JP2005106743A - Inspection apparatus, test method, and manufacturing method for electrooptic device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inspection apparatus, a test method, and a manufacturing method for an electrooptic device reducing the crash of a switching device installed in an electrooptic device arising from static electricity. <P>SOLUTION: A second electrode terminal section which is electrically connected to a second circuit having a high withstanding voltage of a liquid crystal display 10 is brought into contact with a second feeding terminal 46b of a feeding terminal 46 in advance. The second feeding terminal 46b made of a conductive rubber is then pressed to make an electrical continuity with the second electrode terminal section 15b. Electric charges accumulated in the liquid crystal display 10 are thereby discharged to a power supply from the second feeding terminal 46b through a second signal line Vcom. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an inspection apparatus, an inspection method, and a manufacturing method for an electro-optical device, and relates to reduction of display quality deterioration due to static electricity.

  2. Description of the Related Art In recent years, liquid crystal display devices (liquid crystal display panels) as electro-optical devices characterized by light weight, thinness, and low power consumption have been widely used as display devices for portable terminals or mobile computers. In the future, liquid crystal display panels are desired to have higher quality and lower cost, and it is also important to reduce the yield in the manufacturing process and to ensure the quality of the finished product.

  Conventionally, in a finished product inspection of a liquid crystal display panel, quality is inspected by actually inputting a drive signal to the liquid crystal display panel and lighting the liquid crystal display panel.

  However, in the inspection process, there is a problem of poor quality due to static electricity. In general, the cause of static electricity is known to be contact between objects or peeling (friction). In this case, for example, it is conceivable that the liquid crystal display panel is charged by what is charged in the manufacturing process up to the inspection or what is charged on the trailer or caster during the transportation of the panel.

  Conventionally, for example, an inspection apparatus as shown in FIG. 10 has been proposed (for example, Patent Document 1).

  In this inspection, an image display inspection of the liquid crystal display panel 102 including the inspection input electrodes 101 connected to a plurality of pixels is performed. This inspection apparatus includes a contact electrode probe 103 for applying a liquid crystal driving signal to the inspection input electrode 101 and intermediate electrodes 104 and 105 for conducting connection to the contact electrode probe 103. The intermediate electrodes 104 and 105 are respectively guided by the guide 106 and moved up and down. Then, a changeover switch 107 that switches connection between the ground connection and the liquid crystal drive signal, and a liquid crystal drive signal source 108 that supplies the liquid crystal drive signal are provided.

  In this inspection apparatus, the changeover switch 107 is first connected to the earth ground side, and the guide 106 is pushed from above to bring the intermediate electrode 104 and the contact electrode probe 103 into conductive contact. Then, the electric charge charged in the liquid crystal display panel 102 is discharged to the earth ground via the changeover switch 107. Thereafter, the change-over switch 107 is switched to the liquid crystal drive signal source side and connected, and the guide 104 is pushed from above, so that the intermediate electrode 104 and the contact electrode probe 103 are conductively connected. Then, a liquid crystal driving signal is applied to the inspection input electrode 101, and an image is displayed on the liquid crystal display panel 102 based on the applied signal. Then, the displayed image is judged and inspected. According to this inspection apparatus, a voltage obtained by adding an increase in voltage when discharging charges charged in the liquid crystal display panel 102 to the liquid crystal drive signal is applied to the switching element formed in the liquid crystal display panel 102. The problem of adversely affecting electrical characteristics can be solved.

JP 2000-155299 A

  However, with the recent trend toward higher image quality and higher resolution, the elements and wirings have become finer, and there has been a problem that the switching elements and wirings are destroyed only by discharging the charges charged by static electricity. Further, static electricity has been a serious problem because the production yield in the inspection process is poor due to the destruction of the switching element.

  In the conventional inspection shown in FIG. 10, the pitch that can be employed is limited due to the structure of the probe portion, and cannot be employed for inspection of an electro-optical device having an electrode terminal with a fine pitch, and does not solve the above problem. .

  The present invention provides an inspection apparatus, an inspection method, and a manufacturing method for an electro-optical device that can reduce the influence of electrical characteristics on the electro-optical device due to discharge of a charge charged by static electricity during the inspection of the electro-optical device. With the goal.

  An inspection apparatus for an electro-optical device according to the present invention includes a pair of opposing substrates, wherein one of the substrates is a first terminal and a first electrode electrically connected to the first terminal; The switching element electrically connected to the first electrode, the pixel electrode provided corresponding to the switching element, the second terminal, and the other substrate are connected to each other through the conduction portion. An inspection apparatus for an electro-optical device having a second electrode electrically connected to a second terminal, wherein the first inspection portion is brought into contact with the first terminal, and the second terminal The inspection member including the second inspection unit to be brought into contact with one of the inspection member and the other substrate, and the other of the inspection member and the other substrate is inclined toward the second inspection unit. The first inspection after the second inspection portion and the second terminal are in contact with each other. Wherein the first terminal is in contact, it is summarized in that and a control means for controlling the relative spacing of the other substrate and the test member with.

  According to this, since the pair of substrates and the inspection member are relatively inclined by the control means, the second inspection portion and the second terminal come into contact with each other first, and then the first inspection portion and the first Contacts. Therefore, the electric charge charged in the electro-optical device is discharged through the second electrode. Therefore, it is possible to reduce the destruction of the switching element by discharging the charged charge.

  An inspection apparatus for an electro-optical device according to the present invention includes a pair of opposing substrates, and one of the substrates is electrically connected to a pixel electrode, a switching element provided corresponding to the pixel electrode, and the switching element. The connected first electrode, the other substrate, the first terminal electrically connected to the first electrode through a conduction portion, the second electrode, and the second electrode An inspection apparatus for an electro-optical device having a second terminal electrically connected to an electrode, wherein the first inspection unit is in contact with the first terminal, and the second terminal is in contact with the second terminal. An inspection member including two inspection portions, and the other of the inspection member and the other substrate is inclined toward the second inspection portion side with respect to one of the inspection member and the other substrate. After the second inspection unit and the second terminal contact, the first inspection unit and the front As the first terminal is in contact, it is summarized in that and a control means for controlling the relative spacing of the other substrate and the test member.

