JP2005182033A - 光相互接続モジュール用のシリコン・キャリア - Google Patents
光相互接続モジュール用のシリコン・キャリア Download PDFInfo
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- JP2005182033A JP2005182033A JP2004365320A JP2004365320A JP2005182033A JP 2005182033 A JP2005182033 A JP 2005182033A JP 2004365320 A JP2004365320 A JP 2004365320A JP 2004365320 A JP2004365320 A JP 2004365320A JP 2005182033 A JP2005182033 A JP 2005182033A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
- G02B6/4232—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using the surface tension of fluid solder to align the elements, e.g. solder bump techniques
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4274—Electrical aspects
- G02B6/428—Electrical aspects containing printed circuit boards [PCB]
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0274—Optical details, e.g. printed circuits comprising integral optical means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73253—Bump and layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Lasers (AREA)
- Optical Couplings Of Light Guides (AREA)
- Optical Integrated Circuits (AREA)
- Light Receiving Elements (AREA)
Abstract
【解決手段】本発明の一実施形態は、シリコン・キャリアと、そのシリコン・キャリア上に搭載された通信集積回路と、そのシリコン・キャリア上に搭載された光集積回路とを含む光相互接続モジュールである。光集積回路はフリップチップであり、シリコン・キャリア中の電気経路によって通信集積回路に電気的に連絡する。シリコン・キャリア中の光路は、光集積回路と光リンクの間の光学的な結合を行う。
【選択図】図1
Description
208および210の間の電気接続を行うための多層ワイヤリング502(たとえば、酸化ベリリウム)を含む。IC206、208および210は、電気相互接続部503(たとえば、マイクロ・ボール・グリッド・アレイ)を介してシリコン・キャリア202上の電気経路と接触する。フレーム506は、ICを密封し、光相互接続モジュール200用の耐密容器になる。熱スプレッダ508は、フレーム506上に取り付けられ、IC206、208および210と熱的に接触する。このことによって、高速IC208の面全体が熱スプレッダと熱的に接触することが可能になる。光ビア504は、シリコン・キャリア202中に形成され、シリコン・マイクロ・レンズ505を備える通路を含むことができる。ガラス・レンズまたはポリマー・レンズを使用する場合、光トランスミッタ210および光レシーバ212は、約850nmの波長で動作することができる。
102 基板
104 相互接続部
106 集積回路、IC
200 光相互接続モジュール
202 キャリア、シリコン・キャリア
204 相互接続部
206 集積回路、IC
208 通信IC、SiGeドライバIC
210 光トランスミッタIC、光トランスミッタ、VCSELアレイ
212 光レシーバIC、光レシーバ
214 光リンク
302、304 V字型溝
306 光ファイバまたはレンズ
308 電気スルービア、導電性ビア
310 電気経路および光路
402 光路
404 光ビア
502 多層ワイヤリング
503 電気相互接続部
504 光ビア
505 シリコン・マイクロ・レンズ
506 フレーム
507 位置合せ機構
508 熱スプレッダ
509 導波路
510 光路層
602 ガラス層
604 レンズ・アレイ
702 屈折率整合層
704 開口部
706 電気相互接続部
802 開口部
804 ポスト
806 屈折率整合アンダーフィル
902 電気ビア
1002 エッジ発光型マイクロ共振器
Claims (19)
- シリコン・キャリアと、
前記シリコン・キャリア上に搭載された通信集積回路と、
前記シリコン・キャリア上に搭載された光集積回路と、
前記シリコン・キャリア中の光路とを含み、
前記光集積回路が、前記シリコン・キャリア中の電気経路によって前記通信集積回路に電気的に連絡し、
前記光集積回路が、前記シリコン・キャリア中の前記光路によって光リンクに光学的に連絡する、光相互接続モジュール。 - 前記通信集積回路より低い速度で動作する、前記シリコン・キャリアに取り付けられた信号処理集積回路をさらに含む、請求項1に記載の光相互接続モジュール。
- 前記信号処理集積回路がCMOS集積回路である、請求項2に記載の光相互接続モジュール。
- 前記通信集積回路が、ドライバ集積回路と増幅器集積回路とを含む、請求項1に記載の光相互接続モジュール。
- 前記光集積回路が、前記ドライバ集積回路および前記増幅器集積回路に電気的に連絡する光トランシーバを含む、請求項4に記載の光相互接続モジュール。
- 前記光集積回路が、前記ドライバ集積回路に電気的に連絡する光トランスミッタと、前記増幅器集積回路に電気的に連絡する光レシーバとを含む、請求項4に記載の光相互接続モジュール。
- 前記光トランスミッタが、VCSELアレイである、請求項6に記載の光相互接続モジュール。
- 前記光レシーバが、フォトダイオード・アレイである、請求項6に記載の光相互接続モジュール。
- 前記通信集積回路が、シリコン・ゲルマニウム集積回路である、請求項1に記載の光相互接続モジュール。
- 前記シリコン・キャリアが、光学的構成部品を前記シリコン・キャリアと位置合せするためのV字型溝を含む、請求項1に記載の光相互接続モジュール。
- 前記シリコン・キャリアが、前記シリコン・キャリアを貫通する光ビアを含む、請求項1に記載の光相互接続モジュール。
- 前記光路が、シリコン・レンズを備える通路を含む、請求項11に記載の光相互接続モジュール。
