JP2005176522A - Vibrating actuator - Google Patents

Vibrating actuator Download PDF

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JP2005176522A
JP2005176522A JP2003414078A JP2003414078A JP2005176522A JP 2005176522 A JP2005176522 A JP 2005176522A JP 2003414078 A JP2003414078 A JP 2003414078A JP 2003414078 A JP2003414078 A JP 2003414078A JP 2005176522 A JP2005176522 A JP 2005176522A
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rotor
contact
elastic member
rotating body
vibration actuator
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Mitsuhiro Okazaki
光宏 岡崎
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Nikon Corp
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Nikon Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a vibrating actuator stabilized in performance from an initial stage of assembling, and reducible in cost. <P>SOLUTION: The vibrating actuator 10A comprises: a vibrator 11; a rotor 15A that pressure-contacts with the vibrator 11 and rotates; an elastic member 20 that rotates together with the rotor 15A and is arranged to a contact face between the vibrator 11 and the rotor 15A in parallel therewith; a shaft 18 that rotates together with the elastic member 20; and a pressurizing means 19 or the like that makes the rotor 15A pressure-contact with the vibrator 11. The rotor 15A has a sliding part 15a and an elastic member contact part 15b, the elastic member contact part 15b has the same radius as that of the sliding part 15a, and a position in the radial direction wherein the rotor 15A and the elastic member 20 contact with each other and a position in the radial direction wherein the vibrator 11 and the rotor 15A contact with each other are made to be almost equal. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、回転体(ロータ)部分の構造を改良した振動アクチュエータに関するものである。   The present invention relates to a vibration actuator having an improved structure of a rotating body (rotor) portion.

図5は、従来の振動アクチュエータとその問題点を説明するための図である。
この振動アクチュエータ10は、振動子11とロータ15とを備え、振動子11側を固定とし、ロータ15側を回転駆動する形態となっている。
FIG. 5 is a diagram for explaining a conventional vibration actuator and its problems.
The vibration actuator 10 includes a vibrator 11 and a rotor 15, the vibrator 11 side is fixed, and the rotor 15 side is rotationally driven.

振動子11は、ステータ12と、ステータ12に接合され、電気エネルギーを機械エネルギーに変換する圧電素子や電歪素子等を例とした電気機械変換素子(以下、圧電体と称する)13とから構成されている。この振動体11には、進行波(一例として、9波の進行波)が発生する。また、圧電体13の下面には、駆動電圧を供給するフレキシブルプリント基板(FPC)14が接続されている。   The vibrator 11 includes a stator 12 and an electromechanical conversion element (hereinafter referred to as a piezoelectric body) 13 that is joined to the stator 12 and takes an example of a piezoelectric element or an electrostrictive element that converts electrical energy into mechanical energy. Has been. A traveling wave (for example, nine traveling waves) is generated in the vibrating body 11. In addition, a flexible printed circuit board (FPC) 14 for supplying a driving voltage is connected to the lower surface of the piezoelectric body 13.

ステータ12は、共振先鋭度が大きな金属材料からなり、その形状は、円環形状となっている。このステータ12は、圧電体13が接合される反対面には、溝を切った櫛歯12aが形成されており、先端面が駆動面となり、ロータ15に加圧接触される。櫛歯12aを形成する理由は、進行波の中立面をできる限り圧電体13側に近づけることにより、駆動面の進行波の振幅を増幅させるためである。   The stator 12 is made of a metal material having a high resonance sharpness, and has a ring shape. The stator 12 is provided with comb teeth 12a having grooves formed on the opposite surface to which the piezoelectric body 13 is joined. The tip surface serves as a driving surface and is in pressure contact with the rotor 15. The reason for forming the comb teeth 12a is to amplify the amplitude of the traveling wave on the driving surface by bringing the neutral surface of the traveling wave as close as possible to the piezoelectric body 13 side.

圧電体13は、円周方向に沿って2つの相(A相、B相)に分かれており、各相においては、1/2波長毎に分極が交互となった要素が並べられていて、A相とB相との間には、1/4波長分間隔があくようにしてある。   The piezoelectric body 13 is divided into two phases (A phase and B phase) along the circumferential direction, and in each phase, the elements in which polarization is alternated every 1/2 wavelength are arranged, There is an interval of 1/4 wavelength between the A phase and the B phase.

ロータ15は、アルミニウム等の軽金属からなり、摺動面の表面には、耐摩耗性向上のための表面処理がなされている。   The rotor 15 is made of a light metal such as aluminum, and the surface of the sliding surface is subjected to a surface treatment for improving wear resistance.

