JP2005103398A - Reactor and its manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a reactor, by which a crooked part of a flow passage having high precision can be formed. <P>SOLUTION: A mask 81 is formed on one side 52 of a first substrate 51 and linear openings 82, 82,... are formed on the mask 81 by exposing/developing the mask 81. Linear grooves 53, 53,... are formed respectively in the openings 82, 82,... by etching or sandblasting the mask 81-applied first substrate 51. A catalyst 54 is formed on the wall surface of the groove 53. Linear grooves 63, 63,... are formed also on one side 62 of a second substrate 61. The mask 81-formed side 52 of the first substrate is stuck to the groove 63-formed side 62 of the second substrate 61. The side 52 is joined to the side 62 so that a part of the groove 53 is superimposed on a part of the groove 63, and the groove 53 and the groove 63 are made to cross each other at right angles. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a reactor having a bent channel and a manufacturing method thereof.

  In recent years, research and development have been actively conducted on fuel cells that can achieve high energy use efficiency. BACKGROUND ART A fuel cell is a promising battery that is promising and promising because it directly extracts electric energy from chemical energy by electrochemically reacting fuel and oxygen in the atmosphere. The fuel used in the fuel cell includes hydrogen, but there is a problem in handling and storage due to being a gas at room temperature. Therefore, if liquid fuels such as alcohols and gasoline are used, the system for storing the liquid fuel becomes relatively small, but the hydrogen necessary for power generation is generated by heating and reacting the liquid fuel and water vapor to a high temperature. A reformer is required. When a fuel reforming type fuel cell is used as a power source for a small electronic device, it is necessary to downsize not only the fuel cell but also the reforming apparatus.

On the other hand, Patent Document 1 describes that a small amount of chemical reaction is performed by using a small chemical microreactor formed by bonding a plurality of substrates, and the chemical microreactor described in Patent Document 1 is used for a reformer. Research and development are also underway. The microreactor described in Patent Document 1 will be briefly described. A twisted groove is formed on one surface of the first substrate made of polystyrene, and the second substrate is formed so as to cover the groove. By adhering to the substrate with an ultraviolet curable resin, a flow path composed of a groove is formed at the joint between these two substrates. When a reactant is caused to flow through the flow path of the chemical microreactor, the reactant reacts to produce a target product or an intermediate product.
JP 2002-102681 A

By the way, when forming a crease-like groove on the first substrate, a mask having a crease-like opening is formed by a photolithography method, and an etching method or a sand blast method is performed in the state of the mask. Thus, a groove having substantially the same shape as the opening of the mask is formed on the first substrate. However, since there is a problem with the strength of the mask, the shape of the bent portion of the opening of the mask collapses when performing the etching method or the sandblast method, and the bent portion of the groove cannot be accurately formed, Eventually, the bent portion of the flow path cannot be formed with high accuracy. Further, wet etching has a problem that etching cannot be performed sufficiently because the etchant does not easily enter the bent portion.
Therefore, the present invention has been made to solve the above-described problems, and an object of the present invention is to provide a reactor capable of forming a bent portion of a flow path with high accuracy and a method for manufacturing the same. .

In order to solve the above problems, the reactor according to claim 1 comprises:
A first substrate having a plurality of grooves formed on one surface;
A second substrate in which a plurality of grooves formed on the first substrate by communicating with the first substrate communicate with each other is formed on a surface facing the first substrate;
It is characterized by having.
Preferably, the extending direction of a part of the plurality of grooves formed on the first substrate and the extending direction of a part of the grooves formed on the second substrate are orthogonal to each other.
Preferably, the plurality of grooves formed in the first substrate are formed linearly.

  The method for producing a reactor according to claim 4, wherein the step of forming a linear groove on one surface of the first substrate, the step of forming a linear groove on one surface of the second substrate, One surface of the first substrate is bonded to one surface of the second substrate, a part of the groove of the first substrate is overlapped with a part of the groove of the second substrate, and the first substrate is overlapped with the overlapping part. Bonding one surface of the first substrate to one surface of the second substrate so as to intersect the groove of the second substrate and the groove of the second substrate.

  Preferably, a catalyst is formed on a wall surface of at least one of the groove of the first substrate and the groove of the second substrate.

