JP2005164456A - Visual inspection device and visual inspection method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a visual inspection device and a visual inspection method, which can realize optimum inspection form, in which improvement in the production efficiency and the secure establishment of inspection accuracy are balanced. <P>SOLUTION: In the printing inspection for inspecting the printing state by imaging a board after the solder printing is performed, inspection object position data to be the inspection object on the board are grouped, and the data on inspection frequency are prepared, in which inspection frequency is provided to each group in advance. In the process for consecutively executing the printing inspection for the plurality of boards, a visual field moving means for moving a camera or the visual field of the camera on the board and the deciding means for deciding whether the printing state is good or bad are controlled, while deciding for each group, whether it is the object to be inspected, referring to the inspection frequency data. Accordingly, the inspection frequency can be set properly, according to the degree of the need for the object to be inspected, with respect to the same board, and the optimum inspection form can be realized, in which the improvement in the production efficiency and securing setting of the inspection accuracy are balanced. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an appearance inspection apparatus and an appearance inspection method for imaging a test object such as solder printed on a substrate and performing a predetermined inspection such as a printed state.

  In mounting electronic components, cream solder is applied to the surface of the substrate prior to mounting the electronic components on the substrate. As a method for applying the cream solder, a screen printing method is widely used, and after the printing process, a printing inspection for inspecting the printing state of the cream solder is performed. In this print inspection, a substrate after screen printing is imaged by a camera, and the imaged result is subjected to image processing to determine whether or not the cream solder is correctly printed on the print site (see, for example, Patent Document 1). .

By the way, there are various characteristics of electronic components mounted on a substrate, and the required inspection accuracy differs depending on the electronic components mounted after printing in the solder printing process. In other words, for printing parts that are expensive and require high reliability, and where electronic parts that require good printing accuracy are mounted, inspection is performed using a method that is as close to 100% inspection as possible so that printing accuracy is assured. There is a need. On the other hand, it is not always necessary to perform 100% inspection for printed parts on which electronic components that are easy to join by soldering and printing accuracy is not so important, and within the allowable range from the specified production time. The inspection may be performed in a sampling manner.
JP-A-6-18237

  However, in the solder inspection using the above-described conventional apparatus, the inspection frequency cannot be changed according to the necessity of the inspection object for the same substrate, and all the solder print parts to be inspected are inspected entirely. Alternatively, it was only possible to select either sampling inspection at the same frequency. For this reason, in the conventional visual inspection apparatus, it has been difficult to realize an optimal inspection form in which the balance between improvement in production efficiency and ensuring of inspection accuracy is achieved.

  Therefore, an object of the present invention is to provide an appearance inspection apparatus and an appearance inspection method capable of realizing an optimum inspection form in which a balance between improvement in production efficiency and ensuring of inspection accuracy is achieved.

  An appearance inspection apparatus according to the present invention is an appearance inspection apparatus that performs a predetermined inspection by imaging a substrate having a plurality of inspection objects, an imaging unit that images the inspection object and acquires image data, and Visual field moving means for relatively moving an imaging visual field by the imaging means on the substrate; determination means for determining the result of the inspection based on the image data; and inspection target position data indicating positions of the plurality of inspection objects. Position data providing means for providing, grouped data providing means for providing grouped data obtained by grouping the position data to be inspected into individual groups according to grouping conditions, and a frequency at which the inspection is performed for each group. Based on the inspection frequency data providing means for providing the assigned inspection frequency data, the inspection object position data, the grouping data, and the inspection frequency data Serial view movement means, and a test execution control means for controlling the imaging means and determining means.

The visual inspection method of the present invention includes an imaging unit that captures an image of an inspection target and acquires image data, a visual field moving unit that relatively moves an imaging visual field by the imaging unit on the substrate, and the image data based on the image data. Determination means for determining the result of inspection, position data providing means for providing inspection object position data indicating the positions of the plurality of inspection objects, and the inspection object position data are grouped into individual groups according to grouping conditions A plurality of inspections by a visual inspection apparatus comprising: grouped data providing means for providing grouped data; and inspection frequency data providing means for providing inspection frequency data to which the frequency at which the inspection is performed for each group is provided. An appearance inspection method for imaging a substrate having an object and performing a predetermined inspection, wherein the inspection is continuously performed on a plurality of substrates. In the process, controlled by said object position data, grouped data and inspection frequency data the view movement means based on the inspection execution controller imaging means and determining means.