  According to this, since the pair of substrates and the inspection member are relatively inclined by the control means, the second inspection portion and the second terminal come into contact with each other first, and then the first inspection portion and the first Contacts. Therefore, the electric charge charged in the electro-optical device is discharged through the second electrode. Therefore, it is possible to reduce the destruction of the switching element by discharging the charged charge.

  The electro-optical device inspection apparatus is characterized in that the control means causes the other substrate to tilt and contact the inspection member.

  According to this, by tilting the other substrate with respect to the inspection member, the second inspection unit and the second terminal come into contact first, and then the first inspection unit and the first terminal come into contact with each other. . Accordingly, the charge charged in the electro-optical device is discharged through the second electrode first. Therefore, it is possible to reduce the influence of the electrical characteristics of the electro-optical device due to the discharge of the charged electric charge.

  The electro-optical device inspection apparatus is characterized in that the control means tilts the inspection member into contact with the other substrate.

  According to this, by inclining an inspection member with respect to a pair of board | substrate, a 2nd test | inspection part and a 2nd terminal contact previously, and a 1st test | inspection part and a 1st terminal contact after that. . Accordingly, the charge charged in the electro-optical device is discharged through the second electrode first. Therefore, it is possible to reduce the influence of the electrical characteristics of the electro-optical device due to the discharge of the charged electric charge.

  In the inspection apparatus for the electro-optical device, the control unit includes a support portion that supports the pair of substrates and an elastic member that biases the support portion, and the support portion includes the pair of substrates that are inspected by the inspection device. A first posture inclined with respect to the member and a second posture in which the pair of substrates are parallel to the inspection member; and the elastic member is configured to displace the pair of substrates in the first position. The gist is that the support portion is biased so as to be displaced from the second posture to the first posture.

  According to this, since a pair of board | substrate supported by the support part is hold | maintained in the 1st attitude | position which inclines with respect to a test | inspection member by the urging | biasing of an elastic member, a pair of board | substrate is a 2nd test | inspection part first. After that, by receiving contact pressure, it is displaced to the second posture parallel to the inspection member against the urging force of the elastic member, and then contacts the first inspection portion. Therefore, the charge charged in the electro-optical device is discharged first through the second electrode, and then both terminals are electrically connected to the inspection member, and the drive voltage is applied to the pixel, whereby the pixel lighting inspection is performed. Done. Therefore, it is possible to reduce the influence of the electrical characteristics of the electro-optical device due to the discharge of the charged electric charge.

  In the inspection apparatus of the electro-optical device, the control unit includes a support portion that supports the inspection member, and an elastic member that biases the support portion, and the support member includes the pair of substrates that are inspected by the inspection member. And a second posture in which the inspection member is parallel to the pair of substrates, and the elastic member is configured to displace the inspection member in the second posture. The gist is that the support portion is biased so as to be displaced from the posture to the first posture.

  According to this, since the inspection member supported by the support portion is held in the first posture inclined with respect to the pair of substrates by the urging of the elastic member, the inspection member first contacts the second terminal. Then, by receiving the contact pressure, the elastic member is displaced to the second posture parallel to the pair of substrates against the urging force of the elastic member, and then contacts the first terminal. Therefore, the charge charged in the electro-optical device is discharged first through the second electrode, and then both terminals are electrically connected to the inspection member, and the drive voltage is applied to the pixel, whereby the pixel lighting inspection is performed. Done. Therefore, it is possible to reduce the influence of the electrical characteristics of the electro-optical device due to the discharge of the charged electric charge.

  The electro-optical device inspection apparatus is characterized in that the switching element is a thin film diode.

  According to this, since the switching element uses a thin film diode, wiring is provided on one substrate. Therefore, it is possible to reduce the breakdown of the thin film diode by discharging the charge through the wiring on the substrate side where the thin film diode has not been previously formed.

  An inspection method for an electro-optical device according to the present invention includes a pair of opposing substrates, wherein one of the substrates is a first terminal and a first electrode electrically connected to the first terminal; The switching element electrically connected to the first electrode, the pixel electrode provided corresponding to the switching element, the second terminal, and the other substrate are connected to each other through the conduction portion. For an electro-optical device having a second electrode that is electrically connected to a second terminal, a first inspection unit that is brought into contact with the first terminal and a second electrode that is brought into contact with the second terminal An inspection method for an electro-optical device that performs inspection using an inspection device including an inspection member including the inspection member, wherein the other substrate and the inspection member are inclined toward the second inspection portion. The step of bringing the second inspection part into contact with the second terminal; and As the one of the inspection unit the first terminal is in contact, it is summarized in that and a step for relatively moving said test member and the other substrate.

  According to this, a pair of board | substrate and an inspection member are made to incline relatively, a 2nd inspection part and a 2nd terminal are made to contact previously, and a 1st inspection part and a 1st terminal are made after that after that. Make contact. Therefore, the electric charge charged in the electro-optical device is discharged through the second electrode. Therefore, it is possible to reduce the destruction of the switching element by discharging the charged charge.

  An inspection method for an electro-optical device according to the present invention includes a pair of opposing substrates, and one of the substrates is electrically connected to a pixel electrode, a switching element provided corresponding to the pixel electrode, and the switching element. The connected first electrode, the other substrate, the first terminal electrically connected to the first electrode through a conduction portion, the second electrode, and the second electrode For an inspection apparatus for an electro-optical device having a second terminal electrically connected to an electrode, a first inspection unit that is brought into contact with the first terminal, and a second that is brought into contact with the second terminal An inspection method for an electro-optical device that performs inspection using an inspection device including an inspection member including the inspection member, wherein the other substrate and the inspection member are inclined toward the second inspection portion. , Contacting the second inspection part and the second terminal; Serial to the first inspection unit the first terminal is in contact, is summarized in that and a step for relatively moving said test member and the other substrate.

