JP2005165304A5 - - Google Patents
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- Publication number
- JP2005165304A5 JP2005165304A5 JP2004328461A JP2004328461A JP2005165304A5 JP 2005165304 A5 JP2005165304 A5 JP 2005165304A5 JP 2004328461 A JP2004328461 A JP 2004328461A JP 2004328461 A JP2004328461 A JP 2004328461A JP 2005165304 A5 JP2005165304 A5 JP 2005165304A5
- Authority
- JP
- Japan
- Prior art keywords
- film
- semiconductor film
- electrode
- semiconductor
- liquid crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000004065 semiconductor Substances 0.000 claims 51
- 239000004973 liquid crystal related substance Substances 0.000 claims 18
- 230000004888 barrier function Effects 0.000 claims 17
- 238000004519 manufacturing process Methods 0.000 claims 10
- 238000000034 method Methods 0.000 claims 9
- 238000007599 discharging Methods 0.000 claims 4
- 239000012535 impurity Substances 0.000 claims 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 2
- 239000004020 conductor Substances 0.000 claims 2
- 239000010949 copper Substances 0.000 claims 2
- 239000010931 gold Substances 0.000 claims 2
- 229910052736 halogen Inorganic materials 0.000 claims 2
- 150000002367 halogens Chemical class 0.000 claims 2
- 229910052739 hydrogen Inorganic materials 0.000 claims 2
- 239000001257 hydrogen Substances 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 239000011347 resin Substances 0.000 claims 2
- 229920005989 resin Polymers 0.000 claims 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 238000001035 drying Methods 0.000 claims 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 238000007747 plating Methods 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000004332 silver Substances 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 239000010937 tungsten Substances 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004328461A JP4737971B2 (ja) | 2003-11-14 | 2004-11-12 | 液晶表示装置および液晶表示装置の作製方法 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003386013 | 2003-11-14 | ||
JP2003386013 | 2003-11-14 | ||
JP2004328461A JP4737971B2 (ja) | 2003-11-14 | 2004-11-12 | 液晶表示装置および液晶表示装置の作製方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2005165304A JP2005165304A (ja) | 2005-06-23 |
JP2005165304A5 true JP2005165304A5 (enrdf_load_stackoverflow) | 2008-01-10 |
JP4737971B2 JP4737971B2 (ja) | 2011-08-03 |
Family
ID=34741816
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004328461A Expired - Fee Related JP4737971B2 (ja) | 2003-11-14 | 2004-11-12 | 液晶表示装置および液晶表示装置の作製方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4737971B2 (enrdf_load_stackoverflow) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007073856A (ja) * | 2005-09-09 | 2007-03-22 | Sony Corp | 導電性パターンの形成方法、半導体装置の製造方法、および有機電界発光素子の製造方法 |
JP4565572B2 (ja) * | 2006-09-05 | 2010-10-20 | 株式会社フューチャービジョン | 液晶表示パネルの製造方法 |
JP4565573B2 (ja) * | 2006-09-07 | 2010-10-20 | 株式会社フューチャービジョン | 液晶表示パネルの製造方法 |
JP2008129314A (ja) * | 2006-11-21 | 2008-06-05 | Hitachi Displays Ltd | 画像表示装置およびその製造方法 |
US7777224B2 (en) * | 2007-01-30 | 2010-08-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacturing the same |
JP2009117619A (ja) * | 2007-11-06 | 2009-05-28 | Idemitsu Kosan Co Ltd | 有機薄膜トランジスタの製造方法及び有機薄膜トランジスタ |
US20100224880A1 (en) * | 2009-03-05 | 2010-09-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
KR101764098B1 (ko) | 2010-12-28 | 2017-08-14 | 엘지디스플레이 주식회사 | 액정 표시장치 |
CN103811327A (zh) * | 2014-02-14 | 2014-05-21 | 上海和辉光电有限公司 | 薄膜晶体管的制作方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01180521A (ja) * | 1988-01-12 | 1989-07-18 | Fuji Electric Co Ltd | 液晶表示パネル用アクティブマトリックス基板 |
KR100255592B1 (ko) * | 1997-03-19 | 2000-05-01 | 구본준 | 액정 표시 장치 구조 및 그 제조 방법 |
JP2002026333A (ja) * | 2000-07-11 | 2002-01-25 | Nec Corp | アクティブマトリクス基板の製造方法 |
JP2003017706A (ja) * | 2001-07-02 | 2003-01-17 | Idemitsu Kosan Co Ltd | Tft基板、それを用いた液晶表示装置及びその製造方法 |
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2004
- 2004-11-12 JP JP2004328461A patent/JP4737971B2/ja not_active Expired - Fee Related