JP5028794B2 - Pattern forming method and droplet discharge apparatus - Google Patents

Description

  The present invention relates to a pattern forming method and a droplet discharge device.

  Conventionally, a display device such as a liquid crystal display device or an electroluminescence display device is provided with a substrate for displaying an image. On this type of substrate, an identification code (for example, a two-dimensional code) in which manufacturing information such as the manufacturer and product number is encoded is formed for the purpose of quality control and manufacturing control. Such an identification code includes a code pattern (for example, a dot such as a colored thin film or a concave portion) as a pattern in a part of a large number of arranged pattern formation regions (data cells). Is made reproducible.

  Such identification code forming methods include laser sputtering that irradiates a metal foil with laser light to form a code pattern by sputtering, and water jet that engraves a code pattern by spraying water containing an abrasive onto a substrate or the like. A method has been proposed (Patent Documents 1 and 2).

  However, in the above laser sputtering method, the gap between the metal foil and the substrate must be adjusted to several to several tens of micrometers in order to obtain a code pattern having a desired size. That is, very high flatness is required for the surface of the substrate and the metal foil, and the gap between them must be adjusted with an accuracy of the order of μm. As a result, the target substrate on which the identification code can be formed is limited, causing a problem that the versatility is impaired. Further, the water jet method has a problem of contaminating the substrate because water, dust, abrasives, etc. are scattered when the substrate is engraved.

Therefore, an ink jet method has attracted attention as a method of forming an identification code that solves such production problems. In the ink jet method, a code pattern is formed by discharging a droplet containing metal fine particles from a nozzle of a droplet discharge head and drying the droplet. Therefore, the target range of the substrate on which the identification code is formed can be expanded, and the identification code can be formed while avoiding contamination of the substrate.
Japanese Patent Laid-Open No. 11-77340 JP 2003-127537 A

  By the way, in the manufacturing process of the display device described above, in order to improve the productivity, a plurality of identification codes are formed on a single mother substrate, and areas of the substrate corresponding to the identification codes are respectively cut out. A plurality of substrates are manufactured from one mother substrate.

  Therefore, in the inkjet method, the droplet discharge operation of the droplet discharge head is performed only on the identification codes scattered on the mother substrate. As a result, most of the process time for forming the identification code is spent on the movement time of the droplet discharge head that moves between the identification codes.

  Therefore, in the inkjet method, in order to improve the productivity of such an identification code, the droplet discharge head is mounted on a moving means such as an articulated robot, and the mounted droplet discharge head is fast in at least a two-dimensional direction. It was desired to be moved.

However, when the droplet discharge head is moved at a high speed, the amount of pressurizing means (for example, a piezoelectric element) for pressurizing the liquid material and the liquid material interface in the nozzle as the speed and acceleration vary. There was a possibility that the shape of (meniscus) would change. As a result, there has been a problem in that various droplet ejection operations such as fluctuations in the weight (capacity) of droplets to be ejected, fluctuations in flight speed, and displacement of landing positions are caused.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a pattern forming method and a droplet discharge device that stabilize the droplet discharge operation and improve pattern productivity. That is.

In the pattern forming method of the present invention, the liquid droplet discharge head in which the liquid containing the pattern forming material is stored is moved on the object, and the liquid having a predetermined weight from the discharge port of the liquid droplet discharge head. In a pattern forming method in which a droplet of a body is discharged toward the object and a pattern is formed by the droplet that has landed on the object, the droplet discharge head includes a plurality of the discharge ports. One droplet that is arranged in one direction, moves the droplet discharge head in a two-dimensional direction along a plane including the one direction, and moves on a target position of the object among the plurality of discharge ports . A landing position of each droplet discharged from the selected discharge port and a discharge port other than the selected discharge port is estimated based on at least one of the speed and acceleration of the droplet discharge head, and corresponds to the selected discharge port. Landing The distance between the the location target position is equal to or greater than the predetermined value, and, when the distance between the landing position and the target position corresponding to the other discharge ports adjacent to the selected ejection port is smaller than the predetermined value The liquid droplets are discharged from the other discharge ports adjacent to the selected discharge port.

  According to the pattern forming method of the present invention, ejection control can be performed based on the speed or acceleration of the droplet ejection head. Therefore, even when the droplet discharge head is moved at high speed or accelerated or decelerated, the droplet discharge operation can be stabilized regardless of the speed or acceleration of the droplet discharge head. As a result, the productivity of patterns made of droplets can be improved.

In this pattern formation method, the distance between the landing position corresponding to the selected discharge port and the target position is a predetermined value or more, and the landing position corresponding to the other discharge port adjacent to the selected discharge port ; When the distance from the target position is equal to or greater than the predetermined value, a message indicating that the movement path of the droplet discharge head on the object is to be changed may be displayed.

According to this pattern forming method, even when the flying speed of the droplet fluctuates, the droplet having a predetermined weight can be landed on the target position by selecting the discharge port .

The droplet discharge device according to the present invention includes a droplet discharge head in which a plurality of discharge ports for discharging droplets having a predetermined weight are arranged in one direction, and the liquid along a plane including the one direction. A moving unit that moves the droplet discharge head in a two-dimensional direction above the object, and the droplet discharging head and the moving unit are driven to discharge the droplet onto the droplet discharging head toward the object. A droplet discharge device comprising: a discharge control unit configured to cause the discharge control unit to include, among the plurality of discharge ports, one selected discharge port that moves on a target position of the object; and the selected discharge port The landing position of each droplet discharged from other discharge ports is estimated based on at least one of the speed and acceleration of the droplet discharge head, and the distance between the landing position corresponding to the selected discharge port and the target position there are not less than a predetermined value, and the election If the distance between the landing position and the target position corresponding to the other discharge ports adjacent to the discharge port is smaller than the predetermined value, to eject droplets from said other discharge opening adjacent to the selected ejection opening .

  According to the droplet discharge device of the present invention, discharge control can be performed based on the acceleration of the droplet discharge head. Therefore, even when the droplet discharge head is accelerated or decelerated, the droplet discharge operation can be stabilized regardless of the acceleration of the droplet discharge head. As a result, the productivity of patterns made of droplets can be improved.

In the liquid droplet ejection apparatus, the ejection control unit is configured so that the distance between the landing position corresponding to the selected ejection port and the target position is a predetermined value or more and the other ejection port adjacent to the selected ejection port. When the distance between the landing position corresponding to the outlet and the target position is equal to or greater than the predetermined value, a message to change the movement path of the droplet discharge head on the object may be displayed. Good.

According to this droplet discharge device, the position of the discharge port for discharging the droplet can be selected based on the acceleration of the droplet discharge head. Therefore, the control range corresponding to the acceleration of the droplet discharge head can be expanded, and the droplet discharge operation can be further stabilized.

  According to this droplet discharge device, the position of the discharge port for discharging the droplet can be selected based on the speed of the droplet discharge head. Therefore, the control range corresponding to the speed of the droplet discharge head can be expanded, and the droplet discharge operation can be further stabilized.

  Hereinafter, an embodiment embodying the present invention will be described with reference to FIGS. First, the liquid crystal display device 1 having an identification code formed using the pattern forming method of the present invention will be described.

  In FIG. 1, a rectangular display unit 3 in which liquid crystal molecules are sealed is formed at a substantially central position on one side surface (surface 2 a) of a substrate 2, and a scanning line driving circuit is provided outside the display unit 3. 4 and a data line driving circuit 5 are formed. The liquid crystal display device 1 controls the alignment state of the liquid crystal molecules in the display unit 3 based on the scanning signal supplied from the scanning line driving circuit 4 and the data signal supplied from the data line driving circuit 5. ing. The liquid crystal display device 1 is configured to display a desired image in the area of the display unit 3 by modulating the plane light from the illumination device (not shown) according to the alignment state of the liquid crystal molecules.

  In the lower left corner of the surface 2a, a code area S made of a square having a side of about 1 mm is defined, and in the code area S, 16 rows × 16 columns of data cells C are virtually divided. In the area of the selected data cell C of the code area S, dots D as patterns are formed, and the plurality of dots D constitute the identification code 10 of the liquid crystal display device 1.

