JP2005169312A - Liquid material application method and apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To defoam bubbles mixed into a liquid material in a liquid material storing/discharging part for storing/discharging the liquid material, by using a basic function a dispenser has, or a pressurizing function for discharging the liquid material and a depressurizing function for preventing leakage of the liquid material. <P>SOLUTION: When discharging the liquid material by connecting a syringe 1 and a needle 2 storing and discharging the liquid material from a discharge port, to the dispenser 40 having a pressurizing function with an air tube 32, and pressurizing the liquid material in the syringe 1 by the dispenser 40, the dispenser 40 is structured to have the pressurizing/depressurizing function. The syringe 1 is depressurized by the dispenser 40 via the air tube 32 with the discharge port of the needle 2 connected to the lower end of the syringe 1 tightly closed, to thereby defoam the bubbles in the liquid material in the syringe. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a liquid material application method and apparatus for applying (including injection, filling, drip, etc.) a liquid material, for example, an adhesive, a solder paste, etc., onto an object to be applied. The present invention relates to a liquid material application method and apparatus that realizes a defoaming function of bubbles contained in the inside.

  When applying a liquid material to an object to be applied such as a substrate or IC, in order to prevent the discharge delay of the liquid material and to stably supply the discharge amount, a state in which bubbles in the liquid material filled in the syringe in advance are removed. It is necessary to keep it. In particular, when applying a small amount of liquid material to narrow areas, such as wire bonding, IC lead terminals, or IC underfill, or high density locations, eliminate bubbles in the liquid material (defoaming). Is indispensable.

  As a first method for this purpose, as shown in FIG. 4, a syringe 1, which is a container containing a liquid material, is connected to a vacuum pump (vacuum pump) 10 by an air tube 11 and connected to the lower end of the syringe 1. The liquid material discharge port of the needle 2 is closed with a human finger F and the like, and the inside of the syringe 1 is evacuated by the vacuum pump 10, and this evacuation operation is continued for an appropriate time to remove bubbles mixed in the liquid material. There is a way to foam. After defoaming, the vacuum pump 10 is turned off, the air tube 11 is removed from the vacuum pump 10, and the syringe 1 is attached to the coating device.

  As a second method, as shown in FIG. 5, an airtight container (vacuum container) 20 is connected to a vacuum pump 10 by an air tube 11, and a syringe 1 (needle 2) filled with a liquid material in the airtight container 20. The discharge port is sealed with a lid), and the airtight container 20 is decompressed by the vacuum pump 10 so that bubbles mixed in the liquid material are discharged to the outside of the liquid material. is there. Thereafter, the inside of the airtight container 20 is returned to atmospheric pressure, and the syringe 1 is taken out from the airtight container 20 and mounted on the coating apparatus.

  In the case of the first method, bubbles may be mixed when the syringe 1 is transferred to the coating apparatus and mounted. In addition, since there is no defoaming function on the syringe side after mounting on the applicator, there is a possibility that air is accidentally inhaled from the needle tip side during continuous discharge operation, and bubbles may be mixed in the liquid material. .

  Similarly, in the case of the second method, after defoaming, bubbles may be mixed when the syringe 1 is transferred from the airtight container 20 to the application device and attached, and a continuous discharge operation is performed. There is a possibility that air is sucked in from the needle tip side and air bubbles are mixed in the liquid material.

  As known techniques regarding defoaming in this type of coating apparatus, there are Patent Document 1, Patent Document 2, and Patent Document 3.

Japanese Patent Laid-Open No. 11-156267 JP-A-6-57461 JP-A-6-170302

  Patent Document 1 includes a liquid material application unit (syringe and needle) that discharges a liquid material from a discharge port, and a liquid storage tank that is provided separately from the liquid material application unit, and is in the middle of a supply path from the liquid storage tank to the liquid material application unit Is provided with a defoaming mechanism.

  As a problem in this case, since it is a defoaming mechanism in the middle of the supply of the liquid material to the liquid material application unit, it is not possible to deal with bubbles mixed in the liquid material application unit.

  Patent Document 2 has a double structure of a syringe that stores a liquid material, and has a valve function inside. Air bubbles mixed in the liquid material are collected in a bubble storage chamber provided in the upper part of the syringe, and a relief valve. It is the structure which discharges outside.