- 前記光路が、ガラス・レンズを備える通路を含む、請求項11に記載の光相互接続モジュール。
- 前記光路が、ポリマー・レンズを備える通路を含む、請求項11に記載の光相互接続モジュール。
- 前記光路が通路を含み、ガラス層が前記通路の一端にレンズ・アレイを有する、請求項11に記載の光相互接続モジュール。
- 前記光路が、前記シリコン・キャリアを貫通する光伝達路を含み、屈折率整合層が前記シリコン・キャリアの表面上にある、請求項11に記載の光相互接続モジュール。
- 前記光集積回路が、前記シリコン・キャリアの、前記通信集積回路とは反対側の面上に位置決めされる、請求項1に記載の光相互接続モジュール。
- 前記光集積回路が、マイクロ共振器である、請求項17に記載の光相互接続モジュール。
- 前記シリコン・キャリア上にあり、前記光路を基板に位置合せするための位置合せ機構をさらに含む、請求項1に記載の光相互接続モジュール。
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US10/738,064 US7058247B2 (en) | 2003-12-17 | 2003-12-17 | Silicon carrier for optical interconnect modules |
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JP2005182033A true JP2005182033A (ja) | 2005-07-07 |
JP4019395B2 JP4019395B2 (ja) | 2007-12-12 |
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US (1) | US7058247B2 (ja) |
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CN (1) | CN1333279C (ja) |
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JP2002357748A (ja) | 2001-03-30 | 2002-12-13 | Kyocera Corp | 光路変換反射体及びその実装構造並びに光モジュール |
US6739760B2 (en) * | 2001-09-17 | 2004-05-25 | Stratos International, Inc. | Parallel fiber optics communications module |
US6861341B2 (en) * | 2002-02-22 | 2005-03-01 | Xerox Corporation | Systems and methods for integration of heterogeneous circuit devices |
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2003
- 2003-12-17 US US10/738,064 patent/US7058247B2/en not_active Expired - Lifetime
-
2004
- 2004-11-10 CN CNB2004100909434A patent/CN1333279C/zh active Active
- 2004-11-16 KR KR1020040093391A patent/KR100633837B1/ko not_active IP Right Cessation
- 2004-12-17 JP JP2004365320A patent/JP4019395B2/ja not_active Expired - Fee Related
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US8999107B2 (en) | 2010-11-05 | 2015-04-07 | International Business Machines Corporation | Laser ashing of polyimide for semiconductor manufacturing |
US9865564B2 (en) | 2010-11-05 | 2018-01-09 | Globalfoundries Inc | Laser ashing of polyimide for semiconductor manufacturing |
US9413465B2 (en) | 2012-05-31 | 2016-08-09 | Fujitsu Limited | Optical transceiver and optical output level control method |
JP2020520476A (ja) * | 2017-05-17 | 2020-07-09 | コミッサリア ア レネルジー アトミーク エ オ ゼネルジ ザルタナテイヴ | 一体型コリメーション構造を備えたフォトニックチップ |
JP7130001B2 (ja) | 2017-05-17 | 2022-09-02 | コミッサリア ア レネルジー アトミーク エ オ ゼネルジ ザルタナテイヴ | 一体型コリメーション構造を備えたフォトニックチップ |
US11531171B2 (en) | 2017-05-17 | 2022-12-20 | Commissariat á l'énergie atomique et aux énergies alternatives | Photonic chip with integrated collimation structure |
JP2020053673A (ja) * | 2018-06-08 | 2020-04-02 | コミサリア ア レネルジ アトミク エ オウ エネルジ アルタナティヴ | ビアが通り抜ける光チップ |
JP7345279B2 (ja) | 2018-06-08 | 2023-09-15 | コミサリア ア レネルジ アトミク エ オウ エネルジ アルタナティヴ | ビアが通り抜ける光チップ |
Also Published As
Publication number | Publication date |
---|---|
KR100633837B1 (ko) | 2006-10-16 |
US20050135732A1 (en) | 2005-06-23 |
CN1629671A (zh) | 2005-06-22 |
US7058247B2 (en) | 2006-06-06 |
KR20050061289A (ko) | 2005-06-22 |
CN1333279C (zh) | 2007-08-22 |
JP4019395B2 (ja) | 2007-12-12 |
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