  Preferably, a thin film heater is formed on the other surface of at least one of the first substrate and the second substrate.

  In the present invention, a part of the groove of the first substrate is overlapped with a part of the groove of the second substrate, and the groove of the first substrate and the groove of the second substrate are crossed at the overlapping portion. By joining one surface of the first substrate to one surface of the second substrate, a channel in which the groove of the first substrate and the groove of the second substrate are connected is formed. This flow path is bent at the intersection of the groove of the first substrate and the groove of the second substrate. Here, if the groove formed in the first substrate and the groove formed in the groove of the second substrate are linear, neither groove has a bent portion, so that both grooves can be formed with high accuracy.

  According to the present invention, since the groove of the first substrate and the groove of the second substrate can be formed with high accuracy, the bent portion of the flow path composed of these grooves, that is, the intersection of these grooves can be formed with high accuracy. Can do.

  The best mode for carrying out the present invention will be described below with reference to the drawings. However, although various technically preferable limitations for implementing the present invention are given to the embodiments described below, the scope of the invention is not limited to the following embodiments and illustrated examples.

  The manufacturing method of the reactor 50 is demonstrated with reference to FIGS. Here, in each of FIG. 1 to FIG. 6, (a) is a cross-sectional view, (b) is a plan view, and a cross-sectional view along the cutting line AA shown in (b) is (a). Is shown in 7, (a) and (b) are cross-sectional views, (c) is a plan view, and a cross-section along the cutting line AA shown in (c) is shown in (a). The cross section along the cutting line BB is shown in FIG.

  As shown in FIG. 1, a square-shaped first substrate 51 having both flat surfaces is prepared. The first substrate 51 is formed in a plate shape from a material such as silicon, aluminum, or glass. A mask (resist) 81 is formed on one surface 52 of the first substrate 51, and the mask 81 is exposed and developed, whereby a plurality of openings 82, 82,. It forms so that it becomes. Here, in the openings 82, 82,..., One surface 52 of the first substrate 51 is exposed.

  Next, in a state where the mask 81 is applied, an etching method or a sand blasting method is performed on one surface 52 of the first substrate 51 to form a groove 53 in the first substrate 51 in the openings 82, 82,. , 53,... The openings 82, 82,... Are linear and the openings 82, 82,... Have no bent portions, so that the grooves 53, 53,. Therefore, even if the grooves 53, 53,... Are formed so as to narrow the interval between the grooves 53, 53,..., The adjacent grooves 53, 53 are not connected.

  Next, the mask 81 is removed using a removing liquid (peeling liquid) (see FIGS. 2A and 2B). Note that the mask 81 may be mechanically peeled without using the removing liquid.

Next, a dry film resist is coated on one surface 52 of the first substrate 51, an opening is provided in a portion located in the groove 53, 53,... Of the dry film resist, and the dry film resist having the opening is coated. The catalyst 54 is formed on the wall surfaces of the grooves 53, 53,. When the dry film resist is peeled off together with the catalyst formed on the upper surface, the catalyst 54 remains on the wall surfaces of the grooves 53, 53,... (See FIGS. 3A and 3B). Here, the components of the catalyst 54 are appropriately selected according to the purpose of use of the reactor to be produced.
When the reactor to be manufactured is used as a reformer for reforming methanol as a reactant into hydrogen, the catalyst 54 reforms a mixture of methanol and water into hydrogen and carbon dioxide (the following chemistry is given). (See Reaction Formula (1).) A catalyst, specifically, a CuO—ZnO-based catalyst (CuO / ZnO / Al ₂ O ₃ ) in which copper and zinc are supported on an aluminum oxide as a carrier.
CH ₃ OH + H ₂ O → 3H ₂ + CO ₂ (1)

In addition, when the reactor to be manufactured is used as a carbon monoxide remover that removes carbon monoxide as a reactant from a mixture of hydrogen, carbon dioxide, carbon monoxide, and the like, the catalyst 54 includes Carbon and water are reacted to produce carbon dioxide and hydrogen (see the following chemical reaction formula (2)), and the catalyst is used to selectively oxidize carbon monoxide contained in the gas mixture (the following chemical reaction formula (3 ) See). As a catalyst for selectively oxidizing carbon monoxide, there is a Pt-based catalyst (Pt / Al ₂ O ₃ ) in which platinum is supported on an aluminum oxide as a support.
CO + H ₂ O → CO ₂ + H ₂ (2)
2CO + O ₂ → 2CO ₂ (3)

Further, when the reactor to be manufactured is used as a combustor for burning methanol as a reactant, the catalyst 54 is a catalyst that promotes the oxidation of methanol, specifically, aluminum oxide as a carrier. A platinum-supported Pt catalyst (Pt / Al ₂ O ₃ ) is used.