  According to the present invention, inspection of each group in which inspection target position data is grouped in a process of continuously performing appearance inspection on a plurality of substrates by imaging a substrate having a plurality of inspection objects and performing a predetermined inspection. By setting the visual field moving means, the imaging means and the judging means by the inspection execution control means based on the inspection frequency data defining the frequency, an appropriate inspection frequency is set for the same substrate according to the necessity of the inspection object. Therefore, it is possible to realize an optimum inspection form in which the balance between improvement of production efficiency and ensuring of inspection accuracy is achieved.

  Next, embodiments of the present invention will be described with reference to the drawings. 1 is a front view of a screen printing apparatus according to an embodiment of the present invention, FIG. 2 is a side view of the screen printing apparatus according to an embodiment of the present invention, and FIG. 3 is a screen printing apparatus according to an embodiment of the present invention. FIG. 4 is a plan view of the substrate printing surface of the screen printing apparatus according to the embodiment of the present invention, and FIG. 5 is a block diagram showing the configuration of the control system of the screen printing apparatus according to the embodiment of the present invention. FIG. 6 is a diagram showing the contents stored in the program storage unit and the data storage unit of the screen printing apparatus according to the embodiment of the present invention. FIG. 7 is an element of the element solder printing unit of the screen printing apparatus according to the embodiment of the present invention. FIG. 8 is an explanatory diagram of shape / position data, FIG. 8 is an explanatory diagram of mounting data and a mask opening pattern of a screen printing apparatus according to an embodiment of the present invention, and FIG. 9 is an inspection of a printing inspection apparatus of an embodiment of the present invention. Threshold Live FIG. 10 is an explanatory diagram of inspection frequency data of the print inspection apparatus according to the embodiment of the present invention. FIG. 11 is a flowchart of print inspection data creation processing according to the embodiment of the present invention. 13, FIG. 14, FIG. 16 are diagrams showing display screens of the print inspection apparatus according to the embodiment of the present invention. FIG. 15 is a flowchart of the inspection execution control process in the print inspection apparatus according to the embodiment of the present invention. It is.

  First, the structure of the screen printing apparatus will be described with reference to FIG. 1, FIG. 2, and FIG. This screen printing apparatus is not only a printing function for printing cream solder as an inspection object on a board on which electronic components are mounted, but also a predetermined process performed by imaging a board having a plurality of inspection objects as will be described later. Function as a print inspection apparatus (appearance inspection apparatus) that performs pass / fail judgment of the print state, and print inspection data creation apparatus (for appearance inspection) that creates data for print inspection used in this print inspection (appearance inspection) It also has a function as a data creation device.

  1 and 2, the substrate positioning unit 1 includes a θ-axis table 4 stacked on a moving table including an X-axis table 2 and a Y-axis table 3, and a Z-axis table 5 disposed thereon. A substrate holding unit 7 is provided on the Z-axis table 5 to hold the substrate 6 sandwiched by the clamper 8 from below. The substrate 6 to be printed is carried into the substrate positioning unit 1 by the carry-in conveyor 14 shown in FIGS. By driving the substrate positioning unit 1, the substrate 6 moves in the XY directions and is positioned at a printing position and a substrate recognition position described later. The printed circuit board 6 is unloaded by the unloading conveyor 15. The carry-in conveyor 14 and the carry-out conveyor 15 constitute a substrate carrying mechanism 18 (FIG. 5).

A screen mask 10 is disposed above the substrate positioning unit 1, and the screen mask 10 is configured by attaching a mask plate 12 to a holder 11. The substrate 6 is aligned with the mask plate 12 by the substrate positioning unit 1 and abuts from below. Within the solder printing range 6a on the circuit forming surface of the substrate 6, electrodes 6b, 6c, 6d and 6e for joining different types of electronic components P1, P2, P3 and P4 as shown in FIG. Is provided.

  On the screen mask 10, a squeegee head 13 is disposed so as to reciprocate in the horizontal direction by a squeegee moving mechanism 17 (FIG. 5). With the substrate 6 in contact with the lower surface of the mask plate 12, the cream solder 9 is supplied onto the mask plate 12, and the squeegee 13a of the squeegee head 13 is brought into contact with the surface of the mask plate 12 to slide. Cream solder 9 is printed on the printing surface of the substrate 6 through the pattern holes 16 provided in the mask plate 12. As a result, as shown in FIG. 4B, element solder printing portions S1, S2, S3, and S4 are formed on the electrodes 6b, 6c, 6d, and 6e, respectively. The element solder printing portions S1, S2, S3, and S4 are a plurality of inspection objects on the substrate 6.

