JP2005162536A - Glass substrate for flat panel display device - Google Patents
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本発明は、フラットパネルディスプレイ装置、特にプラズマディスプレイ装置に適したガラス基板に関するものである。 The present invention relates to a glass substrate suitable for a flat panel display device, particularly a plasma display device.
プラズマディスプレイ装置は、前面ガラス基板表面にITO膜やネサ膜等からなる透明電極を成膜し、その上に誘電体材料を塗布して誘電体層を形成し、また、背面ガラス基板表面には、Al、Ag、Ni等からなる電極が形成された背面ガラス基板表面に背面誘電体材料と隔壁材料を塗布し隔壁を形成してから、それぞれ500〜600℃程度の温度で焼成することにより回路を形成する。その後、前面ガラス基板と背面ガラス基板を対向させて電極等の位置合わせを行って、周囲を500〜600℃程度の温度でフリットシールすることにより作製される。 In the plasma display device, a transparent electrode made of an ITO film or a nesa film is formed on the front glass substrate surface, and a dielectric material is applied thereon to form a dielectric layer. By applying a back dielectric material and a partition wall material to the back glass substrate surface on which electrodes made of Al, Ag, Ni, etc. are formed, a partition is formed, and then fired at a temperature of about 500 to 600 ° C., respectively. Form. Thereafter, the front glass substrate and the rear glass substrate are opposed to each other to align the electrodes and the like, and the periphery is frit-sealed at a temperature of about 500 to 600 ° C.
従来、ガラス基板としては、フロート法等によって1.8〜3.0mmの肉厚に成形されたソーダ石灰ガラス(熱膨張係数 約84×10-7/℃)が一般的に用いられてきた。また、絶縁ペースト、リブペースト、フリットシールといった周辺材料の熱膨張係数もソーダ石灰ガラスに合わせて、70〜90×10-7/℃の範囲に調整されている。 Conventionally, as a glass substrate, soda-lime glass (coefficient of thermal expansion of about 84 × 10 −7 / ° C.) formed to a thickness of 1.8 to 3.0 mm by a float method or the like has been generally used. In addition, the thermal expansion coefficient of peripheral materials such as insulating paste, rib paste, and frit seal is also adjusted in the range of 70 to 90 × 10 −7 / ° C. in accordance with soda lime glass.
ところが、ソーダ石灰ガラスは歪点が500℃程度と低いため、570〜600℃の温度で熱処理する際に、熱変形や熱収縮が起こり、寸法が著しく変化する。その結果、前面ガラス基板と背面ガラス基板を対向させる際、電極の位置合わせを精度よく実現することが難しく、特に大型高精細のプラズマディスプレイ装置を作製する上で困難を生じていた。 However, since soda-lime glass has a strain point as low as about 500 ° C., when heat-treated at a temperature of 570 to 600 ° C., thermal deformation and thermal shrinkage occur, and the dimensions change remarkably. As a result, when the front glass substrate and the back glass substrate are made to face each other, it is difficult to realize the alignment of the electrodes with high accuracy, and in particular, it is difficult to produce a large and high-definition plasma display device.
また、ソーダ石灰ガラスは、150℃での体積電気抵抗率(log ρ)が8.4Ω・cmと低く、ガラス中のアルカリ成分の移動度が大きい。従って、ガラス中のアルカリ成分がITO膜やネサ膜等の薄膜電極と反応し、電極材料の電気抵抗値を変化させる問題も有している。 In addition, soda-lime glass has a low volume resistivity (log ρ) at 150 ° C. of 8.4 Ω · cm, and the mobility of alkali components in the glass is large. Accordingly, the alkali component in the glass reacts with a thin film electrode such as an ITO film or a nesa film, thereby causing a problem of changing the electric resistance value of the electrode material.