  As a problem in this case, since the defoaming operation is not forcibly performed, it is not universal for all liquid materials. Further, since the liquid discharge operation is performed by the valve mechanism, it is considered that the discharge amount varies greatly with respect to the request for the stabilized discharge.

  Patent Document 3 includes a syringe that discharges a liquid material, a liquid replenishment tank, and a dispenser that controls the liquid material discharge conditions of the syringe, and the inside of the syringe is always kept under reduced pressure by a dispenser via a dedicated air pipe. It is the structure which bubbles.

  As a problem in this case, apart from the piping for causing the syringe and the liquid replenishing tank to discharge the liquid material, a depressurized air piping for defoaming and a syringe with a special structure that can be connected to the piping are required. In addition, as a dispenser for controlling the discharge of the liquid material, a dedicated function for constantly reducing the pressure is required. For this reason, the dispenser of a conventional general coating apparatus cannot cope with it, and the cost increases.

  In view of the above points, the present invention provides a liquid material that stores and discharges a liquid material by using a basic function of the dispenser, that is, a pressurizing function for discharging the liquid material and a pressure reducing function for preventing leakage of the liquid material. It is an object of the present invention to provide a liquid material application method and apparatus capable of defoaming bubbles mixed in a liquid material in a storage / discharge section.

  Other objects and novel features of the present invention will be clarified in embodiments described later.

In order to achieve the above object, the invention of claim 1 of the present application connects a storage discharge unit that stores a liquid material and discharges the liquid material from a discharge port, and a dispenser having a pressurizing function with a pressurizing pipe, and In the liquid material application method in which the liquid material is discharged by pressurizing the liquid material in the storage and discharge section with a dispenser,
The dispenser is configured to have a pressure increasing / decreasing function, and the storage discharge portion is depressurized by the dispenser through the pressurizing pipe in a state where the discharge port of the storage discharge portion is hermetically sealed to be inside the liquid material in the storage discharge portion. It is characterized by defoaming mixed bubbles.

  The liquid material application method according to the second aspect of the present invention is the liquid material application method according to the first aspect of the present invention, wherein the operation of degassing bubbles mixed in the liquid material in the storage / discharge section is performed when the storage / discharge section is replaced or when the liquid material is discharged. It is characterized by being performed during operation.

  The liquid material application method according to the invention of claim 3 of the present application is the liquid material application method according to claim 1 or 2, wherein the bubbles generated above the liquid material by the operation of degassing the bubbles mixed inside the liquid material in the storage and discharge section are In the sealed state of the discharge port, the storage discharge unit is made to disappear by repeated pressurization and decompression.

The invention of claim 4 of the present application relates to a liquid material application device in which a storage discharge unit that stores a liquid material and discharges the liquid material from a discharge port and a dispenser having a pressurizing function are connected by a pressurizing pipe.
While having a soft member that seals the discharge port of the storage discharge unit, the dispenser has a pressure increasing / decreasing function,
Air bubbles mixed in the liquid material in the storage and discharge unit by reducing the pressure in the storage and discharge unit with the dispenser through the pressurizing pipe in a state where the discharge port of the storage and discharge unit is sealed against the soft member It is characterized by degassing.

  The liquid material application device according to the invention of claim 5 is characterized in that, in claim 4, a foam eliminating filter is provided in an upper position separated from the liquid material in the storage and discharge section.

  A liquid material application device according to a sixth aspect of the present invention is characterized in that, in the fourth aspect, a foam eliminating filter floated on a liquid material liquid surface is provided in the storage and discharge section.

  The liquid material application device according to the seventh aspect of the present invention is the liquid material application device according to the fourth, fifth or sixth aspect, wherein the bubbles generated above the liquid material by the operation of defoaming the bubbles mixed in the liquid material in the storage and discharge section. It is characterized in that a sensor for detecting the height position is provided.

  A liquid material application device according to an eighth aspect of the present invention is characterized in that, in the sixth aspect, a sensor is provided for detecting a height position of a foam eliminating filter floating on the liquid surface of the liquid material.

  According to the present invention, a storage discharge unit that stores a liquid material and discharges the liquid material from a discharge port and a dispenser having a pressurizing function are connected by a pressure pipe, and the liquid material in the storage discharge unit is pressurized by the dispenser. In the configuration in which the liquid material is discharged, the dispenser has a pressure increasing / decreasing function, and the storage discharge portion is depressurized by the dispenser through the pressurizing pipe while the discharge port of the storage discharge portion is sealed. Thus, bubbles mixed in the liquid material in the storage / discharge section can be removed. For this reason, the defoaming operation is possible by using the basic function of the dispenser, that is, the pressurizing function for discharging the liquid material and the depressurizing function for preventing leakage of the liquid material, and a special mechanism for defoaming. There is an advantage that is unnecessary.

