JP3740361B2 - Magnetic head for perpendicular recording and magnetic disk drive equipped with the same - Google Patents
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Description
【０００１】
【発明の属する技術分野】
本発明は、垂直記録用磁気ヘッドとその作製方法及びその垂直記録用磁気ヘッドを搭載した磁気ディスク装置に関するものである。
【０００２】
【従来の技術】
磁気ディスク装置では、記録媒体上のデ−タは磁気ヘッドによって読み書きされる。磁気ディスクの単位面積当たりの記録容量を多くするためには、面記録密度を向上する必要がある。しかしながら、現行の面内記録方式では、記録ビットの大きさが小さくなると、熱揺らぎのために記録ビットが消失し面記録密度が上げられないという問題がある。この問題の解決のために媒体に垂直な方向に磁化信号を記録する垂直記録方式が検討されており、研究・開発が進行している。
【０００３】
再生ヘッドに関しては、垂直記録方式、面内記録方式共に同じヘッド、例えば、巨大磁気抵抗効果型ヘッド（ＧＭＲヘッド）やトンネル磁気抵抗効果型ヘッド（ＴＭＲヘッド）を用いることができる。
【０００４】
一方、記録ヘッドに関しては、面内記録と同じリングヘッドを用いることもできるが、リングヘッドは上部磁極から下部磁極へ環流する磁束の垂直成分のみを用いて記録を行うため、磁界強度が弱く、垂直方向の磁界勾配も急峻でないという問題がある。このため、垂直記録に適した記録ヘッドとして単磁極ヘッドが提案されている。単磁極ヘッドの場合、図２に示すように、記録磁界分布は主磁極膜厚４に依存した幅を有し、主磁極形状が媒体の磁化パターンに大きな影響を与える。
【０００５】
【発明が解決しようとする課題】
記録密度の向上のためには、トラック密度と線記録密度を向上する必要があるが、記録密度を高める上で垂直、面内記録方式に共通して障害となっている点に、ヨー角への対応がある。ヨー角とは、磁気ディスク上にある磁気ヘッドのトラック走行方向に対する傾きをいい、具体的には、記録ヘッドの主磁極位置におおけるトラック走行方向と記録ヘッドが搭載されているスライダの長手方向とのなす角を言う。図３（ａ）のように、ヨー角が０度の場合には記録幅は主磁極の幾何学的トラック幅５に依存し、主磁極膜厚４には依存しないが、同図（ｂ）のようにヨー角が付いた場合、すなわちヨー角が０度以外の場合、主磁極膜厚に依存して記録幅が実効的に広くなってしまい、隣接トラックを消去してしまうという問題がある。
【０００６】
ヨー角を常に０とするためには、２段式のアクチュエータを用いる方法があるが、２段式のアクチュエータは高価なため、製造コストの上昇が問題となる。
【０００７】
ヨー角がついた場合への対応策として、特願２０００−２８６８４２号明細書には、ヘッドの浮上面から見た主磁極形状を図４（ａ）に示されるような台形形状にすることによって隣接トラックの消去を防止する技術が開示されている。ここで、図４（ａ）のαは、台形の斜辺とトラック走行方向とのなす角度である。しかし、主磁極の浮上面形状を台形にすると記録磁界強度が減少してしまう。図４（ｂ）に、浮上面形状が台形である主磁極の最大磁界強度とαの関係を示す。αを大きくすると磁界強度が減少している事がわかる。また、特願２０００−７６３３３号明細書には、記録ヘッド磁極の一部を除去することにより磁極の隣接トラックへのはみ出しを低減し、隣接トラックの消去を防止する技術が開示されている。しかし、この場合もヘッド磁界強度が減少してしまう。記録ビットの大きさが小さくなるほど熱揺らぎの問題は顕著になるので、熱揺らぎ対策として媒体の保磁力は増加する傾向にある。ヘッドの記録磁界は媒体へ記録を行うことができる程度に必要十分な大きさを有することが要求されるので、記録磁界強度の減少は面記録密度を向上する上で大きな障害となる。
【０００８】
本発明は記録磁界強度を減少させずに、ヨー角がついた場合にも隣接トラックの消去のない主磁極形状を持つ垂直記録用磁気ヘッドとその作製方法及びその垂直記録用磁気ヘッドを搭載した磁気ディスク装置を提供するものである。
【０００９】
【課題を解決するための手段】
本発明者らは、単磁極ヘッドの主磁極先端に斜面部分を設けた形状にすることにより、記録磁界強度を減少させずにあるいは増加させて、ヨー角による隣接トラックの消去を防止できることを見い出した。本発明の単磁極ヘッドにおいては、記録ヘッドが対抗する記録媒体の回転方向の上流方向、すなわちリーディング側に位置する前記主磁極の面を、主磁極の浮上面に対して傾斜させる。つまり、主磁極先端部にテーパ面を設ける。このようにテーパ面を設けることにより、発生する記録磁界強度をテーパを設けない場合よりも強めることができる。
【００１０】
また、このテーパ面の主磁極の浮上面に対する傾け方を最適化することにより、記録磁界を強めるだけではなく、発生する記録磁界をより絞ることができる。具体的には、テーパ面と主磁極浮上面のなす角度（以後、主磁極先端角度と略）を４５度以上７５度以下にする。
【００１１】
前記テーパ面は、主磁極のトレーリング側ではなくリーディング側に設けても良い。また、トレーリング側、リーディング側の両方に設けても良い。
【００１２】
このようなテーパ面を有する主磁極の製造方法としては、下記の３種類がある。
【００１３】
第１の製造方法は、無機絶縁膜上にレジストパターンを形成する工程と、該レジストパターンをマスクに前記無機絶縁膜をエッチングし、斜面を形成する工程と、該レジストパターンを除去する工程と、無機絶縁膜上にレジストパターンを形成する工程と、前記無機絶縁膜上に磁性膜を形成する工程と、前記レジストパターンを除去する工程と、該磁性膜を研磨による平坦化する工程を順次行う製造方法である。
【００１４】
研磨方法としては、ケミカルメカニカルポリッシング法が一般的に用いられているが、その他の適切な手法を用いても良い。
【００１５】
また、第２の製造方法はいわゆるリフトオフ法によりテーパ面を形成する方法であり、無機絶縁膜上にレジストパターンを形成し、無機絶縁膜上をスパッタし、該レジストパターンとそれに付着した無機絶縁膜を除去し、斜面を形成する工程と、無機絶縁膜上にレジストパターンを形成する工程と、前記無機絶縁膜上に磁性膜を形成する工程と、前記レジストパターンを除去する工程と、該磁性膜を研磨により平坦化する工程を順次行う製造方法である。
