JP2005109071A5 - - Google Patents

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Publication number
JP2005109071A5
JP2005109071A5 JP2003339156A JP2003339156A JP2005109071A5 JP 2005109071 A5 JP2005109071 A5 JP 2005109071A5 JP 2003339156 A JP2003339156 A JP 2003339156A JP 2003339156 A JP2003339156 A JP 2003339156A JP 2005109071 A5 JP2005109071 A5 JP 2005109071A5
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JP
Japan
Prior art keywords
mems switch
electrode
contact
fixed
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003339156A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005109071A (ja
JP4561072B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2003339156A priority Critical patent/JP4561072B2/ja
Priority claimed from JP2003339156A external-priority patent/JP4561072B2/ja
Priority to US10/788,369 priority patent/US7045843B2/en
Publication of JP2005109071A publication Critical patent/JP2005109071A/ja
Publication of JP2005109071A5 publication Critical patent/JP2005109071A5/ja
Application granted granted Critical
Publication of JP4561072B2 publication Critical patent/JP4561072B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2003339156A 2003-09-30 2003-09-30 Ｍｅｍｓスイッチを有する半導体装置 Expired - Fee Related JP4561072B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2003339156A JP4561072B2 (ja) 2003-09-30 2003-09-30 Ｍｅｍｓスイッチを有する半導体装置
US10/788,369 US7045843B2 (en) 2003-09-30 2004-03-01 Semiconductor device using MEMS switch

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003339156A JP4561072B2 (ja) 2003-09-30 2003-09-30 Ｍｅｍｓスイッチを有する半導体装置

Publications (3)

Publication Number Publication Date
JP2005109071A JP2005109071A (ja) 2005-04-21
JP2005109071A5 true JP2005109071A5 (enExample) 2006-02-09
JP4561072B2 JP4561072B2 (ja) 2010-10-13

Family

ID=34373343

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003339156A Expired - Fee Related JP4561072B2 (ja) 2003-09-30 2003-09-30 Ｍｅｍｓスイッチを有する半導体装置

Country Status (2)

Country Link
US (1) US7045843B2 (enExample)
JP (1) JP4561072B2 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100803690B1 (ko) * 2006-08-10 2008-02-20 삼성전자주식회사 전기적- 기계적 비휘발성 메모리 장치 및 그 제조 방법.
US7511994B2 (en) * 2006-08-31 2009-03-31 Micron Technology, Inc. MEM suspended gate non-volatile memory
KR100781972B1 (ko) * 2006-09-18 2007-12-06 삼성전자주식회사 메모리 소자 및 그의 제조방법
DE102006061386B3 (de) * 2006-12-23 2008-06-19 Atmel Germany Gmbh Integrierte Anordnung, ihre Verwendung und Verfahren zu ihrer Herstellung
KR100842730B1 (ko) 2007-01-16 2008-07-01 삼성전자주식회사 멀티 비트 전기 기계적 메모리 소자 및 그의 제조방법
KR100882148B1 (ko) * 2007-06-22 2009-02-06 한국과학기술원 정전 구동기, 그 구동방법 및 이를 이용한 응용소자
KR100867667B1 (ko) * 2008-04-18 2008-11-10 주식회사 엔아이씨테크 마이크로 구조물 및 그 제조방법
US8451077B2 (en) 2008-04-22 2013-05-28 International Business Machines Corporation MEMS switches with reduced switching voltage and methods of manufacture
US8916944B2 (en) * 2010-03-26 2014-12-23 Elmos Semiconductor Ag Stress-sensitive micro-electromechanical device and use thereof
US8685778B2 (en) 2010-06-25 2014-04-01 International Business Machines Corporation Planar cavity MEMS and related structures, methods of manufacture and design structures
US8436638B2 (en) 2010-12-10 2013-05-07 International Business Machines Corporation Switch to perform non-destructive and secure disablement of IC functionality utilizing MEMS and method thereof
US20130299328A1 (en) * 2012-05-14 2013-11-14 Raytheon Company Micro electro mechanical system (mems) microwave switch structures

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE59509883D1 (de) 1995-08-09 2002-01-10 Infineon Technologies Ag Speichervorrichtung und Herstellungsverfahren
JPH09199376A (ja) * 1996-01-18 1997-07-31 Murata Mfg Co Ltd 可変容量コンデンサ
JP3725688B2 (ja) * 1998-01-20 2005-12-14 日本電信電話株式会社 論理演算装置
US6124650A (en) 1999-10-15 2000-09-26 Lucent Technologies Inc. Non-volatile MEMS micro-relays using magnetic actuators
US6625047B2 (en) * 2000-12-31 2003-09-23 Texas Instruments Incorporated Micromechanical memory element

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