これらの事情から、ガラス基板の体積電気抵抗率、熱変形及び熱収縮の問題を解決するために、ソーダ石灰ガラスと同等の熱膨張係数を有し、ソーダ石灰ガラスよりも高い体積電気抵抗率と歪点を有する高歪点ガラスがガラス基板に使用され、大型高精細のプラズマディスプレイ装置が作製されている。
しかしながら、一般に、高歪点ガラスは、ソーダ石灰ガラスに比べ、ガラスの高温粘度が高い。そのため、ガラスの溶融温度や成形温度を高くしなければならなくなり、溶融や成形が困難となる。特に、フロート成形の場合、ガラスの高温粘度が高いと、溶融ガラスを板状に成形するためのフロートバスの温度を高くしなければならず、フロートバスからのスズの揮発量が増加し、ガラス表面に悪影響を及ぼすことになる。 However, in general, high strain point glass has a higher high-temperature viscosity of glass than soda-lime glass. Therefore, it is necessary to increase the melting temperature and molding temperature of the glass, and melting and molding become difficult. In particular, in the case of float forming, if the high-temperature viscosity of the glass is high, the temperature of the float bath for forming the molten glass into a plate shape must be increased, and the volatilization amount of tin from the float bath increases. It will adversely affect the surface.
本発明の目的は、溶融や成形が容易であり、しかも、周辺材料と整合性がとりやすい熱膨張係数を有する高歪点ガラスからなるフラットパネルディスプレイ装置用ガラス基板を提供することである。 An object of the present invention is to provide a glass substrate for a flat panel display device, which is made of high strain point glass having a thermal expansion coefficient that can be easily melted and molded and that is easily compatible with surrounding materials.
本発明のフラットパネルディスプレイ装置用ガラス基板は、質量百分率で、SiO2 54超〜70%、Al2O3 0〜5%未満、MgO 7超〜15%、CaO 0〜7%未満、SrO 0〜20%、BaO 0〜20%、RO(ROはMgO、CaO、SrO、BaOを表わす) 19超〜25%、Na2O 0〜10%、K2O 0〜15%、ZrO2 0〜10%であることを特徴とする。 The glass substrate for a flat panel display device of the present invention is, in mass percentage, SiO 2 54 to 70%, Al 2 O 3 0 to less than 5%, MgO 7 to 15%, CaO 0 to less than 7%, SrO 0. ~20%, BaO 0~20%, RO (RO represents MgO, CaO, SrO, and BaO) 19 super ~25%, Na 2 O 0~10% , K 2 O 0~15%, ZrO 2 0~ It is characterized by 10%.
本発明のガラス基板は、高温粘度が低く、溶融性や成形性に優れている。さらに、歪点が高く、また、周辺材料との整合性が取れる熱膨張係数を有しているため、フラットパネルディスプレイ装置、特に、プラズマディスプレイ装置のガラス基板として好適である。 The glass substrate of the present invention has a low high temperature viscosity and is excellent in meltability and moldability. Furthermore, since it has a high strain point and a thermal expansion coefficient that can be consistent with the surrounding materials, it is suitable as a glass substrate for flat panel display devices, particularly plasma display devices.
本発明のフラットパネルディスプレイ装置用ガラス基板は、高温粘度を低くしているため、優れた溶融性及び成形性を有するガラス基板を得ることができる。具体的には、104dPaの粘度に相当するガラス融液の温度を1150℃以下(好ましくは1145℃以下)にしている。尚、この温度が1150℃より高くなると、成形が難しくなるばかりか成形装置に負担が掛かる。 Since the glass substrate for flat panel display devices of the present invention has a low high temperature viscosity, a glass substrate having excellent meltability and formability can be obtained. Specifically, the temperature of the glass melt corresponding to a viscosity of 10 4 dPa is set to 1150 ° C. or lower (preferably 1145 ° C. or lower). In addition, when this temperature becomes higher than 1150 degreeC, not only shaping | molding will become difficult, but a burden will be applied to a shaping | molding apparatus.
