JP2005179167A5 - Semiconductor device - Google Patents
Semiconductor device Download PDFInfo
- Publication number
- JP2005179167A5 JP2005179167A5 JP2004002352A JP2004002352A JP2005179167A5 JP 2005179167 A5 JP2005179167 A5 JP 2005179167A5 JP 2004002352 A JP2004002352 A JP 2004002352A JP 2004002352 A JP2004002352 A JP 2004002352A JP 2005179167 A5 JP2005179167 A5 JP 2005179167A5
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- semiconductor device
- film layer
- sintered body
- single crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Claims (17)
The semiconductor device according to claim 16, wherein the visible light is white.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004002352A JP2005179167A (en) | 2003-06-30 | 2004-01-07 | Substrate for forming thin film, thin film substrate and light emitting element |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003186175 | 2003-06-30 | ||
JP2003294259 | 2003-08-18 | ||
JP2003396236 | 2003-11-26 | ||
JP2004002352A JP2005179167A (en) | 2003-06-30 | 2004-01-07 | Substrate for forming thin film, thin film substrate and light emitting element |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005179167A JP2005179167A (en) | 2005-07-07 |
JP2005179167A5 true JP2005179167A5 (en) | 2008-07-17 |
Family
ID=34799692
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004002352A Pending JP2005179167A (en) | 2003-06-30 | 2004-01-07 | Substrate for forming thin film, thin film substrate and light emitting element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2005179167A (en) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5054902B2 (en) * | 2005-08-03 | 2012-10-24 | 国立大学法人東京農工大学 | Manufacturing method of AlN semiconductor |
JP2007254190A (en) * | 2006-03-22 | 2007-10-04 | Ngk Insulators Ltd | Aluminum nitride sintered compact, method of manufacturing aluminum nitride, and member |
JP2011077101A (en) * | 2009-09-29 | 2011-04-14 | Toyoda Gosei Co Ltd | Semiconductor element and group iii nitride compound semiconductor element |
JP2011077102A (en) * | 2009-09-29 | 2011-04-14 | Toyoda Gosei Co Ltd | Wafer, group iii nitride compound semiconductor element, and methods of manufacturing them |
WO2013008697A1 (en) * | 2011-07-14 | 2013-01-17 | 株式会社アライドマテリアル | Aln substrate and method for producing same |
JP5585570B2 (en) * | 2011-12-01 | 2014-09-10 | 住友電気工業株式会社 | Sintered body mainly composed of mullite |
JP5942483B2 (en) * | 2012-03-02 | 2016-06-29 | 住友電気工業株式会社 | Support substrate manufacturing method, support substrate, and semiconductor wafer manufacturing method |
JP6094243B2 (en) * | 2013-02-07 | 2017-03-15 | 住友電気工業株式会社 | Composite substrate and method for manufacturing semiconductor wafer using the same |
JP6444207B2 (en) * | 2015-02-17 | 2018-12-26 | 株式会社ディスコ | Inspection method and inspection apparatus for hexagonal single crystal substrate |
CN116837463B (en) * | 2023-06-20 | 2024-06-28 | 中国科学院上海微系统与信息技术研究所 | Preparation method of modulation device based on silicon carbide and modulation device |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3220315B2 (en) * | 1993-12-22 | 2001-10-22 | 京セラ株式会社 | Covering member |
JPH08186329A (en) * | 1994-12-28 | 1996-07-16 | Japan Energy Corp | Growth method of gallium nitride-based semiconductor crystal |
JP3410863B2 (en) * | 1995-07-12 | 2003-05-26 | 株式会社東芝 | Compound semiconductor device and compound semiconductor light emitting device |
JPH09172199A (en) * | 1995-12-20 | 1997-06-30 | Mitsubishi Cable Ind Ltd | Gallium nitride compound semiconductor chip |
-
2004
- 2004-01-07 JP JP2004002352A patent/JP2005179167A/en active Pending
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