  Further, when the reactor to be manufactured is used as a vaporizer for vaporizing a liquid reactant, the catalyst 54 may not be formed in the groove 53.

As a method of forming the catalyst 54, a film of the catalyst is formed on one surface 52 of the first substrate 51 as shown in the following (a) to (d) while the dry film resist having the opening is coated. The catalyst 54 is left only on the wall surface of the groove 53 by removing the dry film resist.
(A) A catalyst dispersion in which catalyst fine particles are dispersed in a dispersion medium is applied and coated on one surface 52 of the first substrate 51.
(B) After forming a carrier film (alumina, silica, etc.) on one surface 52 of the first substrate 51, the catalyst is adsorbed on the carrier film.
(C) After forming a carrier film (alumina, silica, etc.) on one surface 52 of the first substrate 51 by a sol-gel method, a catalyst dispersion liquid in which catalyst fine particles are dispersed in a dispersion medium is applied to one surface of the first substrate 51. By applying to 52, the catalyst fine particles are supported on the carrier film.
(D) A catalyst film is formed by sputtering, PVD, or the like.

  The method (c) will be described in more detail. First, aluminum isopropoxide is dissolved in water to prepare an aqueous solution of aluminum isopropoxide having a concentration of 0.1 to 2 mol / l. Next, when the prepared aqueous solution is heated, hydrolysis occurs in the aqueous solution, which decomposes into aluminum hydroxide fine particles and isopropyl alcohol to obtain a sol. Here, the particle size of aluminum hydroxide can be prepared according to the heating temperature and the holding time of the heating temperature, but when the solution is held at 80 ° C. for 24 hours, the particle size of aluminum hydroxide of about 10 nm is obtained. be able to. Then, after the generated isopropyl alcohol is sufficiently volatilized, a stabilizer is added to the sol in order to stop the growth of aluminum hydroxide particles. The stabilizer to be used may be an acid or an alkali, but by adding 0.1 mol of nitric acid to 1 mol of aluminum hydroxide, the growth of aluminum hydroxide particles is stopped. The sol thus prepared is cooled to room temperature, and the first substrate 51 is immersed in the sol (dip coating method). Then, after pulling up the first substrate 51 from the sol, the first substrate 51 is fired at 360 ° C. in an atmosphere (air) in which oxygen is present, whereby the boehmite film, which is a precursor of γ-alumina, is used as the carrier film. Are formed on a dry film resist provided in a portion of the wall surface of the grooves 53, 53,... And the one surface 52 of the first substrate 51 where the grooves 53, 53,. Next, when the first substrate 51 is immersed in the catalyst dispersion (dip coating method), the catalyst is supported on the carrier film. Thus, the catalyst film is formed on the entire surface, and then the dry film resist is removed to leave the catalyst 54 on the walls of the grooves 53, 53,. The method for coating the sol or the catalyst dispersion on one surface 52 of the first substrate 51 may be a spin coating method or another coating method instead of the dip coating method.

  Next, as shown in FIG. 4, a second substrate 61 having the same shape as the first substrate 51 in a plan view is prepared. The second substrate 61 is a plate-like substrate whose both surfaces are flat, and is formed in a plate shape from a material such as silicon, aluminum, or glass. Then, a mask (resist) 83 is formed on one surface 62 of the second substrate 61, and the mask 83 is exposed and developed, whereby a plurality of openings 84, 84,. Form. Here, in the openings 84, 84,..., One surface 62 of the second substrate 61 is exposed. Here, one end in the longitudinal direction of the opening 84 corresponds to one end in the longitudinal direction of the opening 82 shown in FIG. 1, and the other end in the longitudinal direction of the opening 84 is adjacent. Opening portions 84, 84,... Are formed so as to correspond to one end portion of the opening portion 82 in the longitudinal direction.