ステータ12は、内周にフランジ部12bが形成されており、そのフランジ部12bでステータ取付台16に取り付けられている。ステータ取付台16には、ベアリング17を介して、軸18が回転自在に取り付けられている。軸18には、その先端にロータ15が取り付けられている。   The stator 12 has a flange portion 12b formed on the inner periphery thereof, and is attached to the stator mount 16 with the flange portion 12b. A shaft 18 is rotatably attached to the stator mount 16 via a bearing 17. A rotor 15 is attached to the tip of the shaft 18.

加圧手段19は、ロータ15をステータ12に加圧する手段であり、軸18に設けられている。この加圧手段19は、バネ19aと、ベアリング17に接して配置され、バネ19aの一端を押さえる押さえリング19bと、バネ19aの他端を押さえる押さえリング19cと、軸18に形成された溝に挿入され、押さえリング19cの位置を規制するEリング19bとを備えている   The pressurizing unit 19 is a unit that pressurizes the rotor 15 against the stator 12, and is provided on the shaft 18. The pressurizing means 19 is disposed in contact with the spring 19 a, the bearing 17, a press ring 19 b that presses one end of the spring 19 a, a press ring 19 c that presses the other end of the spring 19 a, and a groove formed in the shaft 18. And an E-ring 19b that regulates the position of the holding ring 19c.

しかし、上述した従来の振動アクチュエータ10は、ロータ15を振動子11に加圧接触させると、摺動部15aの面圧が不均一になり、性能が安定しないという問題があった。図5の例では、ロータ15の内側に加圧力がかかるため、摺動部15aの外側より内側のほうが面圧が高くなってしまう。そのため、摺動部15aは、内側の磨耗が早く進み、その後、摺動部15aは、全面が均等な面圧になり性能が安定する。   However, the conventional vibration actuator 10 described above has a problem that when the rotor 15 is brought into pressure contact with the vibrator 11, the surface pressure of the sliding portion 15a becomes non-uniform and the performance is not stable. In the example of FIG. 5, pressure is applied to the inside of the rotor 15, so that the surface pressure is higher on the inner side than on the outer side of the sliding portion 15 a. For this reason, the inner wear of the sliding portion 15a progresses quickly, and thereafter, the sliding portion 15a has a uniform surface pressure over the entire surface and the performance is stabilized.

この問題を解決するために、特許文献1は、駆動用加圧力よりも大きな加工用加圧力を作用させた状態で、平面研削盤等により摺動面をテーパ加工している。
しかし、この方法では、加圧しながら平面研削をするための工具が必要であり、コストアップにつながる。
特開平11−113272号公報
In order to solve this problem, in Patent Document 1, the sliding surface is tapered by a surface grinder or the like in a state where a working pressure larger than the driving pressure is applied.
However, this method requires a tool for performing surface grinding while applying pressure, leading to an increase in cost.
Japanese Patent Laid-Open No. 11-113272

本発明の課題は、組立初期から性能が安定し、低コスト化が図れる振動アクチュエータを提供することである。   An object of the present invention is to provide a vibration actuator that has stable performance from the initial stage of assembly and can reduce costs.

本発明は、以下のような解決手段により、前記課題を解決する。なお、理解を容易にするために、本発明の実施例に対応する符号を付して説明するが、これに限定されるものではない。
請求項1の発明は、振動体(11)と、前記振動体に加圧接触して回転する回転体(15A)と、前記回転体と共に回転し、前記振動体と前記回転体との接触面に平行に配置される弾性部材(20)と、前記弾性部材と共に回転する回転部材(18)と、前記回転体を前記振動体に加圧接触させる加圧部材(19)と、を備え、前記回転体と前記弾性部材とが接触する半径方向の位置(15b)と、前記振動体と前記回転体とが接触する半径方向の位置(15a)とが略等しいこと、を特徴とする振動アクチュエータである。
The present invention solves the above problems by the following means. In addition, in order to make an understanding easy, although the code | symbol corresponding to the Example of this invention is attached | subjected and demonstrated, it is not limited to this.
According to the first aspect of the present invention, there is provided a vibrating body (11), a rotating body (15A) that rotates by being in pressure contact with the vibrating body, a rotating surface that rotates together with the rotating body, and a contact surface between the vibrating body and the rotating body. An elastic member (20) disposed in parallel with the elastic member, a rotating member (18) that rotates together with the elastic member, and a pressurizing member (19) that pressurizes and contacts the rotating body with the vibrating body, A vibration actuator characterized in that a radial position (15b) where the rotating body and the elastic member contact each other and a radial position (15a) where the vibrating body and the rotating body contact each other are substantially equal. is there.

