JP2005175247A - 窒化物半導体発光素子の位置決め方法と、この位置決め方法を用いた窒化物半導体装置の製造方法 - Google Patents
窒化物半導体発光素子の位置決め方法と、この位置決め方法を用いた窒化物半導体装置の製造方法 Download PDFInfo
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- JP2005175247A JP2005175247A JP2003414323A JP2003414323A JP2005175247A JP 2005175247 A JP2005175247 A JP 2005175247A JP 2003414323 A JP2003414323 A JP 2003414323A JP 2003414323 A JP2003414323 A JP 2003414323A JP 2005175247 A JP2005175247 A JP 2005175247A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H—ELECTRICITY
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- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
Abstract
【解決手段】基板10と基板上に積層された窒化物半導体層13とを備えた発光装置において、基板又は窒化物半導体層に、線状の欠陥集中領域11と低欠陥領域12を有し、発光装置の特性試験やダイボンド工程時に、線状欠陥集中領域で位置合わせすることを特徴とする。この方法により、発光装置の特性試験やダイボンド工程を行うときに、欠陥集中領域を画像認識させ、基準線とすることにより、形状が一定でない窒化物半導体発光素子でもエラーを出すこともなく、発光素子搬送に用いる吸着コレットの吸着位置を一定とすることができる。
【選択図】図2
Description
Applied Physics Letter. Vol.73 No.6 (1998) pp.832-834
11 欠陥集中領域
12 低欠陥領域
13 窒化物半導体層
14 リッジ部
15 絶縁膜
16 p型電極
17 n型電極
20 n型GaN層
21 n型Al0.062Ga0.938N第1クラッド層
22 n型Al0.1Ga0.9N第2クラッド層
23 n型Al0.062Ga0.938N第3クラッド層
24 n型GaNガイド層24
25 多重量子井戸構造活性層
26 p型Al0.3Ga0.7N蒸発防止層
27 p型GaNガイド層
28 p型Al0.062Ga0.938Nクラッド層
29 p型GaNコンタクト層
100 窒化物半導体レーザ素子
105a 金属多層膜
105b 金属多層膜
110 ヒートシンンク
111 ピン
112 Au0.8Sn0.2ハンダ
113 Inハンダ
114a Auワイヤ
114b Auワイヤ
116 ピン
120 支持基体
Claims (5)
- 線状の欠陥集中領域を備えた窒化物半導体発光素子の位置決め方法において、
前記線状の欠陥集中領域を基準線とすることを特徴とする窒化物半導体発光素子の位置決め方法。 - 前記窒化物半導体発光素子にランプ光を当て、その反射光に基づいて、前記欠陥集中領域を認識することを特徴とする請求項1に記載の窒化物半導体発光素子の位置決め方法。
- 前記窒化物半導体発光素子の特性検査を行う検査工程を備えた窒化物半導体発光装置の製造方法において、
前記検査工程が、
請求項1又は請求項2に記載の窒化物半導体発光素子の位置決め方法によって前記窒化物半導体発光素子の認識を行う第1ステップと、
該第1ステップで認識された前記窒化物半導体発光素子を、特性検査を行う検査位置に搬送する第2ステップと、
前記窒化物半導体発光素子の特性検査をする第3ステップと、
を備えることを特徴とする前記窒化物半導体発光装置の製造方法。 - 前記窒化物半導体発光素子のダイボンドを行うダイボンド工程を備えた窒化物半導体発光装置の製造方法において、
前記ダイボンド工程が、
請求項1又は請求項2に記載の窒化物半導体発光素子の位置決め方法によって前記窒化物半導体発光素子の認識を行う第1ステップと、
該第1ステップで認識された前記窒化物半導体発光素子を、ダイボンドを行うダイボンド位置に搬送する第2ステップと、
前記窒化物半導体素子をヒートシンクの所定の位置に載置して窒化物半導体装置を製造する第3ステップと、
を備えることを特徴とする前記窒化物半導体発光装置の製造方法。 - 前記第3ステップにおいて、前記ヒートシンク上のハンダを加熱して前記ハンダを融解した後、前記ハンダの上に前記窒化物半導体発光素子を載置し、前記窒化物半導体発光素子が載置されて構成される前記窒化物半導体発光装置を冷却すること、を特徴とする請求項4に記載の前記窒化物半導体発光装置の製造方法。
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2000196172A (ja) * | 1998-12-25 | 2000-07-14 | Fujitsu Quantum Device Kk | 半導体装置 |
JP2003133650A (ja) * | 2001-10-29 | 2003-05-09 | Sharp Corp | 窒化物半導体レーザ素子、その製造方法および半導体光学装置 |
JP2003229638A (ja) * | 2002-02-05 | 2003-08-15 | Sumitomo Electric Ind Ltd | 窒化物系化合物半導体発光素子 |
JP2003229631A (ja) * | 2002-02-05 | 2003-08-15 | Sumitomo Electric Ind Ltd | 窒化物系化合物半導体素子の実装方法 |
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000196172A (ja) * | 1998-12-25 | 2000-07-14 | Fujitsu Quantum Device Kk | 半導体装置 |
JP2003133650A (ja) * | 2001-10-29 | 2003-05-09 | Sharp Corp | 窒化物半導体レーザ素子、その製造方法および半導体光学装置 |
JP2003229638A (ja) * | 2002-02-05 | 2003-08-15 | Sumitomo Electric Ind Ltd | 窒化物系化合物半導体発光素子 |
JP2003229631A (ja) * | 2002-02-05 | 2003-08-15 | Sumitomo Electric Ind Ltd | 窒化物系化合物半導体素子の実装方法 |
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