be obtained.

(Embodiment 5) FIGS. 12 and 13 are process diagrams of a method of manufacturing the single pole head shown in Embodiment 1. FIG. For ease of understanding, the scale of the film thickness and the like in the figure is not fixed. FIG. 12A shows a state where a resist pattern is formed on the inorganic insulating film. Below the inorganic insulating film,
A reproducing head and an auxiliary pole layer are formed. The inorganic insulating film is made of SiC, A in addition to the conventionally used Al ₂ O _{3.
lN, Ta 2 O 5, TiC} , TiO 2, SiO 2 can be used.

FIG. 3B shows the result of etching the inorganic insulating film using the resist pattern as a mask. For the sake of simplicity, in the drawings after FIG. 12B, the read head portion and the auxiliary magnetic pole layer are omitted. Since the resist edge is shaded by the resist, it is difficult to be etched, and a slope as shown in FIG. 12B is formed by the etching. As an etching gas, Al ₂ was used as an insulating film.
When O ₃ or AlN is used, BCl ₃ or BCl ₃
A mixed gas of Cl ₂ and Cl ₂ is preferred. SiC, AlN, T
In the case of a ₂ O ₅ , TiC, TiO ₂ , and SiO ₂ , fluorine-based CHF ₃ , CF ₄ , SF ₆ ,
C ₄ F ₈ or the like can be used.

After etching, the resist is removed, as shown in FIG. (D) shows a state where a resist pattern is formed. FIG. 13E shows a state where the magnetic film is plated. Since the saturation magnetic flux density is large and the soft magnetic characteristics are good, the material of the magnetic film is Fe ₅₅
Ni ₄₅ , CoNiFe, or the like can be used. As the plating base film, a magnetic film having the same composition as the plating film or a non-magnetic film may be used. (F) shows where the resist has been removed. (G) shows that the main magnetic pole is formed by flattening the air bearing surface of the magnetic film by polishing. For flattening,
A polishing method such as chemical mechanical polishing (CMP) may be used. In the process of exposing the air bearing surface, the air bearing surface may be set at the position indicated by the dashed line. According to this manufacturing method, it is possible to manufacture the vertical single pole head of the present invention in the case where the leading side has a tapered surface.

The present embodiment shows a method of manufacturing a single pole head in which a tapered surface is provided on the leading side of the main pole. A single pole head having a tapered surface can be manufactured.

(Embodiment 6) FIG. 14 shows a process chart of another method of manufacturing a single pole head of the present invention by a lift-off method. As in FIG. 12, a read head portion and an auxiliary pole layer are formed below the inorganic insulating film, but are omitted for simplicity. First, a resist pattern having a shape as shown in FIG. 14 is formed on the inorganic insulating film. A read head and a soft magnetic film for an auxiliary pole are formed below the inorganic insulating film, but are not shown in the figure. (A) shows a state where the resist pattern is formed. Next, in order to form a slope, sputtering is performed on the resist pattern and the inorganic insulating film. (B) shows the result of the sputtering. The angle of the slope can be controlled by adjusting the distance between the target and the substrate during sputtering, the gas pressure during sputtering, the angle of the substrate with respect to the target, and the like. After the sputtering, the resist and the inorganic insulating film attached thereto are removed. (C) shows a state where the resist is removed. (D) shows a state where a resist pattern is formed. (E) shows that the magnetic film was plated. (F) shows where the resist was removed. (G) shows a state where the upper surface of the magnetic film is flattened to form a main pole. In the process of exposing the air bearing surface, the air bearing surface may be set at the position indicated by the dashed line. According to this manufacturing method, the magnetic head for perpendicular recording of the present invention having an inclination on the leading side can be manufactured.

(Embodiment 7) FIG. 15 shows a process chart of another method of manufacturing a single pole head according to the present invention. (A) shows a state where a resist pattern having a shape as shown in the figure is formed on the inorganic insulating film and the magnetic film to be the main pole in this order.
The magnetic film is etched using this resist pattern as a mask, as shown in FIG. (C) shows a state where the resist is removed after the etching. In the process of exposing the air bearing surface, the air bearing surface may be set at the position indicated by the dashed line. According to this manufacturing method, the perpendicular recording magnetic head of the present invention having an inclination on the trailing side can be manufactured.

[0033]

By forming a tapered surface at the leading end of the main pole on the leading side or trailing side, the maximum recording magnetic field strength can be maintained or increased even when the yaw angle is applied. It is possible to provide a magnetic head for perpendicular recording without erasing adjacent tracks by suppressing the increase in the recording width from the geometric track width, and by mounting this head, a magnetic disk device without erasing adjacent tracks can be provided. Can be manufactured.

[Brief description of the drawings]

FIG. 1 is a diagram showing a relationship between a head magnetic field strength and a tip angle of a single pole head according to the present invention, and a relationship between a magnetic field width in a disk rotation direction and a tip angle.

FIG. 2 is a view for explaining a general distribution of a perpendicular component of a head magnetic field in a disk rotation direction by a combination of a conventional two-layer recording medium having a backing layer and a single-pole head.

FIG. 3 is a schematic diagram showing a relationship between a main pole of a conventional magnetic head for perpendicular recording and tracks on a disk.

FIG. 4 is a schematic diagram of a main pole shape of a conventional single-pole head, and a diagram showing a relationship between the main pole shape and a perpendicular component of a head magnetic field.

FIG. 5 is a conceptual diagram illustrating the reason for the occurrence of a yaw angle.

FIG. 6 is a schematic diagram showing the relationship between a perpendicular recording magnetic head and a magnetic disk according to the present invention.

FIG. 7 is a schematic diagram illustrating the concept of perpendicular recording.

FIG. 8 is a schematic diagram showing a main magnetic pole shape of the single magnetic pole head described in the first embodiment of the present invention.