104dPaの粘度に相当するガラス融液の温度を1150℃以下にするには、Al2O3の含有量を減らし、RO(ROはMgO、CaO、SrO、BaOを表わす)を増加することで調整することができる。しかし、Al2O3の含有量が少なくなると、ガラスの歪点が低下する。また、ROの含有量が多くなると、ガラスが失透して成形し難くなったり、ガラスのクラック抵抗(耐クラック性)が低下し、ガラス基板搬送工程等で、ガラス基板に傷が付き割れやすくなる。 In order to set the temperature of the glass melt corresponding to a viscosity of 10 4 dPa to 1150 ° C. or lower, the content of Al 2 O 3 is decreased and RO (RO represents MgO, CaO, SrO, BaO) is increased. Can be adjusted. However, when the content of Al 2 O 3 decreases, the strain point of the glass decreases. In addition, when the RO content increases, the glass becomes devitrified and it becomes difficult to mold, or the crack resistance (crack resistance) of the glass decreases, and the glass substrate is easily damaged and cracked in the glass substrate transporting process and the like. Become.
そこで、本発明のフラットパネルディスプレイ装置用ガラス基板では、ROの中でも、耐クラック性への悪影響が小さく、しかも、ガラスの歪点を上昇させる成分であるMgOを7質量%より多く含有させている。更に、ROの含有量を19超〜25質量%に厳密に調整すると共に、Al2O3の含有量を5質量%未満に抑えることで、失透を抑え、耐クラック性の低下と高温粘度の上昇を抑制している。このようにすることで、耐クラック性を維持しながら、優れた溶融性及び成形性を有する高歪点ガラスからなるガラス基板を得ることができる。 Therefore, in the glass substrate for flat panel display device of the present invention, among RO, the adverse effect on crack resistance is small, and more than 7% by mass of MgO, which is a component that raises the strain point of glass, is contained. . Further, the RO content is strictly adjusted to more than 19 to 25% by mass, and the Al 2 O 3 content is suppressed to less than 5% by mass, thereby suppressing devitrification, lowering of crack resistance and high temperature viscosity. The rise of is suppressed. By doing in this way, the glass substrate which consists of high strain point glass which has the outstanding meltability and moldability can be obtained, maintaining crack resistance.
本発明のフラットパネルディスプレイ装置用ガラス基板おいて、ガラスの組成を上記のように限定した理由は、次のとおりである。 In the glass substrate for a flat panel display device of the present invention, the reason why the glass composition is limited as described above is as follows.
SiO2は、ガラスのネットワークフォーマーを形成する成分である。その含有量は54超〜70%、好ましくは58〜68%、より好ましくは60〜66%である。SiO2の含有量が多くなると、ガラスの高温粘度が高くなり、溶融、成形が難しくなったり、熱膨張係数が小さくなりすぎて周辺材料との整合性が取り難くなる。一方、含有量が少なくなると、熱膨張係数が大きくなりガラスの耐熱衝撃性が低下したり、ガラスの歪点が低下する傾向にあり、ディスプレイ装置を製造する際の熱工程で、ガラス基板に割れが発生したり、熱変形や熱収縮が起こりやすくなる。 SiO 2 is a component that forms a glass network former. The content is more than 54 to 70%, preferably 58 to 68%, more preferably 60 to 66%. When the content of SiO 2 increases, the high temperature viscosity of the glass increases, and melting and molding become difficult, and the coefficient of thermal expansion becomes too small, making it difficult to achieve consistency with surrounding materials. On the other hand, when the content decreases, the thermal expansion coefficient increases and the thermal shock resistance of the glass tends to decrease or the strain point of the glass tends to decrease, and the glass substrate is cracked in the thermal process when manufacturing the display device. Or heat deformation or shrinkage is likely to occur.