請求項2の発明は、請求項1に記載の振動アクチュエータにおいて、前記弾性部材と前記回転部材とは、一体であること、を特徴とする振動アクチュエータである。   A second aspect of the present invention is the vibration actuator according to the first aspect, wherein the elastic member and the rotating member are integrated.

請求項3の発明は、請求項1又は請求項2に記載の振動アクチュエータにおいて、前記回転体と前記弾性部材との間に配置される摩擦係数の高い摩擦部材(21)を備えること、を特徴とする振動アクチュエータである。   A third aspect of the present invention is the vibration actuator according to the first or second aspect, further comprising a friction member (21) having a high friction coefficient disposed between the rotating body and the elastic member. This is a vibration actuator.

請求項4の発明は、振動体(11)と、前記振動体に加圧接触して回転する回転体(15B)と、前記回転体と共に回転する回転部材(18)と、前記回転体を前記振動体に加圧接触させる加圧部材(19)とを備え、前記回転体(15B)は、前記振動体と接触する摺動部(15c)と、前記摺動部と前記振動体との接触面に平行方向に伸びる円板状の弾性部(15d)と、前記摺動部と前記弾性部の間に形成され、その弾性部よりも撓みやすい可撓部(15e)と、を有することを特徴とする振動アクチュエータである。   According to a fourth aspect of the present invention, there is provided a vibrating body (11), a rotating body (15B) that rotates by being in pressure contact with the vibrating body, a rotating member (18) that rotates together with the rotating body, and the rotating body. A pressure member (19) that pressurizes and contacts the vibrating body, wherein the rotating body (15B) includes a sliding portion (15c) that contacts the vibrating body, and a contact between the sliding portion and the vibrating body. A disk-like elastic portion (15d) extending in a direction parallel to the surface, and a flexible portion (15e) formed between the sliding portion and the elastic portion, which is more flexible than the elastic portion. This is a characteristic vibration actuator.

以上説明したように、本発明によれば、回転体と弾性部材とが接触する半径方向の位置と、振動体と回転体とが接触する半径方向の位置とを略等しくしたので、加圧手段の加圧による変形を拡大しても、弾性部材の変形は回転体には伝わらず、組立直後から振動体と回転体の接触面圧が均一になる。
また、回転体は、摺動部と弾性部の間にその弾性部よりも撓みやすい可撓部を形成したので、可撓部がヒンジのように変形し、弾性部の傾きが摺動部に伝わりにくくなるため、組立直後から振動体と回転体の接触面圧が均一になる。
このため、短いエージング時間で性能が安定するうえ、エージング時間が短くなるので、コストが下がる、という効果がある。
As described above, according to the present invention, the radial position where the rotating body and the elastic member are in contact with the radial position where the vibrating body and the rotating body are in contact with each other is substantially equal. Even if the deformation due to pressurization is expanded, the deformation of the elastic member is not transmitted to the rotating body, and the contact surface pressure between the vibrating body and the rotating body becomes uniform immediately after assembly.
Further, since the rotating body is formed with a flexible part that is more flexible than the elastic part between the sliding part and the elastic part, the flexible part deforms like a hinge, and the inclination of the elastic part becomes the sliding part. Since it is difficult to transmit, the contact surface pressure between the vibrating body and the rotating body becomes uniform immediately after assembly.
For this reason, the performance is stabilized with a short aging time, and the aging time is shortened, so that the cost is reduced.

本発明は、振動体と回転体の接触面圧を均一にするという目的を、ロータを構成する摺動部及び加圧方向に伸びる部分と、摺動面に平行な部分とを分離し別部品とし、ロータの摺動部と略等しい半径で加圧するか、又は、ロータに円板部より薄肉の部分を設けることによって実現する。   The present invention aims to make the contact surface pressure between the vibrating body and the rotating body uniform, and separates the sliding portion constituting the rotor and the portion extending in the pressurizing direction from the portion parallel to the sliding surface. It is realized by applying pressure with a radius substantially equal to the sliding portion of the rotor, or by providing a portion of the rotor thinner than the disc portion.

