JP2005138013A - Control method of liquid droplet discharge device and liquid droplet discharge device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To ensure an arbitrary gap in a liquid droplet discharge device wherein a liquid droplet discharge head is made relatively movable in a Z(gap) direction. <P>SOLUTION: This control method of a liquid droplet discharge device (200) is constituted so as to relatively move the liquid droplet discharge device (200) on an object (500) receiving liquid droplets to discharge liquid droplets and includes a process for acquiring the height data of the surface unevenness of the object receiving liquid droplets along the scheduled trajectory (530) of a liquid droplet discharge nozzle (222) including a liquid droplet discharge position supposed on the object receiving the liquid droplets and a nozzle trajectory data forming process for three-dimensionally forming a nozzle moving route, which is spaced apart from the surface of the object receiving the liquid droplets and allows the liquid droplet discharge nozzle to move along the surface unevenness of the object receiving the liquid droplets, on the object receiving the liquid droplets on the basis of the scheduled trajectory and the height data of the surface unevenness of the object receiving the liquid droplets. The nozzle moving route (530) includes a change section (HC) for changing the height of the liquid droplet discharge nozzle and a setting section (CN) for converging the liquid droplet discharge nozzle to the height position of the liquid droplet discharge position on this side of the liquid droplet discharge position. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a droplet discharge method and a discharge device used for spotting ink or a biological sample, and more particularly to position control of a droplet discharge position.

  The droplet discharge device is used for discharge of ink, discharge of biological samples (DNA, RNA, protein, cells, etc.) and the like. The former application example is an ink jet printer, and the latter application example is a biological sample dispensing apparatus. In addition, the droplet discharge device has been studied as a patterning unit for a liquid conductive material or a liquid semiconductor material (for example, an organic semiconductor) on a circuit board.

  The droplet discharge device discharges droplets onto a discharge target object such as paper or a glass substrate, and it is desirable that a gap (distance) between a nozzle that discharges the droplet and the discharge target object is appropriate. If the gap is large, the landing position of the liquid droplets is shifted, or the liquid droplets are divided and scattered on the way. This causes a problem that the droplets adhere to other regions or are mixed with other droplets. In addition, when the gap between the droplet discharge nozzle and the discharge target is small, the discharge head and the discharge target collide with each other, and there is a problem that the discharged droplet is rubbed.

Therefore, for example, in the dispensing device described in Japanese Patent Laid-Open No. 2002-196010, a droplet discharge head that is movable in the Z direction (vertical direction) and a substrate mounting tray that is movable in the XY direction (front and rear, left and right directions) Is used to move the droplet discharge head to a desired position on the substrate, and in the case of droplet discharge, the droplet discharge head is further moved in the Z direction to approach the substrate and the gap between the droplet discharge nozzle and the substrate It is proposed to narrow down.
JP 2002-196010 A

  However, if droplets are ejected while moving the droplet ejection head in the Z direction, the height position (gap) accuracy of the droplet ejection head is lowered. Further, if the droplet discharge is performed every time after the droplet discharge head is stopped at a predetermined discharge position, it takes time for the droplet discharge process. Further, the state of the droplets formed differs depending on the physical property value, temperature, etc. of the discharge liquid, and the optimum gap of the droplet discharge nozzle part is different.

  Therefore, the present invention can ensure the gap (the height position of the droplet discharge nozzle) between the droplet discharge head and the discharge target object even if the droplet discharge head is relatively movable in the XYZ directions. It is an object of the present invention to provide a method for controlling a droplet discharge device.

  Another object of the present invention is to provide a method for controlling a droplet discharge device in which a gap (height position) between a droplet discharge head and a discharge target body is adjusted corresponding to the discharge liquid.

  In order to achieve the above object, a method for controlling a droplet discharge device according to the present invention is a method for controlling a droplet discharge device that performs droplet discharge by relatively moving a droplet discharge device on a discharge target object. A process of obtaining data on the height of the unevenness of the surface of the target to be ejected along a planned movement path of the liquid droplet ejecting nozzle including a liquid droplet ejecting position assumed on the target object of the droplet; A nozzle movement path to which the droplet discharge nozzle should move along the unevenness of the surface of the discharge target body is separated from the body surface based on the planned movement path and the height data of the unevenness of the surface of the discharge target body. A nozzle movement path data forming process that is three-dimensionally formed on the discharge target object, wherein the nozzle movement path changes the height of the droplet discharge nozzle before the droplet discharge position; and The droplet discharge nozzle is connected to the droplet discharge nozzle. Including settling section for converging at a height position.

  With this configuration, when the droplet discharge device moves including a vertical (height) direction component, the change interval for changing the height of the droplet discharge nozzle and the droplet discharge nozzle are set to the droplet discharge position. The droplet discharge position is reached through a settling interval that converges to the height position. Thereby, droplets are discharged in a state where the height position (gap) of the droplet discharge nozzle is stable.

  The change section can be composed of a plurality of divided change sections having different height changes per unit time (height change rate). As a result, the inertial force due to the height change can be gradually reduced to shift to the settling interval.

  Further, the method for controlling the droplet discharge device is a method of controlling the moving mechanism for moving at least the droplet discharge nozzle of the droplet discharge device three-dimensionally on the discharge target object to move the droplet discharge nozzle to the nozzle. Including a droplet discharge nozzle moving process of moving along the path. Thereby, the droplet discharge nozzle can be moved along a virtual three-dimensional path set on the discharge target object.

  Further, the moving mechanism includes a coarse adjustment unit that roughly adjusts the height of the droplet discharge nozzle from the surface of the discharge target body, and a fine adjustment unit that finely adjusts the height of the droplet discharge nozzle. Thereby, quick movement and high position accuracy can be obtained. For example, the tray height adjusting mechanism corresponds to the coarse adjusting means, and the mechanism (actuator) for moving the droplet discharge nozzle back and forth corresponds to the fine adjusting means. Further, the actuator itself can be constituted by a coarse adjustment mechanism (coarse adjustment means) and a fine adjustment mechanism (fine adjustment means).

  The droplet discharge nozzle moving process detects the height (gap) of the droplet discharge nozzle from the surface of the discharge target object, and controls the coarse adjustment means or the fine adjustment means to control the droplet discharge. A process of maintaining the height of the nozzle at the height of the droplet discharge position of the nozzle movement path. Thereby, it becomes possible to correct the target height position from the surface of the target to be ejected in correspondence with the actual height (gap) of the droplet ejection nozzle. In addition, collision between the droplet discharge nozzle and the protrusion on the surface of the discharge target body can be avoided.

  Further, when the droplet discharge nozzle moving process moves across the concave region or the convex region on the surface of the discharge target object, fine adjustment of the height of the droplet discharge nozzle is temporarily stopped. Accordingly, the servo is locked when the droplet discharge device jumps and moves in the region, and an unnecessary following operation of the droplet discharge nozzle is avoided.

  Further, the height of the droplet discharge nozzle from the surface of the discharge target body at the droplet discharge position is set corresponding to physical property value information (for example, surface tension, viscosity, etc.) of the droplet. As a result, a gap corresponding to the shape of the discharged droplet is set in the droplet discharge nozzle unit, thereby avoiding the separation and landing of the droplets.