Al2O3は、ガラスの歪点を高くする成分である。その含有量は0〜5%未満、好ましくは0〜4%、より好ましくは0.1〜3%である。Al2O3の含有量が多くなると、ガラスの高温粘度が高くなり、溶融、成形が難しくなったり、熱膨張係数が小さくなり周辺材料との整合性が取り難くなる。 Al 2 O 3 is a component that increases the strain point of glass. The content is 0 to less than 5%, preferably 0 to 4%, more preferably 0.1 to 3%. When the content of Al 2 O 3 increases, the high-temperature viscosity of the glass increases, and melting and molding become difficult, and the thermal expansion coefficient decreases, making it difficult to achieve consistency with surrounding materials.
MgOは、ガラスの耐クラック性を低下させずに、ガラスの歪点を上昇させ、ガラスの高温粘度のみを著しく低下させて溶融性や成形性を高める成分である。その含有量は7超〜15%、好ましくは7超〜13%、より好ましくは7超〜10%未満である。MgOの含有量が多くなると、ガラスが失透しやすくなる傾向にあり成形し難くなる。一方、含有量が少なくなると、ガラスの歪点が低下する傾向にあり、ディスプレイ装置を製造する際の熱工程で、ガラス基板に割れが発生したり、熱変形や熱収縮が起こりやすくなる。また、ガラスの高温粘度が高くなり、溶融、成形が難しくなる。 MgO is a component that raises the strain point of the glass without reducing the crack resistance of the glass and significantly lowers only the high-temperature viscosity of the glass to improve the meltability and formability. The content is more than 7 to 15%, preferably more than 7 to 13%, more preferably more than 7 to less than 10%. If the content of MgO is increased, the glass tends to be devitrified and it becomes difficult to mold. On the other hand, when the content is reduced, the strain point of the glass tends to be lowered, and the glass substrate is easily cracked or thermally deformed or contracted easily in the heat process when manufacturing the display device. Moreover, the high temperature viscosity of glass becomes high, and melting and forming become difficult.
CaOは、ガラスの高温粘度を低下させて溶融性や成形性を高める成分である。その含有量は0〜7%未満、好ましくは0〜6%、より好ましくは0〜5%である。CaOの含有量が多くなると、ガラスの耐クラック性が低下し、ガラス基板の搬送工程等で、ガラス基板に傷が付き割れやすくなる。 CaO is a component that lowers the high-temperature viscosity of the glass and improves the meltability and moldability. The content is 0 to less than 7%, preferably 0 to 6%, more preferably 0 to 5%. When the content of CaO is increased, the crack resistance of the glass is lowered, and the glass substrate is easily damaged and cracked in the glass substrate transporting process and the like.
SrOは、ガラスの高温粘度を低下させて溶融性や成形性を高めたり、体積電気抵抗率を高める成分である。その含有量は0〜20%、好ましくは0〜15%、より好ましくは0〜11%である。SrOの含有量が多くなると、ガラスが失透しやすくなる傾向にあり成形し難くなる。また、ガラスの耐クラック性が低下し、ガラス基板の搬送工程等で、ガラス基板に傷が付き割れやすくなる。 SrO is a component that lowers the high-temperature viscosity of the glass to improve the meltability and formability, and increase the volume resistivity. Its content is 0-20%, preferably 0-15%, more preferably 0-11%. When the content of SrO increases, the glass tends to be devitrified and it becomes difficult to mold. Further, the crack resistance of the glass is lowered, and the glass substrate is easily scratched and broken during the glass substrate transport process.
BaOは、SrOと同様にガラスの高温粘度を低下させて溶融性や成形性を高めたり、体積電気抵抗率を高める成分である。その含有量は0〜20%、好ましくは0〜10%、より好ましくは0〜5%である。BaOの含有量が多くなると、ガラスが失透しやすくなる傾向にあり成形し難くなる。また、ガラスの耐クラック性が低下し、ガラス基板の搬送工程等で、ガラス基板に傷が付き割れやすくなる。 BaO, like SrO, is a component that lowers the high-temperature viscosity of glass to increase meltability and formability, or to increase volume electrical resistivity. Its content is 0-20%, preferably 0-10%, more preferably 0-5%. When the content of BaO is increased, the glass tends to be devitrified and it is difficult to mold. Further, the crack resistance of the glass is lowered, and the glass substrate is easily scratched and broken during the glass substrate transport process.