【００１６】
また、第３の製造方法は、磁性膜上にレジストパターンを形成する工程と、該レジストパターンをマスクに前記磁性膜をエッチングし、斜面を形成する工程を順次行う製造方法である。
【００１７】
このように主磁極を製造することにより、記録磁界強度の減少を防ぎ、あるいは磁界強度を増大させつつ、隣接トラックの消去が無い優れた単磁極ヘッドを提供することができる。また、軟磁性裏打層を有する垂直二層媒体とこの単磁極ヘッドを搭載した磁気記録装置により、面内記録方式に比べて、耐熱揺らぎ性に優れ面記録密度の高い磁気記録装置を提供することができる。
【００１８】
【発明の実施の形態】
（実施例１）
以下、本発明を図面を用いて説明する。図５は本発明を用いた磁気ディスク装置の媒体−ヘッド系の概略図である（但し、図の拡大倍率は均一では無い）。磁気ディスク装置は、磁気ディスク１１上に、サスペンションアーム１２の先端に固定されたスライダー１３についている磁気ヘッド１４によって磁化信号の記録再生を行なう。磁気ヘッドは、サスペンションアームのスイング動作によって、ディスクの半径方向への移動（シーク動作）を行う。このとき、図に５に示すようにヨー角Ｓが発生する。現行の磁気記録装置においては、ヨー角Ｓの範囲は±３０°程度である。図６に垂直用記録再生ヘッドと磁気ディスクとの関係の概略図を示す。垂直用記録再生ヘッドは、記録ヘッド部１６と再生ヘッド部１７からなる。記録ヘッドはいわゆる単磁極ヘッドであり、再生ヘッドは、軟磁性の第１のシールド層と第２のシールド層に挟まれて配置された再生素子を備えた構造を有している。再生素子としては、高感度であることから、巨大磁気抵抗効果素子（ＧＭＲ素子）やトンネル磁気抵抗効果素子（ＴＭＲ素子）等が用いられる。図７には、垂直用記録再生ヘッドの概略図を示す。単磁極ヘッドの主磁極からでた磁界は記録層、裏打ち層を通り、補助磁極である上部シールド３に入る磁気回路を形成し、記録層に磁化パターンを記録する。
【００１９】
図８に本発明の磁気ヘッドの主磁極形状を示す。ディスク回転方向の上流側に位置するリーディング側の主磁極の浮上面側の角をとり傾斜した形状にした。この形状にした場合の先端角度qと最大磁界強度の関係、及び主磁極から発生する記録磁界分布のディスク回転方向の半値幅と先端角度の関係を図１に示す。先端角度が４５度付近までは磁界強度が大きくなりその後減少しているが、先端角度が０度から７５度付近までは主磁極先端部に角度をつけない場合より大きな磁界強度が得られている。磁性体の尖った部分には磁束が集中しやすいと考えられるので、これは、主磁極の角から裏打ち層に流れる磁束の量が減ったためと考えられる。
【００２０】
また、図１に示された主磁極から発生する記録磁界分布のディスク回転方向の半値幅と先端角度の関係から、ディスク回転方向の磁界の半値幅は減少、すなわち記録磁界がより収束されることが分かる。これは、テーパ面を設けることにより、浮上面露出主磁極膜厚２２が小さくなったためであると考えられる。半値幅は先端角度４５度付近までは急激に減少し、その後の変化は小さい。以上、記録磁界の収束効果を得るためには、先端角度qを４５度以上７５度以下の範囲にすることが有効である。
【００２１】
図９には、本発明の単磁極ヘッドと、従来技術である先端角度が０度である単磁極ヘッドのディスク回転方向の記録磁界分布を示す。従来技術に比べて、本発明の単磁極ヘッドの方が、最大磁界強度も大きく記録磁界の幅も狭いことが分かる。この時、記録磁化パターンに大きく影響するトレーリング側の磁界勾配は劣化していない。したがって、ヨー角がついた場合でも記録幅が広がらず、隣接トラックの消去を防ぐことができる。
【００２２】
（実施例２）
実施例１では、主磁極先端部のリーディング側にテーパ面を設けたが、主磁極のトレーリング側にテーパ面を設けても良い。図１０（ａ）に示すように、ディスク回転方向の下流側に位置するトレーリング側の主磁極の浮上面側の角をとり傾斜した形状にした単磁極ヘッドの形状を示す。この場合でも、磁界強度を劣化させずにあるいは増加させてディスク回転方向の磁界幅を狭くでき、ヨー角が付いた場合でも、幾何学的トラック幅より記録幅の増加の程度を抑え、隣接トラックの消去をない、垂直記録用磁気ヘッドを提供できる。
【００２３】
（実施例３）
実施例３では、図１０（ｂ）に示すように、主磁極先端部のリーディング側とトレーリング側両方にテーパ面を設けた。リーディング側、トレーリング側の角度は独立に設定して良い。この場合であっても、主磁極の浮上面側の角をとり傾斜した形状にしても磁界強度の劣化させずにあるいは増加させてディスク回転方向の磁界幅を狭くでき、ヨー角が付いた場合でも、幾何学的トラック幅より記録幅の増加の程度を抑え、隣接トラックの消去のない、垂直記録用磁気ヘッドを提供できる。
【００２４】
（実施例４）
実施例４は主磁極先端部に設けるテーパ面が曲面である場合の実施例である。製造プロセス上、テーパ面が平面とならずに曲面となる場合があり得るが、テーパ面が曲面であっても同じ効果が得られる。
【００２５】
図１１は単磁極ヘッドをトラック幅方向から見た場合の断面図である。主磁極先端部に設けられた テーパ面はこの場合曲面である。図１１中、ｈで示される長さは、主磁極先端部をトラック方向から見た場合に曲面形状のテーパ面がなす曲線の、浮上高さ方向に対する射影長、Ｗで示される長さは、前記曲面形状のテーパ面がなす曲線の浮上面に対する長である。
【００２６】
また、この場合であっても、Ｗ／ｈの逆タンジェントで定義される角度q、つまりq＝ａｒｃＴａｎ（Ｗ／ｈ）が４５度以上７５度以下の範囲であれば、先端角度を４５度以上７５度以下に規定した場合と同じ効果が得られる。
【００２７】
（実施例５）
図１２、図１３に実施例１に示した単磁極ヘッドの製造方法の行程図を示す。理解しやすさのため、図中の膜厚等の縮尺は一定では無くしている。図１２の（ａ）は、無機絶縁膜上にレジストパターンを形成したところを示す。無機絶縁膜の下部には、再生ヘッド部と補助磁極層とが形成されている。無機絶縁膜は、従来用いられているＡｌ2Ｏ3の他にＳｉＣ、ＡｌＮ、Ｔａ2Ｏ5、ＴｉＣ、ＴｉＯ2、ＳｉＯ2が使用可能である。
【００２８】