FIG. 9 is a magnetic field strength distribution in the disk running direction of the single-pole head described in the first embodiment of the present invention.

FIG. 10 is a schematic diagram showing a main pole shape of a single-pole head described in Examples 2 and 3 of the present invention.

FIG. 11 is a schematic diagram showing a main pole shape of a single-pole head described in Embodiment 4 of the present invention.

FIG. 12 is a schematic diagram of a main magnetic pole forming step of a single magnetic pole head described in Embodiment 5 of the present invention.

FIG. 13 is a schematic diagram of a main magnetic pole forming step of a single magnetic pole head described in Embodiment 5 of the present invention.

FIG. 14 is a schematic diagram of a main magnetic pole forming step of a single magnetic pole head described in Embodiment 6 of the present invention.

FIG. 15 is a schematic view of a main magnetic pole forming step of the single magnetic pole head described in Embodiment 7 of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Main magnetic pole, 2 ... Coil, 3 ... Auxiliary magnetic pole, 4 ... Main magnetic pole film thickness, 5 ... Geometric track width, 6 ... Recording width, 7 ... Reproducing element, 8 ... Lower shield, 9 ... Self-track, 10 ... adjacent track, 11 ... magnetic disk, 12 ... suspension arm, 13 ... slider, 14 ... magnetic head, 15 ...
Rotary actuator, 16 ... Recording head, 17 ...
Disk rotation direction, 18: playback head, 19: recording layer,
Reference Signs List 20: Backing layer, 21: Floating surface, 22: Floating surface exposed main magnetic pole film thickness, 23: Disk radial direction, 24: Trailing side, 25: Leading side, 26: Adjacent track erase area, 27: Resist, 28 ... Inorganic insulating film, 29: magnetic film, q: tip angle, qt: trailing side tip angle.

Continuing on the front page (72) Inventor Tomohiro Okada 1-280 Higashi Koigakubo, Kokubunji-shi, Tokyo Inside the Central Research Laboratory of Hitachi, Ltd. In-house F-term (reference) 5D033 AA01 AA05 BA07 BB43 CA02 DA07 DA31

Claims (11)

[Claims] 1. A single pole head having a main pole and an auxiliary pole, wherein the main pole is tapered in a flying height direction as viewed from a flying surface on a leading side or a trailing side. Single pole head. 2. A recording / reproducing head comprising a reproducing head and a single-pole type recording head having a main magnetic pole and an auxiliary magnetic pole, wherein the main magnetic pole has a flying height as viewed from a flying surface on a leading side or a trailing side. A recording / reproducing head having a tapered surface that intersects the air bearing surface in a vertical direction. 3. The recording / reproducing head according to claim 2, wherein the angle formed between the air bearing surface of said main pole and said tapered surface is 7 degrees.
A recording / reproducing head having an angle of 5 degrees or less. 4. The recording / reproducing head according to claim 2, wherein the angle formed between the air bearing surface of the main pole and the tapered surface is four.
A recording / reproducing head having an angle of 5 degrees or more and 75 degrees or less. 5. The read / write head according to claim 2, wherein said tapered surface is provided on a leading side and a trailing side of a main pole. 6. A recording / reproducing head having a reproducing head and a single-pole type recording head having a main pole and an auxiliary pole, wherein the main pole has a height as viewed from a flying surface on a leading side or a trailing side. A projection length h in a flying height direction of a line formed by the tapered surface with respect to a cross section of the main pole viewed from the track direction, Using the projection length W of the flying surface of
A recording / reproducing head, wherein an angle θ defined by = arcTan (W / h) is 45 degrees or more and 75 degrees or less. 7. A step of forming a first resist pattern on the inorganic insulating film, a step of etching the inorganic insulating film using the first resist pattern as a mask to form a slope, and a step of forming the first resist pattern. Removing the pattern, forming a second resist pattern on the inorganic insulating film having the slope formed thereon, forming a groove in the second resist pattern, and filling the groove with a magnetic material Forming a main magnetic pole by sequentially performing a step of forming a magnetic film on the inorganic insulating film, a step of removing the second resist pattern, and a step of polishing and flattening the magnetic film. A method for manufacturing a single-pole head, comprising: 8. A step of forming a first resist pattern on the inorganic insulating film; a step of sputtering an inorganic insulating film material on the inorganic insulating film and the first resist pattern; Removing the inorganic insulating film adhered on the first resist pattern;
Forming a second resist pattern on the inorganic insulating film from which the resist pattern has been removed, forming a groove in the second resist pattern, and filling the groove with a magnetic material to form the inorganic insulating film. Forming a main pole by sequentially performing a step of forming a magnetic film thereon, a step of removing the second resist pattern, and a step of polishing and flattening the magnetic film. Head manufacturing method. 9. A main magnetic pole comprising: a step of forming a resist pattern on a magnetic film; a step of forming a slope by etching the magnetic film using the resist pattern as a mask; and a step of removing the resist pattern. Forming a single pole head. 10. A single pole head having an auxiliary pole and a main pole tapered in a flying height direction as viewed from a flying surface on a leading side or a trailing side, and a perpendicular magnetic recording medium having a soft magnetic underlayer. A magnetic disk drive, wherein recording is performed on the perpendicular magnetic recording medium by the single pole head. 11. A recording / reproducing head comprising: a reproducing head; and a single-pole type recording head having a main pole and an auxiliary pole;
A perpendicular magnetic recording medium having a soft magnetic backing layer, wherein the main pole has a tapered surface that intersects with the air bearing surface in a flying height direction viewed from the air bearing surface on the leading or trailing side, and A magnetic disk drive, wherein the angle formed between the air bearing surface of the main pole and the tapered surface is not less than 45 degrees and not more than 75 degrees.