In the present embodiment, the center position of the data cell C is “target position P”, and the position coordinate of the orthogonal coordinate system of “target position P” is referred to as “target coordinate Sp” (see FIGS. 6 and 8).
Further, in the present embodiment, the “target position P”, which is the “target position P”, is located at approximately the center position in the X arrow direction (16 “target positions P” corresponding to the eighth row from the X arrow direction). The “position P” is referred to as the “teach position Pt”, and the “target coordinate Sp” regarding the “teach position Pt” is referred to as “teach coordinate Tp”. Furthermore, in the present embodiment, the length of one side of each data cell C is referred to as “cell width W”.

  Each dot D is a hemispherical pattern whose outer diameter is formed by the length of one side of the data cell C (the “cell width W”). The dots D are formed by discharging droplets Fb of a liquid F (see FIG. 6) in which metal fine particles (for example, nickel fine particles and manganese fine particles) as a pattern forming material are dispersed in a dispersion medium to the data cell C, It is formed by irradiating the droplet Fb landed on the cell C with the laser beam B (see FIG. 6) and drying and firing. The size of the dots D is made uniform by setting the weight of each droplet Fb to be discharged to a predetermined weight (“target weight Iw”: see FIG. 8).

The identification code 10 reproduces the product number, lot number, and the like of the liquid crystal display device 1 depending on the presence or absence of the dot D in each data cell C.
In the present embodiment, the longitudinal direction of the substrate 2 is referred to as the X arrow direction, and the direction orthogonal to the X arrow direction is referred to as the Y arrow direction.

  Next, the droplet discharge device 20 for forming the identification code 10 will be described. In the present embodiment, a case will be described in which a plurality of the identification codes 10 that are scattered are formed on a mother substrate 2M as an object from which a plurality of the substrates 2 can be cut out.

  In FIG. 2, the droplet discharge device 20 is provided with a base 21 formed in a substantially rectangular parallelepiped shape, and a plurality of mother substrates 2M are arranged on one side (X arrow direction side) of the base 21. A substrate stocker 22 to be accommodated is disposed. The substrate stocker 22 moves in the vertical direction (Z arrow direction and anti-Z arrow direction) in FIG. 2 so that each mother substrate 2M to be accommodated can be carried out onto the base 21 and the mother on the base 21. The substrate 2M can be loaded into the corresponding slot.

  On the upper surface 21 a of the base 21, a traveling device 23 extending in the Y arrow direction is disposed on the substrate stocker 22 side (counter X arrow direction side). The travel device 23 is configured to cause a transport device 24 that is drivingly connected to an output shaft of a travel motor MS (see FIG. 8) provided therein to travel in the Y arrow direction and the anti-Y arrow direction. The transfer device 24 is a horizontal articulated robot having a transfer arm 24a capable of attracting and gripping the back surface 2Mb of the mother board 2M, and is drivingly connected to an output shaft of a transfer motor MT (see FIG. 8) provided therein. The transport arm 24a is configured to rotate freely on the XY plane and move in the vertical direction.

  On the upper surface 21a of the base 21 and on both sides in the Y direction, a pair of mounting tables 25R and 25L for mounting the mother substrate 2M with the surface 2Ma of the mother substrate 2M on the upper side are provided. The pair of mounting tables 25R and 25L each have a space (recessed portion 25a) that allows the transfer arm 24a to be extracted on the back surface 2Mb side of the mother substrate 2M to be mounted, and the transfer arm 24a in the recessed portion 25a. The mother board 2M can be transported and placed by moving the board up and down.

  Then, when a predetermined drive control signal is supplied to the travel motor MS and the transport motor MT, the travel device 23 and the transport device 24 unload each mother substrate 2M in the substrate stocker 22, and the unloaded mother substrate 2M. It mounts on either one of the mounting bases 25R and 25L. Further, the traveling device 23 and the transport device 24 are configured to carry the mother substrate 2M placed on the placement tables 25R and 25L into a predetermined slot in the substrate stocker 22 and collect it.

  In the present embodiment, as shown in FIG. 3, the code region S of the mother board 2M placed on the placement tables 25R and 25L, and the first row code region S1 in order from the X arrow direction side. The second line code area S2,..., The fifth line code area S5.

  In FIG. 2, an articulated robot (hereinafter simply referred to as a SCARA robot) 26 as a moving means is disposed on the upper surface 21a of the base 21 between the pair of mounting tables 25R and 25L. The SCARA robot 26 includes a main shaft 27 that is fixed to the upper surface 21a of the base 21 and extends upward (in the direction of the arrow Z).

A first arm 28a that is drivingly connected to an output shaft of a first motor M1 (see FIG. 8) installed on the main shaft 27 is connected to an upper end of the main shaft 27 so as to be rotatable in a horizontal direction (XY plane direction). Yes. A second arm 28b that is connected to the output shaft of the second motor M2 (see FIG. 8) installed on the first arm 28a is connected to the hand of the first arm 28a so as to be rotatable in the horizontal direction. Yes. At the tip of the second arm 28b, a cylindrical third arm 28c that is drivingly connected to the output shaft of the third motor M3 (see FIG. 8) installed on the second arm 28b is an axis along the Z arrow direction. It is connected so as to be rotatable about the center of rotation. A head unit 30 is disposed at the lower end (hand) of the third arm 28c.

  The first, second, and third motors M1, M2, and M3 are supplied with signals that cause the joints of the arms 28a, 28b, and 28c to have predetermined joint angles (joint coordinates). Then, the SCARA robot 26 rotates each arm 28a, 28b, 28c, and moves the tip of the third arm 28c (rotation center: head unit 30) to a predetermined area (two-dot chain line shown in FIG. 3) on the upper surface 21a. Area (scanning area E) is moved (scanned).

  Note that the SCARA robot 26 of the present embodiment has the third arm along the “target locus R” as the movement path with each “teaching position Pt” (“teaching coordinate Tp”) of each code area S as a teaching point. The head unit 30 is scanned by moving the hand (rotation center) 28c.

  More specifically, as shown by the arrows in FIG. 3, the SCARA robot 26 first rotates the first arm 28a, the second arm 28b, and the third arm 28c, and moves the hand of the third arm 28c (the center of rotation). : The head unit 30) is arranged and moved on the side opposite to the Y arrow in the first line code area S1 (hereinafter simply referred to as "start point") When the head unit 30 is moved to the “starting point”, the SCARA robot 26 rotates the first arm 28a, the second arm 28b, and the third arm 28c to move the head unit 30 to the first line code area. Move (scan) along the direction of the arrow Y just above S1. When the head unit 30 is scanned on the first-line code area S1, the SCARA robot 26 rotates the third arm 28c counterclockwise and rotates the head unit 30 counterclockwise by 180 degrees, 28a, the second arm 28b, and the third arm 28c are rotated, and the head unit 30 is rotated to the most Y arrow direction side of the second row code area S2. When the head unit 30 is turned to the second line code area S2, the SCARA robot 26 moves (scans) the head unit 30 along the anti-Y arrow direction immediately above the second line code area S2.

  Thereafter, in the same manner, the SCARA robot 26 scans the head unit 30 along the Y arrow direction or the anti-Y arrow direction in the order of the third, fourth, fifth line code areas S3, S4, S5. Then, the arrangement is moved to the Y arrow direction side of the fifth line code area (hereinafter simply referred to as “end point”). That is, the SCARA robot 26 according to this embodiment is configured so that the arrangement direction of the head unit 30 corresponds to the direction in which the head unit 30 moves. Then, the SCARA robot 26 drives and controls the motors M1, M2, and M3, so that the trajectory of the hand (head unit 30) of the third arm 28c connects each “code region S” above smoothly. The speed / acceleration of the hand of the third arm 28c is modulated so as to draw the “target locus R”. In the present embodiment, the direction along the “target locus R” is referred to as a target locus direction RA.

  In FIG. 4, a liquid body tank 31 formed in a box shape is disposed in the head unit 30, and a liquid droplet ejection head (hereinafter simply referred to as “ejection head” is disposed below the liquid body tank 31. ”) 32 is provided. The liquid material tank 31 accommodates the liquid material F so as to be able to be led out, and guides the contained liquid material F to the droplet discharge head 32. On the mother substrate 2M side (lower side) of the liquid tank 31, a droplet discharge head 32 (hereinafter simply referred to as the discharge head 32) is disposed.

  FIG. 5 is a perspective view of the ejection head 32 as viewed from the mother substrate 2M side. In FIG. 5, a nozzle plate 33 is provided below the ejection head 32 (upper side in FIG. 5), and the lower surface (nozzle formation surface 33a) of the nozzle plate 33 is in the normal direction of the mother substrate 2M ( A plurality of circular holes (nozzles N as discharge ports) formed so as to penetrate along the Z arrow direction) are arranged.