  According to this, a pair of board | substrate and an inspection member are made to incline relatively, a 2nd inspection part and a 2nd terminal are made to contact previously, and a 1st inspection part and a 1st terminal are made after that after that. Make contact. Therefore, the electric charge charged in the electro-optical device is discharged through the second electrode. Therefore, it is possible to reduce the destruction of the switching element by discharging the charged charge.

  The gist of this electro-optical device manufacturing method is to include an electro-optical device inspection method.

  According to this, a pair of board | substrate and an inspection member are made to incline relatively, a 2nd inspection part and a 2nd terminal are made to contact previously, and a 1st inspection part and a 1st terminal are made after that after that. Make contact. Therefore, the electric charge charged in the electro-optical device is discharged through the second electrode. Therefore, it is possible to reduce the destruction of the switching element by discharging the charged electric charge, thereby improving the manufacturing efficiency and improving the manufacturing yield.

(First embodiment)
Hereinafter, a first embodiment of the present invention will be described with reference to the drawings.

  FIG. 1 is an exploded perspective view of a liquid crystal display device 10 as an electro-optical device, and is a diagram for explaining a schematic procedure of a method for manufacturing the liquid crystal display device 10. In the liquid crystal display device 10, the first substrate 11 and the second substrate 12, which are a pair of substrates, are bonded together by the sealing material 13, and the space surrounded by the first substrate 11, the second substrate 12, and the sealing material 13. A liquid crystal which is an electro-optical material (not shown) is enclosed.

  The first substrate 11 has a substrate protruding portion 14 that protrudes from the outer shape of the second substrate 12. The finished product of the first substrate 11 includes a first electrode terminal portion 15a (segment) in which an electronic component (semiconductor IC chip) (not shown) having a drive circuit or the like built in on the surface of the substrate extension portion 14 is a set of terminals. Electrode terminal portion) and second electrode terminal portion 15b (common electrode terminal portion).

  In the present embodiment, the first terminal is referred to as a first electrode terminal portion. The second terminal is referred to as a second electrode terminal portion.

  In the present embodiment, no electronic component (semiconductor IC chip) is mounted in order to inspect the liquid crystal display device 10 before completion. In the first substrate 11, a data line 16 that is a first electrode made of Cr or the like and a wiring 17 are formed on the surface of the first substrate 11 made of a transparent material such as glass or plastic. Yes. The data line 16 is connected to a switching element, for example, a thin film diode (hereinafter referred to as TFD) 33 (see FIG. 2), and is led out to the first electrode terminal portion 15a (16a). The wiring 17 is connected to a first connection pad portion 18 that is a conductive portion formed on the first substrate 11, and is drawn out to the second electrode terminal portion 15 b at the end opposite to the first connection pad portion 18. (19a).

  On the other hand, the second substrate 12 includes a plurality of second electrodes 12 made of ITO (Indium Tin Oxide) on the surface of the second substrate 12 made of glass or plastic (the inner surface facing the first substrate 11). The scanning lines 19 that are the two electrodes are formed in a stripe shape. At the end portions of these scanning lines 19, second connection pad portions 20 that are conductive portions are formed. These scanning lines 19 extend in a direction orthogonal to the wiring direction of the data lines 16 of the first substrate 11.

  The second connection pad portion 20 of the scanning line 19 is connected to the first connection pad portion 18 of the wiring 17 through the sealing material 13. In the sealing material 13, a large number of minute conductive particles are dispersedly arranged in a resin base material. These conductive particles are bonded to the first connection pad portion 18 and the second substrate when the first substrate 11 and the second substrate 12 are bonded together via the seal material 13 and the seal material 13 is cured in a pressurized state. The connection pad portion 20 is configured to be conductively connected. More specifically, since the sealing material 13 has conductive anisotropy due to the above-described configuration, the plurality of first connection pad portions 18 and the second connection pad portions 20 correspond to each other through the sealing material 13. Only things are conductively connected.

  Then, a lighting inspection of the liquid crystal display device 10 to be described later is performed.

  FIG. 2 shows an electrical equivalent circuit of the liquid crystal display device 10.

  As shown in FIG. 2, in the display unit 30 surrounded by the one-dot chain line of the liquid crystal display device 10, a plurality of scanning lines 19 are formed to extend in the row (X) direction on the substrate. A plurality of data lines 16 are formed on the substrate so as to extend in the column (Y) direction. A pixel 31 is formed at each intersection of the scanning line 19 and the data line 16. Further, in each pixel 31, a liquid crystal layer 32 and a TFD 33 are connected in series. The liquid crystal layer 32 has a configuration in which liquid crystal is sandwiched between the scanning line 19 functioning as a counter electrode and the pixel electrode. The liquid crystal layer 32 is connected to the scanning line 19, and its pixel electrode is connected to the TFD 33. The TFD 33 is connected to the data line 16.

  In the present embodiment, an end set range (16a, a range indicated by a two-dot chain line in the figure) from which a plurality of data lines 16 are drawn in the substrate overhanging portion 14 is called a first electrode terminal portion 15a.

  In the present embodiment, an end set range (19a, a range indicated by a two-dot chain line in the figure) from which a plurality of scanning lines 19 and wirings 17 are drawn in the substrate extension 14 is referred to as a second electrode terminal portion 15b. It is out.

  In the present embodiment, the data line 16 that is conductively connected to the first electrode terminal portion 15a, the TFD 33, and the pixel electrode are referred to as a first circuit. Further, the wiring 17 that is conductively connected to the second electrode terminal portion 15b, the first connection pad portion 18, the scanning line 19, and the second connection pad portion 20 are referred to as a second circuit. The first circuit, the second circuit, and the liquid crystal layer 32 are collectively called a set of circuits. The withstand voltage of the second circuit connected to the second electrode terminal portion 15b is, for example, 1 KV. The withstand voltage of the first circuit that is conductively connected to the first electrode terminal portion 15a is, for example, 100V.

  Here, in the liquid crystal display device 10, the first substrate 11 and the second substrate 12 disposed so as to be opposed to the first substrate 11 are attached to each other with a certain distance between them. Then, the liquid crystal is filled and sealed between the first substrate 11 and the second substrate 12 to form the liquid crystal layer 32.

  FIG. 3 shows an electrical configuration of an inspection apparatus used for inspecting the liquid crystal display device 10.