  Further, the height of the droplet discharge nozzle from the surface of the discharge target body at the droplet discharge position is set in accordance with the environmental conditions (for example, ambient temperature, atmospheric pressure, etc.) around the droplet discharge nozzle. . As a result, a gap corresponding to the shape of the discharged droplet is set in the droplet discharge nozzle unit, thereby avoiding the separation and landing of the droplets.

  The height of the droplet discharge nozzle from the surface of the discharge target body at the droplet discharge position is set within a range of 0.01 to 0.3 mm. The gap range is suitable for the discharge of biological samples, the discharge of ink, the playable conductive film, the organic EL material, and the like.

  In addition, the droplet discharge method of the present invention includes a process of measuring the height or thickness of a plurality of droplet discharge regions defined on a target substrate, and physical properties of the discharge liquid (for example, surface tension, viscosity) , Mass (droplet size), droplet discharge speed, etc.) and environmental conditions (for example, ambient temperature, humidity, atmospheric pressure, etc.) and the droplet discharge device and cover in each droplet discharge region The process of determining an appropriate gap with the discharge target substrate, and the discharge start position based on the height of each of the plurality of droplet discharge regions on the discharge target substrate or the substrate thickness of the droplet discharge region and the appropriate gap The process of creating a movement program that determines the three-dimensional path (trajectory) of the droplet discharge device from the discharge end position to the discharge end position, and the droplet discharge device can be moved relative to the target substrate in three dimensions According to the above moving program. Controls Te, comprising the steps of ejecting droplets of the liquid droplet ejection apparatus is positioned through the proper gap droplet ejection position on the liquid-droplet ejection area of 該被 discharge target substrate.

  By adopting such a configuration, the droplet discharge device (droplet discharge head) is relatively moved three-dimensionally corresponding to the irregularities on the surface of the discharge target substrate, and discharged according to the characteristics of the discharge liquid and the environmental conditions. It is possible to discharge droplets by appropriately setting a gap at the position (height of the discharge position). As a result, it is possible to improve the landing position accuracy of the liquid droplets, prevent the liquid droplets from separately landing and scattering, and the like.

  In addition, the droplet discharge device of the present invention includes a droplet discharge head that discharges a droplet toward a discharge target, a support mechanism that movably supports the droplet discharge head, and the droplet discharge head described above. An actuator that moves relative to the droplet discharge direction to adjust the gap between the discharge target and the droplet discharge head; and the discharge target and the droplet discharge head are two-dimensionally or three-dimensionally relative to each other. A moving mechanism that moves automatically, a storage unit that stores a moving program that represents a three-dimensional moving path of the droplet discharge head, and a control unit that controls the actuator and the moving mechanism based on the moving program. Prepare.

  With this configuration, the droplet discharge head can be moved along the uneven shape of the surface of the discharge target.

  The droplet discharge device of the present invention further includes means for detecting a gap between the discharge target and the droplet discharge head, and error adjusting means for feeding back a difference between the detected gap and a target gap value to the actuator. . Thereby, the gap between the ejection target and the droplet ejection head can be automatically maintained at a constant gap (target gap). In addition, it is possible to shorten the settling time during which the height position of the droplet discharge head is stabilized during or immediately after the movement.

  For example, the actuator can be constituted by an electromagnetic actuator that moves the droplet discharge head back and forth with electromagnetic force. By using the electromagnetic actuator, a moving mechanism of the discharge head having a large dynamic range (moving range), a compact and quick operation can be obtained. In addition, a piezoelectric element that expands and contracts (or distorts) when a voltage is applied can be used as an actuator (piezo actuator). When a piezo element is used as the actuator, an advancing / retreating piezo element can be incorporated behind the droplet discharge head or the nozzle portion, and integration is easy. In addition, since a piezo element or electrostatic drive is used as a droplet discharge drive source of a droplet discharge device (droplet discharge head), the technology is compatible with the piezo element actuator, and a series of process technologies are used for liquid discharge. A droplet discharge device can be manufactured.

  Further, the actuators may be combined with actuators having different characteristics such as a combination of an electromagnetic actuator and a piezoelectric actuator, and each of them may be assigned a role such as coarse adjustment and fine adjustment.

  The movement program includes information on a movement path of the droplet discharge head on the object, a plurality of droplet discharge positions in the movement path, and a gap between the discharge object and the droplet discharge head. Thereby, the droplet discharge head can be moved along a virtual three-dimensional path of the droplet discharge head set on the discharge target.

  Further, the moving path of the moving program converges to a gap defined at the droplet discharge position and a change section in which the gap between the discharge target body and the droplet discharge head is changed before the droplet discharge position. Includes settling intervals. The height position of the droplet discharge head can be adjusted by providing a settling section that converges the gap to the target gap value after changing the gap between the discharge target and the droplet discharge head (or the nozzle portion of the droplet discharge head). Droplet discharge is performed in a constant state. As a result, even when the droplet discharge head is relatively moved, it is possible to improve the droplet landing position accuracy, prevent the droplet from separately landing and scattering, and the like.

  Preferably, the gap defined at each droplet discharge position is set corresponding to the physical property value information of the droplet. Examples of the physical property value information include surface tension, viscosity, mass (droplet size), droplet discharge speed, and the like of the droplet.

  Preferably, the gap defined at each droplet discharge position is set corresponding to the environmental condition (temperature). Examples of environmental conditions include atmospheric temperature, humidity, atmospheric pressure, airflow, and the like.

  Preferably, the gap defined at each droplet discharge position is 0.01 to 0.3 mm. This gap is suitable for ink ejection in printing, biological sample ejection in probe board preparation, and electrical circuit film-forming materials (organic conductive film, organic insulating film, organic semiconductor film, organic EL film, etc.).

  According to the present invention, since the droplet discharge device (droplet discharge head) is moved three-dimensionally, droplets can be discharged while maintaining an accurate gap even when the surface of the discharge target is uneven. Is possible. In addition, after changing the height (gap) of the droplet discharge device, the droplet is discharged after going through a process of stabilizing the height to a predetermined height, so that the droplet is discharged while moving the droplet discharge device. Even if the operation is performed, the required discharge accuracy can be maintained.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  First, a problem when the gap between the droplet discharge device and the discharge target is inappropriate is described.

  FIG. 21 shows that the landing position (falling position) of the droplet a is different between when the droplet discharge head is stopped and when it is moving. When the droplet discharge head is stopped with respect to the substrate, the discharged droplet a falls directly below, but when the droplet discharge head is moving in parallel with the substrate, the droplet drops a. The inertial force acts and the droplet falls obliquely. Therefore, if the gap is wide, the deviation of the landing position of the liquid droplets may be increased, and the landing area may be increased.

  FIGS. 22 (a) to 22 (d) show in stages how the discharged droplets are separated into a plurality of droplets in the middle of dropping. When the gap is wide, the discharged droplets a are easily separated into a plurality during the fall. The plurality of separated droplets a1 to a3 land at a plurality of positions. As a result, deviation or scattering of the landing position is likely to occur. In particular, this tendency increases when droplets are ejected while moving the droplet ejection head.