  Each nozzle N is arranged such that when the SCARA robot 26 scans the head unit 30 along the “target locus R”, the arrangement direction (nozzle arrangement direction An) is substantially orthogonal to the target locus direction RA shown in FIG. An array is formed. Further, each nozzle N is formed with the same formation pitch along the nozzle arrangement direction An as the “cell width W”. That is, each of the nozzles N of the present embodiment is arranged such that when the SCARA robot 26 scans the head unit 30 along the “target locus R”, the selected 16 consecutive nozzles N are respectively connected to the “target positions P”. Is formed opposite to each other.

In the present embodiment, the nozzle N that is one of the nozzles N and is opposed to each “teaching position Pt” (the rotation center of the third arm 28 c) is referred to as a reference nozzle NC.
In FIG. 6, a cavity 34 as a pressure chamber communicating with the liquid tank 31 is formed above each nozzle N, and the liquid F derived from the liquid tank 31 is placed in the corresponding nozzle N, respectively. It comes to supply. A vibration plate 35 that can vibrate in the vertical direction is attached to the upper side of each cavity 34 so that the volume in the cavity 34 is enlarged or reduced. A plurality of piezoelectric elements PZ corresponding to the respective nozzles N are disposed on the upper side of the vibration plate 35, and are contracted and expanded in the vertical direction in response to a predetermined driving signal (piezoelectric element driving voltage COM1: see FIG. 8). It is supposed to be.

  More specifically, as shown in FIG. 7, the piezoelectric element PZ of the present embodiment has a driving waveform piezoelectric element driving voltage composed of a pull-in period W11, a pull-in holding period W12, an extrusion period W13, an extrusion holding period W14, and a pull-in period W15. In response to COM1, it contracts and expands. The pull-in period W11 is a period in which the piezoelectric element drive voltage COM1 is boosted to a potential higher than the intermediate potential Vb (“drive voltage Vh”). The piezoelectric element PZ contracts and the liquid material interface (meniscus) in the nozzle N is contracted. K) is drawn into the nozzle N to form a concave curved surface. The pull-in holding period W12 is a period in which the piezoelectric element driving voltage COM1 is held at the “driving voltage Vh”, and the meniscus K drawn into the nozzle is stably held. The extruding period W13 is a period in which the piezoelectric element driving voltage COM1 is linearly lowered to the lowest potential VL. The piezoelectric element PZ is expanded, and the meniscus K is formed into a convex curved surface to eject the droplet Fb. ing. The extrusion holding period W14 is a period in which the piezoelectric element driving voltage COM1 is held at the minimum potential VL for a predetermined time, and the shape of the meniscus K that ejects the droplet Fb is stabilized. In the pull-in period W15, the piezoelectric element driving voltage COM1 is linearly boosted from the lowest potential VL to the intermediate potential Vb.

  Then, the piezoelectric element driving voltage COM1 including the drawing period W11, the drawing holding period W12, the pushing period W13, the pushing holding period W14, and the drawing period W15 is supplied to the piezoelectric element PZ. Then, as the piezoelectric element PZ contracts and expands, the meniscus K in the corresponding nozzle N vibrates and the droplet Fb is ejected.

  At this time, the ejected droplets Fb generally include a parameter that vibrates the meniscus K (for example, a pressurizing amount for pressurizing the liquid F (“driving voltage Vh” of the pull-in holding period W12)), a liquid F Are discharged at a weight or flight speed corresponding to a pressurizing speed (inclination of the extrusion period W13).

Therefore, when the speed / acceleration of the ejection head 32 fluctuates along the above-mentioned “target locus R”, the position and shape of the meniscus K, the expansion width of the piezoelectric element PZ, and the amplitude of the diaphragm 35 are as follows. It fluctuates according to the speed and acceleration of the head unit 30. As a result, the weight and flight speed (landing position) of the ejected droplets Fb vary for each corresponding “target position P”.

  Therefore, in the droplet discharge device 20 of the present embodiment, the weight of the droplet Fb to be discharged is calculated by calculating the speed and acceleration of the head unit 30 (each nozzle N) when passing above each “target position P”. The “driving voltage Vh” in the pull-in holding period W12 is corrected so that becomes the “target weight Iw”. That is, in the droplet discharge device 20, the weight of the droplet Fb that varies according to the speed and acceleration of the nozzle N is corrected (weight correction) by the corresponding “drive voltage Vh”.

  In addition, the droplet discharge device 20 uses the velocity / acceleration of each nozzle N when passing above each “target position P” and the corrected “drive voltage Vh” to discharge the droplet Fb to be discharged. "Flying speed Vm" is calculated. Further, the droplet discharge device 20 uses the calculated “flying speed Vm” to coordinate (“landing coordinate Se”: the landing position of the corresponding droplet Fb (“landing position Pe”: see FIG. 10): (See FIG. 10). Then, various corrections (for example, correction of timing for ejecting the droplet Fb, or droplet Fb, so that the “landing coordinate Se” becomes the position coordinate (“target coordinate Sp”) of the corresponding “target position P”. Correction of the position of the nozzle N that discharges (landing position correction).

  Then, as shown in FIG. 6, when the preselected nozzle N passes above the corresponding “target position P” at the timing at which the landing position is corrected, the piezoelectric element PZ corresponding to the nozzle N Thus, the piezoelectric element drive voltage COM1 including the weight-corrected “drive voltage Vh” is supplied. Then, the droplet Fb having the “target weight Iw” is ejected from the corresponding nozzle N, and the ejected droplet Fb flies at the “flying speed Vm”, and the corresponding “landing coordinate Se” (“ Land at the target position P ").

  In FIG. 4, a laser head 37 is disposed on the head unit 30 on the side opposite to the target locus direction RA. Inside the laser head 37, a plurality of semiconductor lasers LD corresponding to the respective nozzles N are arranged along the nozzle arrangement direction An. Each semiconductor laser LD receives a signal (laser driving voltage COM2: see FIG. 8) for controlling the driving of the semiconductor laser LD, and directly receives the laser beam B in the wavelength region corresponding to the absorption wavelength of the droplet Fb. The light is emitted in the direction of the anti-Z arrow.

  A plurality of reflection mirrors M corresponding to the respective semiconductor lasers LD are arranged along the nozzle arrangement direction An at the lower end of the laser head 37 and immediately below the semiconductor laser LD (on the mother substrate 2M side). The reflection mirror M totally reflects the laser beam B from the corresponding semiconductor laser LD to the ejection head 32 side, and also reflects the totally reflected laser beam B to the opposite side of the target locus direction RA of the corresponding “target position P”. It comes to lead.

  In the present embodiment, a position on the mother substrate 2M where the optical axis of the laser beam B intersects the surface 2Ma is defined as an irradiation position Pb, and the position coordinates in the orthogonal coordinate system of the irradiation position Pb are expressed as “irradiation position It is called “coordinate Br”.

In the present embodiment, the distance between the “landing coordinates Se” and the “irradiation position coordinates Br” is referred to as an irradiation standby distance Lw.
Then, at a timing when each “target position P” is opposite to the irradiation position Pb, the laser drive voltage COM2 is supplied to the corresponding semiconductor laser LD. Then, the laser beam B from the corresponding semiconductor laser LD is totally reflected by the corresponding reflecting mirror M, and the droplet F positioned at the irradiation position Pb.
The region b is irradiated. The laser beam B irradiated to the region of the droplet Fb evaporates (drys) the solvent or dispersion medium of the droplet Fb, and fires the metal fine particles of the droplet Fb. As a result, a dot D having a predetermined weight (volume) corresponding to the data cell C is formed at the “target position P”.

Next, the electrical configuration of the droplet discharge device 20 configured as described above will be described with reference to FIG.
In FIG. 8, the droplet discharge device 20 is provided with a control device 51 composed of a CPU or the like. The control device 51 drives the travel device 23, the transport device 24, and the SCARA robot 26 according to the current position of the reference nozzle NC (the hand of the third arm 28c) and various control programs, and also drives the ejection head 32 and the laser head 37. It is supposed to be controlled.

  An input / output unit 61 having operation switches such as a start switch and a stop switch is connected to the control device 51. The input / output unit 61 displays various messages from the control device 51, and information related to the identification code 10 is input as “drawing data Ia” in a predetermined format. Then, the control device 51 generates a bitmap data BMD by performing a predetermined expansion process on the drawing data Ia from the input / output unit 61, and generates each “target coordinate Sp” (each “teaching” based on the bitmap data BMD). The coordinates Tp ") are generated. In addition, the control device 51 performs development processing different from the bitmap data BMD on the drawing data Ia to generate information regarding the size of the dot D, that is, “target weight Iw”.