  The lighting test of the liquid crystal display device 10 is performed by applying a voltage to the data lines 16 and the scanning lines 19 of the liquid crystal display device 10. The inspection device 40 includes a power supply device 41 and an inspection table 50 (see FIG. 4) described later. The power supply device 41 includes a power switch 42 for turning on and off the power, a volume 44 for changing the voltage, and a ground terminal 45. And the power supply device 41 is connected to the electric power feeding terminal 46 which comprises a test | inspection member via the 1st signal line Vseg and the 2nd signal line Vcom.

  The power supply terminal 46 is electrically connected to the first power supply terminal 46a, which is a first inspection part connected to the first electrode terminal part 15a formed in the liquid crystal display device 10, and to the second electrode terminal part 15b. And a second power supply terminal 46b, which is a second inspection unit. The power supply device 41 is electrically connected to the first electrode terminal portion 15a and the second electrode terminal portion 15b of the liquid crystal display device 10 via the power supply terminal 46 when the liquid crystal display device 10 is inspected for lighting, and is surrounded by a two-dot chain line. Each pixel 31 of the displayed display unit 30 is turned on.

  Next, the configuration of the inspection apparatus 40 will be described with reference to FIG.

  FIG. 4 is a schematic configuration diagram showing an inspection device of the liquid crystal display device 10. 4A is a schematic front view of the inspection table 50, and FIG. 4B is a cross-sectional view taken along the line AA.

  The inspection device 40 includes an inspection table 50 that is set for inspecting lighting of the liquid crystal display device 10, and a power supply device 41 for supplying a voltage to the liquid crystal display device 10.

  On the base 51 of the inspection table 50, four posts 52 having appropriate heights are arranged at the respective corners of the base 51. A removable base plate 53 is supported on top of the four posts 52. Between the base 51 and the base plate 53, a backlight 54 is provided at the center of the upper surface of the base 51. The backlight 54 is provided as a light source for observing uneven brightness of the liquid crystal display in the lighting inspection of the liquid crystal display device 10. Note that the backlight 54 is used in the transmissive liquid crystal display device, but the backlight 54 is not used in the reflective liquid crystal display device. For example, a lighting inspection is performed by external light. In addition, a window (opening) for irradiating the liquid crystal display device 10 with light from the backlight 54 is provided at the center of the substrate plate 53.

  A power supply terminal 46 for supplying a voltage to the liquid crystal display device 10 is disposed at substantially the center of the upper surface of the base plate 53. The power supply terminal 46 is connected to the power supply device 41 via the first signal line Vseg and the second signal line Vcom. The first signal line Vseg is connected to the first power supply terminal 46a, and the second signal line Vcom is connected to the second power supply terminal 46b.

  Three guide shafts 55 having a length up to a position higher than the height to the top surface of the base plate 53 are vertically arranged at equal intervals in the width direction on the bottom surface behind the base 51. A guide post 56 slidable in the vertical direction along the guide shaft 55 is fitted to the guide shaft 55. An upper holder 57 having a size up to a range facing the base plate 53 is attached to the upper surface of the guide post 56. An upper holder plate 58 having the same size as that of the base plate 53 is tightly fixed to the bottom surface (base plate side) of the upper holder 57 so as to face the base plate 53. An inspection window 59 (see FIG. 5) is formed in the upper holder 57 and the upper holder plate 58, and the inspection is performed visually through the inspection window 59.

  The lever 60 rotates about the lever shaft 61 and is connected to a guide post 56 attached to the upper holder 57 via first to third connecting members 62 to 64. In addition, illustration of the 1st-3rd connection members 62-64 is abbreviate | omitted in Fig.4 (a). More specifically, the lever 60 is urged upward by a spring (not shown). By pulling the lever 60 forward, the lever 60 rotates about the lever shaft 61 against the urging force of the spring. Then, the rotating movement is caused by the third connecting member 64 turning about the connecting shaft 65 via the first to third connecting members 62 to 64, whereby the guide post 56, the upper holder 57, and the upper holder. The plate 58 is converted into a linear motion that moves up and down.

  FIG. 5A is a perspective view of the entire inspection apparatus, and FIG. 5B is an enlarged perspective view of the vicinity of the liquid crystal display device 10 when set in the inspection apparatus 40.

  The inspection device 40 includes a transfer device 70 disposed on the side of the inspection table 50. The conveyance device 70 performs operations such as vertical movement of the air tweezers 71 and expansion / contraction movement to the vicinity of the center of the base plate 53 and the original position. This operation is performed by an actuator 72 such as an air cylinder or a hydraulic cylinder. The air tweezers 71 are fixed to the tip of the rod 73 of the actuator 72. The main body 70 a of the transport device 70 incorporates an elevating actuator 75 that elevates and lowers the actuator 72 along the guide hole 74. The air tweezers 71 are arranged at the lowered position of the transport device 70 when transporting or returning the liquid crystal display device 10 from a predetermined position. On the other hand, the air tweezers 71 are disposed at the raised position of the transport device 70 when the liquid crystal display device 10 is set on the inspection table 50 or returned to a predetermined position. Further, the air tweezers 71 reach the vicinity of the center of the base plate 53 when the rod 73 is pushed out by the actuator 72. On the other hand, the air tweezers 71 are returned to a position where they do not interfere with the base plate 53 when the rod 73 is pulled back by the actuator 72.

  In order to suck the liquid crystal display device 10 by the air tweezers 71, for example, vacuum suction is performed. When suction is not necessary, the vacuum suction is stopped. At the tip of the air tweezers 71, a suction pad 76 is provided as a support portion for supporting the liquid crystal display device 10. Further, an elastic member 77 is provided at the tip of the air tweezers 71 for tilting and sucking the liquid crystal display device 10. The elastic member 77 is rubber, for example.

  Here, in the positional relationship between the power supply terminal 46 and the pair of substrates (the first substrate 11 and the second substrate 12), the posture in which the pair of substrates 11 and 12 is inclined with respect to the power supply terminal 46 is defined as the first posture. . Further, a posture in which the pair of substrates 11 and 12 are parallel to the power supply terminal 46 is a second posture.