尚、ガラスの耐クラック性を低下させることなく、ガラスの高温粘度を低くして、溶融性と成形性を向上させるためには、MgO、CaO、SrO及びBaOの合量であるROを、19超〜25%にする必要がある。ROの含有量が多くなると、ガラスの耐クラック性が低下し、製造工程において、ガラス基板が割れやすくなる。また、含有量が少なくなると、ガラスの高温粘度が上昇し、溶融、成形が難しくなる。好ましい範囲は19超〜24%であり、より好ましくは19超〜23%である。 In order to lower the high temperature viscosity of the glass and improve the meltability and formability without reducing the crack resistance of the glass, RO, which is the total amount of MgO, CaO, SrO and BaO, is 19 It needs to be more than 25%. When the content of RO increases, the crack resistance of the glass decreases, and the glass substrate easily breaks in the manufacturing process. Moreover, when content decreases, the high temperature viscosity of glass will rise and it will become difficult to fuse | melt and shape | mold. A preferable range is more than 19 to 24%, more preferably more than 19 to 23%.
Na2Oは、ガラスの熱膨張係数を制御したり、ガラスの高温粘度を低下させて溶融性や成形性を高める成分である。その含有量は0〜10%、好ましくは0〜6%、より好ましくは0〜5%である。Na2Oの含有量が多くなると、熱膨張係数が大きくなりすぎて、周辺材料の熱膨張係数と整合し難くなる。また、ガラスの歪点が低下する傾向にあり、ディスプレイ装置を製造する際の熱工程で、ガラス基板に割れが発生したり、熱変形や熱収縮が起こりやすくなる。 Na 2 O is a component that increases the meltability and moldability by controlling the thermal expansion coefficient of the glass or lowering the high temperature viscosity of the glass. Its content is 0-10%, preferably 0-6%, more preferably 0-5%. When the content of Na 2 O increases, the thermal expansion coefficient becomes too large, and it becomes difficult to match the thermal expansion coefficient of the surrounding materials. In addition, the strain point of glass tends to decrease, and the glass substrate is easily cracked or thermally deformed or contracted easily during the heat process when manufacturing the display device.
K2Oは、Na2Oと同様にガラスの熱膨張係数を制御したり、ガラスの高温粘度を低下させて溶融性や成形性を高める成分である。その含有量は0〜15%、好ましくは7〜14%、より好ましくは9〜13%である。K2Oの含有量が多くなると、熱膨張係数が大きくなりすぎて、周辺材料の熱膨張係数と整合し難くなる。また、ガラスの歪点が低下する傾向にあり、ディスプレイ装置を製造する際の熱工程で、ガラス基板に割れが発生したり、熱変形や熱収縮が起こりやすくなる。 K 2 O is a component that controls the coefficient of thermal expansion of glass in the same manner as Na 2 O, or lowers the high-temperature viscosity of glass to improve meltability and formability. The content is 0 to 15%, preferably 7 to 14%, more preferably 9 to 13%. When the content of K 2 O increases, the thermal expansion coefficient becomes too large, and it becomes difficult to match the thermal expansion coefficient of the surrounding materials. In addition, the glass strain point tends to decrease, and the glass substrate is easily cracked, or is likely to be thermally deformed or shrunk in the heat process when manufacturing the display device.