  The bitmap data BMD is data indicating whether or not the droplet Fb is ejected to each position obtained by virtually dividing the drawing plane (the surface 2Ma of the mother substrate 2M) in the orthogonal coordinate system, and each bit value (0 or 0). This data defines whether or not each piezoelectric element PZ is driven according to 1). That is, the bitmap data BMD is data for defining whether or not the droplets Fb are ejected from each nozzle N of the ejection head 32 to be scanned when the ejection head 32 is scanned along the “target locus R”. It is.

  The control device 51 is provided with a storage unit 52 as storage means composed of various RAMs, ROMs, etc., and is used as a processing area for various arithmetic processes, as well as various programs, various data, and various arithmetic processing processes. Results are stored.

  More specifically, the storage unit 52 stores various programs such as a discharge weight setting program PG1 for correcting the discharge weight of the droplet Fb and a landing position correction program PG2 for correcting the landing position. The storage unit 52 stores the “target coordinates Sp”, the “target weight Iw”, and the bitmap data BMD. Furthermore, the “nozzle number information PnI”, “target joint coordinate information BpI”, “speed / acceleration information VaI”, “drive voltage information VhI” and “flight speed information VmI” constituting the discharge control information are stored in the storage unit 52. “Discharge timing information TaI” and “reference error D0” are stored.

  “Nozzle number information PnI” is information in which each “target coordinate Sp” is associated with a nozzle number by using identification information (nozzle number) that makes it possible to identify the position of each nozzle N. Then, the control device 51 refers to the “nozzle number information PnI” and causes the droplets Fb corresponding to the “target coordinates Sp” to be ejected from the nozzles N corresponding to the “target coordinates Sp”. It has become.

The “target joint coordinate information BpI” includes the coordinates of each “teaching coordinate Tp” and a plurality of “interpolation points” connecting between each “teaching coordinate Tp”, and the corresponding posture of the SCARA robot (the joint coordinates of each joint). Information). That is, the “target joint coordinate information BpI” is
This is information in which the coordinates of the “teaching coordinates Tp” and “interpolation point” correspond to the posture of the SCARA robot in which the reference nozzle NC is made to correspond to the coordinates of the corresponding “teaching coordinates Tp” or “interpolation point”, respectively.

  Then, the control device 51 outputs “target joint coordinate information BpI” to the SCARA robot drive circuit 64 to drive and control the motors M1, M2, and M3, and to control the hand of the third arm 28c (reference nozzle NC). , “Teaching coordinates Tp” or “interpolation points”.

  The “speed / acceleration information VaI” is the speed (“target speed”) and acceleration (“target acceleration”) of each nozzle N in the corresponding posture with respect to the posture (combination of joint coordinates of each joint) of each SCARA robot. Is information that corresponds to. Then, the control device 51 refers to the “speed / acceleration information VaI” and calculates the “flying speed Vm” of the droplet Fb from each nozzle N in the posture of each SCARA robot.

  “Drive voltage information VhI” is information in which “drive voltage Vh” is associated with “target speed”, “target acceleration”, and “target weight Iw”. Then, the control device 51 calculates a “drive voltage Vh” for discharging the droplet Fb having the “target weight Iw” specified by the drawing data Ia. Then, the control device 51 generates a piezoelectric element driving voltage COM1 composed of the calculated “driving voltage Vh”, and outputs the piezoelectric element driving voltage COM1 to the ejection head driving circuit 65 in synchronization with a predetermined clock signal. It is like that.

  The “drive voltage information VhI” in the present embodiment is an interpolation formula such as a polynomial derived in advance based on a test or the like. That is, the “driving voltage information VhI” indicates the “driving voltage Vh” when the weight of the droplet Fb becomes a predetermined “target weight Iw” in a combination of a number of “target speeds” and “target accelerations” in advance. The measurement is set, and based on the measurement result, all combinations of “target speed” and “target acceleration” (omnidirectional and magnitude) are interpolated. That is, the “driving voltage information VhI” is the “driving voltage Vh” for ejecting the droplet Fb having the “target weight Iw”, the “target speed” and the “target acceleration” (all directions and sizes). Information that can be derived for the combination.

  “Flying speed information VmI” is information in which “flying speed Vm” is associated with “target speed”, “target acceleration”, and “drive voltage Vh”. Then, the control device 51 calculates the “flying speed Vm” of the droplet Fb composed of the “target weight Iw” based on the “target speed”, the “target acceleration”, and the “driving voltage Vh”. The “landing position Pe” (“landing coordinate Se”) of the droplet Fb is calculated using the “velocity Vm”.

  The “flight speed information VmI” in the present embodiment is an interpolation formula such as a polynomial derived in advance based on a test or the like. That is, the “flying speed information VmI” measures the landing position when the weight of the droplet Fb reaches a predetermined “target weight Iw” in a combination of many “target speeds” and “target accelerations” in advance. Based on the measurement result, it is set to interpolate combinations of all “target speeds” and “target accelerations” (omnidirectional and magnitude). In other words, the “flying speed information VmI” includes the “flying speed Vm” of the droplet Fb composed of the “target weight Iw” for all combinations of “target speed” and “target acceleration” (omnidirectional and size). Information that can be derived.

The “reference error D0” defines an error of the “landing position Pe” corresponding to the “target position P”, and the “landing coordinate Se” of the droplet Fb calculated based on the “flying speed Vm”. And the range of the distance (landing error Dr) between the corresponding “target coordinates Sp”. Then, the control device 51 determines whether or not the landing error Dr is less than the “reference error D0”.

  “Discharge timing information TaI” is information in which the combination of “target coordinates Sp” and the nozzle number corresponds to the timing (correction time) at which the droplet Fb is discharged. The correction time in the present embodiment is based on the timing at which the nozzle N corresponding to the nozzle number is located immediately above the “target coordinate Sp” (or the coordinate position of the “interpolation point”) corresponding to the nozzle number. It's time.

  When the corresponding nozzle N moves immediately above the “target coordinate Sp” (or the coordinate position of the “interpolation point”), the control device 51 refers to the “ejection timing information TaI” and corresponds to the nozzle N. The droplet Fb from the nozzle N is ejected at a timing delayed by the correction time.

  The control device 51 is provided with an interpolation calculation unit 53. The interpolation calculation unit 53 pre-defines a space between three consecutive “teaching positions Pt” (“teaching coordinates Tp” (including the start point)) at a predetermined interpolation cycle (for example, a division cycle of the bitmap data BMD). The set interpolation processing (linear interpolation, circular interpolation, free curve interpolation, or a combination thereof) is executed. Then, the interpolation calculation unit 53 sequentially calculates the position coordinates of a plurality of “interpolation points” (part of the “target locus R”) connecting the space between the three consecutive “teaching coordinates Tp” in the orthogonal coordinate system. It is like that.

  At this time, the interpolation calculation unit 53 associates the nozzle number corresponding to the reference nozzle NC with “teach coordinate Tp” (intermediate “teach coordinate Tp”) located in the middle of the three consecutive. . Further, the interpolation calculation unit 53 associates the nozzle numbers of the corresponding nozzles N with the 15 “target coordinates Sp” corresponding to the nozzle arrangement direction An of the intermediate “teaching coordinates Tp”. That is, every time the “interpolation point” is calculated, the interpolation calculation unit 53 discharges the droplet Fb to each of the 16 “target positions P” in the nozzle arrangement direction An including the intermediate “teach position Pt”. The nozzle number of the nozzle N for making it correspond is linked | related.

  Then, the interpolation calculation unit 53 generates information that associates each “target coordinate Sp” along the nozzle arrangement direction An with the nozzle number, that is, the “nozzle number information PnI”, and stores the information in the storage unit. ing. The nozzle N having the nozzle number associated with each “target position P” by the interpolation calculation unit 53 is referred to as “selected nozzle”.

  The control device 51 is provided with an inverse conversion unit 54. The inverse conversion unit 54 sequentially calculates the posture of the SCARA robot 26 (joint coordinates of the arms 28a, 28b, and 28c) with respect to each of the position coordinates of each “interpolation point” and the intermediate “teaching coordinates Tp”. It has become. Then, the inverse transform unit 54 generates information that associates each combination of joint coordinates with the corresponding “interpolation point” or intermediate “teaching position Pt”, that is, the “target joint coordinate information BpI”. 52 is stored.