  Hereinafter, as the best mode for carrying out the present invention, embodiments of a liquid material coating method and apparatus will be described with reference to the drawings.

  FIG. 1 shows Embodiment 1 which is a basic configuration of a liquid material coating method and apparatus according to the present invention. In this figure, 1 is a syringe, and 2 is a needle (nozzle), which constitutes a storage / discharge section 30 that stores a liquid material and discharges the liquid material from a discharge port. The storage / discharge unit 30 is held by the coating head 31 in a replaceable manner. Moreover, the syringe 1 internal space S of the storage discharge part 30 is connected to the dispenser 40 via the air tube (syringe adapter) 32 as a pressurization pipe. Here, the dispenser 40 has a function of applying pressurized air to the internal space S of the syringe 1 through the air tube 32 and discharging a predetermined amount of liquid material from the liquid material discharge port at the lower end of the needle 2 communicating with the syringe 1. It has a pressure reducing function (vacuum function) for preventing liquid material leakage, and is used in a general coating apparatus.

  In addition, a needle sealing sheet 46 is provided as a soft member for sealing the needle on the upper surface of a needle set plate (exchange stage) 45 for abutting the needle 2 attached to the lower part of the syringe 1 during replacement. . The needle sealing sheet 46 is a soft material sheet such as rubber, foamed resin, or elastomer resin, and when the lower end of the needle 2 is abutted, the liquid material discharge port can be hermetically sealed. The soft member that seals the needle is not limited to a sheet, and may be, for example, a cylindrical lump.

  The method and apparatus of the present embodiment is intended to apply a small amount of a liquid material in a narrow area, such as wire bonding, between IC lead terminals, or underfill of an IC, in a high-density place. It is indispensable to use in a state where bubbles contained in the liquid material are completely removed.

  Usually, in the defoaming operation, the surface of the liquid material in the syringe is evacuated to remove bubbles mixed in the liquid material. In the embodiment according to the present invention, paying attention to this vacuuming work, the defoaming function is provided at a set timing by diverting the vacuum function for preventing leakage of liquid material, which is basically installed in the dispenser of the coating apparatus. It is something that is going to be realized.

  A method for defoaming bubbles mixed in the liquid material in the syringe 1 of the storage / discharge unit 30 will be described.

  After replacing with a new syringe 1 filled with a liquid material and mounting on the application head 31 and connecting the air tube 32 to the dispenser 40, the tip of the needle 2 is abutted against the upper surface of the needle set plate (exchange stage) 45. Since the needle seal seam 46 made of a soft material capable of airtightly sealing the tip of the needle is attached to the plate surface, the tip of the needle is isolated from the atmospheric state at the time of abutment.

  In this state, the liquid material upper space S in the syringe 1 is evacuated by the dispenser 40 through the air tube 32 to be in a vacuum state (depressurized state), and the defoaming operation is started. For a preset time, the vacuum state by this evacuation is maintained, and bubbles mixed in the liquid material are removed. After the set time has elapsed (after evacuation by the dispenser 40 is turned off), the coating head 31 moves to return the syringe 1 to the origin position of the coating device. Thereafter, using the syringe 1 after the defoaming treatment, a normal liquid material application operation is performed by sending pressurized air to the inner space S of the syringe 1 through the air tube 32 by the pressurizing function of the dispenser 40 with respect to the application object. Execute.

  Although the above defoaming operation is an example performed at the time of syringe replacement, it can be made to function at a necessary timing even during the continuous discharge operation of the syringe 1 (during the production operation of the coating apparatus). That is, the normal coating operation is interrupted, the coating head 31 is moved, the tip of the needle 2 is abutted against the needle sealing sheet 46, and the above-described dispenser 40 is then evacuated for a predetermined time.

  In addition, as a countermeasure against bubbles generated on the liquid surface of the liquid material in the syringe 1 during the defoaming operation (collected on the liquid surface as a result of the bubbles in the liquid material being defoamed), the pressure in the syringe 1 is set. By repeating the operation of depressurizing {defoaming (generating bubbles on the liquid surface)} and pressurizing (foaming on the liquid surface) under the control of the dispenser 40, the generation of bubbles on the liquid surface is made constant. There is a way to suppress it. The reason why the above measures are taken is that if the bubbles rise into the air tube 32, the air tube 32 may be clogged.

