JPH02303372A - Ultrasonic motor - Google Patents

Ultrasonic motor

Info

Publication number
JPH02303372A
JPH02303372A JP1126047A JP12604789A JPH02303372A JP H02303372 A JPH02303372 A JP H02303372A JP 1126047 A JP1126047 A JP 1126047A JP 12604789 A JP12604789 A JP 12604789A JP H02303372 A JPH02303372 A JP H02303372A
Authority
JP
Japan
Prior art keywords
movable element
stator
ultrasonic motor
mover
auxiliary member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1126047A
Other languages
Japanese (ja)
Inventor
Yasuo Kuwabara
保雄 桑原
Takao Saeki
佐伯 孝夫
Mutsuo Aoyama
睦朗 青山
Shinji Sagara
信治 相良
Tadayoshi Murakami
忠良 村上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fukoku KK
Aisin Corp
Original Assignee
Aisin Seiki Co Ltd
Fukoku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aisin Seiki Co Ltd, Fukoku KK filed Critical Aisin Seiki Co Ltd
Priority to JP1126047A priority Critical patent/JPH02303372A/en
Publication of JPH02303372A publication Critical patent/JPH02303372A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To suppress fluctuation of rotation and torque by arranging an auxiliary pressurizing member between a spring means and a mover. CONSTITUTION:An ultrasonic motor comprises a housing 1, a stator having a piezoelectric element 14, a rotary shaft 20, a mover 24 and a bellevile spring 30 mounted on the rotary shaft 20, and the like. An auxiliary pressurizing member 34 is placed between the belleville spring 30 and the mover 24 and the ring projection 35 thereof is engaged with the mover 24 from a position immediately above the contact faces of the stator 6 and the mover 24. By such arrangement, the stator 6 and the mover 24 are prevented from curving.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、固定子に発生した弾性進行波により可動子を
駆動するように構成した超音波モータに係り、詳しくは
、固定子に対し可動子を加圧する構造に関するものであ
る。
Detailed Description of the Invention [Field of Industrial Application] The present invention relates to an ultrasonic motor configured to drive a movable element by elastic traveling waves generated in a stator. This relates to a structure that pressurizes the child.

[従来の技術] 従来のこの種の超音波モータとして、特開昭63−73
887号公報に掲載された技術を挙げることができる。
[Prior art] As a conventional ultrasonic motor of this type, there is a
One example is the technology published in Publication No. 887.

第3図は従来の超音波モータを示す縦断面図、第4図は
第3図の超音波モータにおいて固定子と可動子との接触
部分を拡大して示す部分断面図、第5図は第4図の超音
波モータで使用されている皿ばねの加圧力の分布を示す
説明図である。
FIG. 3 is a vertical sectional view showing a conventional ultrasonic motor, FIG. 4 is a partial sectional view showing an enlarged contact area between the stator and the movable element in the ultrasonic motor shown in FIG. 3, and FIG. 5 is an explanatory diagram showing the distribution of the pressing force of the disc spring used in the ultrasonic motor of FIG. 4. FIG.

第3図において、41は超音波モータの外郭となるケー
ス、42はケース41を閉じるカバー、43は固定子、
44は前記固定子43に配設された圧電素子、45はラ
イナー46を介して固定子43に接合配置された可動子
、47は前記可動子45と一体に回転する回転軸である
。前記回転軸47の大径鍔部48の下側には、可動子4
5の薄肉部49を押圧する皿ばね50が配設されている
In FIG. 3, 41 is a case that forms the outer shell of the ultrasonic motor, 42 is a cover that closes the case 41, 43 is a stator,
44 is a piezoelectric element disposed on the stator 43, 45 is a movable element connected to the stator 43 via a liner 46, and 47 is a rotating shaft that rotates together with the movable element 45. A movable element 4 is provided on the lower side of the large diameter flange 48 of the rotating shaft 47.
A disc spring 50 that presses against the thin wall portion 49 of 5 is disposed.

また、回転軸47の下部にはスナップリング51により
シム52が保持されていて、このシム52の厚みを選択
することにより、皿ばね50の押圧力を適宜に調整でき
るように構成されている。
Further, a shim 52 is held at the lower part of the rotating shaft 47 by a snap ring 51, and by selecting the thickness of the shim 52, the pressing force of the disc spring 50 can be adjusted as appropriate.