  A camera 20 is provided above the screen mask 10. As shown in FIG. 3, the camera 20 is horizontally moved in the XY directions by the X-axis table 21 and the Y-axis table 22. The X-axis table 21 and the Y-axis table 22 are a camera moving mechanism 23 (FIG. 5) that moves the camera 20. By moving the camera 20 with respect to the mask plate 12 by the camera moving mechanism 23, the camera 20 images an arbitrary position of the mask plate 12.

  As shown in FIG. 2, the substrate positioning unit 1 is moved in the Y direction from the lower side of the screen mask 10 by the Y-axis table 3 to move the held substrate 6 to the substrate recognition position. In this state, the camera 20 is moved to the substrate 6 on the substrate positioning unit 1 by the camera moving mechanism 23, so that an arbitrary position of the substrate 6 can be imaged by the camera 20. Therefore, the camera 20 is an imaging unit that captures the element solder printing portions S1, S2, S3, and S4 that are inspection objects and acquires image data. The camera moving mechanism 23 that horizontally moves the camera 20 is a visual field moving unit that relatively moves the imaging visual field of the camera 20 on the substrate 6.

  Next, the configuration of the control system of the screen printing apparatus will be described with reference to FIG. In FIG. 5, a calculation unit 25 is a CPU, and performs various calculations and processing described later by executing various programs stored in the program storage unit 26. In these calculations / processes, various data stored in the data storage unit 27 are used.

  The operation / input unit 28 is input means such as a keyboard and a mouse, and inputs various control commands and data. The communication unit 29 exchanges data with other devices constituting the electronic component mounting line together with the screen printing device. As will be described later, the image processing unit 30 performs image processing on image data captured by the camera 20 to recognize a solder printing unit for print inspection and to detect a mask opening for creating print inspection data.

  The mechanism control unit 31 includes mechanism units such as the substrate positioning unit 1, the substrate transport mechanism 18 that carries the substrate 6 in and out of the printing position, the squeegee moving mechanism 17 that moves the squeegee head 13, and the camera moving mechanism 23 that moves the camera 20. To control. The substrate count unit 33 counts the number of substrates 6 that are carried into and out of the printing position based on the detection result of the substrate detection sensor 19 that detects the presence or absence of the substrate 6. As will be described later, the substrate count result is used for inspection execution control when continuously inspecting a plurality of substrates 6. The display unit 32 is a display device, and serves as a display unit that displays an image acquired by the camera 20 as well as an operation screen in a print inspection data creation process, which will be described later, and a determination result of the print inspection.

  Next, programs and data stored in the program storage unit 26 and the data storage unit 27 will be described with reference to FIG. The program storage unit 26 includes a printing operation program 26a, an image processing program 26b, a printing quality determination program 26c, a grouping processing program 26d, an inspection threshold application processing program 26e, an inspection frequency application processing program 26f, and an inspection execution control program 26g. Is remembered.

  The printing operation program 26 a is a program for a printing operation that controls the operations of the substrate positioning unit 1 and the squeegee head 13 to print the cream solder 9 on the substrate 6. The image processing program 26b is a program for the image processing unit 30 to perform the following two types of processing based on the imaging result of the camera 20.

  First, by recognizing the imaging result obtained by imaging the substrate 6 after printing, the element solder printing portion (see FIG. 4B) formed on each electrode of the substrate 6 is detected. Calculate the area. Further, by performing recognition processing on the imaging result obtained by imaging the mask plate 12, processing for obtaining mask opening data indicating the position and shape of each pattern hole 16 provided in the mask plate 12 is performed. This mask opening data is used as inspection data for print inspection.

  The print quality determination program 26c compares the area of the element solder printing unit calculated by the image processing unit 30 with an inspection threshold (described later), thereby determining the quality of the print state for each element solder printing unit. That is, the function realized when the image processing unit 30 and the calculation unit 25 execute the printing quality determination program 26c is based on image data obtained by imaging an inspection target on a substrate and inspection data necessary for executing a printing inspection. Thus, a determination means for determining whether or not the printing state is good, that is, the inspection result is configured.

  The grouping processing program 26d, when creating inspection data used for print inspection, grouped individual inspection target position data indicating the position of each element solder printing section into individual groups according to specific grouping conditions. It is a program for performing processing for creating data. That is, the function realized by the calculation unit 25 executing the grouping processing program 26d is a grouping means for grouping the inspection target position data into individual groups according to the grouping condition, and provides grouped data. It becomes a grouped data providing means. Details of the grouped data will be described later.