  In the liquid crystal display device 10, the suction pad 76 is supported via an elastic member 77 so as to be inclined with respect to the base plate 53. The liquid crystal display device 10 sucked by the suction pad 76 is held in the first posture. Further, the liquid crystal display device 10 is displaced from the first posture to the second posture that is parallel to the power supply terminal 46 as the elastic member 77 is bent.

  In addition, the first power supply terminal 46a and the second power supply terminal 46b use, for example, conductive rubber, and have a characteristic that the upper surface and the lower surface of the conductive rubber are electrically connected by being compressed. On the other hand, if no force is applied to the conductive rubber, the upper and lower surfaces of the conductive rubber are not electrically connected. The conductive rubber according to the present embodiment is configured such that a plurality of wirings on the upper surface and the lower surface can be electrically connected by an upper and lower compression operation.

  Around the power supply terminal 46, when the liquid crystal display device 10 is set, support members 78 for adjusting the height of the power supply terminal 46 have three remaining sides excluding the side corresponding to the power supply terminal 46 of the liquid crystal display device 10. It is provided so that a part corresponding to can be indicated.

  Next, an inspection method for the liquid crystal display device 10 will be described with reference to FIGS.

  This lighting inspection of the liquid crystal display device 10 is an inspection of the state of luminance unevenness of each pixel and screen. In the present embodiment, a full lighting test is performed in which the pixels 31 (see FIG. 2) of the display unit 30 of the liquid crystal display device 10 are all lit to check the state of the pixels and wiring.

  The lighting inspection of the liquid crystal display device 10 is performed in a state before a driver (IC chip) for driving the liquid crystal display device 10 is mounted on the first electrode terminal portion 15a and the second electrode terminal portion 15b.

  As shown in FIG. 5, the air tweezers 71 sucks the display surface of the liquid crystal display device 10 at a predetermined position. In the liquid crystal display device 10, the air tweezers 71 are extended by the actuator 72 and conveyed to the vicinity of the center of the base plate 53. At this time, the liquid crystal display device 10 is sucked while being held in the first posture in which the second electrode terminal portion 15 b is lowered by the elastic member 77. Then, the second electrode terminal portion 15b that is conductively connected to the second circuit having a high withstand voltage of the liquid crystal display device 10 and the second power supply terminal 46b of the power supply terminal 46 come into contact first. Then, the second power supply terminal 46b made of conductive rubber is pressed to be electrically connected to the second electrode terminal portion 15b. Then, the electric charge charged in the liquid crystal display device 10 is discharged from the second power supply terminal 46b through the second circuit into the power supply device through the second signal line Vcom.

  The liquid crystal display device 10 affects the TFD 33 connected to the first circuit by discharging the charge from the second electrode terminal portion 15b (second power supply terminal 46b) side that is conducted to the second circuit having a high withstand voltage. The charge can be released without giving it.

  On the other hand, when the 1st electrode terminal part 15a and the 1st electric power feeding terminal 46a contact previously, an electric charge is discharged through the 1st circuit electrically connected by the 1st electrode terminal part 15a. In this case, since the withstand voltage of the first circuit is 100V, if the electrostatic charge is 100V or more, the TFD 33 in the first circuit may be destroyed.

  After some time, the liquid crystal display device 10 is lowered by the transport device 70, and the elastic member 77 provided at the tip of the air tweezers 71 is bent, so that the second posture horizontal to the power supply terminal 46 is obtained. Migrate to At this time, the liquid crystal display device 10 is set in the second posture along a product guide (not shown). In this second posture, the suction of the air tweezers 71 is stopped, and the liquid crystal display device 10 is detached from the air tweezers 71. The liquid crystal display device 10 is set on the upper surfaces of the power supply terminal 46 and the support member 78. The air tweezers 71 are returned to a position away from the inspection table by the conveying device 70.

  Next, description will be made with reference to FIG. 6A is a diagram illustrating a state in which the lever 60 is tilted and the upper holder plate 58 is lowered, and FIG. 6B is an enlarged view of the periphery of the liquid crystal display device 10 that is set. .

  The lever 60 is pulled forward, and the upper holder plate 58 is lowered so as to be in close contact with the liquid crystal display device 10 (see FIG. 6A). Now, the liquid crystal display device 10 is in the second posture parallel to the power supply terminal 46. Then, the first electrode terminal portion 15a and the first power supply terminal 46a, and the second electrode terminal portion 15b and the second power supply terminal 46b of the liquid crystal display device 10 are in close contact with each other.

  At this time, when the power supply terminals 46a and 46b are pressed downward and the upper and lower surfaces of the conductive rubber are brought into conduction, the first electrode terminal portion 15a is connected to the second electrode terminal 15b via the first signal line Vseg. A signal is applied through the second signal line Vcom. The signal applied to the second electrode terminal portion 15b is supplied to all the scanning lines 19 at once. The signals applied to the first electrode terminal portion 15a are supplied to all the data lines 16 at once, and the pixels 31 (see FIG. 2) of the display unit 30 of the liquid crystal display device 10 are all lit.

  Further, the volume 44 of the power supply device 41 is rotated to check the lighting state while changing the applied voltage. When the pixel 31 is normal, the pixel 31 has the same luminance due to the voltage applied to the liquid crystal layer 32. However, if the TFD 33, the data line 16, the scanning line 19, or the like is broken or blown, the pixel 31 related to the defect exhibits luminance different from that of the normal part, and the defect can be found. .

  When the lighting inspection of the liquid crystal display device 10 is finished, the lever 60 is returned and the upper holder plate 58 is raised. Then, the liquid crystal display device 10 set on the base plate 53 is sucked by the air tweezers 71. At this time, the liquid crystal display device 10 is sucked in a flat state by the elastic member 77 being displaced to the second posture. Thereafter, the liquid crystal display device 10 is returned to a predetermined position by the transport device 70.

  As described above in detail, according to the present embodiment, the following effects can be obtained.