このレジストパターンをマスクとして用いて、無機絶縁膜のエッチングを行ったところを（ｂ）に示す。簡便のため、図１２の（ｂ）以降の図面では、再生ヘッド部と補助磁極層は省略して書いている。レジスト端部はレジストの陰になるのでエッチングされにくく、エッチングにより図１２（ｂ）のような斜面が形成される。エッチングガスとしては、絶縁膜としてＡｌ2Ｏ3、ＡｌＮを用いた場合にはＢＣｌ3、またはＢＣｌ3とＣｌ2の混合ガスが好適である。ＳｉＣ、ＡｌＮ、Ｔａ2Ｏ5、ＴｉＣ、ＴｉＯ2、ＳｉＯ2の場合は、エッチングされやすいためフッ素系のＣＨＦ3、ＣＦ4、ＳＦ6、Ｃ4Ｆ8等を用いることができる。
【００２９】
エッチング後、レジストを除去したところを（ｃ）に示す。（ｄ）には、レジストパターンを形成したところを示した。図１３の（ｅ）には磁性膜をめっきしたところを示した。飽和磁束密度が大きく軟磁気特性が良好であることから、磁性膜の材料としてはＦｅ55Ｎｉ45やＣｏＮｉＦｅ等を用いることができる。メッキ下地膜は、メッキ膜と同じ組成の磁性膜を用いても、非磁性膜を用いても良い。（ｆ）はレジストを除去したところを示す。（ｇ）は、研磨により磁性膜浮上面の平坦化を行い主磁極を形成したところを示す。平坦化には、ケミカルメカニカルポリッシング（ＣＭＰ）等の研摩法を用いれば良い。浮上面を出す行程において、浮上面は一点鎖線の位置にすれば良い。この製造方法により、リーディング側にテーパ面がある場合の本発明の垂直用単磁極ヘッドを製造できる。
【００３０】
本実施例は、主磁極のリーディング側にテーパ面を設けた場合の単磁極ヘッドの製造法を示したものであるが、レジストの形成パターンを左右逆にすることにより、トレーリング側にテーパ面がある単磁極ヘッドを製造することができる。
【００３１】
（実施例６）
図１４に、リフトオフ方式による本発明の単磁極ヘッドの別の製造方法の行程図を示す。図１２と同様、無機絶縁膜の下部には、再生ヘッド部と補助磁極層が形成されているが、簡便のため省略する。第１に、無機絶縁膜上に図１４のような形状のレジストパターンを形成する。無機絶縁膜の下には、再生ヘッドと、補助磁極用の軟磁性膜が形成されているが、図では省略する。レジストパターンが形成されたところを（ａ）に示す。次に、斜面を形成するために、レジストパターンと無機絶縁膜上にスパッタリングを行う。スパッタを行ったところを（ｂ）に示す。斜面の角度は、スパッタリングの際のターゲット−基板間距離、スパッタ時のガス圧、ターゲットに対する基板の角度などを調整することにより制御できる。
スパッタ後、レジスト及びそれに付着した無機絶縁膜を除去する。（ｃ）には、レジストを除去したところを示す。（ｄ）には、レジストパターンを形成したところを示した。（ｅ）には磁性膜をめっきしたところを示した。 （ｆ）はレジストを除去したところを示した。（ｇ）に磁性膜上面の平坦化を行い、主磁極を形成したところを示す。浮上面を出す行程において、浮上面は一点鎖線の位置にすれば良い。この製造方法により、リーディング側に傾斜がある本発明の垂直記録用磁気ヘッドを製造できる。
【００３２】
（実施例７）
図１５に、本発明の単磁極ヘッドの別の製造方法の行程図を示す。無機絶縁膜、主磁極となる磁性膜の順に積層された上に、図のような形状のレジストパターンを形成したところを（ａ）に示す。このレジストパターンをマスクとして用いて、磁性膜のエッチングを行ったところを（ｂ）に示す。エッチング後、レジストを除去したところを（ｃ）に示す。浮上面を出す行程において、浮上面は一点鎖線の位置にすれば良い。この製造方法により、トレーリング側に傾斜がある本発明の垂直記録用磁気ヘッドを製造できる。
【００３３】
【発明の効果】
主磁極のリーディング側またはトレーリング側先端部にテーパ面を設けた形状にすることにより、ヨー角が付いた場合でも、最大記録磁界強度を劣化させずにあるいは増加させて、幾何学的トラック幅より記録幅の増加の程度を抑え、隣接トラックの消去をない垂直記録用磁気ヘッドを提供でき、また、本ヘッドを搭載することにより、隣接トラックの消去のない磁気ディスク装置を製造できる。
【図面の簡単な説明】
【図１】本発明の単磁極ヘッドのヘッド磁界強度と先端角度、及びディスク回転方向の磁界幅と先端角度の関係を示した図。
【図２】従来の裏打ち層を有する２層記録媒体と単磁極ヘッドの組み合わせによる、ディスク回転方向のヘッド磁界垂直成分の一般的な分布を説明する図。
【図３】従来の垂直記録用磁気ヘッドの主磁極とディスク上のトラックとの関係の概略図。
【図４】従来技術の単磁極ヘッドの主磁極形状の概略図、及び主磁極形状とヘッド磁界垂直成分の関係を示した図。
【図５】ヨー角の発生理由を説明する概念図。
【図６】本発明の垂直記録用磁気ヘッドと磁気ディスクとの関係の概略図。
【図７】垂直記録の概念を示した概略図。
【図８】本発明の実施例１に記載された単磁極ヘッドの主磁極形状を示す概略図。
【図９】本発明の実施例１に記載された単磁極ヘッドのディスク走行方向の磁界強度分布。
【図１０】本発明の実施例２および３に記載された単磁極ヘッドの主磁極形状を示す概略図。
【図１１】本発明の実施例４に記載された単磁極ヘッドの主磁極形状を示す概略図。
【図１２】本発明の実施例５に記載された単磁極ヘッドの主磁極形成工程の概略図。
【図１３】本発明の実施例５に記載された単磁極ヘッドの主磁極形成工程の概略図。
【図１４】本発明の実施例６に記載された単磁極ヘッドの主磁極形成工程の概略図。
【図１５】本発明の実施例７に記載された単磁極ヘッドの主磁極形成工程の概略図。
【符号の説明】
１…主磁極、２…コイル、３…補助磁極、４…主磁極膜厚、５…幾何学的トラック幅、６…記録幅、７…再生素子、８…下部シールド、９…自己トラック、１０…隣接トラック、１１…磁気ディスク、１２…サスペンションアーム、１３…スライダー、１４…磁気ヘッド、１５…ロータリーアクチュエータ、１６…記録ヘッド、１７…ディスク回転方向、１８…再生ヘッド、１９…記録層、２０…裏打ち層、２１…浮上面、２２…浮上面露出主磁極膜厚、２３…ディスク半径方向、２４…トレーリング側、２５…リーディング側、２６…隣接トラック消去領域、２７…レジスト、２８…無機絶縁膜、２９…磁性膜、q…先端角度、qt…トレーリング側先端角度。[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a perpendicular recording magnetic head, a method of manufacturing the perpendicular recording magnetic head, and a magnetic disk device on which the perpendicular recording magnetic head is mounted.
