JP2005136370A5 - - Google Patents

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Publication number
JP2005136370A5
JP2005136370A5 JP2004044030A JP2004044030A JP2005136370A5 JP 2005136370 A5 JP2005136370 A5 JP 2005136370A5 JP 2004044030 A JP2004044030 A JP 2004044030A JP 2004044030 A JP2004044030 A JP 2004044030A JP 2005136370 A5 JP2005136370 A5 JP 2005136370A5
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JP
Japan
Prior art keywords
temperature
heating means
substrate
detecting
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004044030A
Other languages
English (en)
Japanese (ja)
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JP2005136370A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004044030A priority Critical patent/JP2005136370A/ja
Priority claimed from JP2004044030A external-priority patent/JP2005136370A/ja
Publication of JP2005136370A publication Critical patent/JP2005136370A/ja
Publication of JP2005136370A5 publication Critical patent/JP2005136370A5/ja
Pending legal-status Critical Current

Links

JP2004044030A 2003-10-07 2004-02-20 基板処理装置 Pending JP2005136370A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004044030A JP2005136370A (ja) 2003-10-07 2004-02-20 基板処理装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003348222 2003-10-07
JP2004044030A JP2005136370A (ja) 2003-10-07 2004-02-20 基板処理装置

Publications (2)

Publication Number Publication Date
JP2005136370A JP2005136370A (ja) 2005-05-26
JP2005136370A5 true JP2005136370A5 (cg-RX-API-DMAC7.html) 2007-10-25

Family

ID=34655959

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004044030A Pending JP2005136370A (ja) 2003-10-07 2004-02-20 基板処理装置

Country Status (1)

Country Link
JP (1) JP2005136370A (cg-RX-API-DMAC7.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6424593B2 (ja) * 2014-12-01 2018-11-21 住友電気工業株式会社 炭化珪素単結晶の製造方法
WO2018100850A1 (ja) 2016-12-01 2018-06-07 株式会社日立国際電気 基板処理装置、天井ヒータおよび半導体装置の製造方法
CN110335901B (zh) * 2019-08-12 2024-04-16 无锡松煜科技有限公司 光伏电池表面钝化系统及钝化方法
CN113237234A (zh) * 2021-05-24 2021-08-10 四川九门科技股份有限公司 一种小型水浴式燃气管道间接加热装置及恒温加热方法

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