JP2005159332A5 - - Google Patents
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- Publication number
- JP2005159332A5 JP2005159332A5 JP2004312684A JP2004312684A JP2005159332A5 JP 2005159332 A5 JP2005159332 A5 JP 2005159332A5 JP 2004312684 A JP2004312684 A JP 2004312684A JP 2004312684 A JP2004312684 A JP 2004312684A JP 2005159332 A5 JP2005159332 A5 JP 2005159332A5
- Authority
- JP
- Japan
- Prior art keywords
- region
- ultrafine carbon
- channel formation
- semiconductor device
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 229920000049 Carbon (fiber) Polymers 0.000 claims 17
- 239000004917 carbon fiber Substances 0.000 claims 17
- 239000004065 semiconductor Substances 0.000 claims 13
- 230000015572 biosynthetic process Effects 0.000 claims 11
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 10
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims 10
- 229910002804 graphite Inorganic materials 0.000 claims 6
- 239000010439 graphite Substances 0.000 claims 6
- 238000004519 manufacturing process Methods 0.000 claims 6
- 238000000034 method Methods 0.000 claims 6
- 239000000463 material Substances 0.000 claims 5
- 229910052751 metal Inorganic materials 0.000 claims 5
- 239000002184 metal Substances 0.000 claims 5
- 239000000758 substrate Substances 0.000 claims 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims 2
- 229910052799 carbon Inorganic materials 0.000 claims 2
- 239000002134 carbon nanofiber Substances 0.000 claims 2
- 239000002041 carbon nanotube Substances 0.000 claims 2
- 229910021393 carbon nanotube Inorganic materials 0.000 claims 2
- 239000002110 nanocone Substances 0.000 claims 2
- 239000002121 nanofiber Substances 0.000 claims 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 239000000956 alloy Substances 0.000 claims 1
- 229910017052 cobalt Inorganic materials 0.000 claims 1
- 239000010941 cobalt Substances 0.000 claims 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 claims 1
- 229910052732 germanium Inorganic materials 0.000 claims 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims 1
- 239000011810 insulating material Substances 0.000 claims 1
- 229910052742 iron Inorganic materials 0.000 claims 1
- 210000003666 myelinated nerve fiber Anatomy 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 229910052763 palladium Inorganic materials 0.000 claims 1
- 229910052697 platinum Inorganic materials 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004312684A JP4762522B2 (ja) | 2003-10-28 | 2004-10-27 | 半導体装置の作製方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003368159 | 2003-10-28 | ||
| JP2003368159 | 2003-10-28 | ||
| JP2004312684A JP4762522B2 (ja) | 2003-10-28 | 2004-10-27 | 半導体装置の作製方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010271734A Division JP5250615B2 (ja) | 2003-10-28 | 2010-12-06 | 半導体装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005159332A JP2005159332A (ja) | 2005-06-16 |
| JP2005159332A5 true JP2005159332A5 (enrdf_load_stackoverflow) | 2007-11-22 |
| JP4762522B2 JP4762522B2 (ja) | 2011-08-31 |
Family
ID=34741101
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004312684A Expired - Fee Related JP4762522B2 (ja) | 2003-10-28 | 2004-10-27 | 半導体装置の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4762522B2 (enrdf_load_stackoverflow) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7829883B2 (en) * | 2004-02-12 | 2010-11-09 | International Business Machines Corporation | Vertical carbon nanotube field effect transistors and arrays |
| US7135773B2 (en) * | 2004-02-26 | 2006-11-14 | International Business Machines Corporation | Integrated circuit chip utilizing carbon nanotube composite interconnection vias |
| WO2006038504A1 (ja) * | 2004-10-04 | 2006-04-13 | Matsushita Electric Industrial Co., Ltd. | 縦型電界効果トランジスタおよびその製造方法 |
| JP2010525557A (ja) | 2007-03-28 | 2010-07-22 | クナノ アーベー | ナノワイヤ回路構造物 |
| US8143617B2 (en) * | 2007-07-03 | 2012-03-27 | Panasonic Corporation | Semiconductor device, semiconductor device manufacturing method and image display device |
| CN102027610B (zh) * | 2008-04-11 | 2012-12-05 | 桑迪士克3D有限责任公司 | 包括碳纳米管可逆电阻切换元件的存储器单元及其形成方法 |
| JP2011187901A (ja) | 2010-03-11 | 2011-09-22 | Canon Inc | 半導体デバイスの製造方法 |
| JP6250210B2 (ja) * | 2017-04-11 | 2017-12-20 | ユニサンティス エレクトロニクス シンガポール プライベート リミテッドＵｎｉｓａｎｔｉｓ Ｅｌｅｃｔｒｏｎｉｃｓ Ｓｉｎｇａｐｏｒｅ Ｐｔｅ Ｌｔｄ． | 半導体装置 |
| CN113471298A (zh) * | 2021-06-23 | 2021-10-01 | Tcl华星光电技术有限公司 | 薄膜晶体管、显示面板及电子设备 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100360476B1 (ko) * | 2000-06-27 | 2002-11-08 | 삼성전자 주식회사 | 탄소나노튜브를 이용한 나노 크기 수직 트랜지스터 및 그제조방법 |
-
2004
- 2004-10-27 JP JP2004312684A patent/JP4762522B2/ja not_active Expired - Fee Related
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