  Next, in a state where the mask 83 is applied, an etching method, a sand blasting method, or the like is performed on one surface 62 of the second substrate 61, whereby the grooves 63 are formed in the second substrate 61 in the openings 84, 84,. , 63,... (See FIGS. 5A and 5B). The openings 84, 84,... Are linear and the openings 84, 84,... Have no bent portions, so that the grooves 63, 63,. Therefore, even if the grooves 63, 63,... Are formed so as to narrow the interval between the grooves 63, 63,..., The adjacent grooves 63, 63 are not connected.

1
Next, the mask 83 is removed using a removing liquid (peeling liquid) (see FIGS. 5A and 5B). Note that the mask 83 may be mechanically peeled without using the removing liquid.

  Next, a dry film resist is coated on one surface 62 of the second substrate 61, an opening is provided in a portion located in the grooves 63, 63,... Of the dry film resist, and the one surface 62 of the second substrate 61 is provided. Are formed on the wall surfaces of the grooves 63, 63,... And the upper surface of the dry film resist mask using a dry film resist provided in a portion where the grooves 63, 63,. The dry film resist is peeled off together with the catalyst formed on the upper surface (see FIGS. 6A and 6B). Here, the formation method of the catalyst 64 is the same as the formation method of the catalyst 54, and the components of the catalyst 64 are the same as the components of the catalyst 54. Next, a resist mask having an opening is provided at a position corresponding to one end of the groove 53 positioned at the end and a position corresponding to the other end of the groove 53 positioned at the other end, and A through hole 65 penetrating from one surface 62 of the second substrate 61 to the other surface and a through hole 66 penetrating from one surface 62 of the second substrate 61 to the other surface are formed, and the resist mask is removed.

As shown in FIG. 7, one surface 52 of the first substrate 51 is bonded to one surface 62 of the second substrate 61, and the outer shape of the second substrate 61 is aligned with the outer shape of the first substrate 51 in plan view. The first substrate 51 is bonded to the second substrate 61. Here, the end of the groove 53 positioned at one end is aligned with the through hole 65, and the end of the groove 53 positioned at the other end is aligned with the through hole 66. Furthermore, one end of the groove 63 is aligned with one end of the groove 53, the other end of the groove 63 is aligned with one end of the adjacent groove 53, and the groove 63 is adjacent to the adjacent grooves 53, 53 in plan view. The first substrate 51 is bonded to the second substrate 61 so that the end of the groove 53 and the end of the adjacent groove 53 are connected via the groove 63. Thereby, the groove | channel 53,53, ... and the groove | channels 63,63, ... can be combined, and the flow path 71 of the planar view twisted shape connected from the through-hole 65 to the through-hole 66 can be formed. Here, since the grooves 53, 53,... And the grooves 63, 63,... Can be formed with high accuracy, the bent portion of the flow path 71, that is, the intersection between the grooves 53 and 63 is formed with high accuracy. Can do.
In the conventional manufacturing method, the distance between adjacent grooves is about 0.35 mm. However, in the manufacturing method of this embodiment, the distance between adjacent grooves 53 and 53 can be 0.1 mm or less. When the width is 0.2 mm, the ratio of the channel area in the substrate is improved from 36% to 66%, and when the groove areas are the same, the size of the substrate according to the present embodiment is the same as that of the conventional manufacturing method. Can be halved.

  Next, a fold-like thin film heater 72 is formed on the other surface of the first substrate 51. The thin film heater 72 is formed by forming an electric resistance heating element, a semiconductor heating element or the like into a thin film, and generates heat by electric energy generated when a current flows or a voltage is applied.

Thus, the reactor 50 is completed.
In the manufacturing method as described above, since the linear grooves 53, 53,... And the grooves 63, 63,... Are formed on the separate substrates 51, 61, the bent portion of the flow path 71 can be formed with high accuracy. . Therefore, it is possible to form the grooves 53, 53,... By narrowing the interval between the grooves 53, 53,... And further form the grooves 63, 63,. Can do. Accordingly, the area occupied by the flow path 71 can be further increased.