ZrO2は、ガラスの歪点を高める成分である。その含有量は0〜10%、好ましくは0.1〜4%、より好ましくは0.1〜3%である。ZrO2の含有量が多くなると、失透ブツが発生する傾向にあり、成形が難しくなる。 ZrO 2 is a component that increases the strain point of glass. The content is 0 to 10%, preferably 0.1 to 4%, more preferably 0.1 to 3%. If the content of ZrO 2 increases, devitrification will tend to occur and molding becomes difficult.
尚、本発明において、上記成分以外にも、例えば、X線着色を抑えるために、CeO2を5%まで、紫外線着色を防止するために、TiO2を3%まで、液相温度を低下させて、成形性を向上させるために、Y2O3、La2O3、Nb2O3を各3%まで、着色剤として、Fe2O3、CoO、NiO、Cr2O3、Nd2O3を各2%まで、清澄剤として、As2O3、Sb2O3、SnO2、SO3、F、Cl等を合量で1%まで添加することが可能である。但し、フロート法で成形する場合、As2O3、Sb2O3はフロートバス中で還元されて金属異物となるため、導入は避けるべきである。 In the present invention, in addition to the above components, for example, to reduce X-ray coloring, the liquid phase temperature is lowered to 5% CeO 2 and to 3% TiO 2 to prevent ultraviolet coloring. In order to improve the moldability, Y 2 O 3 , La 2 O 3 and Nb 2 O 3 are each added up to 3% as colorants, and Fe 2 O 3 , CoO, NiO, Cr 2 O 3 , Nd 2 It is possible to add up to 2% of O 3 each, and as a clarifier, As 2 O 3 , Sb 2 O 3 , SnO 2 , SO 3 , F, Cl, etc. can be added up to 1% in total. However, when forming by the float process, As 2 O 3 and Sb 2 O 3 are reduced in the float bath to become metal foreign matter, so introduction should be avoided.
また、本発明において、ガラスの熱膨張係数を80〜100×10-7/℃(より好ましくは80〜95×10-7/℃)にすることが好ましい。尚、ガラスの熱膨張係数がこの範囲外であると、周辺材料の熱膨張係数と整合せず、フリットシールを良好に行うことが難しくなる。 Further, in the present invention, the thermal expansion coefficient of the glass 80~100 × 10 -7 / ℃ (more preferably 80~95 × 10 -7 / ℃) preferably to. If the thermal expansion coefficient of the glass is out of this range, it does not match the thermal expansion coefficient of the surrounding materials, and it becomes difficult to perform frit sealing well.
また、ガラスの歪点を570℃以上(より好ましくは575℃以上)にすることが好ましい。尚、ガラスの歪点が570℃より低くなると、ディスプレイ装置を製造する際の熱工程で、ガラス基板に割れが発生したり、熱変形や熱収縮が起こりやすくなる。 Further, it is preferable that the strain point of the glass is 570 ° C. or higher (more preferably 575 ° C. or higher). When the strain point of the glass is lower than 570 ° C., the glass substrate is easily cracked or thermally deformed or contracted easily in the heat process when manufacturing the display device.
次に、本発明のフラットパネルディスプレイ装置用ガラス基板を製造する方法を説明する。 Next, a method for producing a glass substrate for a flat panel display device of the present invention will be described.
まず、上記のガラス組成範囲となるようにガラス原料を調合する。続いて、調合したガラス原料を連続溶融炉に投入し、ガラス原料を加熱溶融し、脱泡した後、成形装置に供給し、溶融ガラスを板状に成形し徐冷することでガラス基板を得ることができる。 First, a glass raw material is prepared so that it may become said glass composition range. Subsequently, the prepared glass raw material is put into a continuous melting furnace, the glass raw material is heated and melted, defoamed, then supplied to a molding apparatus, and the molten glass is formed into a plate shape and gradually cooled to obtain a glass substrate. be able to.
