JP2009179525A - Reactor, method for manufacturing reactor, and power generation system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a reactor which can be minimized and in which fluctuation in a flow rate of a reaction gas is stabilized to cause a preferable reforming reaction, and which can prevent peeling of a catalyst in a reaction flow passage, and a method for manufacturing the reactor, and a power generation system. <P>SOLUTION: The reactor 10 includes: flow passage grooves 18 formed on upper and lower surfaces 1a, 1b of a flow passage substrate 1; and first and second cap substrates 2, 3 covering the flow passage grooves 18 to form a reaction flow passage 12 between the cap and the substrate 1. Porous portions 11a, 11b are provided in the reaction flow passage 12. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a reactor that causes reaction of reactants, a method for manufacturing the reactor, and a power generation system.

In recent years, research and development have been actively conducted on fuel cells capable of realizing high energy use efficiency as a highly efficient and clean energy source due to global environmental problems. BACKGROUND ART A fuel cell is a promising battery that is promising and promising because it can directly extract electric energy from chemical energy by electrochemically reacting fuel and oxygen in the atmosphere.
Since hydrogen as a fuel used in a fuel cell is a gas at normal temperature, there is a problem in handling and storage. Therefore, when fuels such as alcohols and gasoline are used, the system for storing liquid fuel becomes relatively small. However, when a fuel reforming fuel cell is used as a power source for small electronic devices, only the fuel cell is used. In addition, the reformer must be downsized.
As a small reformer for supplying hydrogen to the fuel cell, a fine reaction flow path is formed with a substrate typified by Si or glass, and a methanol aqueous solution or the like is used as a raw material in the flow path provided with a catalyst. There is a small chemical reaction device (micro reformer) that causes a small-scale chemical reaction to obtain the above. A small chemical reactor that can control the concentration and temperature much more precisely than before by performing the reaction in a micro space with a large surface area per volume, including a micro reformer, is called a microreactor. In order to obtain the reaction products of conventional chemical plants, it has been realized by scaling up the reaction vessel, but in order to take advantage of this microreactor, the amount of products can be reduced by arranging multiple small reactors. A system to earn is considered.

As an example of using a porous material to stabilize the reaction in the reformer or carbon monoxide remover,
In the reformer and carbon monoxide remover, a pressure loss plate having a hole with a smaller diameter than the gas flow path of each catalyst layer is arranged on the downstream side of the catalyst layer to make the flow velocity surface distribution of the reaction gas uniform. Thus, there is a technique of stabilizing the reaction and simultaneously functioning as a filter for the catalyst that has been peeled off (see, for example, Patent Document 1). As the pressure loss plate, a perforated plate in which a plurality of holes are formed in a metal plate such as SUS is used.
JP 2000-31005 A

Currently, in a micro reformer, there is a method in which a catalyst suitable for reaction is mounted in a micro-channel and the fuel is reformed by contact action with the fuel gas. Pressure control is not easy. If a pressure change occurs during the reaction, the reaction becomes unstable. In particular, when a large load fluctuation of the fuel cell reaction connected to the subsequent stage of the micro reformer or switching of the gas flow path occurs, the flow is further increased. When the pipe connecting the passage and other parts (for example, a fuel cell, etc.) is accidentally damaged or detached, the pressure change that occurs suddenly causes the catalyst to peel off. As a conventional means for controlling the pressure, the pressure loss plate is provided inside the reformer as described above. However, when applying to the micro reformer, the reformer becomes larger and the heat capacity is thereby increased. Inconveniences such as increase and deterioration of thermal efficiency occur.
The present invention has been made in view of the above circumstances, and can reduce the size and stabilize the flow rate fluctuation of the reaction gas to cause a good reforming reaction, a method for producing the reactor, and power generation The purpose is to provide a system.

In order to solve the above problems, the invention of claim 1 is a reactor formed of a plurality of substrates and causing reaction of reactants.
A first substrate having at least one substrate of the plurality of substrates and having a groove formed on at least one surface;
A second substrate that is bonded to the one side surface of the first substrate and forms a reaction channel by covering the groove; and
At least one of the positions where the inlet side and the outlet side of the reaction channel of the second substrate are formed, the surface side of the second substrate to be bonded to the first substrate and the surface opposite to the surface to be bonded It is characterized in that a fine hole penetrating the side is provided.

Invention of Claim 2 is the reactor of Claim 1,
The micropores are porous bodies.
The invention according to claim 3 is the reactor according to claim 2,
The second substrate is a silicon substrate, and the porous body is formed by an anodizing method or a deep etching method.
Invention of Claim 4 is a reactor as described in any one of Claims 1-3,
It is a reformer that generates reformed gas by supplying fuel.
The invention of claim 5 is a method of manufacturing a reactor which is formed of a plurality of substrates and causes reaction of reactants.
Forming a groove on at least one surface of the first substrate which is at least one of the plurality of substrates;
The reaction flow by joining the first substrate to the first substrate of the second substrate that forms a reaction flow path for causing the reaction by joining the first substrate and the surface on one side. At least one of the positions forming the inlet side and the outlet side of the path is formed with a fine hole through which the surface side of the second substrate to be bonded to the first substrate and the surface side opposite to the surface to be bonded penetrate. It is characterized by doing.
The invention of claim 6 is the power generation system,
Reactor according to any one of claims 1 to 4,
And a power generation cell that generates power by an electrochemical reaction.