  In the above example, the grouped data is created by the data creation function of this apparatus. However, grouped data created in advance offline is input via the operation / input unit 28 or received via the communication unit 29. Then, it may be stored in the data storage unit 27. In this case, the data storage unit 27 serves as grouped data providing means.

  The inspection threshold value assigning processing program 26e is a program for performing processing for assigning an inspection threshold value to each group obtained by grouping element position / shape data into individual groups. The function realized by the calculation unit 25 executing the grouping processing program 26d is an inspection threshold value assigning means for assigning an inspection threshold value.

  The inspection frequency giving processing program 26f performs inspection frequency data, that is, in a process of repeatedly executing a printing operation continuously on substrates of the same type for each group obtained by grouping element position / shape data into individual groups. The frequency with which the inspection is executed for the element solder printing section of the group is given in units of the number of boards. The function realized by the calculation unit 25 executing the inspection frequency giving process program 26f is an inspection frequency giving means for giving the frequency at which the inspection is executed to each group.

  The inspection execution control program 26g is an operation control program for executing an inspection at a frequency specified by the inspection frequency data for each group of each substrate in a process of continuously performing a print inspection on a plurality of substrates. is there. The calculation unit 25 executes the inspection execution control program 26g to control the camera moving mechanism 23, the camera 20, and the image processing unit 30, and further executes the print quality determination program 26c, so that the printing operation is continuously performed. On each substrate, imaging, image processing, and pass / fail determination are executed for only the group to be inspected based on the inspection frequency data.

  Therefore, the function realized by the calculation unit 25 executing the inspection execution control program 26g is an inspection that controls the visual field moving means, the imaging means, and the determination means based on the inspection target position data, the grouping data, and the inspection frequency data. It is an execution control means. In the present embodiment, the inspection object position data, the grouping data, and the inspection frequency data are handled in the form of execution data edited for each board type as will be described later.

  The data storage unit 27 stores mounting data 27a, a component data library 27b, a mask opening data library 27c, an inspection threshold library 27d, grouping data 27e, inspection frequency data 27f, and execution data 27g. Among these data, the mounting data 27a, the component data library 27b, the mask opening data library 27c, and the inspection threshold value library 27d are transferred and stored from other devices such as a data management computer via the communication unit 29. .

  The mounting data 27a is data used in a mounting operation for mounting an electronic component on a substrate after cream solder printing, that is, data in which the type of electronic component to be mounted is associated with mounting position coordinates on the substrate. The component data library 27b is data relating to individual electronic components mounted on the board. The component data library 27b includes component data of the electronic component, attribute data indicating required accuracy in mounting operation, difficulty in solder printing for solder bonding, and the like. It includes numerical data that numerically expresses the shape and size and the opening pattern for each component (see 33A, 33B, 33C, and 33D shown in FIG. 8) indicating the arrangement of the element solder printing portion during solder joining.

  By using the mounting data 27a and the component data library 27b, the individual pattern holes 16 of the mask plate 12 and the electronic components corresponding to the solder printing portions printed through these pattern holes can be associated on the data, which will be described later. As described above, in creating print inspection data, it is possible to link data of many types with each other to improve the efficiency of data creation processing.

  The mask opening data library 27c stores numerical data indicating the opening positions and sizes of the pattern holes 16 of the mask plate 12 used for printing for various types, and mask opening data associated with individual mask plates. As given in advance. That is, in the example of the mask plate 12 shown in FIG. 7, data for each pattern hole 16a to 16d is given. For example, for the pattern hole 16c, the dimensions a and b indicating the pattern hole size, and each pattern hole with respect to the reference origin The position coordinate values x1, x2, x3..., Y1, y2,. The same applies to the other pattern holes.

  As will be described later, this mask opening data is used as element position / shape data indicating the position / shape of the element solder printing portions (S1 to S4) shown in FIG. Therefore, the data storage unit 27 including the mask opening data library 27c serves as position data providing means for providing inspection object position data indicating the position of the inspection object.

As described above, since the data indicating the opening position and the opening size of the pattern hole can also be obtained by imaging the mask plate 12 with the camera 20, the required mask opening data is stored in the mask opening data library 27c. If it is not included, the same data as the data shown in FIG. 7 can be obtained using the actual mask plate 12. In this case, the camera 20 and the image processing unit 30 serve as position data providing means for providing inspection target position data acquired based on the mask opening data detected from the mask plate 12 used for screen printing.