  FIG. 23 shows an example of discharging droplets in a suitable gap. It is desirable that the gap be such that the lower end of the droplet touches the substrate when the liquid is pushed out from the inside of the nozzle and falls as a droplet. Such a gap is related to the size and shape of the droplet (spindle type). Factors that determine the size and shape of the ejected droplets include physical properties of the ejected liquid (eg, surface tension, viscosity, mass, etc.) and environmental conditions (eg, ambient temperature, atmospheric pressure, airflow, etc.). Examples of the discharge liquid include an ink solution, a DNA probe solution, an RNA probe solution, a protein, a wiring film solution, a semiconductor material solution, and an organic EL film solution. A suitable gap value is tabulated in advance and stored as a database in a storage medium such as a memory corresponding to the type, temperature, etc. (physical property value, environmental condition) of these discharged liquids.

  When the gap described above is too narrow, there may be a problem that the liquid droplets already ejected on the substrate come into contact with the ejection nozzle. In addition, the droplet discharge head may collide with or rub against the protrusion on the substrate surface or the thickened portion of the substrate.

  Therefore, in the first embodiment, the concave / convex shape of the substrate surface is stored in advance, and the path is set three-dimensionally so that the droplet discharge head (nozzle tip) maintains an appropriate gap (distance) from the substrate surface. Do. Furthermore, by providing a settling section that stabilizes the nozzle height position before the droplet discharge position, the droplet discharge head is not only relatively moved in the front-rear and left-right directions (XY direction), but also in the height direction (Z The liquid is discharged after convergence or convergence of the height fluctuation and vibration caused by the movement in the direction) in front of the discharge position.

  In the second embodiment, the droplet discharge head is provided with detection means for detecting a gap (distance) between the droplet discharge head and the substrate in real time, and the entire droplet discharge head follows a pre-programmed three-dimensional path. The feedback control (servo adjustment) is performed so that the actual gap becomes the planned gap while moving. By performing feedback control at least in the settling interval described above, the position of the discharge nozzle is reliably maintained by a predetermined gap (distance) before droplet discharge.

  FIG. 1 schematically shows a droplet discharge process apparatus 1 that performs droplet discharge. Specific examples of the droplet discharge process apparatus 1 include a biological sample discharge apparatus, an ink jet printing apparatus (printer), and a patterning (film formation) apparatus by droplet discharge.

  The droplet discharge process apparatus 1 is roughly divided into a tray 100, a droplet that is placed on a substrate 500 to be discharged and moves in the XY direction (front-rear left-right direction) or XYZ direction (front-rear left-right height direction) shown in the figure. The droplet discharge device 200 discharges the droplet discharge device 200 onto the substrate 500, the reciprocation mechanism 300 that reciprocates the droplet discharge device 200 in the Y direction (left-right direction), and a control device 400 (see FIG. 2) described later.

  The tray 100 includes a mounting table 172 on which the substrate 500 is mounted, an X-direction moving mechanism 110 that moves the mounting table 172 in the X direction, a Y-direction moving mechanism 160 that moves the mounting table 172 in the Y direction, and a mounting table 172 that moves in the Z direction. A Z-direction moving mechanism 170 is provided. The X-direction moving mechanism 110 includes guide rails 120 and 130 that guide the movement of the mounting table 172 in the X direction, and a magnetic scale 112 and a position sensor 114 that detect the position of the mounting table 172 in the X direction. The position sensor 150 corresponds to the X coordinate detection means for the nozzle position. The X-direction moving mechanism 110 includes a linear motor and a screw feed mechanism (not shown) that drives the mounting table 172 in the X direction, and is controlled by a control device 400 described later. The Y-direction moving mechanism 160 also includes a magnetic scale 162 that detects the position of the mounting table 172 in the Y direction, a position sensor 161, a linear motor (not shown) that drives the mounting table 172 in the Y direction, a screw feed mechanism, and the like. Controlled by device 400. The Z-direction moving mechanism 170 is provided on the X-direction moving mechanism 110 and includes an actuator 174 that moves the placement surface 172 in the Z direction. As the actuator 174, for example, a piezoelectric actuator that expands by application of a voltage can be used. By arranging a plurality of the actuators 174 below the mounting surface 172, it is possible to perform horizontal adjustment and gap adjustment of the substrate 500.

  A droplet discharge device 200 capable of adjusting the gap is disposed on the tray 100. The droplet discharge device 200 includes a carriage 211 that moves in the left-right direction in the Y direction (left-right direction) along the guide rails 312 and 314, a droplet discharge head 220 that is mounted on the carriage 211 and includes a discharge nozzle 222 at the lower end, and the carriage 2 includes an actuator (discharge head driving mechanism) that is provided at 211 and moves the droplet discharge head 220 in the forward and reverse directions in the Z direction. In this embodiment, an electromagnetic actuator is used. The electromagnetic actuator includes a drive coil 224 that is wound around the outer periphery of the droplet discharge head 220, a cylindrical magnet 226 that is disposed so as to include the drive coil 224 portion in the internal space, and the movement of the droplet discharge head 220 in the Z direction. Two guide rails 228, an elastic body 230 that movably supports the droplet discharge head 220, a magnetic scale 242 and a position sensor 244 that detect the position of the droplet discharge head 220 in the Y direction, and the droplet discharge head 220. Are provided with a magnetic scale 246 and a position sensor 248 for detecting the position in the Z direction. The elastic body 230 can be constituted by a coil spring, a leaf spring, a wire, rubber, a damper using a fluid, etc., and the droplet discharge head 220 is suspended at a reference position so as to be movable and the droplet discharge head 220 is driven. The vibration (vibration) at the time of this is suppressed.

  The reciprocating mechanism 300 includes guide rails 312 and 314 extending in the Y direction, pulleys 322 and 324 disposed at both ends of the guide rails 312 and 314, a timing belt 326 that couples the pulleys, and a pulley 324, respectively. Are configured by a pulse motor 328 that rotates in a forward and reverse direction, a coupling unit 330 that couples the carriage 211 to the belt 326, and the like.

With such a configuration, position adjustment and position movement of the substrate 500 placed on the tray 100 are performed. Further, the droplet discharge head 220 can be moved not only in the Y direction but also in the Z direction. ,
FIG. 2 is a block diagram illustrating the control device 400 of the droplet discharge process apparatus 1 described above. In the figure, the CCD camera 410 observes the state of the substrate 500 placed on the tray 100 from above and sends the image to the control unit 430. As will be described later, it is used for pattern recognition such as determination of a substrate position (marker), identification of a substrate number, and determination of a discharge area. Nozzle position detection means 411, 412 and 413 detect the coordinate positions of the nozzle 222 of the droplet discharge head in the X, Y and Z directions. For example, the position detector 114 corresponds to the nozzle position detection unit 411. The position detectors 161 and 244 correspond to the nozzle position detecting means 412. This corresponds to a position detector in the Z-direction moving mechanism 170 (not shown) and a position detector 248 nozzle position detecting means 413.