  (1) When the liquid crystal display device 10 is inspected, the electric charge charged in the liquid crystal display device 10 is discharged from the second circuit side having a higher withstand voltage first, so that the first circuit side where the TFD 33 is formed is moved to the first circuit side. It was made not to have an adverse effect. Therefore, the electrostatic breakdown of the TFD 33 can be reduced and the product yield can be improved.

  (2) In order to displace the attitude of the liquid crystal display device 10, the elastic member 77 is used. Therefore, according to a predetermined order, the lighting inspection of the liquid crystal display device 10 is displaced to the second posture when the air tweezers 71 are lowered, and is displaced to the first posture which is the original posture when the air tweezers 71 are raised. Therefore, the lighting inspection of the liquid crystal display device 10 can be performed smoothly.

(Second Embodiment)
Next, a second embodiment of the present invention will be described with reference to FIGS.

  7-9 is the schematic perspective view which shows the main structures of the test | inspection apparatus of 2nd Embodiment, and is the figure which demonstrated the test | inspection state in order.

  In the inspection device 40 of the liquid crystal display device 10 of the present embodiment, as shown in FIG. 7, the power supply terminal 81 is attached to the upper holder plate 58 (see FIGS. 4 and 5) via the tilting device 80. Further, the power supply terminal 81 can be moved up and down as the upper holder plate 58 moves up and down. When inspecting, the liquid crystal display device 10 is set on the base plate 53 (see FIGS. 4 and 5) of the inspection table 50. Accordingly, the power supply terminal 81 is inclined with respect to the liquid crystal display device 10 and is moved in a direction in which the power supply terminal 81 approaches the liquid crystal display device 10, thereby bringing the power supply terminal 81 into contact with the electrode terminal portions 15 a and 15 b of the liquid crystal display device 10. The point which discharges an electric charge is different from 1st Embodiment.

  In addition, the inspection apparatus according to the present embodiment is applied to an inspection for confirming a contact state between adjacent ones (hereinafter referred to as a panel short inspection) with respect to the all lighting inspection described in the first embodiment. Different from one embodiment.

  Here, in the positional relationship between the pair of substrates 11 and 12 and the power supply terminal 81, the posture in which the power supply terminal 81 is inclined with respect to the pair of substrates 11 and 12 is defined as a first posture. Further, a posture in which the power supply terminal 81 is parallel to the pair of substrates 11 and 12 is a second posture.

  The tilting device 80 as control means includes a fixing member 83, a tilting member 84, and a spring 85. The fixing member 83 includes a plate-like plate 83a and a semicircular member 83b having an appropriate thickness fixed to one side surface of the plate 83a. An inspection window 83c is formed at the center of the plate 83a, and inspection is performed through the inspection window 83c. Further, a rectangular parallelepiped member 83e is fixed to the lower surface of the member 83b. When performing the short panel inspection of the present embodiment, the member 83b is screwed to the upper holder plate 58 through the first hole 83f. The member 83e is provided with a box-shaped tilting member 84 having an open upper surface having a second hole 84a so as to be tiltable about the shaft 83d. On one side of the lower surface of the member 83b, a spring 85 is interposed between the member 83b and the tilting member 84. The tilting member 84 is biased by a spring 85 and maintains a first posture inclined with respect to the fixing member 83.

  From the lower surface of the tilting member 84, a tape-like base material 82 made of polyimide and a large number of wirings formed on the base material 82 are provided. Terminals 81a and 81b are formed.

  In the present embodiment, a first power supply terminal 81 a that contacts the first electrode terminal portion 15 a and a second power supply terminal 81 b that contacts the second electrode terminal portion 15 b are formed in a predetermined region in the longitudinal direction of the base material 82. Yes.

  The liquid crystal display device 10 is supplied with a voltage via the first signal line Vseg when the first power supply terminal 81a and the first electrode terminal portion 15a are in contact with each other. On the other hand, when the second power supply terminal 81b and the second electrode terminal portion 15b are in contact with each other, a voltage is supplied via the second signal line Vcom. At this time, a voltage is supplied to each of the drawn lines (scanning line 19a and data line 16a) to the first electrode terminal portion 15a and the second electrode terminal portion 15b.

  The liquid crystal display device 10 is, for example, sucked by the air tweezers 71 by an operator and set at a predetermined position near the center of the base plate 53 provided on the inspection table 50 (see FIG. 4) shown in FIG.

  Next, an inspection method for the liquid crystal display device 10 according to the second embodiment will be described with reference to FIGS.

  Now, the liquid crystal display device 10 is set on the base plate 53 disposed on the inspection table 50. As shown in FIG. 7, the power supply terminal 81 attached to the tilting member 84 is in a first posture inclined with respect to the liquid crystal display device 10, and is biased so that the second power supply terminal 81b side is lowered. .

  As shown in FIG. 8, when the lever 60 is pulled forward, the power supply terminal 81 is lowered together with the fixing member 83 attached to the upper holder plate 58. Since the power supply terminal 81 is inclined in the first posture together with the tilting member 84, the second power supply terminal 81b comes into contact with the second electrode terminal portion 15b of the liquid crystal display device 10 first. At this time, the electric charge charged in the liquid crystal display device 10 is provided in the power supply device 41 through the second circuit (17, 18, 19, 20) from the second electrode terminal portion 15b via the second signal line Vcom. The ground terminal 45 is discharged.

  Subsequently, when the lever 60 is further lowered as shown in FIG. 9, the power supply terminal 81 shifts to a second posture parallel to the base plate 53 due to the reaction force from the electrode terminal portions 15 a and 15 b. . As a result, the first power supply terminal 81a and the second power supply terminal 81b are in contact with the first electrode terminal portion 15a and the second electrode terminal portion 15b of the liquid crystal display device 10, respectively. At this time, the spring 85 provided between the member 83b of the fixing member 83 and the tilting member 84 is compressed.

  The plurality of terminals formed on the electrode terminal portions 15a and 15b and the plurality of terminals (exposed portions for each wiring) formed on the power supply terminals 81a and 81b are electrically connected only to those corresponding to each other. The Then, a panel short inspection is performed to check for short defects in the data line 16, the wiring 17, and the scanning line 19 through lighting of pixels.