上記のように構成された従来の超音波モータにおいて、
圧電素子44に高周波電圧が印加されると、圧電素子4
4の変形に伴い固定子43に弾性進行波が発生し、この
弾性進行波により固定子43の表面上の質点に楕円運動
が生起する。そして、この楕円運動に伴い固定子43と
可動子45との接触面に摩擦力が発生し、その摩擦力で
可動子45に回転モーメントが作用して、可動子45と
一体に回転軸47が回転される。
In the conventional ultrasonic motor configured as above,
When a high frequency voltage is applied to the piezoelectric element 44, the piezoelectric element 4
As the stator 4 deforms, an elastic traveling wave is generated in the stator 43, and this elastic traveling wave causes an elliptical motion to occur at a mass point on the surface of the stator 43. As a result of this elliptical movement, a frictional force is generated on the contact surface between the stator 43 and the movable element 45, and a rotational moment acts on the movable element 45 due to the frictional force, and the rotating shaft 47 is rotated integrally with the movable element 45. be rotated.

[発明が解決しようとする課題] ところで、この種の超音波モータのトルク出力は、一般
に、固定子43と可動子45との摩擦係数及び皿ばね5
0の加圧力に依存する。しかしながら、従来の超音波モ
ータにおいては、皿ばね50の加圧力が固定子43及び
可動子45の接触部の内側に作用するため、第4図に拡
大して示すように、その加圧力で可動子45の薄肉部4
9及び固定子43の薄肉部54がそれぞれ彎曲して、固
定子43と可動子45とが片当りの状態で圧接される。
[Problems to be Solved by the Invention] Incidentally, the torque output of this type of ultrasonic motor is generally determined by the friction coefficient between the stator 43 and the movable element 45 and the disc spring 5.
It depends on the pressing force of 0. However, in the conventional ultrasonic motor, the pressing force of the disc spring 50 acts on the inside of the contact portion of the stator 43 and the movable element 45, so the pressing force causes the motor to move, as shown in an enlarged view in FIG. Thin wall part 4 of child 45
9 and the thin wall portion 54 of the stator 43 are respectively curved, and the stator 43 and the movable element 45 are pressed into contact with each other in a state of partial contact.

また、皿ばね50はそれ自身のばね特性からして、第5
図に矢印で示すように、周方向の加圧力が不均一となっ
ているので、固定子43に対し可動子45を各部均一な
力で加圧することが困難である。したがって、固定子4
3と可動子45との摩擦係数及び圧接力がそれぞれ不安
定になり、回転むらまたはトルクむらが生じやすく、そ
の結果、超音波モータの高出力化が妨げらちることにな
る。
Furthermore, the disc spring 50 has a fifth characteristic due to its own spring characteristics.
As shown by the arrows in the figure, since the pressing force in the circumferential direction is non-uniform, it is difficult to press the movable element 45 against the stator 43 with uniform force at each part. Therefore, stator 4
The friction coefficient and pressure contact force between the movable element 3 and the movable element 45 become unstable, and uneven rotation or torque tends to occur.As a result, the ultrasonic motor cannot achieve high output.

そこで、本発明の課題は、固定子と可動子とを常に安定
した接触面で圧接させて、回転むら及びトルクむらを防
止でき、もって、高い出力を得ることができる超音波モ
ータの提供にある。
SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide an ultrasonic motor in which a stator and a movable element are always brought into pressure contact with each other at a stable contact surface to prevent uneven rotation and torque, and thereby to obtain high output. .

[課題を解決するための手段] 本発明にかかる超音波モータは、圧電素子により弾性進
行波を発生する固定子と、その固定子に弾接するように
配置され、弾性進行波により駆動される可動子と、その
可動子を固定子に向けて加圧するばね手段と、そのばね
手段と可動子との間に介装され、ばね手段の加圧力を固
定子及び可動子の接触面とほぼ同じ位置でその接触面に
伝える加圧補助部材とから構成されている。
[Means for Solving the Problems] An ultrasonic motor according to the present invention includes a stator that generates an elastic traveling wave using a piezoelectric element, and a movable motor that is arranged so as to be in elastic contact with the stator and is driven by the elastic traveling wave. a spring means for pressurizing the movable element toward the stator; and a spring means interposed between the spring means and the movable element, the pressing force of the spring means being applied to a position approximately equal to the contact surface of the stator and the movable element. and an auxiliary member for applying pressure to the contact surface.