At this time, the inverse conversion unit 54 determines the combination of the joint coordinates based on the posture of the SCARA robot 26, the maximum torque of each motor M1, M2, M3, the arm length of each arm 28a, 28b, 28c, the moment of inertia, and the like. The speed / acceleration of the head unit 30 is calculated in an orthogonal coordinate system. Further, the inverse conversion unit 54 calculates the “target speed” and “target acceleration” of each “nozzle N” in each combination of joint coordinates based on the calculated speed and acceleration of the head unit 30 and the formation pitch of the nozzle N, and the like. The calculation is performed sequentially. Then, for each posture of the SCARA robot 26 (combination of each joint coordinate), the inverse conversion unit 54 provides information on the combination of “target speed” and “target acceleration” corresponding to the nozzle number of the nozzle N, that is, the “speed / "Acceleration information VaI" is generated and stored in the storage unit 52.

  The control device 51 is provided with a bitmap data transfer unit 55. The bitmap data transfer unit 55 sequentially serially transfers a part of the bitmap data BMD to the ejection head drive circuit 65 based on the “nozzle number information PnI” and the “ejection timing information TaI”. Yes.

  More specifically, the bitmap data transfer unit 55 generates bit data (part of the bitmap data BMD) corresponding to the movement path of each nozzle (“selected nozzle”) on the drawing plane based on “nozzle number information PnI”. ) Are extracted sequentially. Also, the bitmap data transfer unit 55 discharges the sequentially extracted bit data (a part of the bitmap data BMD) in synchronization with a predetermined clock signal based on the timing specified by the “discharge timing information TaI”. Serial transfer is sequentially performed to the head drive circuit 65.

  For example, in the “discharge timing information TaI”, the discharge timing of the droplet Fb discharged from the reference nozzle NC is the predetermined time (correction time) at the timing when the reference nozzle NC passes a predetermined position (correction position). Suppose that it is specified to be delayed. Then, the bitmap data transfer unit 55 extracts only the bit data (0 or 1) corresponding to the reference nozzle NC at the correction position from the bit data (a part of the bitmap data BMD) extracted and sequentially transferred. Transfer is performed at a position delayed by a predetermined time. Thereby, only the ejection timing at a desired position on the drawing plane can be changed. In the present embodiment, the bit data transferred by the bitmap data transfer unit 55 to the discharge head drive circuit 65 is referred to as “discharge control signal SI”.

  A travel device drive circuit 62 is connected to the control device 51, and a drive control signal corresponding to the travel device drive circuit 62 is output. A travel motor MS and a travel motor rotation detector MSE are connected to the travel device drive circuit 62, and the travel motor MS is rotated forward or reverse in response to a drive control signal from the control device 51, and the travel motor rotation is detected. Based on the detection signal from the container MSE, the moving direction and the moving amount of the transport device 24 are calculated.

  The control device 51 is connected to a transport device drive circuit 63 so as to output a drive control signal corresponding to the transport device drive circuit 63. A transport motor MT and a transport motor rotation detector MTE are connected to the transport device drive circuit 63, and the transport motor MT is rotated forward or reverse in response to a drive control signal from the control device 51, and the transport motor rotation is detected. Based on the detection signal from the device MTE, the moving direction and the moving amount of the transfer arm 24a are calculated.

  A SCARA robot drive circuit 64 is connected to the control device 51 so as to output a drive control signal (the “target joint coordinate information BpI”) corresponding to the SCARA robot drive circuit 64. A first motor M1, a second motor M2, and a third motor M3 are connected to the SCARA robot drive circuit 64, and in response to “target joint coordinate information BpI” from the control device 51, the first, second, and third motors are connected. The third motors M1, M2, and M3 are rotated forward or reverse to the corresponding joint coordinates. The SCARA robot drive circuit 64 is connected with a first motor rotation detector M1E, a second motor rotation detector M2E, and a third motor rotation detector M3E, and the first, second, and third motor rotation detectors. Based on detection signals from M1E, M2E, and M3E, the moving direction and moving amount of the hand (reference nozzle NC) of the third arm 28c are calculated.

Then, the control device 51 receives the head unit 30 via the SCARA robot drive circuit 64.
Are scanned in a 99-fold pattern along the “target locus R”, and various control signals are output based on the calculation result (current position of the reference nozzle NC) from the SCARA robot drive circuit 64. That is, the control device 51 starts to output a discharge timing signal LP having a predetermined frequency (for example, an interpolation frequency) to the discharge head drive circuit 65 at the timing when the reference nozzle NC starts scanning. ing. In the present embodiment, the ejection timing signal LP is output at the timing when the position of the reference nozzle NC is positioned at each “teach position Pt” and each “interpolation point”.

  A discharge head drive circuit 65 is connected to the control device 51 so as to output the discharge timing signal LP. The control device 51 outputs the piezoelectric element drive voltage COM1 to the ejection head drive circuit 65 in synchronization with a predetermined clock signal. Furthermore, the control device 51 serially transfers the generated ejection control signal SI to the ejection head drive circuit 65 sequentially via the bitmap data transfer unit 55. The ejection head drive circuit 65 sequentially converts the ejection control signal SI from the control device 51 into serial / parallel conversion corresponding to each piezoelectric element PZ.

  When the ejection head drive circuit 65 receives the ejection timing signal LP from the control device 51, the piezoelectric element drive voltage COM1 corresponding to each of the piezoelectric elements PZ selected based on the serial / parallel converted ejection control signal SI. ("Drive voltage Vh") is supplied. That is, every time the control device 51 receives the discharge timing signal LP, the control device 51 discharges the droplet Fb having the “target weight Iw” from the nozzle N defined by the discharge control signal SI. ”And land at the corresponding“ target position P ”.

Further, the control device 51 outputs a discharge control signal SI obtained by serial / parallel conversion to the laser head drive circuit 66 via the discharge head drive circuit 65.
A laser head driving circuit 66 is connected to the control device 51 so as to output a laser driving voltage COM2 synchronized with a predetermined clock signal. When the laser head driving circuit 66 receives the ejection control signal SI from the ejection head driving circuit 65, the laser head driving circuit 66 waits for a predetermined time (irradiation standby time), and applies to each semiconductor laser LD corresponding to the ejection control signal SI. A laser drive voltage COM2 is supplied to each. The irradiation waiting time of the present embodiment is set based on the “speed / acceleration information VaI” and the “flying speed Vm”.

  More specifically, the irradiation standby time of the present embodiment is a time obtained by adding the “flight time” of the corresponding droplet Fb to the scanning time corresponding to the irradiation standby distance Lw of the reference nozzle NC (irradiation position Pb). That is, the irradiation standby time is set to a time from the start of the discharge operation of the droplet Fb (when the discharge control signal SI is received) until the droplet Fb faces the corresponding irradiation position Pb.

  Then, the laser head driving circuit 66 receives the ejection control signal SI from the ejection head driving circuit 65. Then, the control device 51 scans the head unit 30 through the laser head driving circuit 66 for the irradiation standby time, and at the timing when the irradiation position Pb is positioned at the corresponding “target position P”, the “target position P”. The laser beam B is irradiated toward the region of the droplet Fb.

Next, a method for forming the identification code 10 using the droplet discharge device 20 will be described.
First, the drawing data Ia is input to the control device 51 by operating the input / output unit 61. Then, the control device 51 drives and controls the travel device 23 and the transport device 24 via the travel device drive circuit 62 and the transport device drive circuit 63, and the mother substrate 2M of the substrate stocker 22 is placed on the mounting table 25R (mounting table 25L). To be transported and mounted.

  When the mother board 2M is placed, the control device 51 performs predetermined development processing on the drawing data Ia to generate bitmap data BMD, “target coordinates Sp” (“teaching coordinates Tp”), and “target weight Iw”. The bitmap data BMD, “target coordinates Sp” (“teaching coordinates Tp”), and “target weight Iw” are stored in the storage unit 52.

  When the various types of information generated by the expansion process are stored, the control device 51 moves the hand (reference nozzle NC) of the third arm 28c to the start point via the SCARA robot drive circuit 64. During this time, the control device 51 reads the discharge weight setting program PG1 from the storage unit 52, and starts trajectory control of the hand of the third arm 28c (reference nozzle NC).