以下、図面等を参照して、本発明の実施例をあげて、さらに詳しく説明する。
図1は、本発明による振動アクチュエータの実施例1の組み立て状態を示す断面図、図2は、実施例1による振動アクチュエータの動作を説明する図である。
なお、以降の実施例は、振動アクチュエータとして、超音波の振動域を利用した超音波モータを例にとって説明する。
また、以下に示す各実施例では、前述した従来例と同様な機能を果たす部分には、同一の符号又は末尾に統一した符号を付して、重複する説明や図面を適宜省略する。
Hereinafter, the present invention will be described in more detail with reference to the drawings and the like.
FIG. 1 is a cross-sectional view illustrating an assembled state of a vibration actuator according to a first embodiment of the present invention, and FIG. 2 is a diagram illustrating the operation of the vibration actuator according to the first embodiment.
In the following embodiments, an ultrasonic motor using an ultrasonic vibration region will be described as an example of a vibration actuator.
Moreover, in each Example shown below, the part which fulfill | performs the same function as the prior art example mentioned above attaches | subjects the same code | symbol or the code | symbol unified at the end, and abbreviate | omits the description and drawing which overlap suitably.

実施例1の振動アクチュエータ10Aは、振動子11と、振動子11に加圧接触して回転するロータ15Aと、ロータ15Aと共に回転し、振動子11とロータ15Aとの接触面に平行に配置される弾性部材20と、弾性部材20と共に回転する軸18と、ロータ15Aを振動子11に加圧接触させる加圧手段19等とを備えている。   The vibration actuator 10A according to the first embodiment is arranged in parallel with the vibrator 11, the rotor 15A that rotates by being in pressure contact with the vibrator 11, the rotor 15A, and the contact surface between the vibrator 11 and the rotor 15A. Provided with an elastic member 20, a shaft 18 that rotates together with the elastic member 20, and a pressurizing unit 19 that pressurizes and contacts the rotor 15 </ b> A with the vibrator 11.

ロータ15Aは、摺動部15aと弾性部材接触部15bとを備えており、それぞれ0.2mm程度の段差を設けてある。弾性部材接触部15bは、摺動部15aと同じ半径である。つまり、この振動アクチュエータ10Aは、ロータ15Aと弾性部材20とが接触する半径方向の位置と、振動子11とロータ15Aとが接触する半径方向の位置とを略等しくしてある。   The rotor 15A includes a sliding portion 15a and an elastic member contact portion 15b, each having a step of about 0.2 mm. The elastic member contact portion 15b has the same radius as the sliding portion 15a. That is, in the vibration actuator 10A, the radial position where the rotor 15A and the elastic member 20 are in contact with the radial position where the vibrator 11 and the rotor 15A are in contact is approximately equal.

ロータ15Aの材質は、PEEK樹脂又はPPS樹脂に繊維を配合したものが好ましく使用される。それ以外に、アルミニウムにアルマイト処理を施したものでもよいし、他の金属材料で必要に応じてNiメッキ等を施したものでもよい。また、ロータ15Aは、摺動部15aを平滑にするために、組立前に平面研磨を行うことが好ましい。   As the material of the rotor 15A, a material obtained by blending fibers into PEEK resin or PPS resin is preferably used. In addition, aluminum may be alumite-treated, or other metal material may be Ni-plated as necessary. Further, the rotor 15A is preferably subjected to surface polishing before assembly in order to smooth the sliding portion 15a.

弾性部材20は、ロータ15Aと共に回転し、振動体11のステータ12とロータ15Aとの接触面に平行に配置される部材であり、軸18の上端に一体に設けられている。弾性部材20とロータ15Aの間には、ゴム等の摩擦係数が高い摩擦部材21が挟まれており、加圧手段19の加圧力によって発生する摩擦力によって、ロータ15Aと共に弾性部材20及び軸18が回転する。   The elastic member 20 is a member that rotates together with the rotor 15 </ b> A and is disposed in parallel to the contact surface between the stator 12 of the vibrating body 11 and the rotor 15 </ b> A, and is integrally provided at the upper end of the shaft 18. A friction member 21 having a high coefficient of friction such as rubber is sandwiched between the elastic member 20 and the rotor 15A, and the elastic member 20 and the shaft 18 together with the rotor 15A are generated by the frictional force generated by the pressing force of the pressurizing means 19. Rotates.