[0002]
[Prior art]
In a magnetic disk device, data on a recording medium is read and written by a magnetic head. In order to increase the recording capacity per unit area of the magnetic disk, it is necessary to improve the surface recording density. However, the current in-plane recording method has a problem that when the size of the recording bit is reduced, the recording bit disappears due to thermal fluctuation and the surface recording density cannot be increased. In order to solve this problem, a perpendicular recording method for recording a magnetization signal in a direction perpendicular to the medium has been studied, and research and development are in progress.
[0003]
Regarding the reproducing head, the same head for both the perpendicular recording method and the in-plane recording method, for example, a giant magnetoresistive head (GMR head) or a tunnel magnetoresistive head (TMR head) can be used.
[0004]
On the other hand, for the recording head, the same ring head as in the in-plane recording can be used, but since the ring head performs recording using only the vertical component of the magnetic flux circulating from the upper magnetic pole to the lower magnetic pole, the magnetic field strength is weak, There is a problem that the magnetic field gradient in the vertical direction is not steep. For this reason, a single pole head has been proposed as a recording head suitable for perpendicular recording. In the case of a single magnetic pole head, as shown in FIG. 2, the recording magnetic field distribution has a width depending on the main magnetic pole film thickness 4, and the main magnetic pole shape greatly affects the magnetization pattern of the medium.
[0005]
[Problems to be solved by the invention]
In order to improve the recording density, it is necessary to improve the track density and the linear recording density. However, in terms of increasing the recording density, there is a common obstacle to the perpendicular and in-plane recording methods. There is correspondence. The yaw angle refers to the inclination of the magnetic head on the magnetic disk with respect to the track traveling direction. Specifically, the track traveling direction at the main magnetic pole position of the recording head and the longitudinal direction of the slider on which the recording head is mounted. Say the angle between. As shown in FIG. 3A, when the yaw angle is 0 degree, the recording width depends on the geometrical track width 5 of the main magnetic pole and does not depend on the main magnetic pole film thickness 4, but FIG. When the yaw angle is added as shown in FIG. 2, that is, when the yaw angle is other than 0 degrees, the recording width is effectively increased depending on the main pole film thickness, and the adjacent track is erased. .