  When the panel short inspection of the liquid crystal display device 10 is completed, the lever 60 is returned and the upper holder plate 58 is raised. At this time, the power supply terminal 81 is displaced to the first posture in which the second power supply terminal 81 b side is lowered again by the bias of the spring 85. When the space between the base plate 53 and the upper holder plate 58 is widened, the operator next sucks the liquid crystal display device 10 with the air tweezers 71 and then returns it to a predetermined position after the inspection.

  As described above in detail, according to the present embodiment, the effect (1) in the first embodiment can be obtained similarly, and the following effects can be obtained.

  (3) In order to displace the posture of the power supply terminal 81, the tilting device 80 is used. Therefore, according to a predetermined order, the lighting inspection of the liquid crystal display device 10 is displaced to the second posture if the upper holder plate 58 is lowered, and is displaced to the first posture which is the original posture if the upper holder plate 58 is raised. Therefore, the lighting inspection of the liquid crystal display device 10 can be performed smoothly.

  (4) Only a plurality of terminals formed on the electrode terminal portions 15a and 15b and a plurality of terminals formed on the power supply terminals 81a and 81b are electrically connected to each other. Therefore, it is possible to inspect a short state between adjacent (panel short inspection).

  In addition, this embodiment is not limited above, It can also implement with the following forms.

  (Modification 1) In the first embodiment, the elastic member 77 is exemplified by rubber. This is not limited to rubber, and a spring may be used as long as it can be sucked. In the second embodiment, the tilting member 84 is displaced between the first posture and the second posture, using a spring as an example. This may be displaced by rubber instead of a spring.

  (Modification 2) In the above-described embodiment, an example in which the set of the liquid crystal display device 10 on the inspection table 50 is brought into contact with the second electrode terminal portion having a high withstand voltage in the first posture using the lifting device. did. You may set this to the test | inspection table 50 not by a raising / lowering apparatus but by manual work. However, also in this case, the liquid crystal display device 10 is in the first posture by the elastic member 77 and is brought into contact with the second electrode terminal portion having a high withstand voltage.

  (Modification 3) In the said embodiment, the liquid crystal display device 10 demonstrated TFD33 as an example as a switching element. This may be applied to a device using a TFT element as a switching element.

  (Modification 4) In the first embodiment, the liquid crystal display device 10 is inclined with respect to the power supply terminal 46 so that the second electrode terminal 15b and the second power supply terminal 46b are in contact with each other. And after discharging electric charge, the example which performs a lighting test | inspection by making the 1st electrode terminal 15a and the 1st electric power feeding terminal 46a contact is made, contacting each terminal (15b and 46b). After the second electrode terminal 15b and the second power supply terminal 46b are in contact with each other, the terminals (15b and 46b) are once separated from each other, and the liquid crystal display device 10 is made parallel to be in contact with both (the second electrode terminal 15b and The second power supply terminal 46b may be in contact, and the first electrode terminal 15a and the first power supply terminal 46a may be in contact). The same applies to the second embodiment.

  (Modification 5) In the embodiment, when the power supply terminals (46, 81) and the liquid crystal display device 10 are brought into contact, the liquid crystal display device 10 and the power supply terminals (46, 81) are parallel to each other against the biasing force of the elastic member. It was displaced and contacted. This may be mechanically displaced in a tilted or parallel manner by using an actuator to make contact.

  (Modification 6) In each of the above embodiments, the example in which the liquid crystal display device 10 and the power supply terminal 81 are inclined by the control means has been described. Alternatively, the liquid crystal display device 10 may be parallel and the shape of the power supply terminal (46 or 81) may be a shape in which the contact surface or the contact side is inclined. In this case, even if a complicated mechanism such as a control unit is not used, it is possible to reduce the destruction of the element when performing the lighting inspection.

  (Modification 7) In the embodiment, the example in which one of the liquid crystal display device 10 and the power supply terminals 46 and 81 is inclined has been described. If the one with higher withstand voltage comes into contact first, both of them may be inclined.

  (Modification 8) In the above embodiment, a two-chip (IC chip) type liquid crystal display device has been described, but it may be applied to a three-chip type liquid crystal display device.

  (Modification 9) In the embodiment, on the substrate side on which the TFD 33 is provided, the pixel electrode, the first electrode terminal portion 15a, the second electrode terminal portion 15b, and the data line are formed, and the substrate on which the TFD 33 is formed; In the above description, the scanning line 19 is formed on the opposite substrate side. This will be described with reference to FIG. 2. The pixel electrode and the data line 16 are formed on the substrate side on which the TFD 33 is provided, and the scanning line 19, the first electrode terminal portion 15a, and the first electrode terminal portion 15a are formed on the other substrate side. It is good also as a structure of the liquid crystal display device in which the 2 electrode terminal part 15b was formed.

  (Modification 10) Although the liquid crystal display device has been described as an example in the above-described embodiment, it can be applied to various devices such as an organic electroluminescence device, a plasma display device, and a field emission display device. That is, in the present invention, all display devices provided with pixels corresponding to intersections of scanning lines and data lines are to be inspected. In this case, contact from the higher withstand voltage can reduce the destruction of the element and improve the yield of the product.