  Furthermore, as a method of obtaining the inspection target position data, a method of combining the data included in the mounting data 27a and the component data library 27b may be employed. That is, as shown in FIG. 8, mounting points M1, M2A, M2B, M3, and M4 indicating mounting positions of the electronic components P1, P2, P3, and P4 are obtained from the mounting data 27a. By superimposing the component-specific opening patterns 33A, 33B, 33C, and 33D of the library 27b, numerical data equivalent to the mask opening data can be obtained.

  The inspection threshold library 27d is a data library that provides data for calculating an inspection threshold used in the print inspection. In this embodiment, as shown in FIG. 9, two types of inspection threshold libraries are prepared: a library associated with the pattern hole opening type and a library associated with the electronic component type.

  In the library associated with the opening type of the pattern hole, threshold value data for threshold calculation is set in advance for each prepared opening type. A plurality of types of pattern hole opening types are set depending on the combination of the pattern hole shape (square, rectangular, circular, etc.) and size classification. That is, by determining which opening type the target opening corresponds to, an inspection threshold value based on the solder printing area can be calculated.

  Further, in the library associated with the pattern hole opening type, the same threshold data can be directly obtained by specifying the type of electronic component (P1, P2,...). Therefore, it is not necessary to determine the type of the opening type. In any example, the threshold data includes the normal range ((−) OK to (+) OK), warning range ((−) Warning to (+) Warning), and failure of each element solder printing portion. The lower limit and the lower limit ((−) NG, (+) NG) are defined as a percentage of the area of the regular-shaped element solder printing portion.

  The grouping data 27e is data obtained by grouping individual inspection target position data indicating the position of each element solder printing unit according to a specific grouping condition by the grouping processing program 26d. On the grouping data 27e, an identification number is assigned to each group. By specifying these numbers, the position of the group corresponding to this number on the substrate 6 is specified via the inspection target position data. . Then, at the time of executing the inspection, the inspection execution control program 26g refers to the grouping data 27e and moves the camera 20 to image the specified group.

  The inspection frequency data 27f is data that specifies the inspection frequency to be executed for each group in the print inspection for one substrate. As shown in FIG. 10, for each group number Gn, the inspection frequency, that is, the inspection interval to be executed for the group is defined by the number N of substrates. Here, in a group in which electronic components that require high reliability and require high printing accuracy are installed, 100% inspection is input, that is, N = 1 is input so as to ensure printing accuracy, and soldering is easy. For a group in which electronic parts are placed where printing accuracy is not so important, a sampling frequency inspection is appropriately determined.

The inspection frequency data 27 f is manually input by the operation / input unit 28 and the data storage unit 27.
Is written to. In the inspection data creation described later, the data is read from the data storage unit 27. Therefore, the data storage unit 27 serves as inspection frequency data providing means for providing inspection frequency data to which an inspection frequency is assigned for each group.

  The execution data 27g is inspection data that is actually used in a print inspection that is executed subsequent to solder printing. By specifying a substrate type to be printed as described later, the mask opening data library 27c, the inspection data It is created based on the data corresponding to the board type in the threshold library 27d, the grouping data 27e, and the inspection frequency data 27f, and is stored in the data storage unit 27 as execution data 27g.

  This screen printing apparatus is configured as described above. Next, the inspection data creation process will be described with reference to each drawing along the flow of FIG. This inspection data creation processing creates inspection data used in a print inspection apparatus (appearance inspection apparatus) that performs pass / fail judgment of a printing state, which is a predetermined inspection performed by imaging a substrate having a plurality of inspection objects. To do.

  First, in FIG. 11, the inspection target position data is read (ST1). As a result, the mask opening data as the inspection target position data is read, and as shown in FIG. 12, the operation screen 40 for data creation processing displayed on the display unit 32 displays the opening portion in the print range 12a. An opening pattern indicating the arrangement is displayed. These openings correspond to element shape / position data indicating the shape and position of the element solder printing portion formed on each electrode on the circuit forming surface.

  Here, as the mask opening data, when the mask opening data corresponding to the target mask plate 12 is stored in the mask opening data library 27c of the data storage unit 27, this library data is used. . If this library data is not yet available, processing for creating equivalent mask data from the mounting data 27a and the component data library 27b is performed. Further, if the mounting data 27a and the component data library 27b are not yet obtained, the opening is detected from the image data obtained by imaging the mask plate 12 as described above, and is used as element shape / position data. Data generation processing is performed.

  Next, grouping processing is performed to group these element shape / position data corresponding to each displayed pattern hole into individual groups by bundling them according to the grouping condition (ST2). In this grouping process, individual element shape / position data are grouped into individual groups by associating the opening parts displayed on the operation screen 40 according to predetermined grouping conditions. And is automatically performed by the grouping processing program.

