JP2005116188A - プラズマ電位測定方法及び装置 - Google Patents
プラズマ電位測定方法及び装置 Download PDFInfo
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- JP2005116188A JP2005116188A JP2003344720A JP2003344720A JP2005116188A JP 2005116188 A JP2005116188 A JP 2005116188A JP 2003344720 A JP2003344720 A JP 2003344720A JP 2003344720 A JP2003344720 A JP 2003344720A JP 2005116188 A JP2005116188 A JP 2005116188A
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Abstract
【解決手段】 プラズマ雰囲気P中に高周波電場Eに囲まれた測定空間Aを形成し、その測定空間Aに置かれた電極2の浮遊電位Vf を高周波電圧Vrfの大きさにより調節し、この電極2の内部電極2aへのイオン電流Iiが減少し始まる電極2の浮遊電位Vf をプラズマ電位φとする。
【選択図】 図1
Description
[外1]
[外3]
一定のプラズマ電位φを持つプラズマの領域である。ここで、アンテナ1に印加する高周波電圧Vrfを大きくすると、動重力により電子が跳ね返され実線で示すφ(r)分布において、イオンシース区間の電位が上昇し始める(C1)。高周波電圧Vrfをさらに大きくすると、電極2の電位はφを越えて大きくなりイオン粒子も跳ね返すようになる(C2)。
2 電極
2a 内部電極
3 電源
4 電位判定部
4a イオン電流判定部
8 プローブ
11 高周波源
Claims (2)
- プラズマ雰囲気中に高周波電場に囲まれた測定空間を形成し、その測定空間に置かれた電極における浮遊電位を高周波電場の大きさにより調節し、この電極の内部に置かれた内部電極へのイオン電流が減少し始まる浮遊電位をプラズマ電位とすることを特徴とするプラズマ電位測定方法。
- プラズマ雰囲気中に高周波電場に囲まれた測定空間を形成するアンテナと、その測定空間に置かれた電極と、この電極に流れ込むイオンの一部を捕集する内部電極と、イオン電流の減少を判定するイオン電流判定部と、前記電極の浮遊電位を判定する電位判定部とを備えたことを特徴とするプラズマ電位測定装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003344720A JP4287724B2 (ja) | 2003-10-02 | 2003-10-02 | プラズマ電位測定方法及び装置 |
US10/953,113 US7288942B2 (en) | 2003-10-02 | 2004-09-30 | Plasma potential measuring method and apparatus, and plasma potential measuring probe |
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JP2003344720A JP4287724B2 (ja) | 2003-10-02 | 2003-10-02 | プラズマ電位測定方法及び装置 |
Publications (2)
Publication Number | Publication Date |
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JP2005116188A true JP2005116188A (ja) | 2005-04-28 |
JP4287724B2 JP4287724B2 (ja) | 2009-07-01 |
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JP2003344720A Expired - Fee Related JP4287724B2 (ja) | 2003-10-02 | 2003-10-02 | プラズマ電位測定方法及び装置 |
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JP (1) | JP4287724B2 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007071590A (ja) * | 2005-09-05 | 2007-03-22 | Canon Inc | 導波路、それを用いた装置及び検出方法 |
JP2007073420A (ja) * | 2005-09-08 | 2007-03-22 | Fuji Electric Holdings Co Ltd | プラズマ計測装置 |
CN106851953A (zh) * | 2017-02-22 | 2017-06-13 | 大连理工大学 | 一种凸凹探针及其等离子体诊断方法 |
-
2003
- 2003-10-02 JP JP2003344720A patent/JP4287724B2/ja not_active Expired - Fee Related
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007071590A (ja) * | 2005-09-05 | 2007-03-22 | Canon Inc | 導波路、それを用いた装置及び検出方法 |
JP2007073420A (ja) * | 2005-09-08 | 2007-03-22 | Fuji Electric Holdings Co Ltd | プラズマ計測装置 |
CN106851953A (zh) * | 2017-02-22 | 2017-06-13 | 大连理工大学 | 一种凸凹探针及其等离子体诊断方法 |
CN106851953B (zh) * | 2017-02-22 | 2018-12-21 | 大连理工大学 | 一种凸凹探针及其等离子体诊断方法 |
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Publication number | Publication date |
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JP4287724B2 (ja) | 2009-07-01 |
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