[作用] 本発明の超音波モータによれば、加圧補助部材がばね手
段と可動子との間に介在して、ばね手段の加圧力を固定
子及び可動子の接触面とほぼ同じ位置でその接触面に伝
えるため、固定子及び可動子の彎曲が防止されるととも
に、ばね手段の加圧力が固定子及び可動子の接触面の各
部に均一に作用する。したがって、固定子と可動子とが
常に安定した接触面を介して圧接され、回転むら及びト
ルクむらが抑制され、その結果、高い出力を得ることが
できる。
[Function] According to the ultrasonic motor of the present invention, the pressurizing auxiliary member is interposed between the spring means and the movable element, and applies the pressurizing force of the spring means at approximately the same position as the contact surfaces of the stator and the movable element. In order to transmit the force to the contact surfaces, the stator and mover are prevented from bending, and the pressing force of the spring means acts uniformly on each part of the contact surfaces of the stator and mover. Therefore, the stator and the movable element are always pressed against each other via a stable contact surface, rotational unevenness and torque unevenness are suppressed, and as a result, high output can be obtained.

[実施例] 以下、本発明を具体化した実施例を図面に基づいて説明
する。
[Example] Hereinafter, an example embodying the present invention will be described based on the drawings.

第1図は本発明の一実施例による超音波モータの縦断面
図、第2図は可動子と回転軸との連結措造が第1図とは
異なる本発明の別の実施例による超音波モータを示す縦
断面図である。
FIG. 1 is a vertical sectional view of an ultrasonic motor according to an embodiment of the present invention, and FIG. 2 is an ultrasonic motor according to another embodiment of the present invention in which the connection structure between the movable element and the rotating shaft is different from that in FIG. 1. FIG. 3 is a longitudinal cross-sectional view showing the motor.

第1図に示すように、この実施例の超音波モータのハウ
ジング1は、略円板状のベース2と、前記ベース2の外
周部に立設固定された側壁筒3と、前記側壁筒3の上端
部内周に螺着された蓋部材4とから構成されている。
As shown in FIG. 1, the housing 1 of the ultrasonic motor of this embodiment includes a substantially disk-shaped base 2, a side wall tube 3 erected and fixed on the outer periphery of the base 2, and a side wall tube 3. It consists of a lid member 4 screwed onto the inner periphery of the upper end.

前記ベース2の中央環状部5には固定子6の内孔7が挿
着されている。前記固定子6は小径リング部8、大径リ
ング部9及び薄肉部10とから、りん青銅等の金属弾性
材料で一体的に構成されている。前記小径リング部8は
ベース2の支持面11に接合した状態で螺子12によっ
て固定されている。前記大体リング部9の上面には全周
にわたって多数のくし歯13が一定ピッチで突設されて
いる。
An inner hole 7 of a stator 6 is inserted into the central annular portion 5 of the base 2 . The stator 6 is integrally constructed of a small-diameter ring portion 8, a large-diameter ring portion 9, and a thin-walled portion 10 made of an elastic metal material such as phosphor bronze. The small-diameter ring portion 8 is fixed to the support surface 11 of the base 2 by screws 12 while being joined to the support surface 11 of the base 2 . A large number of comb teeth 13 are protruded from the upper surface of the ring portion 9 at a constant pitch over the entire circumference.

前記固定子6の大径リング部9の下面には、セラミック
ス材料等でリング状に成形された圧電素子14が図示し
ない導電性の接着材を介して固着されている。そして、
前記圧電素子14に高周波電圧が印加されると、圧電素
子14の伸縮変形に伴い固定子6の大径リング部9に弾
性進行波、すなわち、超音波振動が発生する。
A piezoelectric element 14 formed into a ring shape from a ceramic material or the like is fixed to the lower surface of the large-diameter ring portion 9 of the stator 6 via a conductive adhesive (not shown). and,
When a high frequency voltage is applied to the piezoelectric element 14, elastic traveling waves, that is, ultrasonic vibrations, are generated in the large diameter ring portion 9 of the stator 6 as the piezoelectric element 14 expands and contracts.