  The unevenness detection device 414 is a device that measures in advance the unevenness on the surface of the substrate 500 to be ejected. For example, the gap can be measured by a configuration in which the light beam output from the laser device 414a is reflected by the substrate 500 and detected by the CCD sensor 414b as in the optical distance detection device shown in FIG. Since the return position of the light beam to the CCD sensor 414b varies depending on the size of the gap, the gap (distance) can be detected based on the detection position.

  In addition, it is possible to detect a change in the impedance of the coil portion and detect a gap by inserting a metal rod that moves up and down by the unevenness of the surface of the substrate 500 as in the mechanical-electrical converter shown in FIG. is there.

  Such an unevenness detecting device 414 is moved along a droplet discharge path set on the substrate 500 as described later, and the unevenness (height) of the surface of the substrate 500 in the path is measured.

  The input / operation device 415 inputs an operation command and data to the control unit 430 and displays information.

  The control unit 430 is configured by a control computer system, and executes a corresponding control program when receiving an operation command from the input operation device 415. The control program includes a substrate surface unevenness measurement program, an X / Y / Z moving mechanism control program, a droplet discharge head control program, various control data, and the like which will be described later. These control programs and data are held in database holding means 431 including a memory, a hard disk, and the like.

  The control unit 430 controls the X-axis driving device 451, the Y-axis driving device 452, and the Z-axis driving device 453 to move the droplet discharge head according to a three-dimensional map (coordinates) prepared in advance. Here, the X-axis drive device 451 corresponds to the X-axis drive mechanism 110. The Y-axis drive device 452 corresponds to the Y-axis drive mechanism 160 and the pulse motor 328. The Z-axis driving device 453 corresponds to the actuator 174 that drives the mounting table (table height) 172 and the actuator coil 224 of the droplet discharge head 220.

  Further, the control unit 430 operates the ejection head driving device 454 to eject droplets when the ejection head moves along the three-dimensional path and reaches the ejection position. The ejection head driving device 454 is, for example, an electrostatic actuator that applies a discharge pressure to a droplet by driving a pressure plate by an electrostatic force, or a piezoelectric device that drives a pressure plate by a piezoelectric body to apply a discharge pressure to the droplet ( Piezo) actuators are used.

  FIG. 5 is an explanatory diagram for explaining a measurement path for unevenness on the surface of the substrate 500 and a path for discharging droplets. FIG. 5A is a plan view of the substrate 500 as viewed from above, and FIG. 5B and FIG. 5C show a cross section in the A-A ′ direction of FIG. FIG. 5B shows an example in which the droplet discharge region is set as a convex portion of the substrate, and FIG. 5C shows an example where the droplet discharge region is set as a concave portion of the substrate.

  As shown in FIG. 5A, positioning markers 510 and 512 are provided on the substrate 500. By referring to the database 431, the position of each pattern including the ejection region 520 on the substrate can be determined from these markers 510 and 512. Note that the pattern on the substrate 500 may be observed with a camera to determine the position and range of each droplet discharge region 520. Then, the controller 430 moves the unevenness detector 414 along a path r (x, y) of the XY coordinate system set (assumed) on the substrate 500 to measure the unevenness (height) on the substrate surface. Thereby, data of the three-dimensional path R (x, y, z) of the XYZ coordinate system maintaining an appropriate height position from the surface of the substrate 500 is formed. By moving and controlling the position of the droplet discharge head 220 (nozzle 222) on the substrate 500 based on the data of the path R (x, y, z), the unevenness of the surface of the substrate 500 and the discharged droplets can be detected. It is possible to avoid contact and perform droplet discharge while maintaining an appropriate gap in a predetermined discharge region (discharge position). As a result, it is possible to form a discharge spot 250 having a predetermined shape in each droplet discharge region 520.

  FIG. 6 shows another setting example of the measurement path and the droplet discharge path. In the figure, parts corresponding to those in FIG.

  In the example shown in FIG. 5, a path that passes through a plurality of droplet ejection regions 520 is formed by so-called sequential scanning (raster scanning) on the substrate 500. In this example, ejection is necessary by so-called vector scanning. Between the liquid droplet ejection regions 520.

  Thus, the measurement path and the droplet discharge path set on the substrate 500 are not limited to a specific order, and a required path can be set.

  7 to 10 show a plurality of examples of the droplet discharge paths R (x, y, z) set on the substrate 500 by components in the XZ plane or the YZ plane (the cross section in the height Z direction). Yes. The droplet discharge path of each example shown in the figure is a change section that changes the height of the droplet discharge nozzle before the droplet discharge position and a setting that converges (or converges) the droplet discharge nozzle to the height position of the droplet discharge position. Includes sections. In addition, the same code | symbol is attached | subjected to the corresponding part of FIG. 7 thru | or FIG.

  First, in the example shown in FIG. 7, a plurality of convex regions having the same height are formed as droplet ejection regions 520 on the surface of the substrate 500. The droplet discharge path 530 set on the substrate passes through a change section HC that changes the droplet discharge head 220 from a predetermined height position (for example, an initial position) to a target height h1. It includes a settling section CN that stabilizes the position at the target height h1. By setting the change interval and the settling interval before the droplet discharge position P1, the gap between the convex portion of the discharge region 520 of the substrate 500 and the nozzle 222 portion of the droplet discharge head 220 is maintained at an appropriate value. The level of the substrate 500 can be secured by adjusting the piezoelectric actuator 174 described above.

  In the example shown in FIG. 8, the height positions of the droplet discharge positions P1 and P2 are different. Therefore, the droplet discharge path 530 sets the height of the droplet discharge head 220 to the height h1 through the changing section HC and the settling section CN before the droplet discharge position P1, and before the droplet discharge position P2. Then, the height of the droplet discharge head 220 is set to the height h2 through the change interval HC and the settling interval CN. In this way, when the height of the discharge position changes, the settling section CN is inserted after the change section HC so that the minute fluctuation due to the height change of the droplet discharge head is settled, and then the movement to the discharge position.

  9 and 10, the droplet discharge region 520 is set in the concave portion of the substrate 500. In the example of FIG. 9, the height position of each droplet discharge region 520 is the same, but in the example of FIG. 10, the height position of each droplet discharge region 520 is different. In order to maintain a predetermined gap value in the concave portion, the path 530 moves the droplet discharge head 220 along the unevenness of the surface of the substrate 500, and the change interval HC and the settling interval before each droplet discharge position P1, P2,. Through CN, the height of the droplet discharge head 220 is stably set to a required height.

  Next, an example of operation of the droplet discharge process apparatus will be described with reference to FIGS. FIG. 11 is a flowchart for explaining a measurement mode for measuring the unevenness (or height) of the substrate surface, which is the above-described ejection target. FIG. 12 is a flowchart for explaining the formation of the three-dimensional path of the droplet discharge head based on the measured unevenness data of the substrate surface. FIG. 13 is a flowchart for explaining an example of moving the droplet discharge head along a three-dimensional path set on the substrate.