  According to the first embodiment, the following effects can be obtained.

(1) The defoaming operation in the liquid material in the syringe 1 can be performed by utilizing the vacuum function for preventing leakage of the liquid material, which is basically installed in a dispenser of a general coating apparatus. There is no need to use a special one or the dispenser 40, and no dedicated piping is required. For this reason, new equipment is not required for defoaming, and cost reduction can be achieved.

(2) The defoaming operation can be performed not only when the syringe 1 is replaced, but also during a continuous discharge operation of the liquid material. For this reason, even if bubbles may be generated in the liquid material during the continuous discharge operation, the bubbles can be removed by performing the defoaming operation during the discharge operation, so that it is possible to cope with it.

(3) There is a problem that bubbles are collected on the liquid surface of the liquid material in the syringe 1 by the defoaming operation of the syringe 1, but the pressure in the syringe 1 is reduced {defoaming (bubble generation on the liquid surface)}. And the operation of pressurizing (foaming on the liquid surface) can be repeated by controlling the dispenser 40.

  FIGS. 2A, 2B, and 2C show Embodiments 2, 3, and 4 to which a bubble eliminating function is added, respectively.

  In Embodiment 2 of FIG. 2A, a breathable filter 50 such as a wire mesh that has a ventilation function but does not raise bubbles is provided (fixed) in the upper portion of the syringe 1. Thereby, the rise of the foam generated on the liquid surface of the liquid material by the defoaming operation is suppressed, and the role of foam elimination is achieved.

  In the third embodiment shown in FIG. 2B, a filter 51 in which needle-like protrusions 53 that break through bubbles are integrated downwardly into a breathable filter main body 52 such as a wire mesh that has a ventilation function but does not raise bubbles is a syringe 1. Provided (fixed) on the inner top. Thereby, the rise of the foam generated on the liquid surface of the liquid material by the defoaming operation is suppressed, and the role of foam elimination is achieved.

  In Embodiment 4 of FIG. 2C, a float type breathable filter (drop lid) 55 that has a ventilation function but does not raise bubbles is floated on the liquid surface of the liquid material in the syringe 1 When it occurs, it floats on the foam). For example, the float filter 55 has excellent chemical resistance and is made of a material (for example, a foaming material) smaller than the specific gravity of the liquid material, so that it can float on the bubbles above the liquid material. Further, by forming several small holes that are air passages, it is possible to provide a bubble erasing function while ensuring air permeability.

  In the second, third, or fourth embodiment, the other configurations are the same as those in the first embodiment described above, and the same or corresponding parts are denoted by the same reference numerals and the description thereof is omitted.

  3A, 3B, and 3C show Embodiments 5, 6, and 7, respectively, to which a function for detecting the height of bubbles generated on the liquid surface of the liquid material is added.

  In Embodiment 5 of FIG. 3 (A), the position detection is performed so that the height of the foam generated on the liquid surface of the liquid material in the syringe 1 by the defoaming operation can be detected when reaching a certain position in the upper part of the syringe. The photoelectric sensor 60 is provided as a sensor. In this case, the syringe 1 is transparent or translucent so that bubbles can be easily detected, and the light emitting unit 61 and the light receiving unit 62 of the photoelectric sensor 60 are opposed to each other at a predetermined height with the syringe 1 interposed therebetween.

  When bubbles are collected on the liquid surface and reach a predetermined height due to the defoaming operation of the bubbles in the liquid material, the light emitting unit 61 and the light receiving unit 62 of the photoelectric sensor 60 are blocked and thereby the bubbles are predetermined. It is possible to detect that the height position has been reached.

  In Embodiment 6 of FIG. 3B, position detection is performed so that the height of the bubble generated on the liquid surface of the liquid material in the syringe 1 by the defoaming operation can be detected when reaching a certain position in the upper part of the syringe. It is the structure which provided the contact-type sensor 63 as a sensor. In this case, the liquid material that can be detected is limited to a conductive material such as a solder paste, and the conductive foam short-circuits between the pair of electrodes of the contact sensor 63 so that the foam has a predetermined height. It can be detected that the position has been reached.