[0006]
In order to always set the yaw angle to 0, there is a method using a two-stage actuator. However, since the two-stage actuator is expensive, an increase in manufacturing cost becomes a problem.
[0007]
As a countermeasure against the case where the yaw angle is attached, Japanese Patent Application No. 2000-286842 discloses that the main magnetic pole shape as seen from the air bearing surface of the head is trapezoidal as shown in FIG. A technique for preventing erasure of adjacent tracks is disclosed. Here, α in FIG. 4A is an angle formed by the hypotenuse of the trapezoid and the track traveling direction. However, when the air bearing surface of the main pole is trapezoidal, the recording magnetic field strength is reduced. FIG. 4B shows the relationship between the maximum magnetic field strength and α of the main pole whose air bearing surface has a trapezoidal shape. It can be seen that increasing α increases the magnetic field strength. Japanese Patent Application No. 2000-76333 discloses a technique for reducing the protrusion of the magnetic pole to the adjacent track by removing a part of the magnetic pole of the recording head and preventing the erasure of the adjacent track. However, also in this case, the head magnetic field strength is reduced. As the size of the recording bit decreases, the problem of thermal fluctuation becomes more prominent, so the coercive force of the medium tends to increase as a countermeasure against thermal fluctuation. Since the recording magnetic field of the head is required to have a necessary and sufficient magnitude so that recording can be performed on the medium, a decrease in the recording magnetic field strength is a great obstacle to improving the surface recording density.
[0008]
The present invention is equipped with a perpendicular recording magnetic head having a main magnetic pole shape that does not erase adjacent tracks even when the yaw angle is applied without reducing the recording magnetic field intensity, and a method for manufacturing the perpendicular recording magnetic head. A magnetic disk device is provided.
[0009]
[Means for Solving the Problems]
The present inventors have found that erasing of adjacent tracks due to the yaw angle can be prevented by reducing or increasing the recording magnetic field strength by forming the slope portion at the tip of the main pole of the single pole head. It was. In the single magnetic pole head of the present invention, the surface of the main magnetic pole located on the upstream side of the rotation direction of the recording medium opposed to the recording head, that is, on the leading side, is inclined with respect to the air bearing surface of the main magnetic pole. That is, a tapered surface is provided at the main magnetic pole tip. By providing the taper surface in this manner, the generated recording magnetic field strength can be increased as compared with the case where no taper is provided.
[0010]
Further, by optimizing the inclination of the taper surface with respect to the air bearing surface of the main magnetic pole, not only the recording magnetic field can be strengthened but also the generated recording magnetic field can be further reduced. Specifically, an angle formed by the tapered surface and the main magnetic pole air bearing surface (hereinafter, abbreviated as the main magnetic pole tip angle) is set to 45 degrees or more and 75 degrees or less.
[0011]
The tapered surface may be provided not on the trailing side of the main pole but on the leading side. Further, it may be provided on both the trailing side and the leading side.
[0012]
There are the following three types of manufacturing methods for the main magnetic pole having such a tapered surface.
[0013]
The first manufacturing method includes a step of forming a resist pattern on the inorganic insulating film, a step of etching the inorganic insulating film using the resist pattern as a mask to form a slope, a step of removing the resist pattern, Manufacturing in which a step of forming a resist pattern on an inorganic insulating film, a step of forming a magnetic film on the inorganic insulating film, a step of removing the resist pattern, and a step of planarizing the magnetic film by polishing Is the method.
[0014]
As a polishing method, a chemical mechanical polishing method is generally used, but other appropriate methods may be used.
[0015]
The second manufacturing method is a method of forming a tapered surface by a so-called lift-off method. A resist pattern is formed on the inorganic insulating film, the inorganic insulating film is sputtered, and the resist pattern and the inorganic insulating film attached thereto are deposited. And forming a slope, forming a resist pattern on the inorganic insulating film, forming a magnetic film on the inorganic insulating film, removing the resist pattern, and the magnetic film Is a manufacturing method in which the steps of flattening by polishing are sequentially performed.
[0016]
The third manufacturing method is a manufacturing method in which a step of forming a resist pattern on the magnetic film and a step of forming a slope by etching the magnetic film using the resist pattern as a mask are sequentially performed.
[0017]
By manufacturing the main magnetic pole in this way, it is possible to provide an excellent single magnetic pole head that prevents the recording magnetic field strength from decreasing or increases the magnetic field strength and does not erase adjacent tracks. Also, a perpendicular magnetic recording medium having a soft magnetic underlayer and a magnetic recording apparatus equipped with this single-pole head provide a magnetic recording apparatus that has superior heat fluctuation resistance and high surface recording density compared to the in-plane recording system. Can do.