  First, the substrate 500 is placed on the tray 100, and the operator instructs the controller 430 to execute the unevenness measurement mode from the input operation device 415 (S10). The control unit 430 observes the substrate 500 with the CCD camera 410 and moves the X direction moving mechanism 110, the Y direction moving mechanism 160, and the Z direction movement of the tray 100 so that the positions of the markers 510 and 512 on the substrate 500 are positioned at the reference position. The mechanism 170 is controlled (S12). Next, as shown in FIG. 5 described above, when the operator sequentially indicates the scanning position by the input operation on the image of the substrate 500 shown on the screen of the input operation device 415, or the observation image by the control unit 430 The required droplet discharge area 520 is discriminated by the pattern recognition, and the discharge path 530 is determined by determining the path 530 for scanning each droplet discharge area 520 on the substrate 500 (S14). The unevenness detector 414 (see FIG. 3) is moved along the discharge path 530 represented by the determined series of XY coordinate values, and the unevenness (height) of the substrate surface in the path is measured. Reading is possible with the measured substrate number and the substrate identification number ID indicating the scanning path, and a data group of height values Z for a series of XY coordinate values representing the scanning path is stored in the storage device (S18). Thereafter, the control unit 430 returns to the standby state (S20).

  It is also possible to use board shape design information such as CAD instead of actual measurement of the surface of the substrate 500.

  As shown in FIG. 12, the control unit 430 executes a three-dimensional path setting mode in accordance with an operator instruction or following the unevenness measurement mode to form a three-dimensional movement path of the droplet discharge head (S30). .

  That is, the route data corresponding to the target substrate identification number ID is read from the storage device by the operator's input operation of the input device 415 or by reading the substrate number with a CCD camera or a barcode reader (S32). For example, the substrate and the route are displayed in a superimposed manner on the screen of the input / operation device 415, and the discharge position is set on the screen by an operator's instruction. Alternatively, the central portion of the discharge region 520 recognized by the control unit 430 is set as the discharge position. An appropriate gap value at this discharge position (or discharge region) is set according to the above-described environmental conditions such as physical property value information and temperature of the discharge liquid. A droplet discharge flag is set in the three-dimensional position data of the droplet discharge position. (S34).

  Next, the route height route is set. As shown in FIGS. 7 to 10, the height position of the movement path of the nozzle portion of the ejection head from the initial position is formed on a two-dimensional path (XY coordinate system) with reference to the unevenness data on the substrate surface. Further, the height change section HC and the settling section CN are set in consideration of the convergence time or the convergence distance before the droplet discharge position. The height position of the movement path of the nozzle portion of the ejection head is set so that the above-described appropriate gap is obtained at the droplet ejection position or the droplet ejection area. A change section flag is set in the position data of the change section HC. A settling section flag is set in the position data of the settling section (S38).

  By connecting the movement paths of the droplet discharge heads at the respective points set in this way, a movement path of the discharge heads expressed as a group of three-dimensional coordinate data is created (S40). In order to be able to read the coordinate data of the movement route, the movement route data is associated with the board number or the like and stored in the storage unit (S40). Thereafter, the control unit returns to the standby state (S42). Such three-dimensional route data is formed in advance for a plurality of substrates, and is held in database holding means (storage device) 431 so as to be readable as a database.

  FIG. 13 is a flowchart for explaining a three-dimensional movement mode in which the control unit 430 controls the droplet discharge head 220 to move three-dimensionally on the target substrate 500.

  When the substrate 500 is placed on the tray 100 and the execution of the 3D droplet discharge mode is instructed from the input / scanning device 415, the control unit 430 starts the execution of the 3D droplet discharge mode (S50).

  First, the controller 430 performs initial alignment of the substrate 500 with reference to the markers 510 and 512 of the substrate 500 placed on the tray 100. The initial alignment is such that the substrate markers 510 and 512 are positioned at predetermined positions in the XY coordinate system of the apparatus 1 and that the height of the substrate (for example, the markers 510 and 512) is at the predetermined position. The coordinate system is adjusted (S52).

  Next, the substrate number / corresponding path data number assigned to the substrate 500 is read by the CCD camera, or the input of the substrate number / corresponding path data number from the input / operation device 415 by the operator is read from the database holding means 431. The corresponding three-dimensional route data is read (S54). The control unit 430 reads the initial position p0 (X0, Y0, Z0) of the path from the three-dimensional path data (S56), and the X direction moving mechanism 110, the Y direction moving mechanism 160, and the Z direction moving mechanism 170 of the tray 100 are read. Set the initial position. Further, the reciprocating mechanism 300 and the electromagnetic actuators (224, 226) are controlled to set their initial positions (S58). Here, the X-direction moving mechanism 110 corresponds to an X coordinate system driving unit. The Y-direction moving mechanism 170 and the reciprocating mechanism 300 correspond to a Y coordinate system driving unit. The Z direction moving mechanism 170 and the electromagnetic actuators (224, 226) correspond to the Z coordinate system driving means.

  Next, data p1 (X1, Y1, Z1) of the position next to the initial position along the three-dimensional path is read, and the droplet discharge head 220 (position of the nozzle 222) is moved to the three-way position p1 (X1, Y1,. Z1) is advanced (S60). This is because the X direction position X1 of the coordinate data p1 (X1, Y1, Z1) of the position p1 is set in the X coordinate system driving means (S60), and the Y direction position Y1 of p1 (X1, Y1, Z1) is set to Y. The coordinate system driving means is set (S60), and the Z-direction position Z1 of p1 (X1, Y1, Z1) is set in the Z coordinate system driving means (S66). As shown in FIG. 5, when the three-dimensional path of the droplet discharge head 220 performs reciprocal scanning parallel to the Y coordinate axis, the reciprocating mechanism 300 performs the X of the droplet discharge head for the same row. Direction setting (movement) can be performed. Further, after the initial height Z0 (Z-direction position) of the tray 100 is set by the Z-direction moving mechanism 170, the position change in the Z direction of the droplet discharge head 220 can be set by the electromagnetic actuator.

  The control unit 430 determines whether or not the step position of the droplet discharge head 220 is the discharge position and whether or not the droplet discharge flag is set (S68). When the droplet discharge head 220 is present at the droplet discharge position (S68; YES), the control unit 430 sends a drive signal to the discharge head driving device to discharge the droplet (S70). If the droplet discharge head 220 does not exist at the droplet discharge position (S68; YES), it is determined whether or not it is the final path position Pe (S72). For example, since the droplet discharge flag is not set at the positions p1 and p2 shown in FIG. 5, no droplet is discharged. At position p3, since the droplet discharge flag is set, droplets are discharged.

  If the final position pe has not yet been reached (S72: NO), the process returns to step 60 to read the next path position data and move the droplet discharge head 220 (or discharge nozzle 222) to the next position. By repeating this (S60 to S72), the droplet discharge head 220 moves along the assumed three-dimensional path on the surface of the substrate 500.

  When the droplet discharge head 220 reaches the final position pe, the droplet discharge head 220 is returned to a predetermined position, for example, a storage position where a mechanism for preventing nozzle drying of the droplet discharge head is present or an initial scanning position ( S74). The substrate 500 after the droplet discharge process is completed is sent to the next stage by an operator or by a robot arm (conveyance) mechanism. Control unit 430 waits for the next command after finishing this mode (S76).

  In this way, by setting the movement path of the ejection head in three dimensions in consideration of the unevenness of the substrate surface, it is possible to eject droplets while maintaining a predetermined gap with the substrate. In addition, by providing the height change section HC and the settling section CN in front of the droplet discharge point in the three-dimensional movement path, the droplet discharge position remains in the vibration state of the droplet discharge head due to vertical (height) movement. It is possible to avoid moving to.