尚、ガラス基板の成形方法としては、フロート法、スロットダウンドロー法、オーバーフローダウンドロー法、リドロー法等の様々な成形方法があるが、フロート法で板状に成形することが好ましい。その理由は、フロート法の場合、比較的安価に大型のガラス基板を得やすいためである。 As a method for forming the glass substrate, there are various forming methods such as a float method, a slot down draw method, an overflow down draw method, and a redraw method, but it is preferable to form the glass substrate into a plate shape by the float method. The reason is that in the case of the float process, it is easy to obtain a large glass substrate at a relatively low cost.
以下、本発明のフラットパネルディスプレイ装置用ガラス基板を実施例に基づいて詳細に説明する。 Hereinafter, the glass substrate for flat panel display devices of the present invention will be described in detail based on examples.
表1は、本発明の実施例(試料No.1〜4)及び比較例(試料No.5、6)を示すものである。尚、試料No.6は、従来から使用されている高歪点ガラスである。 Table 1 shows examples (sample Nos. 1 to 4) and comparative examples (samples No. 5 and 6) of the present invention. Sample No. 6 is a high strain point glass conventionally used.
表中の各試料は、次のようにして作製した。 Each sample in the table was prepared as follows.
まず、表の組成となるようにガラス原料を調合し、白金ポットを用いて1450〜1600℃で4時間溶融した。その後、溶融ガラスをカーボン板の上に流し出して板状に成形し、徐冷後、板厚が2.8mmになるように両面研磨して、得られた板ガラスを200mm角の大きさに切断加工することで試料ガラスを作製した。 First, the glass raw material was prepared so that it might become the composition of a table | surface, and it melted at 1450-1600 degreeC for 4 hours using the platinum pot. Thereafter, the molten glass is poured onto a carbon plate, formed into a plate shape, slowly cooled, then polished on both sides so that the plate thickness becomes 2.8 mm, and the obtained plate glass is cut into a size of 200 mm square. Sample glass was produced by processing.
このようして得られた各試料について、熱膨張係数、歪点、104dPaの粘度に相当するガラス融液の温度及びクラック抵抗を測定し、表に示した。 For each sample thus obtained, the coefficient of thermal expansion, the strain point, the temperature of the glass melt corresponding to the viscosity of 10 4 dPa and the crack resistance were measured and shown in the table.
表から明らかなように、実施例である試料No.1〜4の各試料は、104dPa・sに相当するガラス融液の温度は1140℃以下と低く成形性にも優れていた。また、熱膨張係数が83.0〜85.0×10-7/℃であり、周辺材料と良好に整合する熱膨張係数を有しおり、しかも、歪点は570℃以上であり、熱処理工程におけるガラス基板の熱変形や熱収縮を抑えることができる。更に、クラック抵抗は480mN以上であった。 As can be seen from the table, the sample No. In each of the samples 1-4, the temperature of the glass melt corresponding to 10 4 dPa · s was as low as 1140 ° C. or less, and the moldability was excellent. The thermal expansion coefficient is 83.0 to 85.0 × 10 −7 / ° C., has a thermal expansion coefficient that is well matched with the surrounding materials, and has a strain point of 570 ° C. or higher. Thermal deformation and thermal shrinkage of the glass substrate can be suppressed. Furthermore, the crack resistance was 480 mN or more.
これに対して、比較例である試料No.5及び6は、104dPa・sに相当するガラス融液の温度は1160℃以上と高く、成形性が劣っていた。 On the other hand, sample No. which is a comparative example. In 5 and 6, the temperature of the glass melt corresponding to 10 4 dPa · s was as high as 1160 ° C. or higher, and the moldability was inferior.
尚、熱膨張係数については、直径5.0mm、長さ20mmの円柱状の試料を作製し、ディラトメーターで30〜380℃における平均熱膨張係数を測定した。 In addition, about the thermal expansion coefficient, the cylindrical sample of diameter 5.0mm and length 20mm was produced, and the average thermal expansion coefficient in 30-380 degreeC was measured with the dilatometer.