実施例1の振動アクチュエータ10Aは、加圧手段19の加圧による変形を拡大すると、図2のようになり、弾性部材20の変形はロータ15Aには伝わらず、振動子11とロータ15Aの接触面圧は均一になる。   The vibration actuator 10A according to the first embodiment becomes as illustrated in FIG. 2 when the deformation due to the pressurization of the pressurizing unit 19 is enlarged, and the deformation of the elastic member 20 is not transmitted to the rotor 15A, but the contact between the vibrator 11 and the rotor 15A. The surface pressure becomes uniform.

以上の通り、実施例1によれば、組立直後から振動子11とロータ15Aの接触面圧が均一になるため、短いエージング時間で性能が安定するとともに、エージング時間が短くなるので、コストダウンを図ることができる。
また、平面研磨又はエージング時の磨耗量を減らすことができるので、ロータ15Aの摩擦材(メッキ、アルマイト等の表面処理含む)を薄くすることができるため、さらにコストを下げることができるという効果がある。
As described above, according to the first embodiment, since the contact surface pressure between the vibrator 11 and the rotor 15A becomes uniform immediately after assembly, the performance is stabilized in a short aging time, and the aging time is shortened. Can be planned.
In addition, since the amount of wear during planar polishing or aging can be reduced, the friction material (including surface treatment such as plating and alumite) of the rotor 15A can be made thin, so that the cost can be further reduced. is there.

図3は、本発明による振動アクチュエータの実施例2の組み立て状態を示す断面図、図4は、実施例2による振動アクチュエータの動作を説明する図である。
実施例2の振動アクチュエータ10Bは、振動子11と、振動子11に加圧接触して回転するロータ15Bと、ロータ15Bと共に回転する軸18と、ロータ15Bを振動子11に加圧接触させる加圧手段19などとを備えている。
FIG. 3 is a sectional view showing an assembled state of the vibration actuator according to the second embodiment of the present invention, and FIG. 4 is a diagram for explaining the operation of the vibration actuator according to the second embodiment.
The vibration actuator 10B according to the second embodiment includes the vibrator 11, the rotor 15B that rotates by being in pressure contact with the vibrator 11, the shaft 18 that rotates together with the rotor 15B, and the rotor 15B that is in pressure contact with the vibrator 11. Pressure means 19 and the like.

回転体15Bは、振動体11と接触する摺動部15cと、摺動部15cと振動体11との接触面に平行方向に伸びる円板状の弾性部15dと、摺動部15cと弾性部15dの間に形成され、その弾性部15dよりも撓みやすい可撓部15eとを備えている。   The rotating body 15B includes a sliding portion 15c that contacts the vibrating body 11, a disk-shaped elastic portion 15d extending in a direction parallel to a contact surface between the sliding portion 15c and the vibrating body 11, a sliding portion 15c, and an elastic portion. 15d, and a flexible portion 15e that is more flexible than the elastic portion 15d.

実施例2の振動アクチュエータ10Bは、ロータ15Bに設けた薄肉の可撓部15eがヒンジのように変形するので、ロータ15Bの円板状の弾性部15dの傾きが摺動部15cに伝わりにくくなるため、加圧手段19の加圧による変形を拡大すると、図4のようになり、振動子11とロータ15Bの接触面圧は均一になる。   In the vibration actuator 10B according to the second embodiment, since the thin flexible portion 15e provided on the rotor 15B is deformed like a hinge, the inclination of the disk-like elastic portion 15d of the rotor 15B is not easily transmitted to the sliding portion 15c. Therefore, when the deformation due to the pressurization of the pressurizing means 19 is enlarged, the contact surface pressure between the vibrator 11 and the rotor 15B becomes uniform as shown in FIG.

(変形例)
以上説明した実施例に限定されることなく、種々の変形や変更が可能であって、それらも本発明の均等の範囲内である。
例えば、実施例1において、弾性部材20の外周に不図示の切り欠きを設け、ロータ15Aに設けた突起部と嵌合することで、ロータ15Aと弾性部材20及び軸18が共に回転するようにしてもよい。
(Modification)
The present invention is not limited to the embodiments described above, and various modifications and changes are possible, and these are also within the equivalent scope of the present invention.
For example, in the first embodiment, a notch (not shown) is provided on the outer periphery of the elastic member 20 and is fitted with a protrusion provided on the rotor 15A so that the rotor 15A, the elastic member 20 and the shaft 18 rotate together. May be.