  A second embodiment will be described with reference to FIGS. This embodiment is characterized in that a droplet detection head is provided with a gap detection device, and servo control is performed so that a predetermined gap is maintained.

  FIG. 14 is an explanatory diagram for explaining the configuration of a droplet discharge device 200 in the second embodiment. In FIG. 14, parts corresponding to those in FIG.

  The droplet discharge device 200 includes a gap detection device 601 at the lower end of the discharge head 220 so as to straddle the droplet discharge nozzle 222. The gap detection device 601 includes a laser device 601a that generates a laser beam and a CCD sensor light receiving element 601b. The gap detection utilizes the fact that the incident position of the laser light reflected by the substrate 500 to the CCD sensor 601b is determined corresponding to the gap between the ejection head 220 and the substrate 500 (see FIG. 3). Other configurations are the same as those in FIG.

  FIG. 15 shows a gap servo control circuit. The incident position of the reflected light of the CCD sensor 601b is converted into a level output and input from the nozzle gap detection device 601 to the comparator (differential amplifier) 603. This gap value is compared with a target gap value 602 set in advance at the current travel position (or scanning region) by a comparator 603, and a gap error that is the difference (positive or negative value) between the two is compared. Is output as a difference signal. This difference signal is input to a sample hold circuit 607 that can hold an instantaneous value via an LPF (low pass filter) 604 that removes a noise component and a servo switch circuit 605 that opens a servo loop. The sample hold circuit 607 inputs the difference signal to one input terminal of the adder 610, and holds the instantaneous value of the immediately preceding difference signal when the switch circuit 605 opens, and supplies it to the adder 610. The other input terminal of the adder 610 is supplied with a series of Z coordinate (height) values of the three-dimensional path (Z component output of the planned path) from the bias setting circuit 608. The switch circuit 605 operates by a switching signal (SW signal).

  When the switching signal is OFF and the servo circuit is not functioning, the adder 610 outputs the actuator 224 via the LPF 610 and outputs the output set corresponding to the Z coordinate of the predetermined movement path output from the bias setting circuit 608. This is supplied to a driving circuit 612 to be driven. Thereby, the height position of the droplet discharge head is set to a pre-programmed Z coordinate value.

  The adder 610 drives the actuator 224 by superimposing a difference signal (error signal) between the actual gap value and the target value on the Z coordinate value when the switching signal is on and the servo circuit is functioning. A circuit (power amplifier) 612 is supplied. Thereby, the actuator 224 is driven in a direction in which the differential component becomes zero. As a result, the height position of the droplet discharge head 220 (or the droplet discharge nozzle 222) is forcibly drawn to the gap value set as a target. Accordingly, when the droplet discharge head 220 is moved in the Y direction, the height position in the Z direction of the head is continuously set by a predetermined path output (programmed output), and the droplet discharge region or the droplet discharge is set. It becomes possible to activate the servo circuit before the position and accurately set it to a predetermined gap defined at the discharge position.

  When the bias setting circuit 608 defines the height position of the ejection head 220 based on the gap value between the droplet ejection head 220 (or ejection nozzle 222) and the substrate 500, the output value includes the target gap. Since a value is included, this value may be supplied to the comparator 603 instead of the output of the target gap value circuit 602.

  FIG. 16 shows a configuration example of the control system 400 of the second embodiment. In the figure, parts corresponding to those in FIG. 2 are denoted by the same reference numerals, and description thereof will be omitted.

  As described above, the gap detection device 601 is added to the control system 400. In the control unit 430, the servo circuit shown in FIG. 15 is formed by a digital circuit or an analog circuit.

  Next, the operation of the control unit 430 will be described with reference to FIGS. 17 and 18.

  If the surface of the substrate 500 is uneven, if the height is relatively high, the height of the droplet discharge head must be moved greatly. In such a case, it takes time until the height position of the droplet discharge head is stabilized after the movement. In such a case, when the servo circuit is operated, the droplet discharge head (discharge nozzle) can be set at the target height position in a short time.

  FIG. 17 is an explanatory diagram illustrating an operation example of the servo circuit. The control unit 430 reads a series of three-dimensional position data of the movement path. A SW on / off flag indicating the on / off of the servo circuit is attached to the position data. For example, in the height change region HC and the obstacle jump section, an SW off flag for stopping the servo circuit is set to relatively move the droplet discharge head 220 relatively. Further, the SW on flag flag is set in the section from the settling section CN before the droplet discharge position to the discharge position.

  In the example shown in FIG. 17, when the droplet discharge head 220 moves in the HC section, the control unit 430 reads the SW off flag from the position data of the path 530, opens the switch circuit 605, and is output from the bias setting circuit 608. A series of height data of the movement path 530 is supplied to the drive circuit 611. Thereby, the droplet discharge head 220 is moved along a HC of the assumed path to a height position that becomes a target gap value via a gentle inclination. Next, when the droplet discharge head 220 advances and the position data of the movement path indicates the CN section, the control unit 430 reads the SW on flag, closes the switch circuit 605, and turns on the servo circuit. An error (difference) signal between the current gap value of the droplet discharge head 220 and the target gap value set in the region is superimposed on the height signal of the Z coordinate value and supplied to the drive circuit. The gap of the nozzle portion 222 is forcibly pulled to the target gap value. Thereby, the settling of the height position of the droplet discharge head 220 is ensured before the droplet discharge position. Thereafter, when the droplet discharge head 220 moves and is positioned at the droplet discharge position P 1, the control unit 430 discharges droplets from the discharge nozzle 222.

  Next, when the droplet discharge head moves away from the surface of the substrate 500 and jumps over the obstacle or the like, the control unit 430 reads the SW off flag indicated by the position data of the three-dimensional path 530 and shuts off the switching circuit 605. . The error output at this time is held in the sample hold circuit 607, and the occurrence of disturbances due to switching is prevented. Since the servo circuit (or servo loop) is interrupted, the droplet discharge head 220 is unlocked to the target gap and moves according to the height output of the Z coordinate system of the bias setting circuit 608. The bias setting circuit 608 outputs a series of height values in the jump section and moves the droplet discharge head so as to straddle the obstacle.

  In this embodiment, in order to shorten the settling time required for settling or the settling distance required for settling, the landing side of the jump section is made to reach the settling section through two stages of height change sections HC1 and HC2. . In the height change section HC1, the height change is abrupt and the height is reduced in a short time. In the height change section HC2, the height change is made relatively gradual and the droplet discharge head Z before entering the settling section CN. The inertia force in the direction is weakened. In addition, a large feedback amount is generated in the servo circuit, thereby preventing the occurrence of vibration in the vertical movement of the ejection head. In this embodiment, by turning on the SW flag from the height change section HC2, the servo circuit is turned on early so as to set the ejection head before the next ejection position P2. In this embodiment, an example is shown in which the change interval is divided into two change intervals HC1 and HC2. However, the change interval is not limited to two. The change section HC can be configured by a plurality of change sections HC1 to HCn having different height change rates as necessary.