  Here, the group condition selection wizard 41 displayed on the operation screen 40 shown in FIG. 13 selects any of the three grouping conditions, that is, the grouping conditions based on the component unit 42a, the attribute designation 42b, and the range designation 42c. Be able to. This selection is performed by a check frame 43 provided for each option.

When the component unit 42a is selected, the grouping condition is determined so that each of the electronic components mounted on the board 6 is made into one group. That is, as shown in FIG. 14 (a), pattern holes 16a, 16b, 16c, respectively corresponding to electrodes (see FIG. 4) provided for soldering the four electronic components P1, P2, P3, P4, 16d is surrounded by grouping frames 45a, 45b, 45c, and 45d, so that element shape / position data corresponding to individual pattern holes are grouped into groups by each electronic component unit. Is specified by each electronic component (P1, P2,...).

  When the attribute designation 42b is selected, the grouping condition is determined based on the attribute of the electronic component. In other words, among all the electronic components to be mounted, only the electronic components having the attribute specified by being input to the designated input frame 44 are targeted for grouping. For example, when the electronic component type “QFP” is designated as the attribute, only the pattern hole 16d corresponding to the electronic component P4 corresponding to the type is surrounded by the grouping frame 45d as shown in FIG. Thereby, the element shape / position data corresponding to the pattern hole 16d is classified into a group grouped by the data group and other data groups according to the input attribute, and the group grouped by the data group It is specified by “QFP”.

  When the range designation 42c is selected, the grouping condition is determined based on the geometric range on the printed surface of the substrate. In this case, as shown in FIG. 14C, on the operation screen, a grouping frame 45e that surrounds only pattern holes (here, pattern holes 16c and 16d) to be grouped by a pointing device such as a mouse. Perform the operation to set. As a result, the element shape / position data corresponding to these pattern holes are classified into the data group and the other data group based on the geometrical range determined by the frame setting operation. Groups grouped in a data group are specified by characteristics of a specified range (for example, “same inspection threshold application range”, “same inspection frequency application range”, etc.).

  Thus, when the grouping process is completed, the inspection threshold value and the inspection frequency are given (ST3). That is, a unique inspection threshold and inspection frequency are assigned to each group, and an inspection threshold is collectively given to a plurality of inspection objects belonging to each group. A target inspection execution interval is set in units of the number of substrates. As a result, even when a substrate having an enormous number of pattern holes is targeted, data processing for providing inspection threshold values and inspection frequencies can be facilitated.

  The inspection data to which the inspection threshold and the inspection frequency are assigned for each group is stored in the data storage unit 27 as execution data 27g (ST4). In the above-described flow, the grouping process (ST2), the inspection threshold value and the inspection frequency assignment (ST3) do not necessarily have to be performed in the order described above, and may be performed in any order for each group.

  Next, a print inspection process in clean printing performed following the generation of inspection data will be described along the flow of FIG. First, the substrate 6 is carried into the screen printing apparatus (ST11). Next, the number of substrates is counted by the substrate counting unit 33 (ST12). That is, it is determined how many substrates are counted from the start of production.

  Next, screen printing is performed (ST13), that is, first, the cream solder 9 is supplied onto the mask plate 12, and the substrate 6 is brought into contact with the lower surface of the mask plate 12. Next, the squeegee head 13 is moved to print the cream solder 9 on the electrodes 6b to 6d of the substrate 6 through the pattern holes 16a to 16c. Thereafter, the Z-axis table 5 is lowered to release the plate, whereby element solder printing portions S1 to S4 (see FIG. 4) are formed on the electrodes of the substrate 6.

Thereafter, the printed substrate is moved to the inspection position (ST14) (see FIGS. 2 and 3), and a printing inspection (appearance inspection) is performed. First, prior to performing inspection, it is determined whether or not each group of inspection target positions on the substrate is an inspection target (ST15). That is, by referring to the inspection frequency assigned to each group and the number of substrates counted by the substrate counting unit 33, a group to be inspected and a group not to be inspected in the current inspection operation are identified. .

  Then, the group to be inspected is inspected (ST16). That is, the camera moving mechanism 23 moves the camera 20 above the groups to be inspected, and sequentially images these groups. Then, the areas of the element solder printing sections S1 to S4 belonging to these groups are detected, and the results of area detection are compared with the inspection threshold values obtained based on the inspection threshold value library 27d. Is determined. The substrate 6 that has been inspected is unloaded (ST17), and it is determined whether or not it is the last substrate. If it is the last substrate, the printing operation and the print inspection are ended.