  In the completed reactor 50, the two bonded substrates 51 and 61 become the main body of the reactor 50, and the grooves 53, 53,... Are communicated with each other by the grooves 57, 57,. The flow path 71 is formed inside the main body of the reactor 50. Here, the extending direction of the groove 53 is orthogonal to the extending direction of the groove 57.

  The usage method of the reactor 50 manufactured as mentioned above is demonstrated. In a state where the thin film heater 72 is heated by applying electric power to the thin film heater 72, a fluid reactant is poured into one through hole 65. Then, the reactant flows through the flow path 71 to the through hole 66, the reactant is heated by the heat of the thin film heater 72, and the reactant reacts. Here, when the catalysts 54, 64 are formed on the walls of the grooves 53, 53, ..., the grooves 63, 63, ..., the action and heat of the catalysts 54, 64 when the reactant is flowing through the flow path 71. And reacts to produce a product from the reactant. Further, when the reactant is a liquid and the catalysts 54 and 64 are not formed on the walls of the grooves 53, 53,..., The grooves 63, 63,. Change.

  When the grooves 63, 63,... Are formed on one surface 62 of the second substrate 61, grooves 67, 67,. good. Here, the grooves 67, 67,... Are arranged from the grooves 53, 53,... Of the first substrate 51 so that the grooves 67, 67,. Also short. Of course, a catalyst 68 (shown in FIG. 9) similar to the catalyst 64 formed in the grooves 63, 63,... May be formed on the walls of the grooves 67, 67,.

  As shown in FIG. 9, as in the case of manufacturing the reactor 50, the surface 62 of the second substrate 61 is bonded to the one surface 52 of the first substrate 51, and the groove located at one end. The end of 53 is aligned with the through hole 65, the end of the groove 53 located at the other end is aligned with the through hole 66, and the groove 67 is aligned with the longitudinal center of the groove 63. Furthermore, one end of the groove 63 is aligned with one end of the groove 53, the other end of the groove 63 is aligned with one end of the adjacent groove 53, and the groove 63 is adjacent to the adjacent grooves 53, 53 in plan view. The first substrate 51 is bonded to the second substrate 61 so that the end of the groove 53 and the end of the adjacent groove 53 are connected via the groove 63. In this way, the groove 53, 53,..., The grooves 63, 63,... And the grooves 67, 67,. Can do. Next, a fold-like thin film heater 72 is formed on the other surface of the first substrate 51 to complete the reactor 60.

The power generator 1 using the reactor 50 and the reactor 60 manufactured as described above will be described with reference to FIG.
FIG. 10 is a block diagram showing the power generation device 1.
The power generation device 1 is provided in a notebook personal computer, a mobile phone, a PDA, an electronic notebook, a wristwatch, a digital still camera, a digital video camera, a game device, a game machine, a household electric device, and other electronic devices. Yes, it is used as a power source for operating the electronic device main body.

  The power generation apparatus 1 includes a first fuel container 2 that stores a first fuel serving as a power generation source, a second fuel container 4 that stores a second fuel, and a first fuel container 2 that is supplied from the first fuel container 2. A first vaporizer 3 for vaporizing the fuel, a first fuel pump 7 for sucking the first fuel from the first fuel container 2 and supplying the sucked first fuel to the first vaporizer 3; A second vaporizer 15 that vaporizes the second fuel supplied from the second fuel container 2, and a second fuel that is aspirated from the second fuel container 4 to the second vaporizer 15. From the second fuel pump 8 to be supplied, the first combustor 5 and the second combustor 6 for burning the second fuel supplied from the second carburetor 15 by the catalyst, and the first carburetor 3 A reformer 9 that reforms the supplied fuel mixture of the first fuel into hydrogen, and one mixture from the gas mixture supplied from the reformer 9. A carbon monoxide remover 10 for removing carbonized carbon, a fuel cell 11 for generating electric energy by an electrochemical reaction between hydrogen and oxygen in the outside air of the gas mixture supplied from the carbon monoxide remover 10, And an air pump 12 that sucks air and supplies the sucked air to the first combustor 5, the second combustor 6, the carbon monoxide remover 10, and the fuel cell 11.