  FIG. 18A is a flowchart for explaining the control operation of the control unit 430 when the servo operation is performed with the gap detection device 601 shown in FIG. In the figure, a servo circuit is set between steps S60 and S62 shown in FIG. That is, the control unit 430 reads position data at the step position of the three-dimensional movement path of the droplet discharge head (S60), and determines whether or not the current position of the droplet discharge head 220 is in the change section HC (S82). ). If it is the change region HC (S82; YES), the switching signal (SW signal) is set to OFF. As a result, the servo circuit shown in FIG. 15 does not operate (S84). The droplet discharge head 220 can be moved along a predetermined trajectory (path).

  Further, when it is not the change section HC (S82; NO) and when the switching signal (SW signal) is set to OFF (S84), it is determined whether or not the droplet discharge head 220 has entered the settling section CN (S86). . If it is entered (S86; YES), the switching signal is set to ON to operate the servo circuit. Thereby, the servo circuit is turned on, and the droplet discharge head 220 is pulled in so as to converge to the target gap set in the settling interval (S88). If the settling section CN is not entered (S86; NO), or if the servo circuit has been turned on (S88), the position setting of the X / Y / Z coordinate system to the above-described stepping position is performed. (S62 and later).

  As described above, it is possible to set a range in which the servo operation is performed regardless of the change section HC and the settling section CN by attaching a servo on / off flag to the position data of the three-dimensional movement path (see FIG. 17).

  FIG. 18B is a flowchart for explaining the control operation of the control unit 430 corresponding to the jump described above. Also in the figure, a procedure for setting a servo circuit is added between steps S60 and S62 shown in FIG. That is, the control unit 430 reads position data at the advance position of the three-dimensional movement path of the droplet discharge head (S60), and determines whether or not the current position of the droplet discharge head 220 is a jump position (or section). (S92). If it is the jump position (S92; YES), the switching signal (SW signal) is set to OFF. As a result, the servo circuit shown in FIG. 15 does not operate (S94). The droplet discharge head 220 can be moved along a predetermined jump trajectory (path).

  If it is not the jump position (S92; NO) and the switching signal (SW signal) is set to OFF (S94), it is determined whether or not the droplet discharge head 220 has entered the jump end position (or end section). (S96). If entered (S96; YES), the switching signal is set to ON to operate the servo circuit. Thereby, the servo circuit is turned on, and the droplet discharge head 220 is pulled in so as to converge at the height position or target gap set in the section (S98). When the jump end position is not entered (S96; NO) or when the servo circuit is turned on (S98), the position setting of the X, Y, Z coordinate system to the above-described stepping position is performed (S98). S62 and later).

  In this way, servo control is performed to maintain the gap (or height) of the droplet discharge head at a predetermined value.

  19 and 20 show another embodiment in which the droplet discharge device 200 is provided with a gap detection device.

  19, parts corresponding to those in the example shown in FIG. 15 are denoted by the same reference numerals, and description thereof is omitted. In the third embodiment, the gap detection device 601 is configured separately from the droplet discharge head 220. The gap detection device 601 is attached to the lower part of the frame of the carriage that carries (reciprocates) the droplet discharge device. Other configurations are the same as the example of FIG.

  In such a configuration, the gap is measured at a position preceding the position of the nozzle 222 of the current droplet discharge head by a distance L. Therefore, unlike the example shown in FIG. 14, it is not necessary to shift the gap measurement at the droplet discharge position and the droplet discharge timing on the time axis. The CCD sensor 601b is not easily contaminated by discharged droplets. Compared to the case where the droplet discharge head 220 and the gap detection device 601 are integrally configured, the droplet discharge head 220 can be configured at a lower cost. Further, by measuring the gap in advance of the droplet discharge nozzle 222 in advance, a margin time for avoiding the collision of the droplet discharge nozzle 222 with the protrusion of the substrate 500 is increased.

  FIG. 20 shows an example of a servo circuit used in the droplet discharge device 200 configured as shown in FIG. In the figure, parts corresponding to those in FIG. 15 are denoted by the same reference numerals, and description thereof will be omitted.

  In this servo circuit, the servo signal is superimposed on the output of the bias setting circuit 608 after being delayed by a time difference T corresponding to the positional deviation L in correspondence with the positional deviation L between the gap measurement position and the droplet discharge position. In addition, a signal delay circuit 606 is provided between the switch circuit 605 and the sample hold circuit 607.

  The gap measuring device 601 can be attached to an appropriate place such as a droplet discharge head, a carriage for mounting and transporting the droplet discharge head, an actuator for mounting and discharging the droplet discharge head. Yes, it is not limited to the arrangement of the embodiment.

  In the above embodiment, the electromagnetic actuator 223 is shown as an actuator for moving the droplet discharge head 220 back and forth. However, a piezoelectric actuator may be used. An electromagnetic actuator and a piezo actuator may be combined. Further, a feed screw mechanism (coarse adjustment) and an electromagnetic actuator (fine adjustment) or a feed screw mechanism (coarse adjustment) and a piezo actuator (fine adjustment) may be combined.

  In the above-described embodiment, since the droplet is ejected downward from the droplet ejection nozzle 222, the gap exists in the height or the vertical direction (Z-axis direction). However, when the discharge target surface of the discharge target body is disposed on, for example, the YZ plane and the droplets are discharged from the droplet discharge device 200 in the lateral direction, the gap existing in the droplet discharge direction is the front side ( In the X-axis direction). Of course, the present invention is also applied to such a case. In short, the present invention is applicable to the gap adjustment between the droplet discharge head 220 and the discharge target object. Further, the present invention can be used as position control for the droplet discharge head 220.

  In the above-described embodiment, an example is shown in which droplets are ejected to a plurality of non-contiguous positions scheduled like a multi-array such as a DNA chip. However, droplets are ejected continuously to form lines and surfaces. A droplet film can be formed. This can be dried to form an electrical wiring, an organic semiconductor film, and an organic EL film. The present invention is also used for such a droplet discharge process. For example, in the process of manufacturing an organic EL display substrate, when discharging an organic EL material with a minimum gap, it is necessary to discharge from a droplet discharge nozzle over a bank layer that defines an organic EL region. This can be performed by the above-described three-dimensional control (FIGS. 7 to 10) and jump control (see FIG. 17).