  That is, in the above-described inspection execution, the inspection execution control program 26g is executed as described above, and the visual field moving mechanism 23, the camera 20, and the image processing unit 30 are based on the inspection target position data, grouping data, and inspection frequency data. The print quality determination program 26c is controlled by the above-described inspection execution control means.

  The final determination of the printing state in (ST16) is determined in association with the aforementioned group, and the display of the determination result is similarly performed in association with the group for each group. For example, when grouping is performed on a component basis, determination and display of the determination result are performed on a component basis. That is, if all the element solder printing portions corresponding to each electronic component are good, it is determined that the solder printing for the electronic component is good, and there is at least one element solder printing portion with a poor print state. The electronic component is determined to have a poor printing state.

  These determination results are displayed on the operation screen 40. FIG. 16 shows a display example of the determination result. The determination result is displayed in association with the group. Here, the determination result is displayed using both the electronic component unit and the element solder printing unit unit. Yes. For example, as described above, no special display is made on the screen for an electronic component that is determined to have a good solder printing portion corresponding to one electronic component and that the solder printing for the electronic component is good. The defect display is performed on the element solder printing unit in which the printing state defect is detected and the electronic component corresponding to the element solder printing unit.

  The example of FIG. 16 shows an example in which a defect is detected in the solder printing portion printed corresponding to the electronic component P4 by the pattern hole 16d. The location can be easily confirmed for each electronic component. In addition, the pattern hole 16d * corresponding to the element solder printing portion where the defect is detected is displayed in reverse video, and a display column 46 indicating the content of the defect is displayed corresponding to each pattern hole.

  As described above, in the present embodiment, in the process of continuously executing the print inspection on a plurality of substrates, the visual field is moved based on the inspection frequency data that defines the inspection frequency of each group obtained by grouping the inspection target position data. The means, the imaging means, and the determination means are controlled by the inspection execution control means. As a result, it is possible to set an appropriate inspection frequency according to the necessity of the inspection object for the same substrate, and it is possible to realize an optimal inspection form that balances improvement in production efficiency and ensuring inspection accuracy. .

  In the present embodiment, a mode in which inspection data is created by a screen printing apparatus having an inspection data creation function is shown. However, a dedicated inspection data creation apparatus is independent of the screen printing apparatus. Even in the case of providing, the configuration described in this embodiment can be applied.

In the above embodiment, an example of solder inspection in which the inspection object is solder printed on the substrate is shown. However, even when an electronic component mounted on the substrate after solder printing is used as the inspection object, The invention can be applied. In this case, an inspection apparatus having a configuration excluding the squeegee unit 13 and the squeegee moving mechanism 17 from the configuration shown in FIG. 5 is used as the appearance inspection apparatus.

  As the inspection object position data indicating the position of the inspection object, mounting data 27a indicating the position of each electronic component on the substrate is used. Even in this case, when creating the execution data as the inspection data, the inspection target position data is grouped into individual groups according to the grouping condition, and the frequency at which the inspection is executed is given to each group. The

  As the grouping condition when the electronic component is an inspection object, the grouping condition can be determined based on the geometric range on the substrate surface as shown in FIG. Thereby, based on the geometric range determined by the frame setting operation, a group of “same inspection threshold application range” and “same inspection frequency application range” can be set. As shown in FIGS. 13 and 14B, the grouping condition may be determined based on attributes such as the type of electronic component. In this case, the same inspection threshold value and inspection frequency can be assigned to the group classified by the instructed attribute.

  The appearance inspection apparatus and the appearance inspection method of the present invention make it possible to set an appropriate inspection frequency according to the necessity of an inspection object on the same substrate, and the optimum balance between improving production efficiency and ensuring inspection accuracy. The inspection method has a merit that it can realize various inspection forms, such as inspection of the printed state of the solder printed on the substrate and inspection of the mounting state of the electronic components mounted on the substrate. It is useful in the field where