[0018]
DETAILED DESCRIPTION OF THE INVENTION
Example 1
Hereinafter, the present invention will be described with reference to the drawings. FIG. 5 is a schematic view of a medium-head system of a magnetic disk apparatus using the present invention (however, the magnification in the figure is not uniform). The magnetic disk device records and reproduces a magnetization signal on a magnetic disk 11 by a magnetic head 14 attached to a slider 13 fixed to the tip of a suspension arm 12. The magnetic head moves in the radial direction of the disk (seek operation) by the swing operation of the suspension arm. At this time, a yaw angle S is generated as shown in FIG. In the current magnetic recording apparatus, the range of the yaw angle S is about ± 30 °. FIG. 6 shows a schematic diagram of the relationship between the perpendicular recording / reproducing head and the magnetic disk. The perpendicular recording / reproducing head includes a recording head unit 16 and a reproducing head unit 17. The recording head is a so-called single pole head, and the reproducing head has a structure including a reproducing element disposed between a soft magnetic first shield layer and a second shield layer. As the reproducing element, since it has high sensitivity, a giant magnetoresistive element (GMR element), a tunnel magnetoresistive element (TMR element), or the like is used. FIG. 7 shows a schematic diagram of a perpendicular recording / reproducing head. The magnetic field generated from the main magnetic pole of the single magnetic pole head passes through the recording layer and the backing layer, forms a magnetic circuit that enters the
[0019]
FIG. 8 shows the main magnetic pole shape of the magnetic head of the present invention. The leading main pole located on the upstream side in the disk rotation direction has an inclined shape with a corner on the air bearing surface side. FIG. 1 shows the relationship between the tip angle q and the maximum magnetic field strength in this shape, and the relationship between the half-value width and the tip angle in the disk rotation direction of the recording magnetic field distribution generated from the main pole. The magnetic field strength increases and then decreases until the tip angle is close to 45 degrees, but a larger magnetic field strength is obtained when the tip angle is between 0 and 75 degrees than when the main magnetic pole tip is not angled. . Since it is considered that the magnetic flux tends to concentrate on the pointed portion of the magnetic material, this is considered to be because the amount of magnetic flux flowing from the corner of the main pole to the backing layer is reduced.
[0020]
Further, the half-value width of the magnetic field in the disk rotation direction is reduced, that is, the recording magnetic field is more converged, from the relationship between the half-value width in the disk rotation direction and the tip angle of the recording magnetic field distribution generated from the main magnetic pole shown in FIG. I understand. This is considered to be because the air bearing surface exposed main magnetic
[0021]
FIG. 9 shows the recording magnetic field distribution in the disk rotation direction of the single magnetic pole head of the present invention and the conventional single magnetic pole head having a tip angle of 0 degree. It can be seen that the single magnetic pole head of the present invention has a larger maximum magnetic field strength and a smaller recording magnetic field width than the prior art. At this time, the trailing-side magnetic field gradient that greatly affects the recording magnetization pattern has not deteriorated. Therefore, even when the yaw angle is added, the recording width is not widened, and erasure of adjacent tracks can be prevented.
[0022]
(Example 2)
In the first embodiment, a tapered surface is provided on the leading side of the main magnetic pole tip, but a tapered surface may be provided on the trailing side of the main magnetic pole. As shown in FIG. 10 (a), the shape of a single magnetic pole head is shown in which the trailing side main magnetic pole located on the downstream side in the disk rotation direction is inclined at the air bearing surface side. Even in this case, the magnetic field width in the disk rotation direction can be narrowed without degrading or increasing the magnetic field strength, and even when the yaw angle is added, the increase in the recording width is suppressed from the geometric track width, and the adjacent track is reduced. Thus, it is possible to provide a magnetic head for perpendicular recording that eliminates the above-mentioned erasure.
[0023]
Example 3
In Example 3, as shown in FIG. 10B, tapered surfaces were provided on both the leading side and the trailing side of the main magnetic pole tip. The leading and trailing angles may be set independently. Even in this case, even if the angle of the main magnetic pole on the air bearing surface side is inclined, the magnetic field width in the disk rotation direction can be reduced without deteriorating or increasing the magnetic field strength, and the yaw angle is added. However, it is possible to provide a perpendicular recording magnetic head that suppresses the increase in the recording width from the geometric track width and does not erase adjacent tracks.
[0024]
(Example 4)
Example 4 is an example in which the tapered surface provided at the tip of the main magnetic pole is a curved surface. In the manufacturing process, the tapered surface may be a curved surface instead of a flat surface, but the same effect can be obtained even if the tapered surface is a curved surface.
[0025]
FIG. 11 is a cross-sectional view of the single pole head as viewed from the track width direction. In this case, the tapered surface provided at the tip of the main pole is a curved surface. In FIG. 11, the length indicated by h is the projected length with respect to the flying height direction of the curve formed by the curved tapered surface when the main magnetic pole tip is viewed from the track direction, and the length indicated by W is The length of the curved surface formed by the curved tapered surface with respect to the air bearing surface.
[0026]
Even in this case, if the angle q defined by the inverse tangent of W / h, that is, q = arcTan (W / h) is in the range of 45 degrees to 75 degrees, the tip angle is 45 degrees or more. The same effect as that obtained when the angle is set to 75 degrees or less can be obtained.
[0027]
(Example 5)
FIGS. 12 and 13 show process diagrams of the method of manufacturing the single pole head shown in the first embodiment. For ease of understanding, the scales such as the film thickness in the figure are not constant. FIG. 12A shows a resist pattern formed on the inorganic insulating film. A reproducing head portion and an auxiliary magnetic pole layer are formed below the inorganic insulating film. As the inorganic insulating film, SiC, AlN, Ta 2 O 5 , TiC, TiO 2 , and SiO 2 can be used in addition to Al 2 O 3 which has been conventionally used.
[0028]
(B) shows the result of etching the inorganic insulating film using this resist pattern as a mask. For simplicity, the reproducing head portion and the auxiliary magnetic pole layer are omitted in the drawings after FIG. Since the resist end portion is behind the resist, it is difficult to etch, and a slope as shown in FIG. 12B is formed by etching. As an etching gas, BCl 3, or a mixed gas of BCl 3 and Cl 2 is preferred in the case of using Al 2 O 3, AlN as an insulating film. In the case of SiC, AlN, Ta 2 O 5 , TiC, TiO 2 , and SiO 2 , fluorine-based CHF 3 , CF 4 , SF 6 , and C 4 F 8 can be used because they are easily etched.