本発明による振動アクチュエータの実施例1の組み立て状態を示す断面図である。It is sectional drawing which shows the assembly state of Example 1 of the vibration actuator by this invention. 実施例1による振動アクチュエータの動作を説明する図である。It is a figure explaining operation | movement of the vibration actuator by Example 1. FIG. 本発明による振動アクチュエータの実施例2の組み立て状態を示す断面図である。It is sectional drawing which shows the assembly state of Example 2 of the vibration actuator by this invention. 実施例2による振動アクチュエータの動作を説明する図である。It is a figure explaining operation | movement of the vibration actuator by Example 2. FIG. 従来の振動アクチュエータとその問題点を説明するための図である。It is a figure for demonstrating the conventional vibration actuator and its problem.

符号の説明Explanation of symbols

10A,10B 振動アクチュエータ
11 振動子
12 ステータ
13 圧電体
14 フレキシブルプリント基板(FPC)
15A,15B ロータ
15a 摺動部
15b 弾性部材接触部
15c 摺動部
15d 弾性部
15e 可撓部
16 ステータ取付台
17 ベアリング
18 軸
19 加圧手段
20 弾性部材
21 摩擦部材
10A, 10B Vibration actuator 11 Vibrator 12 Stator 13 Piezoelectric body 14 Flexible printed circuit board (FPC)
15A, 15B Rotor 15a Sliding part 15b Elastic member contact part 15c Sliding part 15d Elastic part 15e Flexible part 16 Stator mount 17 Bearing 18 Axis 19 Pressing means 20 Elastic member 21 Friction member

Claims (4)

振動体と、
前記振動体に加圧接触して回転する回転体と、
前記回転体と共に回転し、前記振動体と前記回転体との接触面に平行に配置される弾性部材と、
前記弾性部材と共に回転する回転部材と、
前記回転体を前記振動体に加圧接触させる加圧部材と、
を備え、
前記回転体と前記弾性部材とが接触する半径方向の位置と、前記振動体と前記回転体とが接触する半径方向の位置とが略等しいこと、
を特徴とする振動アクチュエータ。
A vibrating body,
A rotating body that rotates in pressure contact with the vibrating body;
An elastic member that rotates together with the rotating body and is arranged in parallel to a contact surface between the vibrating body and the rotating body;
A rotating member that rotates with the elastic member;
A pressing member that pressurizes and contacts the rotating body with the vibrating body;
With
The radial position where the rotating body and the elastic member contact each other and the radial position where the vibrating body and the rotating body contact each other are substantially equal;
Vibration actuator characterized by
請求項1に記載の振動アクチュエータにおいて、
前記弾性部材と前記回転部材とは、一体であること、
を特徴とする振動アクチュエータ。
The vibration actuator according to claim 1,
The elastic member and the rotating member are integral;
Vibration actuator characterized by
請求項1又は請求項2に記載の振動アクチュエータにおいて、
前記回転体と前記弾性部材との間に配置される摩擦係数の高い摩擦部材を備えること、
を特徴とする振動アクチュエータ。
The vibration actuator according to claim 1 or 2,
Comprising a friction member having a high coefficient of friction disposed between the rotating body and the elastic member;
Vibration actuator characterized by
振動体と、
前記振動体に加圧接触して回転する回転体と、
前記回転体と共に回転する回転部材と、
前記回転体を前記振動体に加圧接触させる加圧部材とを備え、
前記回転体は、
前記振動体と接触する摺動部と、
前記摺動部と前記振動体との接触面に平行方向に伸びる円板状の弾性部と、
前記摺動部と前記弾性部の間に形成され、その弾性部よりも撓みやすい可撓部と、
を有することを特徴とする振動アクチュエータ。
A vibrating body,
A rotating body that rotates in pressure contact with the vibrating body;
A rotating member that rotates together with the rotating body;
A pressure member that pressurizes and contacts the rotating body to the vibrating body,
The rotating body is
A sliding portion in contact with the vibrating body;
A disc-shaped elastic portion extending in a direction parallel to the contact surface between the sliding portion and the vibrating body;
A flexible part formed between the sliding part and the elastic part, which is more flexible than the elastic part;
A vibration actuator comprising:
JP2003414078A 2003-12-12 2003-12-12 Vibrating actuator Pending JP2005176522A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003414078A JP2005176522A (en) 2003-12-12 2003-12-12 Vibrating actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003414078A JP2005176522A (en) 2003-12-12 2003-12-12 Vibrating actuator

Publications (1)

Publication Number Publication Date
JP2005176522A true JP2005176522A (en) 2005-06-30

Family

ID=34733992

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003414078A Pending JP2005176522A (en) 2003-12-12 2003-12-12 Vibrating actuator

Country Status (1)

Country Link
JP (1) JP2005176522A (en)

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