It is explanatory drawing explaining the structural example of the droplet discharge apparatus of this invention. It is a block diagram explaining the control system of a droplet discharge apparatus. It is explanatory drawing explaining the example which detects the unevenness | corrugation (height) of the to-be-discharged target body optically. It is explanatory drawing explaining the example which detects the unevenness | corrugation (height) of the to-be-discharged target body surface by a mechanical-electrical conversion system. FIGS. 5A and 5B are explanatory views for explaining a discharge path onto a substrate to be discharged, in which FIG. 5A is a plan view, and FIGS. 5B and 5C are in the AA ′ direction of FIG. It is sectional drawing which shows the unevenness | corrugation of the substrate surface. FIG. 5B shows a case where the ejection region is formed in a convex portion, and FIG. 5C shows a case where the ejection region is formed in a concave portion. It is explanatory drawing explaining the discharge path | route on another to-be-discharged board | substrate. It is explanatory drawing which shows the example of the movement path | route of the droplet discharge head in Z (height) direction. It is explanatory drawing which shows the other example of the movement path | route of the droplet discharge head in Z (height) direction. It is explanatory drawing which shows the other example of the movement path | route of the droplet discharge head in Z (height) direction. It is explanatory drawing which shows the other example of the movement path | route of the droplet discharge head in Z (height) direction. It is a flowchart explaining the mode which measures the unevenness | corrugation of the discharge substrate surface in the assumed discharge path | route. 6 is a flowchart illustrating a mode for setting a movement path of an ejection head three-dimensionally on an ejection substrate. 6 is a flowchart for explaining a mode in which droplet ejection is performed by moving the ejection head according to a set movement path. It is explanatory drawing explaining the example of a droplet discharge head provided with the gap measurement means which measures the gap between a droplet discharge nozzle and a discharge substrate. It is a block diagram explaining the structural example of the servo control system which adjusts a gap to a target value. It is a block diagram explaining a control system at the time of using a droplet discharge head provided with a gap measurement means. It is explanatory drawing explaining the example of the movement path | route where a servo lock is performed. It is a flowchart explaining the example of control which performs a servo lock. It is explanatory drawing explaining the other example of a droplet discharge head provided with the gap measurement means which measures the gap between a droplet discharge nozzle and a discharge substrate. It is a block diagram explaining the other structural example of the servo control system which adjusts a gap to a target value. It is explanatory drawing explaining the shift | offset | difference of the landing position of the discharge droplet by inertia force. It is explanatory drawing explaining the separation landing by the separation of a droplet. It is explanatory drawing explaining the example of a droplet discharge in a preferable gap value.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Droplet discharge process apparatus 100 Tray, 200 Droplet discharge apparatus, 220 Droplet discharge head, 222 Droplet discharge nozzle, 300 Reciprocating movement mechanism, 400 Control apparatus, 601 Gap detection apparatus

Claims (17)

A method for controlling a droplet discharge device for performing droplet discharge by relatively moving a droplet discharge device on a discharge target object,
A process of acquiring data on the height of irregularities on the surface of the discharge target object along the planned movement path of the droplet discharge nozzle including the assumed droplet discharge position on the target object of the droplet;
The nozzle movement path to which the droplet discharge nozzle should move along the unevenness of the surface of the discharge target body is separated from the surface of the discharge target body, and the height of the unevenness of the planned movement path and the surface of the discharge target body A nozzle movement path data forming process that three-dimensionally forms on the discharge target object based on the data,
A liquid including a change section in which the nozzle movement path changes the height of the droplet discharge nozzle before the droplet discharge position and a settling section for converging the droplet discharge nozzle to the height position of the droplet discharge position; Control method of droplet discharge device.   Further, a droplet that moves the droplet discharge nozzle along the nozzle movement path by controlling at least a moving mechanism that three-dimensionally moves the droplet discharge nozzle of the droplet discharge device on the discharge target object. The method for controlling a droplet discharge device according to claim 1, comprising a discharge nozzle moving process.   3. The moving mechanism includes a coarse adjustment unit that roughly adjusts a height of the droplet discharge nozzle from the surface of the discharge target body, and a fine adjustment unit that finely adjusts the height of the droplet discharge nozzle. A method for controlling a droplet discharge device according to claim 1.   The droplet discharge nozzle moving process detects the height of the droplet discharge nozzle from the surface of the discharge target object, and controls the coarse adjustment means or the fine adjustment means to control the height of the droplet discharge nozzle. The method for controlling a droplet discharge device according to claim 3, comprising a step of maintaining the height of the droplet discharge position on the nozzle movement path.   5. The fine adjustment of the height of the droplet discharge nozzle is temporarily stopped when the droplet discharge nozzle moving process moves across a concave region or a convex region on the surface of the discharge target object. A method for controlling a droplet discharge device according to any one of the above.   The droplet according to any one of claims 1 to 5, wherein a height of the droplet discharge nozzle from the surface of the discharge target body at the droplet discharge position is set corresponding to physical property value information of the droplet. Discharge device control method.   6. The height of the droplet discharge nozzle from the surface of the discharge target body at the droplet discharge position is set in accordance with environmental conditions around the droplet discharge nozzle. A method for controlling a droplet discharge device according to any one of the above.   8. The height according to claim 1, wherein a height of the droplet discharge nozzle from the surface of the discharge target body at the droplet discharge position is set within a range of 0.01 to 0.3 mm. A method for controlling a droplet discharge device. A process of measuring the height or thickness of a plurality of droplet discharge regions defined on the target substrate;
Determining a proper gap between the droplet discharge device and the substrate to be discharged in each droplet discharge region in accordance with at least one of the physical property value of the discharge liquid and the environmental conditions;
The three-dimensional droplet discharge device from the discharge start position to the discharge end position based on the height of each of the plurality of droplet discharge regions on the target substrate or the thickness of the substrate in the droplet discharge region and the appropriate gap The process of creating a travel program to determine the global route,
A movement mechanism capable of moving the droplet discharge device in three dimensions relative to the substrate to be discharged is controlled by the moving program, and the droplet discharge device is placed on a droplet discharge region of the substrate to be discharged. A step of discharging a droplet by being positioned through the appropriate gap at a droplet discharge position of
A droplet discharge method comprising: A droplet discharge head that discharges droplets toward a discharge target body;
A support mechanism for movably supporting the droplet discharge head;
An actuator that moves the droplet discharge head relative to the droplet discharge direction to adjust a gap between the discharge target and the droplet discharge head;
A moving mechanism for relatively moving the object and the droplet discharge head;
Storage means for storing a movement program representing a three-dimensional movement path of the droplet discharge head;
Control means for controlling the actuator and the movement mechanism based on the movement program;
A droplet discharge device comprising: And means for detecting a gap between the discharge object and the droplet discharge head;
The liquid droplet ejection apparatus according to claim 10, further comprising an error adjustment unit that feeds back a difference between the detected gap and a target gap value to the actuator.   12. The droplet discharge device according to claim 10, wherein the actuator includes any one of an electromagnetic actuator that advances and retracts the droplet discharge head with electromagnetic force, a piezoelectric actuator that uses a piezoelectric effect, and a feed screw mechanism.   The moving program includes information on a movement path of the droplet discharge head on the object, a plurality of droplet discharge positions in the movement path, and a gap between the discharge object and the droplet discharge head. The droplet discharge device according to any one of Items 12 to 12.   A change section in which the movement path of the movement program changes the gap between the discharge target and the droplet discharge head before the droplet discharge position, and settling to converge the gap to the gap determined at the droplet discharge position. The liquid droplet ejection apparatus according to claim 10, including a section.   The liquid droplet ejection apparatus according to claim 13 or 14, wherein the gap defined at each liquid droplet ejection position is set corresponding to the physical property value information of the liquid droplet.   The droplet discharge device according to claim 13 or 14, wherein a gap defined at each droplet discharge position is set in accordance with an environmental condition. The droplet discharge device according to claim 13 or 14, wherein a gap defined at each droplet discharge position is 0.01 to 0.3 mm.

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