前記ベース2の中央開口部16には軸受17が圧入され
ている。また、前記蓋部材4の中央部には挿通孔18が
形成されるとともに、ベアリング19が固定されている
。そして、前記軸受17とベアリング19とに回転軸2
0が挿通支承されている。前記回転輪20はハウジング
1の外部に突出する出力部21及びベアリング19に当
接する大径鍔部22を備えていて、大径鍔部22にて出
力部21側への移動が規制されている。
A bearing 17 is press-fitted into the central opening 16 of the base 2. Further, an insertion hole 18 is formed in the center of the lid member 4, and a bearing 19 is fixed thereto. The rotating shaft 2 is connected to the bearing 17 and the bearing 19.
0 is inserted and supported. The rotary ring 20 includes an output portion 21 that projects outside the housing 1 and a large-diameter collar portion 22 that contacts the bearing 19, and movement toward the output portion 21 is restricted by the large-diameter collar portion 22. .

前記固定子6に対し上方から接合するように、前記回転
輪20には可動子24が挿通されている。
A movable element 24 is inserted through the rotary ring 20 so as to be joined to the stator 6 from above.

前記可動子24はアルミニウム等の金属材料で成形され
ていて、その外周にはリング状凸部26が下向に突設さ
れている。そして、前記リング状凸部26の下面はライ
ナー28を介して固定子6のくし歯13に対接している
The movable element 24 is made of a metal material such as aluminum, and has a ring-shaped protrusion 26 projecting downward from its outer periphery. The lower surface of the ring-shaped convex portion 26 is in contact with the comb teeth 13 of the stator 6 via the liner 28.

前記可動子24と回転軸20の大径鍔部22との間には
、皿ばね30、第1ゴムシート31、加圧補助部材34
及び第2ゴムシート29が上下に積層されている。
A disc spring 30 , a first rubber sheet 31 , and a pressurizing auxiliary member 34 are provided between the movable element 24 and the large diameter flange 22 of the rotating shaft 20 .
and a second rubber sheet 29 are stacked vertically.

前記皿ばね30は、大径鍔部22の下面に突設した複数
の係止凸部32に嵌合する係止孔33を備え、その係止
孔33で回転軸20に対し回り止めされ、これにより、
可動子24を加圧補助部材34を介して回転軸20に一
体回転可能に連結する。そして、皿ばね30は本実施例
のばね手段を構成し、その弾性力で前記加圧補助部材3
4を介して可動子24を固定子6に加圧する。なお、皿
ばね30の加圧力は蓋部材4の締付は量を加減すること
によって適宜に調整される。
The disc spring 30 is provided with a locking hole 33 that fits into a plurality of locking protrusions 32 protruding from the lower surface of the large-diameter collar portion 22, and is prevented from rotating with respect to the rotating shaft 20 by the locking hole 33. This results in
The movable element 24 is connected to the rotating shaft 20 via a pressurizing auxiliary member 34 so as to be integrally rotatable therewith. The disc spring 30 constitutes the spring means of this embodiment, and its elastic force causes the pressurizing auxiliary member 3 to
4 pressurizes the movable element 24 against the stator 6. Note that the pressing force of the disc spring 30 is adjusted as appropriate by adjusting the amount of tightening of the lid member 4.

前記加圧補助部材34は、アルミニウム等よりなる可動
子24よりも剛性が高い鉄等の金属材料で形成されると
ともに、可動子24よりも大きな質量を有している。ま
た、加圧補助部材34の外周には、前記第2ゴムシート
29を介して可動子24のリング状凸部26の上面に当
接するリング状突起35が下向きに突設されている。そ
して、加圧補助部材34は皿ばね30と可動子24との
間に介在して、前記リング状突起35により、皿ばね3
0の加圧力を固定子6及び可動子24の接触面とほぼ同
じ位置でその接触面に伝えるように構成されている。
The pressurizing auxiliary member 34 is made of a metal material such as iron, which has higher rigidity than the movable element 24 made of aluminum or the like, and has a larger mass than the movable element 24. Furthermore, a ring-shaped protrusion 35 is provided on the outer periphery of the pressurizing auxiliary member 34 so as to protrude downward, the ring-shaped protrusion 35 coming into contact with the upper surface of the ring-shaped protrusion 26 of the movable element 24 via the second rubber sheet 29 . The pressurizing auxiliary member 34 is interposed between the disc spring 30 and the movable element 24, and the ring-shaped protrusion 35 allows the disc spring 3 to
It is configured to transmit a pressing force of 0 to the contact surfaces of the stator 6 and the movable element 24 at substantially the same position as the contact surfaces.