  First vaporizer 3, first combustor 5, second combustor 6, first fuel pump 7, second fuel pump 8, reformer 9, carbon monoxide remover 10, fuel cell 11 The air pump 12 and the second vaporizer 15 are mounted on the electronic device main body. On the other hand, the first fuel container 2 and the second fuel container 4 are provided so as to be detachable from the electronic device main body.

  The first fuel stored in the first fuel container 2 is a mixture of liquid chemical fuel and water. As the chemical fuel, alcohols such as methanol and ethanol, and compounds containing hydrogen elements such as gasoline are applicable. is there. Here, in particular, a mixed liquid of methanol and water is used as the first fuel. The second fuel stored in the second fuel container 4 is a compound containing hydrogen elements such as alcohols such as methanol and ethanol, and gasoline. Here, in particular, methanol is used as the second fuel.

  Here, with respect to the first vaporizer 3, the first combustor 5, the second combustor 6, the reformer 9, the carbon monoxide remover 10, and the second vaporizer 15 among the above components. At least one of the reactor 50 and the reactor 60 manufactured as described above can be applied.

  When the reactor 50 or the reactor 60 is used as the first vaporizer 3 and the second vaporizer 15, the catalysts 54, 64, and 68 are not formed. When the reactor 50 or the reactor 60 is used as the first combustor 5 or the second combustor 6, a catalyst that promotes oxidation of the second fuel is used as the catalysts 54, 64, and 68. When the reactor 50 or the reactor 60 is used as the reformer 9, a catalyst that reforms the first fuel into hydrogen and carbon dioxide is used as the catalysts 54, 64, and 68. When the reactor 50 or the reactor 60 is used as the carbon monoxide remover 10, a catalyst that selectively oxidizes carbon monoxide is used.

  In the second vaporizer 15, the second fuel flowing from the second fuel pump 8 into the through hole 65 of the second vaporizer 15 is heated by the thin film heater 72 and vaporized.

  In the first combustor 5 and the second combustor 6, the second fuel discharged from the through hole 66 of the second carburetor 15 is passed through the through hole 65 of the first combustor 5 and the second combustor 6. Further, air flows from the air pump 12 into the through holes 65 of the first combustor 5 and the second combustor 6. The second fuel and air react with each other when flowing through the flow path 71 of the first combustor 5 and the second combustor 6 to generate combustion heat. The products generated in the first combustor 5 and the second combustor 6 are discharged to the outside through the through holes 66. The first combustor 5 is assembled to the first vaporizer 3, and the second combustor 6 is assembled to the reformer 9, and the combustion heat is generated from the first vaporizer 3 and the reformer. Heat is transferred to each container 9.

  The first fuel flowing into the through-hole 65 of the first carburetor 3 from the first fuel pump 7 is heated by the combustion heat in the first combustor 5 and the like while flowing in the flow path 71 of the first carburetor 3. As a result, the mixture is vaporized to generate a mixture of methanol and water (steam). The air-fuel mixture generated in the first vaporizer 3 is discharged from the through hole 66 of the first vaporizer 3 and flows into the through hole 65 of the reformer 9.

In the reformer 9, the mixture of the first fuel flowing into the through-hole 65 of the reformer 9 from the first vaporizer 3 is reformed to hydrogen and carbon dioxide during the flow of the flow path 71 of the reformer 9. (See the above chemical reaction formula (1).) In the reformer 9, methanol and steam may not be completely reformed to carbon dioxide and hydrogen. In this case, as shown in chemical reaction formula (4), methanol and steam react to react with carbon dioxide and carbon monoxide. Is generated.
2CH ₃ OH + H ₂ O → 5H ₂ + CO + CO ₂ (4)
The air-fuel mixture such as carbon monoxide, carbon dioxide and hydrogen generated in the reformer 9 is discharged from the through hole 66 of the reformer 9 and flows into the through hole 65 of the carbon monoxide remover 10.