  That is, as shown in FIG. 9, the control device 51 firstly, via the interpolation calculation unit 53, “start point” and “teaching position Pt” (first position on the most anti-Y arrow direction side of the first line code area S 1). And the “teaching position Pt” (second “teaching position Pt”) on the Y arrow direction side of the first “teaching position Pt”. As a result, the control device 51 creates a plurality of “interpolation points” between the “start point”, the first “teach position Pt”, and the second “teach position Pt”. Between the first “teaching position Pt” and the second “teaching position Pt”, trajectories each consisting of “interpolation points” are created. Then, the control device 51 causes the nozzles N to eject droplets Fb to each “target position P” in the nozzle arrangement direction An including the first “teach position Pt” via the interpolation calculation unit 53. Are associated with each other and stored as “nozzle number information PnI” (step S11).

  When the “nozzle number information PnI” is stored, the control device 51 calculates a combination of each joint coordinate corresponding to each “interpolation point” and the first “teaching position Pt” via the inverse conversion unit 54. “Target joint coordinate information BpI” is generated. When each “target joint coordinate information BpI” is generated, the control device 51 combines each joint coordinate (the posture of the SCARA robot 26 that makes the reference nozzle NC relative to each “interpolation point” and the first “teaching position Pt”). On the other hand, a combination of “target speed” and “target acceleration” corresponding to the nozzle number of each nozzle N is calculated. Then, the control device 51 generates “speed / acceleration information VaI” in which both the “target speed” and “target acceleration” of each nozzle N in the corresponding posture correspond to the posture of each SCARA robot. (Step S12).

  When the “speed / acceleration information VaI” is generated, the control device 51 calculates the “drive voltage Vh” with reference to the “drive voltage information VhI” and the “speed / acceleration information VaI” in the storage unit 52. That is, the control device 51 sets the weight of the droplet Fb to “target weight Iw” for all nozzles N (all nozzle numbers) corresponding to each “interpolation point” and first “teaching position Pt”. The “driving voltage Vh” is calculated (step S13).

When the “drive voltage Vh” is calculated, the control device 51 refers to the flight speed information VmI and the “speed / acceleration information VaI” stored in the storage unit 52, and sets the “interpolation point” and the first “teach position Pt”. For all corresponding nozzles N (all nozzle numbers), the “flying speed Vm” of the droplet Fb consisting of the “target weight Iw” is calculated (step 14).
When the “flying speed Vm” is calculated, the control device 51 calculates all the nozzles N at each “interpolation point” and the first “teaching position Pt” based on the “speed / acceleration information VaI” and the “flying speed Vm”. For (all nozzle numbers), the “landing position Pe” (“landing coordinate Se”) of the droplet Fb consisting of “target weight Iw” is calculated (step S15).

That is, as shown in FIG. 10, the control device 51 sets each “landing position Pe” corresponding to the selected nozzle in the posture of the SCARA robot 26 that makes the reference nozzle NC relative to the first “teaching position Pt”. It is calculated as “first landing position P1” (first landing coordinate T1). Further, the control device 51 sets each “landing position Pe” corresponding to the selected nozzle to “interpolation landing position PS” (interpolation landing coordinate TS) in the posture of the SCARA robot 26 in which the reference nozzle NC is opposed to each “interpolation point”. Calculate as

  Similarly, the control device 51 sets the “landing position Pe” (“landing coordinate Se” corresponding to the nozzle N other than the selected nozzle in the posture of the SCARA robot 26 in which the reference nozzle NC is opposed to the first “teaching position Pt”. )). Further, the control device 51 calculates the “landing position Pe” (“landing coordinate Se”) corresponding to the nozzle N other than the selected nozzle in the posture of the SCARA robot 26 in which the reference nozzle NC is made to face each “interpolation point”. .

  When each “landing coordinate Se” is calculated, the control device 51 determines the distance (landing error Dr) between the “first landing coordinate T1” corresponding to each selected nozzle and the corresponding “target coordinate Sp”, respectively. It is determined whether or not “reference error Dp” or more. (Step S16).

  Then, as shown in FIG. 10, it is determined that each landing error Dr is less than “reference error Dp” (“first landing coordinate T1” is located within the circle of the two-dot chain line in FIG. 10) (step S16). In YES). Then, the control device 51 discharges the droplet Fb from the corresponding selected nozzle at the timing when the reference nozzle NC (selected nozzle) is positioned immediately above the first “teach position Pt” (each target position P). "Discharge timing information TaI" is generated (step S17). That is, “ejection timing information TaI” is generated in which the correction time corresponding to each nozzle number is 0 second.

  When the “ejection timing information TaI” is generated, the control device 51 refers to the “ejection timing information TaI” and the “nozzle number information PnI”, and the nozzles corresponding to the nozzle arrangement direction An of the first “teaching position Pt”. N pieces of bit data are extracted from the bitmap data BMD. Further, the control device 51 generates an ejection control signal SI composed of the extracted bit data, and serially transfers the ejection control signal SI to the ejection head drive circuit 65 sequentially.

  Then, the control device 51 generates the piezoelectric element driving voltage COM1 composed of the “driving voltage Vh” corresponding to each of the selected nozzles, synchronizes each piezoelectric element driving voltage COM1 with a predetermined clock signal, and discharge head The output is made to the drive circuit 65, and the discharge weight setting program PG1 is terminated (step S18).

  On the other hand, if it is determined that the landing error Dr is greater than or equal to the “reference error Dp” (“first landing coordinate T1” is located outside the circle of the two-dot chain line in FIGS. 11 and 12) (NO in step S16). Then, the control device 51 executes the landing position correction program PG2 (step S20). In the present embodiment, the “target position P” (“target coordinate Sp”) at which the landing error Dr is equal to or greater than the “reference error Dp” is set as the “correction target position PH” (“correction target coordinate SH”). The nozzle N associated with the correction target position PH is referred to as a correction nozzle.

  When the landing position correction program PG2 is executed, as shown in FIG. 13, the control device 51 first determines whether or not correction is possible by changing the discharge timing of the correction nozzle (step S21). That is, it is determined whether the “first landing coordinate T1” and the “interpolated landing coordinate TS” in the vicinity of the “correction target coordinate SH” are located in the target locus direction RA of the “correction target coordinate SH”.

Then, as shown in FIG. 11, it is determined that “first landing position T1” and “interpolated landing coordinate TS” are located along target trajectory direction RA (YES in step 21). Then, the control device 51 determines the distance (correction) between the “interpolation landing coordinate TS” located on the opposite side of the target trajectory direction RA with respect to the “correction target coordinate SH” and the “correction target coordinate SH”. Distance LH) is calculated. When calculating the correction distance LH, the control device 51 calculates the scanning time (correction time) of the ejection head 32 relative to the correction distance LH based on the correction distance LH and the “speed / acceleration information VaI”. When the correction time is calculated, the control device 51 sets the correction time for the combination of the correction nozzle and the “correction target coordinate SH”. In other words, the control device 51 generates “discharge timing information TaI” for discharging the correction nozzle with a delay of the correction time from the timing positioned immediately above the “interpolated landing coordinate TS”, and the storage unit. 52 (step S22).

  When the “ejection timing information TaI” is stored, the control device 51 refers to the “ejection timing information TaI” and the “nozzle number information PnI” and corresponds to the nozzle arrangement direction An of the first “teach position Pt”. N pieces of bit data are extracted from the bitmap data BMD. Further, the control device 51 performs a delay process on the extracted bit data according to “ejection timing information TaI” to generate an ejection control signal SI, and serially transfers the ejection control signal SI to the ejection head drive circuit 65 sequentially. .

Then, the control device 51 generates a piezoelectric element driving voltage COM1 composed of “driving voltage Vh” corresponding to each of the selected nozzles, and drives the ejection head in synchronization with each piezoelectric element driving voltage COM1 with a predetermined clock signal. It outputs to the circuit 65, and the landing position correction program PG2 is complete | finished (step S23).
On the other hand, when determining that the “first landing position T1” and the “interpolated landing coordinate TS” are not on the opposite side of the target locus direction RA of the “correction target coordinate SH” (NO in step S21), the control device 51 It is determined whether or not correction is possible with the adjacent nozzle N. That is, the distance between the “correction target coordinates SH” from the “first landing coordinates T1”, “interpolated landing coordinates TS”, and “landing coordinates Se” corresponding to the adjacent nozzles N is “reference error Dp”. It is determined whether or not there are “first landing coordinates T1”, “interpolated landing coordinates TS”, and “landing coordinates Se” that are less than “(step S24).