なお、前記第1ゴムシート31は可動子24の振動に伴
う皿ばね30及び加圧補助部材34間の振動音を防止す
る。また、前記第2ゴムシート29は可動子24と加圧
補助部材34との間の振動音を防止する。
Note that the first rubber sheet 31 prevents vibration noise between the disc spring 30 and the pressurizing auxiliary member 34 due to the vibration of the movable element 24. Further, the second rubber sheet 29 prevents vibration noise between the movable element 24 and the pressurizing auxiliary member 34.

次に、上記のように構成された本実施例の超音波モータ
の動作を説明する。
Next, the operation of the ultrasonic motor of this embodiment configured as described above will be explained.

固定子6に固着された圧電素子14に高周波電力が印加
されると、その圧電素子14が伸縮変形されて、固定子
6に弾性進行波が発生する。この弾性進行波は固定子6
の大径リング部9に沿って周回し、その過程で、弾性進
行波を生起する楕円運動の振幅が大径リング部9のくし
歯13によって拡大される。すると、<L歯13の表面
」二の質点の楕円運動によって、固定子6と可動子24
との接触面に摩擦力が発生する。そして、この摩擦力で
可動子24に回転モーメントが作用し、これにより、可
動子24及り回転軸20が一体に回転される。
When high frequency power is applied to the piezoelectric element 14 fixed to the stator 6, the piezoelectric element 14 is expanded and contracted, and an elastic traveling wave is generated in the stator 6. This elastic traveling wave is transmitted to the stator 6
In the process, the amplitude of the elliptical motion that generates an elastic traveling wave is expanded by the comb teeth 13 of the large-diameter ring portion 9 . Then, due to the elliptical movement of the second mass point on the surface of the L tooth 13, the stator 6 and the mover 24
Frictional force is generated on the contact surface. Then, a rotational moment acts on the movable element 24 due to this frictional force, whereby the movable element 24 and the rotating shaft 20 are rotated together.

ところで、本実施例の超音波モータにおいては、加圧補
助部材34が皿ばね30と可動子24との間に介在して
、そのリング状突起35が固定子6及び可動子24の接
触面の真上の位置から可動子24に係合するため、従来
とは異なり、固定子6及び可動子24の彎曲が防止され
るとともに、皿ばね30の加圧力がリング状突起35に
沿って固定子6及び可動子24の接触面の各部に均一に
作用する。したがって、固定子6と可動子24とが常に
安定した接触面を介して圧接され、回転むら及びトルク
むらが抑制され、その結果、高い出力を得ることができ
る。
By the way, in the ultrasonic motor of this embodiment, the pressurizing auxiliary member 34 is interposed between the disc spring 30 and the movable element 24, and its ring-shaped protrusion 35 contacts the contact surface of the stator 6 and the movable element 24. Since the movable element 24 is engaged from the position directly above, unlike the conventional case, the stator 6 and the movable element 24 are prevented from bending, and the pressing force of the disc spring 30 is applied along the ring-shaped protrusion 35 to the stator. 6 and the movable element 24, it acts uniformly on each part of the contact surface. Therefore, the stator 6 and the movable element 24 are always pressed into contact with each other through a stable contact surface, rotational unevenness and torque unevenness are suppressed, and as a result, high output can be obtained.