  In Embodiment 7 of FIG. 3C, the position detection is performed so that the height of the foam generated on the liquid surface of the liquid material in the syringe 1 by the defoaming operation can be detected when reaching a certain position in the upper part of the syringe. A proximity sensor 65 as a sensor is provided. In this case, the proximity sensor 65 can detect by providing the metal part M in a part of the float filter 55 shown in Embodiment 4 of FIG. 2C and floating on the bubble on the liquid material. That is, by detecting the height of the float filter 55 lifted by bubbles with the proximity sensor 65, the height position of the bubbles can be known. Further, when the float filter 55 is made of a nonmetal such as a resin, the height can be detected by using the above-described photoelectric sensor.

  The other configurations of the fifth, sixth, and seventh embodiments are the same as those of the first embodiment described above, and the same or corresponding parts are denoted by the same reference numerals and description thereof is omitted.

  Although the embodiments of the present invention have been described above, it will be obvious to those skilled in the art that the present invention is not limited to these embodiments, and various modifications and changes can be made within the scope of the claims.

  ADVANTAGE OF THE INVENTION According to this invention, the coating device which can apply | coat a trace amount liquid material to a narrow range and high-density places, such as wire bonding, between the lead terminals of IC, or underfill of IC, is realizable.

It is a block diagram which shows Embodiment 1 which is a basic composition of the liquid material application method and apparatus which concern on this invention. It is other embodiment of this invention, (A) is Embodiment 2, (B) is Embodiment 3 and (C) is a block diagram which shows Embodiment 4, respectively. It is other embodiment of this invention, (A) is Embodiment 5, (B) is Embodiment 6 and (C) is a block diagram which shows Embodiment 7, respectively. It is explanatory drawing which shows the conventional defoaming method of a liquid material. It is explanatory drawing which shows the other defoaming method of the conventional liquid material.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Syringe 2 Needle 10 Vacuum pump 11, 32 Air tube 20 Airtight container 30 Storage discharge part 40 Dispenser 45 Needle set plate 46 Needle sealing sheet 50, 55 Breathable filter 51 Filter 52 Filter main body 53 Protrusion 60 Photoelectric sensor 63 Contact type sensor 65 Proximity sensor

Claims (8)

A storage discharge unit for storing the liquid material and discharging the liquid material from the discharge port is connected to a dispenser having a pressurizing function by a pressurizing pipe, and the liquid material in the storage discharge unit is pressurized by the dispenser. In the liquid material application method to be discharged,
The dispenser is configured to have a pressure increasing / decreasing function, and the storage discharge portion is depressurized by the dispenser through the pressurizing pipe in a state where the discharge port of the storage discharge portion is hermetically sealed to be inside the liquid material in the storage discharge portion. A liquid material application method characterized by defoaming mixed bubbles.   The liquid material application method according to claim 1, wherein the operation of defoaming bubbles mixed in the liquid material in the storage / discharge section is performed when the storage / discharge section is replaced or during the discharge operation of the liquid material.   Due to the operation of defoaming bubbles mixed in the liquid material in the storage / discharge unit, bubbles generated in the upper part of the liquid material are eliminated by repeated pressurization and decompression in the storage / discharge unit in a sealed state of the discharge port. The liquid material coating method according to claim 1 or 2, wherein In a liquid material application apparatus in which a storage discharge unit that stores a liquid material and discharges the liquid material from a discharge port and a dispenser having a pressurizing function are connected by a pressurizing pipe.
While having a soft member that seals the discharge port of the storage discharge unit, the dispenser has a pressure increasing / decreasing function,
Air bubbles mixed in the liquid material in the storage and discharge unit by reducing the pressure in the storage and discharge unit with the dispenser through the pressurizing pipe in a state where the discharge port of the storage and discharge unit is sealed against the soft member A liquid material applicator characterized by degassing.   The liquid material application device according to claim 4, wherein a foam eliminating filter is provided in an upper position separated from the liquid material in the storage and discharge section.   The liquid material application device according to claim 4, further comprising a foam erasing filter floated on a liquid material liquid level in the storage and discharge section.   The liquid material application according to claim 4, 5 or 6, further comprising a sensor for detecting a height position of bubbles generated above the liquid material by an operation of defoaming bubbles mixed in the liquid material in the storage / discharge section. apparatus.   The liquid material application apparatus according to claim 6, further comprising a sensor for detecting a height position of the foam eliminating filter floated on the liquid material liquid surface.

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