1 is a front view of a screen printing apparatus according to an embodiment of the present invention. The side view of the screen printing apparatus of one embodiment of this invention The top view of the screen printing apparatus of one embodiment of this invention The top view of the substrate printing surface by the screen printing apparatus of one embodiment of this invention The block diagram which shows the structure of the control system of the screen printing apparatus of one embodiment of this invention The figure which shows the memory content of the program storage part and data storage part of the screen printing apparatus of one embodiment of this invention Explanatory drawing of the element shape and position data of the element solder printing part of the screen printing apparatus of one embodiment of this invention Explanatory drawing of the mounting data and mask opening pattern of the screen printing apparatus of one embodiment of this invention Explanatory drawing of the inspection threshold value library of the printing inspection apparatus of one embodiment of this invention Explanatory drawing of the inspection frequency data of the printing inspection apparatus of one embodiment of this invention Flow chart of print inspection data creation processing of one embodiment of the present invention The figure which shows the display screen of the printing inspection apparatus of one embodiment of this invention The figure which shows the display screen of the printing inspection apparatus of one embodiment of this invention The figure which shows the display screen of the printing inspection apparatus of one embodiment of this invention FIG. 3 is a flowchart of inspection execution control processing in the print inspection apparatus according to the embodiment of the present invention. The figure which shows the display screen of the printing inspection apparatus of one embodiment of this invention

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Board | substrate positioning part 6 Board | substrate 6b, 6c, 6d, 6e Electrode 9 Cream solder 12 Mask plate 13 Squeegee head 16, 16a, 16b, 16c, 16d Pattern hole 20 Camera 25 Calculation part 26 Program memory | storage part 26c Print quality determination program 26d Group Processing program 26f inspection frequency giving processing program 27 data storage unit 27c mask aperture data library 27f inspection frequency data 30 image processing unit

Claims (12)

  An appearance inspection apparatus for imaging a substrate having a plurality of inspection objects to perform a predetermined inspection, an imaging means for imaging the inspection object and acquiring image data, and an imaging field of view by the imaging means for the substrate Visual field moving means for relatively moving above, determination means for determining the result of the inspection based on the image data, position data providing means for providing inspection object position data indicating positions of the plurality of inspection objects, A grouped data providing means for providing grouped data obtained by grouping the inspection target position data into individual groups according to a grouping condition, and an inspection for providing inspection frequency data to which the frequency at which the inspection is performed is given for each group Frequency data providing means, and the visual field moving means and imaging means based on the inspection object position data, grouping data, and inspection frequency data Appearance inspection apparatus comprising the inspection execution control means for controlling the preliminary determination means.   The inspection object is solder printed on an electrode for bonding electronic components on a board, and the grouping condition is determined based on a geometric range on a surface of the board. 1. An appearance inspection apparatus according to 1.   2. The appearance according to claim 1, wherein the inspection object is solder printed on an electrode for joining electronic components on a substrate, and the grouping condition is determined based on attributes of the electronic components. Inspection device.   The inspection object is a solder printed on an electrode for bonding electronic components on a substrate, and the grouping condition is determined by associating each one of the electronic components with one group. The visual inspection apparatus according to claim 1.   The appearance inspection apparatus according to claim 1, wherein the inspection object is an electronic component mounted on a substrate, and the grouping condition is determined based on a geometric range on a surface of the substrate. .   The appearance inspection apparatus according to claim 1, wherein the inspection object is an electronic component mounted on a substrate, and the grouping condition is determined based on an attribute of the electronic component. Imaging means for capturing an image of an inspection object and acquiring image data, visual field moving means for relatively moving an imaging visual field by the imaging means on the substrate, and determination means for determining the result of the inspection based on the image data Grouping data providing means for providing inspection object position data indicating positions of the plurality of inspection objects, and grouping data for grouping the inspection object position data into individual groups according to a grouping condition The visual inspection apparatus comprising data providing means and inspection frequency data providing means for providing inspection frequency data to which the frequency at which the inspection is performed for each group is used to image a substrate having a plurality of inspection objects. An appearance inspection method for performing a predetermined inspection,
In the process of continuously performing the inspection on a plurality of substrates, the visual field moving means, the imaging means, and the determination means are controlled by the inspection execution control means based on the inspection object position data, grouping data, and inspection frequency data. An appearance inspection method characterized by:   8. The inspection object is solder printed on an electrode for bonding electronic components on a board, and the grouping condition is determined based on a geometric range on the surface of the board. The appearance inspection method described. 8. The appearance according to claim 7, wherein the inspection object is solder printed on an electrode for joining electronic components on a substrate, and the grouping condition is determined based on attributes of the electronic components. Inspection method.   The inspection object is solder printed on an electronic component bonding electrode of a substrate, and the grouping condition is determined by associating each one of the electronic components with one group. The visual inspection method according to claim 7.   The visual inspection method according to claim 7, wherein the inspection object is an electronic component mounted on a substrate, and the grouping condition is determined based on a geometric range on a surface of the substrate. . The appearance inspection method according to claim 7, wherein the inspection object is an electronic component mounted on a substrate, and the grouping condition is determined based on an attribute of the electronic component.

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