[0029]
The state where the resist is removed after the etching is shown in FIG. In (d), a resist pattern is formed. FIG. 13 (e) shows a state where a magnetic film is plated. Since the saturation magnetic flux density is large and the soft magnetic characteristics are good, Fe 55 Ni 45 , CoNiFe, or the like can be used as the material of the magnetic film. The plating base film may be a magnetic film having the same composition as the plating film or a non-magnetic film. (F) shows the place where the resist is removed. (G) shows a state where the main magnetic pole is formed by flattening the air bearing surface of the magnetic film by polishing. For the planarization, a polishing method such as chemical mechanical polishing (CMP) may be used. In the process of projecting the air bearing surface, the air bearing surface may be positioned at the alternate long and short dash line. With this manufacturing method, the single pole head for vertical use according to the present invention having a tapered surface on the leading side can be manufactured.
[0030]
This example shows a manufacturing method of a single pole head when a taper surface is provided on the leading side of the main pole, but the taper surface is formed on the trailing side by reversing the resist formation pattern. A single pole head can be manufactured.
[0031]
(Example 6)
FIG. 14 shows a process chart of another manufacturing method of the single pole head of the present invention by the lift-off method. As in FIG. 12, a reproducing head portion and an auxiliary magnetic pole layer are formed below the inorganic insulating film, but are omitted for simplicity. First, a resist pattern having a shape as shown in FIG. 14 is formed on the inorganic insulating film. A reproducing head and a soft magnetic film for the auxiliary magnetic pole are formed under the inorganic insulating film, but they are omitted in the drawing. The location where the resist pattern is formed is shown in FIG. Next, in order to form a slope, sputtering is performed on the resist pattern and the inorganic insulating film. The place where sputtering was performed is shown in FIG. The angle of the slope can be controlled by adjusting the target-substrate distance during sputtering, the gas pressure during sputtering, the angle of the substrate relative to the target, and the like.
After sputtering, the resist and the inorganic insulating film attached thereto are removed. (C) shows the resist removed. In (d), a resist pattern is formed. (E) shows the magnetic film plated. (F) shows that the resist is removed. (G) shows a state in which the top surface of the magnetic film is planarized to form the main magnetic pole. In the process of projecting the air bearing surface, the air bearing surface may be positioned at the alternate long and short dash line. By this manufacturing method, the magnetic head for perpendicular recording of the present invention having an inclination on the leading side can be manufactured.
[0032]
(Example 7)
FIG. 15 shows a process chart of another manufacturing method of the single pole head of the present invention. (A) shows a state where a resist pattern having a shape as shown in the figure is formed on an inorganic insulating film and a magnetic film to be a main magnetic pole in this order. FIG. 4B shows the magnetic film etched using this resist pattern as a mask. The state where the resist is removed after the etching is shown in FIG. In the process of projecting the air bearing surface, the air bearing surface may be positioned at the alternate long and short dash line. By this manufacturing method, the perpendicular recording magnetic head of the present invention having an inclination on the trailing side can be manufactured.
[0033]
【The invention's effect】
Geometrical track width without increasing or decreasing the maximum recording magnetic field strength even when there is a yaw angle by using a shape with a tapered surface at the leading end or trailing end of the main pole. Further, it is possible to provide a perpendicular recording magnetic head that suppresses the increase in recording width and eliminates erasure of adjacent tracks. By mounting this head, a magnetic disk device without erasure of adjacent tracks can be manufactured.
[Brief description of the drawings]
FIG. 1 is a diagram showing a relationship between a head magnetic field strength and a tip angle of a single magnetic pole head of the present invention, and a magnetic field width and a tip angle in a disk rotation direction.
FIG. 2 is a diagram for explaining a general distribution of a head magnetic field vertical component in a disk rotation direction by a combination of a conventional double-layer recording medium having a backing layer and a single-pole head.
FIG. 3 is a schematic diagram showing the relationship between a main pole of a conventional perpendicular recording magnetic head and a track on a disk.
FIG. 4 is a schematic diagram of a main magnetic pole shape of a conventional single-pole head, and a diagram showing a relationship between the main magnetic pole shape and a head magnetic field vertical component.
FIG. 5 is a conceptual diagram illustrating the reason for the occurrence of a yaw angle.
FIG. 6 is a schematic diagram showing the relationship between a magnetic head for perpendicular recording and a magnetic disk according to the present invention.
FIG. 7 is a schematic diagram showing the concept of perpendicular recording.
FIG. 8 is a schematic diagram showing a main magnetic pole shape of a single magnetic pole head described in
FIG. 9 shows the magnetic field strength distribution in the disk running direction of the single-pole head described in
FIG. 10 is a schematic diagram showing a main magnetic pole shape of a single magnetic pole head described in
FIG. 11 is a schematic diagram showing a main magnetic pole shape of a single magnetic pole head described in Embodiment 4 of the present invention.
FIG. 12 is a schematic view of a main magnetic pole forming step of a single magnetic pole head described in Embodiment 5 of the present invention.
FIG. 13 is a schematic view of a main magnetic pole forming step of a single magnetic pole head described in Embodiment 5 of the present invention.
FIG. 14 is a schematic view of a main magnetic pole forming step of a single magnetic pole head described in Embodiment 6 of the present invention.
FIG. 15 is a schematic view of a main magnetic pole forming step of a single magnetic pole head described in
[Explanation of symbols]
DESCRIPTION OF
Claims (8)
前記主磁極は、先端部と、トラック幅方向の幅が前記先端部のトラック幅方向の幅よりも大きい後部とを有し、
前記主磁極の先端部には、前記垂直磁気記録媒体に対向する面からテーパ面が設けられ、
前記テーパ面は、前記主磁極のリーディング側面に、浮上面から見た浮上高さ方向に傾斜するように形成されていることを特徴とする単磁極ヘッド。A recording layer of the perpendicular magnetic recording medium used in a perpendicular magnetic recording medium having a backing layer and a recording layer, having a main magnetic pole and an auxiliary magnetic pole, and the magnetic field emitted from the main magnetic pole constitutes a closed magnetic path And a single pole head that passes through the backing layer and enters the auxiliary pole ,
The main magnetic pole has a front end portion and a rear portion whose width in the track width direction is larger than the width of the front end portion in the track width direction,
A taper surface is provided at a tip portion of the main magnetic pole from a surface facing the perpendicular magnetic recording medium,
The single magnetic pole head, wherein the tapered surface is formed on the leading side surface of the main magnetic pole so as to be inclined in a flying height direction as viewed from the flying surface.