また、歪点については、ASTM C336−71に基づいて測定した。尚、この温度は高い方が良く、ディスプレイ装置を製造する際の熱工程におけるガラス基板の熱変形や熱収縮を抑えることができる。 Further, the strain point was measured based on ASTM C336-71. In addition, it is better that this temperature is high, and thermal deformation and thermal shrinkage of the glass substrate in the thermal process when manufacturing the display device can be suppressed.
また、ガラスの粘度が104dPa・sに相当するガラス融液の温度は、白金球引き上げ法により測定した。尚、この温度は、ガラスを板状に成形する際の目安になり、この温度が低い方が成形性が良いことになる。 The temperature of the glass melt corresponding to a glass viscosity of 10 4 dPa · s was measured by a platinum ball pulling method. In addition, this temperature becomes a standard at the time of shape | molding glass in plate shape, and the one where this temperature is lower will have a good moldability.
耐クラック抵抗の測定は、和田らが提案した方法(M.Wada et al. Proc., the Xth ICG, vol.11, Ceram. Soc., Japan, Kyoto, 1974, p39)を用いた。この方法は、ビッカース硬度計のステージに試料ガラスを置き、試料ガラスの表面に菱形状のダイヤモンド圧子を種々の荷重で15秒間押し付ける。そして、除荷後15秒までに圧痕の四隅から発生するクラック数をカウントし、最大発生しうるクラック数(4ヶ)に対する割合を求め、クラック発生率とした。また、クラック発生率が50%になるときの荷重を「クラック抵抗」とした。クラック抵抗が大きいということは、高い荷重でもクラックが発生しにくい、つまり、耐クラック性に優れているということである。 For the measurement of crack resistance, the method proposed by Wada et al. (M. Wada et al. Proc., The Xth ICG, vol. 11, Ceram. Soc., Japan, Kyoto, 1974, p39) was used. In this method, a sample glass is placed on the stage of a Vickers hardness tester, and a diamond-shaped diamond indenter is pressed against the surface of the sample glass with various loads for 15 seconds. Then, the number of cracks generated from the four corners of the indentation was counted up to 15 seconds after unloading, and the ratio to the maximum number of cracks (4) that could be generated was determined to obtain the crack generation rate. Further, the load when the crack occurrence rate was 50% was defined as “crack resistance”. A large crack resistance means that cracks are unlikely to occur even under high loads, that is, excellent crack resistance.
尚、クラック発生率の測定は、同一荷重で20回測定し、その平均値を求めた。また、測定条件は、気温25℃、湿度30%の条件で行った。 The crack occurrence rate was measured 20 times with the same load, and the average value was obtained. The measurement conditions were a temperature of 25 ° C. and a humidity of 30%.
また、熱膨張係数、密度、クラック抵抗の測定については、熱履歴の影響を受けないように、熱処理したものを用いて測定した。この熱処理は、試料を、室温からガラスの歪点+80℃まで10℃/分の昇温速度で加熱し、その温度で1時間保持し、その後、500℃まで2℃/分の降温速度で冷却し、続けて、室温まで10℃/分の降温速度で冷却する条件で行った。 In addition, the thermal expansion coefficient, density, and crack resistance were measured using heat-treated materials so as not to be affected by thermal history. In this heat treatment, the sample is heated from room temperature to the glass strain point + 80 ° C. at a rate of temperature increase of 10 ° C./min, held at that temperature for 1 hour, and then cooled to 500 ° C. at a rate of temperature decrease of 2 ° C./min. Then, it was performed under the condition of cooling to room temperature at a temperature decreasing rate of 10 ° C./min.
本発明のフラットパネルディスプレイ装置用ガラス基板は、プラズマディスプレイ装置用途に限られるものではなく、例えば、電界放射型ディスプレイ、エレクトロルミネッセンスディスプレイ用途に用いることも可能である。 The glass substrate for a flat panel display device of the present invention is not limited to the plasma display device application, and can be used for, for example, a field emission display and an electroluminescence display.
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