  As shown in FIG. 12, there is a “first landing coordinate T1” or “landing coordinate Se” of an adjacent nozzle N whose distance from the “correction target coordinate SH” is less than the “reference error Dp”. It is determined that “the first landing coordinate T1” or “the landing coordinate Se” of the adjacent nozzle N is located within the circle of the two-dot chain line in FIG. 12 (YES in step 24). Then, the control device 51 generates “nozzle number information PnI” in which the “correction target coordinates SH” are associated with the nozzle numbers of the adjacent nozzles N and stores them in the storage unit 52 (step S25).

  When the “nozzle number information PnI” is stored, the control device 51 refers to the “ejection timing information TaI” and the “nozzle number information PnI”, and corresponds to the nozzle arrangement direction An of the first “teach position Pt”. N pieces of bit data are extracted from the bitmap data BMD. Further, the control device 51 generates a discharge control signal SI in which the extracted bit data is subjected to the rearrangement process according to the “nozzle number information PnI”, and sequentially transfers the discharge control signal SI to the discharge head drive circuit 65. To do.

Then, the control device 51 generates a piezoelectric element driving voltage COM1 composed of “driving voltage Vh” corresponding to each of the selected nozzles, and drives the ejection head in synchronization with each piezoelectric element driving voltage COM1 with a predetermined clock signal. It outputs to the circuit 65, and the landing position correction program PG2 is complete | finished (step S23).
On the other hand, if it is determined that correction cannot be performed by the adjacent nozzle N (NO in step S23), the control device 51 inputs / outputs a message to change the interpolation processing by the interpolation calculation unit 53, that is, the setting of the trajectory creation. The landing position correction program PG2 is terminated by displaying on the unit 61 (step S25).

  When the discharge weight setting program PG1 (landing position correction program PG2) is terminated, the control device 51 controls the driving of the SCARA robot 26 via the SCARA robot driving circuit 64, and the head unit 30 based on the “target joint coordinate information BpI”. Start scanning.

  Then, based on the current position of the reference nozzle NC (the tip of the third arm 28c) calculated by the SCARA robot drive circuit 64, the control device 51 places the reference nozzle NC directly above the “interpolation point” and the “teaching position Pt”. An ejection timing signal LP is output to the ejection head drive circuit 65 at the position timing. The ejection head drive circuit 65 converts the ejection control signal SI from the control device 51 into serial / parallel conversion corresponding to the piezoelectric element PZ. The ejection head drive circuit 65 receives the ejection timing signal LP, and the piezoelectric element drive voltage COM1 corresponding to each piezoelectric element PZ (selected nozzle) selected based on the serial / parallel converted ejection control signal SI. ("Drive voltage Vh") is supplied. Further, the ejection head drive circuit 65 outputs a serial / parallel converted ejection control signal SI to the laser head drive circuit 66.

  At this time, each piezoelectric element PZ is given a “driving voltage Vh” corresponding to the “target speed” and “target acceleration” of the corresponding nozzle N and causing the weight of the droplet Fb to be “target weight Iw”. The Moreover, each piezoelectric element PZ has a landing position correction that shortens the distance from the corresponding “target position P” based on the “flying speed Vm” (“landing position Pe”) of the droplet Fb to be ejected. The applied piezoelectric element drive voltage COM1 is supplied.

  Accordingly, the discharged droplet Fb has the weight set to the “target weight Iw”, flies at the “flying speed Vm”, and is landed without being displaced from the corresponding “target position P” region. To do.

  Then, when the irradiation standby time has elapsed from the start of the discharge operation, the control device 51 makes each irradiation position Pb relative to the “target position P” and applies each of the semiconductor lasers LD selected based on the discharge control signal SI to each of the semiconductor lasers LD. A laser drive voltage COM2 is supplied, and laser light B is emitted all at once from the selected semiconductor lasers LD.

  The laser beam B emitted from the semiconductor laser LD is totally reflected by the reflection mirror M and irradiated onto the region of the droplet Fb at the irradiation position Pb (“target position P”). The droplet Fb irradiated with the laser beam B is fixed to the surface 2Ma as dots D by evaporation of the solvent or dispersion medium and baking of the metal fine particles. Thereby, dots D corresponding to the respective target positions P corresponding to the nozzle arrangement direction An of the first “teach position Pt” are formed.

  Thereafter, similarly, the control device 51 sequentially scans the head unit 30 along the “target locus R”, and the reference nozzle NC (the tip of the third arm 28 c) calculated by the SCARA robot drive circuit 64 becomes “interpolation point”. ”And“ Teaching position Pt ”, the ejection timing signal LP is output at the timing immediately above. Then, a corresponding piezoelectric element drive voltage COM1 (“drive voltage Vh”) is supplied to each piezoelectric element PZ (selected nozzle) selected based on the ejection control signal SI.

  As a result, the droplet Fb composed of the “target weight Iw” can be landed on the “target position P”, and the region of the droplet Fb can be irradiated with the laser beam B. In addition, uniform shaped dots D can be formed in each code region S of the mother substrate 2M.

Next, effects of the present embodiment configured as described above will be described below.
(1) According to the above embodiment, the “drive voltage Vh” is stored in the storage unit 52 as “drive voltage information VhI” in association with the “target speed”, “target acceleration”, and “target weight Iw”. .
Then, based on the “drive voltage information VhI”, the “target voltage” and “target acceleration” of the nozzle N, and the “drive voltage Vh” corresponding to the “target weight Iw” designated by the drawing data Ia are calculated. The piezoelectric element driving voltage COM1 composed of the “driving voltage Vh” is generated and supplied to the corresponding piezoelectric element PZ.

Therefore, even when the head unit 30 is moved at high speed or accelerated or decelerated, the weight of the droplet Fb can be set to the “target weight Iw”. As a result, the discharge operation of the droplets Fb can be stabilized, and the productivity of the dots D can be improved.
(2) Moreover, the “drive voltage Vh” is calculated based on both “target speed” and “target acceleration”. As a result, the motion state of the ejection head 32 can be reflected in detail, and the weight of the droplet Fb can be more accurately compared with the case where the calculation is performed based on one of “target speed” and “target acceleration”. Can be controlled.
(3) According to the above embodiment, the “flying speed Vm” is stored in the storage unit 52 as the flying speed information VmI in association with the “target speed”, “target acceleration”, and “drive voltage Vh”. Then, based on the flight speed information VmI, the “target speed” and “target acceleration” of the nozzle N and further the “flying speed Vm” corresponding to the “driving voltage Vh” are calculated, and the “flying speed Vm” is calculated. Is used to calculate the landing position Pe (“landing coordinates Se”) of the droplet Fb. Further, various corrections are performed so as to shorten the distance between the calculated “landing coordinates Se” and “target coordinates Sp”.

Therefore, even when the head unit 30 is moved at high speed or accelerated or decelerated, the positional accuracy of the landing position Pe of the droplet Fb can be maintained or improved. As a result, the discharge operation of the droplets Fb can be stabilized, and the productivity of the dots D can be improved.
(4) In addition, the “landing coordinate Se” is calculated based on both the “target speed” and the “target acceleration”. As a result, the movement state of the ejection head 32 can be reflected in detail, and the landing position can be controlled more accurately than in the case where it is defined based on either “target speed” or “target acceleration”. Can do.
(5) According to the above embodiment, based on the positional relationship between the “landing coordinates Se” and the “target coordinates Sp”, the timing for ejecting the droplet Fb or the nozzle N for ejecting the droplet Fb is changed. Thus, the distance between the “landing coordinates Se” and the “target coordinates Sp” is shortened. Accordingly, the position correction method for the landing position can be expanded, and the discharge operation of the droplet Fb can be further stabilized.
(6) According to the above-described embodiment, between the “landing coordinate Se” and the “target coordinate Sp” in both the correction of the timing for discharging the droplet Fb and the correction of the nozzle number for discharging the droplet Fb. When the distance cannot be corrected to be less than the reference error D0, a message for prompting the change of the interpolation process setting is displayed. Therefore, the creation of the target locus R corresponding to the target position P can be proceeded smoothly, and the productivity of the dots D can be further improved.