前記主磁極は、先端部と、トラック幅方向の幅が前記先端部のトラック幅方向の幅よりも大きい後部とを有し、
前記主磁極の先端部には、前記垂直磁気記録媒体に対向する面からテーパ面が設けられ、
前記テーパ面は、前記主磁極のリーディング側面に、浮上面から見た浮上高さ方向に傾斜するように形成されていることを特徴とする記録再生ヘッド。A recording layer of the perpendicular magnetic recording medium used in a perpendicular magnetic recording medium having a backing layer and a recording layer, having a main magnetic pole and an auxiliary magnetic pole, and the magnetic field emitted from the main magnetic pole constitutes a closed magnetic path And a recording / reproducing head comprising a single magnetic pole head that passes through the backing layer and enters the auxiliary magnetic pole, and a reproducing head,
The main magnetic pole has a front end portion and a rear portion whose width in the track width direction is larger than the width of the front end portion in the track width direction,
A taper surface is provided at a tip portion of the main magnetic pole from a surface facing the perpendicular magnetic recording medium,
The taper surface is formed on the leading side surface of the main pole so as to incline in the flying height direction as viewed from the air bearing surface.
前記主磁極は、先端部と、トラック幅方向の幅が前記先端部の浮上面部分におけるトラック幅方向の幅よりも大きい後部とを有し、
前記主磁極の先端部には、前記垂直磁気記録媒体に対向する面からテーパ面が設けられ、
前記テーパ面は、前記主磁極のリーディング側面に、浮上面から見た浮上高さ方向に傾斜するように形成されていることを特徴とする単磁極ヘッド。A recording layer of the perpendicular magnetic recording medium used in a perpendicular magnetic recording medium having a backing layer and a recording layer, having a main magnetic pole and an auxiliary magnetic pole, and the magnetic field emitted from the main magnetic pole constitutes a closed magnetic path And a single pole head that passes through the backing layer and enters the auxiliary pole ,
The main magnetic pole has a tip portion and a rear portion whose width in the track width direction is larger than the width in the track width direction in the air bearing surface portion of the tip portion,
A taper surface is provided at a tip portion of the main magnetic pole from a surface facing the perpendicular magnetic recording medium,
The single magnetic pole head, wherein the tapered surface is formed on the leading side surface of the main magnetic pole so as to be inclined in a flying height direction as viewed from the flying surface.
前記主磁極は、先端部と、トラック幅方向の幅が前記先端部の浮上面部分におけるトラック幅方向の幅よりも大きい後部とを有し、
前記主磁極の先端部には、前記垂直磁気記録媒体に対向する面からテーパ面が設けられ、
前記テーパ面は、前記主磁極のリーディング側面に、浮上面から見た浮上高さ方向に傾斜するように形成されていることを特徴とする記録再生ヘッド。A recording layer of the perpendicular magnetic recording medium used in a perpendicular magnetic recording medium having a backing layer and a recording layer, having a main magnetic pole and an auxiliary magnetic pole, and the magnetic field emitted from the main magnetic pole constitutes a closed magnetic path And a recording / reproducing head comprising a single magnetic pole head that passes through the backing layer and enters the auxiliary magnetic pole, and a reproducing head,
The main magnetic pole has a tip portion and a rear portion whose width in the track width direction is larger than the width in the track width direction in the air bearing surface portion of the tip portion,
A taper surface is provided at a tip portion of the main magnetic pole from a surface facing the perpendicular magnetic recording medium,
The taper surface is formed on the leading side surface of the main pole so as to incline in the flying height direction as viewed from the air bearing surface.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000328405A JP3740361B2 (en) | 2000-10-23 | 2000-10-23 | Magnetic head for perpendicular recording and magnetic disk drive equipped with the same |
| US09/920,648 US6710973B2 (en) | 2000-09-18 | 2001-08-03 | Single pole type recording head including tapered edges |
| US10/768,104 US7006326B2 (en) | 2000-09-18 | 2004-02-02 | Single pole type recording head with tapered edges |
| US11/257,083 US7133252B2 (en) | 2000-09-18 | 2005-10-25 | Single pole type recording head with trailing side tapered edges |
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| Application Number | Priority Date | Filing Date | Title |
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| JP2000328405A JP3740361B2 (en) | 2000-10-23 | 2000-10-23 | Magnetic head for perpendicular recording and magnetic disk drive equipped with the same |
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| JP2004336857A Division JP4729292B2 (en) | 2004-11-22 | 2004-11-22 | Magnetic head for perpendicular recording and magnetic disk drive equipped with the same |
| JP2005035400A Division JP4713174B2 (en) | 2005-02-14 | 2005-02-14 | Magnetic head for perpendicular recording and magnetic disk drive equipped with the same |
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| JP2002133610A JP2002133610A (en) | 2002-05-10 |
| JP3740361B2 true JP3740361B2 (en) | 2006-02-01 |
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| US7796359B2 (en) | 2007-08-23 | 2010-09-14 | Tdk Corporation | Magnetic head for perpendicular magnetic recording and method of manufacturing the same, the magnetic head including pole layer and two shields sandwiching the pole layer |
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