In the carbon monoxide remover 10, the air-fuel mixture flowing from the reformer 9 into the through-hole 65 of the carbon monoxide remover 10 is included in the air-fuel mixture when flowing through the flow path 71 of the carbon monoxide remover 10. The carbon monoxide is selectively oxidized, and carbon monoxide is removed from the gas mixture (see the chemical reactor (3) above).
Then, the air-fuel mixture is discharged from the through hole 65 of the carbon monoxide remover 10 and flows into the fuel electrode of the fuel cell 11.

  The fuel cell 11 includes a fuel electrode as a gas diffusion layer made of catalyst fine particles and carrier fine particles, an air electrode as a gas diffusion layer made of catalyst fine particles and carrier fine particles, and hydrogen sandwiched between the fuel electrode and the air electrode. An ion conductive solid polymer electrolyte membrane.

An air-fuel mixture is supplied to the fuel electrode of the fuel cell 11 from the carbon monoxide remover 10, and as shown in the electrochemical reaction formula (5), hydrogen gas in the air-fuel mixture is subjected to the action of catalyst fine particles in the fuel electrode. And separated into hydrogen ions and electrons. Hydrogen ions are conducted to the air electrode through the solid polymer electrolyte membrane, and electrons are taken out by the fuel electrode.
H ₂ → 2H ⁺ + 2e ⁻ (5)
Of the air-fuel mixture supplied to the fuel electrode of the fuel cell 11, products (such as carbon dioxide) that do not contribute to the electrochemical reaction are discharged to the outside.

Air is supplied from the air pump 12 to the air electrode of the fuel cell 11, and as shown in the electrochemical reaction formula (6), oxygen in the air, hydrogen ions that have passed through the solid polymer electrolyte membrane, and the fuel electrode Reacts with the electrons taken out by the above, to produce water as a product.
2H ⁺ + 1 / 2O ₂ + 2e ⁻ → H ₂ O (6)
Of the air supplied to the air electrode of the fuel cell 11, gas (such as nitrogen) that does not contribute to the electrochemical reaction and generated water are discharged to the outside.

  As described above, in the power generation device 1, electric energy is generated by the electrochemical reactions shown in the above (5) and (6) in the fuel cell 11.

  The present invention is not limited to the above-described embodiment, and various improvements and design changes may be made without departing from the spirit of the present invention.

3 is a drawing for explaining one process when manufacturing the reactor 50. It is drawing for demonstrating the next process of FIG. FIG. 3 is a diagram for explaining a step subsequent to FIG. 2. FIG. 4 is a drawing for explaining the next step of FIG. 3. FIG. 5 is a drawing for explaining the next step of FIG. 4. It is drawing for demonstrating the next process of FIG. It is drawing for demonstrating the next process of FIG. It is drawing for demonstrating the process instead of FIG. It is drawing which showed the reactor 60 manufactured through the process of FIG. It is a block diagram of the electric power generating apparatus 1 using the reactors 50 and 60. FIG.

Explanation of symbols

50, 60 ... reactor 51 ... first substrate 53 ... groove 54 ... catalyst 61 ... second substrate 63 ... groove 64 ... catalyst 67 ... groove 68 ... catalyst 71 ... flow path 72 ... thin film heater

Claims (6)

A first substrate having a plurality of grooves formed on one surface;
A second substrate in which a plurality of grooves formed on the first substrate by communicating with the first substrate communicate with each other is formed on a surface facing the first substrate;
The reactor characterized by having.   The extending direction of a part of the plurality of grooves formed on the first substrate and the extending direction of a part of the grooves formed on the second substrate are orthogonal to each other. Reactor according to.   The reactor according to claim 1 or 2, wherein the plurality of grooves formed in the first substrate are formed in a straight line. Forming a linear groove on one surface of the first substrate;
Forming a linear groove on one surface of the second substrate;
One surface of the first substrate is bonded to one surface of the second substrate, and a part of the groove of the first substrate is overlapped with a part of the groove of the second substrate. Bonding one surface of the first substrate to one surface of the second substrate so that the groove of the substrate intersects the groove of the second substrate. Method.   The method for producing a reactor according to claim 4, wherein a catalyst is formed on a wall surface of at least one of the groove of the first substrate and the groove of the second substrate.   The method for producing a reactor according to claim 4 or 5, wherein a thin film heater is formed on the other surface of at least one of the first substrate and the second substrate.

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