In addition, you may change the said embodiment as follows.
In the above embodiment, the “target speed” and the “target acceleration” are calculated based on the “interpolation point” generated by the interpolation process. For example, the maximum “target speed” and “target acceleration” are set in advance in the interpolation process so that the scanning time of the ejection head 32 is the shortest, and the “target speed” and “target acceleration” are set. May be executed as long as the discharge control is performed based on the “target speed” or “target acceleration”.
In the above embodiment, the discharge control is performed based on both the “target speed” and the “target acceleration”. For example, the discharge control may be performed based only on the “target speed”, or the discharge control may be performed based only on the “target acceleration”. According to this, the calculation speed can be increased, and the process delay due to the calculation of the locus (interpolation point) or the like can be avoided.
In the above embodiment, the “target speed” and “target acceleration” are calculated based on the “teach position Pt” and the “interpolation point”. For example, the head unit 30 may be provided with a speed / acceleration sensor, and the ejection control may be performed based on the speed and acceleration detected by the speed / acceleration sensor, and the speed / acceleration calculation or measurement method is limited. Is not to be done.
In the above embodiment, “drive voltage information VhI” is embodied as an interpolation formula, but this is not limiting, and “drive voltage Vh” corresponds to “target speed”, “target acceleration”, and “target weight Iw”. The information may be information that can be derived based on “target speed”, “target acceleration”, and “target weight Iw”.
In the above embodiment, the “flying speed information VmI” is embodied as an interpolation formula. The “flying speed information VmI” is not limited to this, and is a lookup table in which “flying speed Vm” is associated with “target speed”, “target acceleration”, “target weight Iw”, and “drive voltage Vh”. Any information may be used as long as it can derive the “flying speed Vm” based on the “target speed”, “target acceleration”, “target weight Iw”, and “drive voltage Vh”.
In the above embodiment, the nozzle arrangement direction An is configured to be orthogonal to the target locus direction RA. Not limited to this, the nozzle arrangement direction An may be inclined in the target locus direction RA. According to this, the formation pitch of the nozzles N as viewed from the target locus direction RA can be reduced by the amount of inclination of the nozzle arrangement direction An, and the droplet discharge device 20 can be adapted to draw a finer pattern. be able to.
In the above embodiment, the weight of the droplet Fb is controlled based on the “drive voltage Vh” of the piezoelectric element drive voltage COM1. Not limited to this, the weight of the droplet Fb may be controlled by the driving waveform of the piezoelectric element driving voltage COM1. For example, the weight of the droplet Fb may be controlled by varying the pressurization speed for pressurizing the liquid F, such as the time of the pull-in holding period W12 and the time of the extrusion period W13. Further, the piezoelectric element driving voltage COM1 may be continuously supplied in a short time, and the number (total weight) of the continuous droplets Fb that can land at the same position may be controlled by the number of extrusion periods W13. .
In the above embodiment, the distance between the “landing coordinate Se” and the “target coordinate Sp” is set to “reference” in both the correction of the timing for discharging the droplet Fb and the correction of the nozzle number for discharging the droplet Fb. When the error cannot be corrected to be less than "D0", a message to prompt the setting change of the interpolation process is displayed. For example, based on the positional relationship between the “landing coordinates Se” and the “target coordinates Sp”, the control device 51 changes the interpolation parameter for making the “landing coordinates Se” correspond to the “target coordinates Sp”. Alternatively, a configuration in which interpolation processing (calculation of “interpolation point”) is performed separately may be employed.
In the above embodiment, the laser head 37 is mounted on the head unit 30. However, the configuration is not limited to this, and a configuration in which the laser head 37 is not mounted may be used. According to this, the moving speed of the droplet discharge head 32 can be controlled at a higher speed, and the productivity of the identification code 10 can be improved.
In the above-described embodiment, the moving unit is embodied as an articulated robot. However, the moving unit is not limited thereto, and may be any unit that can move the head unit 30 on the object.
In the above embodiment, the droplet Fb is dried and fired by the laser beam B irradiated to the region of the droplet Fb. For example, the configuration may be such that the droplet Fb flows in a desired direction by the energy of the irradiated laser beam B, or the droplet Fb is pinned by irradiating only the outer edge of the droplet Fb. May be. In other words, any configuration may be used as long as the pattern formed of the droplets Fb is formed by the laser beam B applied to the region of the droplets Fb.
In the above embodiment, the hemispherical dots D are formed by the droplets Fb. However, the present invention is not limited to this. For example, an oval dot or a linear pattern may be formed.
In the above embodiment, the dot D of the identification code 10 is formed by the discharged droplet Fb. For example, the liquid crystal display device 1 and various types of devices provided in a field effect type device (FED, SED, etc.) provided with a flat electron-emitting device and using light emission of a fluorescent material by electrons emitted from the device. A thin film, a metal wiring, a color filter, or the like may be formed, and any structure may be used as long as the pattern is formed by the landed droplets Fb.
In the above embodiment, the object is embodied in the mother substrate 2M. However, the present invention is not limited thereto, and may be a silicon substrate, a flexible substrate, a metal substrate, or the like, and the pattern is formed by the landed droplets Fb. Any object can be used.

The top view which shows the liquid crystal display device in this embodiment. Similarly, the schematic perspective view which shows a droplet discharge device. Similarly, the schematic plan view which shows a droplet discharge device. Similarly, the schematic side view which shows a head unit. Similarly, a perspective view showing a droplet discharge head. Similarly, an explanatory view explaining a droplet discharge head. Similarly, the timing chart explaining a piezoelectric element drive voltage. Similarly, the electric block circuit diagram which shows the electric constitution of a droplet discharge apparatus. Similarly, the flowchart explaining a discharge weight setting program. Similarly, the explanatory view explaining the discharge weight setting program. Similarly, explanatory drawing explaining a landing position correction program. Similarly, explanatory drawing explaining a landing position correction program. Similarly, the flowchart explaining an impact position correction program.

Explanation of symbols

2M ... Mother board as object, 20 ... Droplet ejection device, 26 ... Articulated robot as moving means, 32 ... Droplet ejection head, 52 ... Storage section as storage means, F ... Liquid, Fb ... Liquid Drop, P ... target position.

Claims (4)

A droplet discharge head in which a liquid material containing a pattern forming material is stored is moved on the object, and a droplet of the liquid material having a predetermined weight is discharged from the discharge port of the droplet discharge head. In a pattern forming method in which a pattern is formed by the droplets discharged toward the object and landed on the object,
In the droplet discharge head, a plurality of the discharge ports are arranged in one direction,
Moving the droplet discharge head in a two-dimensional direction along a plane including the one direction;
Of the plurality of discharge ports, the landing position of each droplet discharged from one selected discharge port that moves on the target position of the object and a discharge port other than the selected discharge port is defined as the droplet discharge Estimated based on at least one of head speed and acceleration,
The distance between the landing position corresponding to the selected discharge port and the target position is a predetermined value or more, and the distance between the landing position corresponding to another discharge port adjacent to the selected discharge port and the target position is When it is less than the predetermined value, a droplet is ejected from the other ejection port adjacent to the selected ejection port. In the pattern formation method of Claim 1,
The distance between the landing position corresponding to the selected discharge port and the target position is a predetermined value or more, and the distance between the landing position corresponding to the other discharge port adjacent to the selected discharge port and the target position When the value is equal to or greater than the predetermined value, a message for changing the movement path of the droplet discharge head on the object is displayed. A droplet discharge head in which a plurality of discharge ports for discharging droplets having a predetermined weight are arranged in one direction;
Moving means for moving the droplet discharge head in a two-dimensional direction above the object along a plane including the one direction;
A droplet ejection apparatus comprising: a droplet control unit that drives the droplet ejection head and the moving unit to cause the droplet ejection head to eject the droplet toward the object;
The discharge control means includes
Of the plurality of discharge ports, the landing position of each droplet discharged from one selected discharge port that moves on the target position of the object and a discharge port other than the selected discharge port is defined as the droplet discharge Estimated based on at least one of head speed and acceleration,
The distance between the landing position corresponding to the selected discharge port and the target position is a predetermined value or more, and the distance between the landing position corresponding to another discharge port adjacent to the selected discharge port and the target position is When it is less than the predetermined value, a droplet is ejected from the other ejection port adjacent to the selected ejection port. In the droplet discharge device according to claim 3,
The discharge control means includes
The distance between the landing position corresponding to the selected discharge port and the target position is a predetermined value or more, and the distance between the landing position corresponding to the other discharge port adjacent to the selected discharge port and the target position When the value is equal to or greater than the predetermined value, a message for changing the movement path of the droplet discharge head on the object is displayed.

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