また、加圧補助部材34が皿ばね30と可動子24との
間に介在して、皿ばね30の加圧力をリング状突起35
の周方向に一様に分布するので、圧電素子14への印加
電圧を高く設定した場合でも、可動子24に固定子6と
は異なる周波数の固有振動が生起するおそれがない。そ
れ故、皿ばね30等の異音を防止した状態で、超音波モ
ータの出力を増大させることができる。しかも、本実施
例においては、加圧補助部材34が可動子24よりも剛
性が高い材料によって形成され、かつ、可動子24より
も大きな質量を有しているので、可動子24の振動が加
圧補助部材34及び皿ばね30等に伝わりにくくなる。
Further, a pressurizing auxiliary member 34 is interposed between the disc spring 30 and the movable element 24 to apply the pressing force of the disc spring 30 to the ring-shaped protrusion 35.
Even if the voltage applied to the piezoelectric element 14 is set high, there is no risk of natural vibrations having a frequency different from that of the stator 6 occurring in the movable element 24 . Therefore, the output of the ultrasonic motor can be increased while preventing abnormal noise from the disc spring 30 and the like. Moreover, in this embodiment, the pressurizing auxiliary member 34 is made of a material with higher rigidity than the movable element 24 and has a larger mass than the movable element 24, so that the vibration of the movable element 24 is The pressure is less likely to be transmitted to the auxiliary member 34, disc spring 30, etc.

なお、上記実施例では、大径鍔部22と皿ばね30との
結合を介して可動子24が回転軸20と一体して回転可
能に連結されているが、本発明はこれに限定されるもの
ではなく、可動子24と回転軸20とを第2図に示す構
造で連結することも可能である。すなわち、第2図に示
す別の実施例においては、回転軸20の下部37が両側
面を切除した断面太鼓状に形成されていて、その回転軸
20の下部37に可動子24が相対回転不能に挿通され
ている。この連結構造によれば、可動子24が回転軸2
0に対し直接結合されているので、可動子24の回転モ
ーメントを回転軸20に効率よく伝達することができる
。また、第2図に図示した例とは異なり、回転軸20の
下部をスプライン状に形成し、ここに可動子24を相対
回転不能に挿通した場合でも前記と同様の効果が得られ
る。
In the above embodiment, the mover 24 is integrally and rotatably connected to the rotary shaft 20 through the connection between the large-diameter collar portion 22 and the disc spring 30, but the present invention is not limited to this. Instead, it is also possible to connect the movable element 24 and the rotating shaft 20 with the structure shown in FIG. That is, in another embodiment shown in FIG. 2, the lower part 37 of the rotating shaft 20 is formed into a drum-like cross section with both sides cut away, and the mover 24 is attached to the lower part 37 of the rotating shaft 20 so that it cannot rotate relative to the lower part 37 of the rotating shaft 20. is inserted into. According to this connection structure, the movable element 24 is connected to the rotating shaft 2.
0, the rotational moment of the movable element 24 can be efficiently transmitted to the rotating shaft 20. Further, unlike the example shown in FIG. 2, the same effect as described above can be obtained even if the lower part of the rotary shaft 20 is formed into a spline shape and the movable element 24 is inserted therein so as not to be relatively rotatable.

更に、上記実施例の超音波モータは可動子24が回転運
動を行なうように構成されているが、可動子が直線運動
するように構成したリニア型の超音波モータに本発明を
応用して具体化することも可能である。
Furthermore, although the ultrasonic motor of the above embodiment is configured so that the movable element 24 performs rotational motion, the present invention can be applied to a linear type ultrasonic motor in which the movable element is configured to perform linear motion. It is also possible to convert