The disassembled perspective view of the liquid crystal display device in 1st Embodiment. Explanatory drawing which shows an electrical structure. Explanatory drawing which shows the electrical structure in a test | inspection. The schematic perspective view of the test | inspection apparatus used for a lighting test | inspection. (A) is a schematic front view of an inspection table, (b) is sectional drawing in the AA line. The schematic perspective view which shows the main structures of an inspection apparatus. (A) is a perspective view of the whole inspection apparatus. (B) is an enlarged perspective view of the vicinity of the liquid crystal display device. The schematic perspective view which shows the main structures of an inspection apparatus. (A) is a figure which shows the state which lowered | hung the upper holder plate, (b) is an expansion perspective view near a liquid crystal display device. The schematic perspective view which shows the main structures of the test | inspection apparatus in 2nd Embodiment. The schematic perspective view which shows the main structures of an inspection apparatus. The schematic perspective view which shows the main structures of an inspection apparatus. The schematic perspective view which shows the structure of the test | inspection apparatus of a prior art.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Liquid crystal display device as an electro-optical device, 11 ... 1st board | substrate, 12 ... 2nd board | substrate, 15a ... 1st electrode terminal part as 1st terminal, 15b ... 1st Second electrode terminal portion as two terminals, 16... Data line as first electrode, 17... Wiring as scanning line, 18... First connection pad portion, 19. 20... Second connection pad section, 31... Pixel, 32... Liquid crystal layer constituting the pixel, 33... TFD as switching element, 40. , 41... Power supply device constituting the inspection device, 45... Grounding terminal constituting the inspection device, 46... Feeding terminal constituting the inspection member, 46 a. First feeding terminal as a part, 46b ... a second inspection part constituting an inspection member Second inspection terminal constituting the inspection apparatus, 53... Base plate, 58... Upper holder plate, 60... Lever, 70. ..Air tweezers, 72... Actuator, 75... Elevating actuator, 76... Suction pad as a support as control means, 77... Elastic member as control means, 80. As an apparatus, 81... Power supply terminal constituting the inspection member, 81a... First power supply terminal as a first inspection part constituting the inspection member, 81b... As a second inspection part constituting the inspection member A second feeding terminal, 82 ... a base material, 83 ... a fixing member, 84 ... a tilting member, 85 ... a spring as an elastic member.

Claims (10)

A pair of opposing substrates,
One of the substrates includes a first terminal, a first electrode electrically connected to the first terminal, a switching element electrically connected to the first electrode, and the switching A pixel electrode provided corresponding to the element, a second terminal,
The other substrate is an inspection apparatus for an electro-optical device having a second electrode electrically connected to the second terminal through a conduction part,
An inspection member that includes a first inspection unit that is in contact with the first terminal, and a second inspection unit that is in contact with the second terminal;
With respect to one of the inspection member and the other substrate, the other of the inspection member and the other substrate is inclined toward the second inspection portion, and the second inspection portion and the second terminal are An electro-optic comprising: control means for controlling a relative distance between the inspection member and the other substrate so that the first inspection unit and the first terminal come into contact with each other after contact. Equipment inspection device. A pair of opposing substrates,
One of the substrates includes a pixel electrode, a switching element provided corresponding to the pixel electrode, a first electrode electrically connected to the switching element,
The other substrate is electrically connected to the first electrode, the second electrode, and the second electrode that are electrically connected to the first electrode through a conducting portion. An inspection apparatus for an electro-optical device having two terminals,
An inspection member that includes a first inspection unit that is in contact with the first terminal, and a second inspection unit that is in contact with the second terminal;
With respect to one of the inspection member and the other substrate, the other of the inspection member and the other substrate is inclined toward the second inspection portion, and the second inspection portion and the second terminal are An electro-optic comprising: control means for controlling a relative distance between the inspection member and the other substrate so that the first inspection unit and the first terminal come into contact with each other after contact. Equipment inspection device. An inspection apparatus for an electro-optical device according to claim 1 or 2,
An inspection apparatus for an electro-optical device, wherein the control means causes the other substrate to be inclined and brought into contact with the inspection member. The electro-optical device inspection apparatus according to claim 1,
An inspection apparatus for an electro-optical device, wherein the control means causes the inspection member to be brought into contact with the other substrate while being inclined. The electro-optical device inspection apparatus according to claim 3,
The control means includes a support portion that supports the pair of substrates, and an elastic member that biases the support portion, and the support portion includes a first portion in which the pair of substrates is inclined with respect to the inspection member. An attitude and a pair of substrates are displaceably provided in a second attitude parallel to the inspection member, and the elastic member moves the pair of substrates from the second attitude to the first attitude. An inspection apparatus for an electro-optical device, wherein the supporting portion is urged so as to be displaced in the direction. The inspection apparatus for an electro-optical device according to claim 4,
The control means includes a support portion that supports the inspection member and an elastic member that biases the support portion, and the support portion has a first posture in which the inspection member is inclined with respect to the pair of substrates. And the inspection member is displaceably provided in a second posture parallel to the pair of substrates, and the elastic member displaces the inspection member from the second posture to the first posture. An inspection apparatus for an electro-optical device, wherein the supporting portion is biased so as to cause The inspection apparatus for an electro-optical device according to any one of claims 1 to 6,
The electro-optical device inspection apparatus, wherein the switching element is a thin film diode. A pair of opposing substrates,
One of the substrates includes a first terminal, a first electrode electrically connected to the first terminal, a switching element electrically connected to the first electrode, and the switching A pixel electrode provided corresponding to the element, a second terminal,
The other substrate has a second electrode that is electrically connected to the second terminal through a conductive portion.
An inspection method for an electro-optical device that performs an inspection using an inspection apparatus that includes an inspection member that includes a first inspection unit that is in contact with the first terminal and a second inspection unit that is in contact with the second terminal. There,
A step of bringing the second inspection part and the second terminal into contact with each other in a state where the other substrate and the inspection member are inclined toward the second inspection part;
An inspection method for an electro-optical device, comprising: a step of relatively moving the other substrate and the inspection member so that the first inspection section and the first terminal are in contact with each other. A pair of opposing substrates,
One of the substrates includes a pixel electrode, a switching element provided corresponding to the pixel electrode, a first electrode electrically connected to the switching element,
The other substrate is electrically connected to the first electrode, the second electrode, and the second electrode that are electrically connected to the first electrode through a conducting portion. For an electro-optical device inspection apparatus having two terminals,
An inspection method for an electro-optical device that performs an inspection using an inspection apparatus that includes an inspection member that includes a first inspection unit that is in contact with the first terminal and a second inspection unit that is in contact with the second terminal. There,
A step of bringing the second inspection part and the second terminal into contact with each other in a state where the other substrate and the inspection member are inclined toward the second inspection part;
An inspection method for an electro-optical device, comprising: a step of relatively moving the other substrate and the inspection member so that the first inspection section and the first terminal are in contact with each other. An electro-optical device manufacturing method comprising the electro-optical device inspection method according to claim 8.

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