[発明の効果コ 以上に詳述したように、本発明の超音波モータは、圧電
素子の変形により弾性進行波を発生する固定子と、その
固定子に弾接するように配置され、弾性進行波によって
駆動される可動子と、その可動子を固定子に向けて加圧
するばね手段と、そのばね手段と可動子との間に介装さ
れ、ばね手段の加圧力を固定子及び可動子の接触面とほ
ぼ同じ位置でその接触面に伝える加圧補助部材とから構
成したものであるから、固定子と可動子とを常に安定し
た接触面で圧接させて、回転むら及びトルクむらを防止
でき、もって、高い出力を得ることができるという優れ
た効果を奏する。
[Effects of the Invention] As described in detail above, the ultrasonic motor of the present invention includes a stator that generates an elastic traveling wave by deformation of a piezoelectric element, and a stator that is arranged so as to come into elastic contact with the stator. A movable element driven by a movable element, a spring means for pressurizing the movable element toward the stator, and a spring means interposed between the spring means and the movable element, the pressing force of the spring means being applied to the contact between the stator and the movable element. Since it is composed of an auxiliary member that applies pressure to the contact surface at almost the same position as the surface, the stator and mover can always be brought into pressure contact with a stable contact surface, preventing uneven rotation and torque. This provides an excellent effect in that high output can be obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例による超音波モータの縦断面
図、第2図は可動子と回転軸との連結構造が第1図とは
異なる本発明の別の実施例による超音波モータを示す縦
断面図、第3図は従来の超音波モータを示す縦断面図、
第4図は第3図の超音波モータにおいて固定子と可動子
との接触部分を拡大して示す部分断面図、第5図は第3
図の超音波モータで使用されている皿ばねの加圧力の分
布を示す説明図である。 図において、 6:固定子、     14:圧電素子、24:可動子
、     30:皿ばね、34:加圧補助部材 である。 なお、図中、同−符号及び同一記号は同一または相当部
分を示すものである。 特許出願人 アイシン精機株式会社 外1名
FIG. 1 is a vertical cross-sectional view of an ultrasonic motor according to an embodiment of the present invention, and FIG. 2 is an ultrasonic motor according to another embodiment of the present invention in which the connection structure between the movable element and the rotating shaft is different from that in FIG. 1. FIG. 3 is a vertical cross-sectional view showing a conventional ultrasonic motor.
FIG. 4 is a partial cross-sectional view showing an enlarged view of the contact area between the stator and the movable element in the ultrasonic motor shown in FIG. 3, and FIG.
FIG. 3 is an explanatory diagram showing the distribution of the pressing force of the disc spring used in the ultrasonic motor shown in the figure. In the figure, 6: stator, 14: piezoelectric element, 24: mover, 30: disc spring, 34: pressurizing auxiliary member. In the drawings, the same reference numerals and the same symbols indicate the same or equivalent parts. Patent applicant: 1 person other than Aisin Seiki Co., Ltd.

Claims (2)

【特許請求の範囲】[Claims] (1)圧電素子の変形により弾性進行波を発生する固定
子と、 前記固定子に弾接するように配置されて、前記弾性進行
波により駆動される可動子と、 前記可動子を固定子方向に加圧するばね手段と、前記ば
ね手段と可動子との間に介装され、ばね手段の加圧力を
固定子及び可動子の接触面とほぼ同じ位置でその接触面
に伝える加圧補助部材とを具備することを特徴とする超
音波モータ。
(1) A stator that generates an elastic traveling wave by deformation of a piezoelectric element, a movable element that is arranged to come into elastic contact with the stator and is driven by the elastic traveling wave, and a movable element that moves the movable element in the direction of the stator. A pressurizing auxiliary member that is interposed between the spring means and the movable element and transmits the pressurizing force of the spring means to the contact surfaces of the stator and the movable element at substantially the same position as the contact surfaces of the stator and the movable element. An ultrasonic motor comprising:
(2)前記加圧補助部材は、可動子よりも剛性が高い材
料により形成され、かつ、可動子よりも大きな質量を有
していることを特徴とする請求項1に記載の超音波モー
タ。
(2) The ultrasonic motor according to claim 1, wherein the pressurizing auxiliary member is made of a material having higher rigidity than the movable element and has a larger mass than the movable element.
JP1126047A 1989-05-18 1989-05-18 Ultrasonic motor Pending JPH02303372A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1126047A JPH02303372A (en) 1989-05-18 1989-05-18 Ultrasonic motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1126047A JPH02303372A (en) 1989-05-18 1989-05-18 Ultrasonic motor

Publications (1)

Publication Number Publication Date
JPH02303372A true JPH02303372A (en) 1990-12-17

Family

ID=14925335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1126047A Pending JPH02303372A (en) 1989-05-18 1989-05-18 Ultrasonic motor

Country Status (1)

Country Link
JP (1) JPH02303372A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5313132A (en) * 1991-05-20 1994-05-17 Canon Kabushiki Kaisha Elastic supporting member for a vibration driven motor
KR100698438B1 (en) * 2005-05-18 2007-03-22 한국과학기술연구원 Piezoelectric linear motor with displacement amplifying device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5313132A (en) * 1991-05-20 1994-05-17 Canon Kabushiki Kaisha Elastic supporting member for a vibration driven motor
KR100698438B1 (en) * 2005-05-18 2007-03-22 한국과학기술연구원 Piezoelectric linear motor with displacement amplifying device

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