  According to the present invention, it is possible to reduce the size and stabilize the fluctuation of the flow rate of the reaction gas to cause a good reforming reaction.

The best mode for carrying out the present invention will be described below with reference to the drawings. However, the scope of the invention is not limited to the illustrated examples.
[Reactor]
1A is a top view of the first lid substrate 2, FIG. 1B is a bottom view of the first lid substrate 2, and FIG. 2A is a top view of the flow path substrate 1. 2 (b) is a bottom view of the flow path substrate 1, and FIG. 3 is a view of the first lid substrate 2, the flow path substrate 1 and the first line when cut along the cutting lines II and II-II. FIG. 4 is a sectional view of the reactor 10, and FIG. 4 is a sectional view of the reactor 10.
As shown in FIG. 4, the reactor 10 includes a flow path substrate 1, a first lid substrate 2 provided on the upper portion of the flow path substrate 1, and a second lid provided on the lower portion of the flow path substrate 1. And a substrate 3.
As the flow path substrate 1, for example, it is preferable to use a silicon substrate, particularly an n-type silicon substrate. The thickness is preferably about 600 μm. In the flow path substrate 1, flow path grooves 18a and 18b penetrating the upper and lower surfaces 1a and 1b are formed at two locations. Porous portions 11a and 11b are respectively provided in rectangular shapes in plan view at the upper end portions of the flow channel grooves 18a and 18b, and the porous portions 11a and 11b are exposed to the upper and lower surfaces 1a and 1b of the flow channel substrate 1. is doing. The porous portions 11a and 11b can be formed by an anodizing method described later.

  One of the two channel grooves 18a and 18b is located at a position corresponding to an end 21a of the channel groove 21 described later when the first lid substrate 2 and the channel substrate 1 are joined. The other channel groove 18 b is formed at a position corresponding to the end 21 b of the channel groove 21. As shown in FIG. 2 (b), the lower end of the channel groove 18 a penetrates one side surface of the channel substrate 1 and communicates with a supply port 19 a that supplies an air-fuel mixture described later into the reaction channel 12. ing. Furthermore, the lower end portion of the flow channel groove 18b penetrates the side surface of the flow channel substrate 1 opposite to the supply port 19a, and communicates with a discharge port 19b that supplies the reaction flow channel 12 and discharges the reacted air-fuel mixture. is doing.

For example, a glass substrate or a silicon substrate can be used as the first lid substrate 2. On the lower surface 2 b of the first lid substrate 2, a meandering channel groove 21 is formed. The flow channel 21 does not penetrate the upper surface 2 a of the first lid substrate 2. A catalyst layer 22 is supported on the inner wall surface of the flow channel 21. Examples of the catalyst layer 22 include a Cu / ZnO-based catalyst and a Pd / ZnO-based catalyst.
A thin film heater 23 made of an electric resistor is meandered along the flow path groove 21 on the upper surface 2 a of the first lid substrate 2. A Kovar wire 24 is connected to both ends of the thin film heater 23 via an Au film 25 that is an electrode wiring portion, and becomes a heat source during a reforming reaction that is an endothermic reaction by applying a voltage. It may be used when the catalyst layer 22 is fired.
For example, a glass substrate or a silicon substrate can be used as the second lid substrate 3.

Then, by joining the first lid substrate 2, the channel substrate 1 and the second lid substrate 3, the channel groove 21 and the channel grooves 18 a and 18 b become the reaction channel 12. The supply port 19a and the discharge port 19b communicate with each other. And the porous parts 11a and 11b are provided in the supply port 19a side and the discharge port 19b side of the reaction channel 12. The bonding of the substrates is preferably anodic bonding when the flow path substrate 1 is a silicon substrate and the first lid substrate 2 and the second lid substrate 3 are glass substrates.
In the reactor 10 configured in this way, as will be described later, for example, a reactant is supplied from a supply port 19a and flows through the reaction channel 12 to react with the catalyst layer 22, and then as a product, a discharge port 19b. Discharged from. Here, even if the pressure loss suddenly changes on the supply port 19a side or the discharge port 19b side of the reaction flow path 12, the reactant flowing in the reaction flow path 12 is a porous body 11 that becomes a pressure loss. Thus, the flow rate fluctuation is alleviated. Therefore, with respect to the reaction in the reaction flow path 12, the reactant flow rate is stable, and an appropriate reaction is performed. Further, since rapid flow rate fluctuations and pressure fluctuations do not occur in the reaction channel, the physical load on the catalyst due to the fluid can be reduced, and the catalyst layer 22 can be prevented from peeling off.

Next, the manufacturing method of the reactor 10 is demonstrated.
5A to 5H are process diagrams showing a method for manufacturing the flow path substrate 1.
First, the SiO ₂ film 14 is formed by sputtering on the upper surface 13a of the substrate 13 in FIG. 5A (see FIG. 5B). Next, a dry film photoresist 15 is attached to the upper surface of the SiO ₂ film 14 and the lower surface 13b of the substrate 13, and the dry film photoresist 15 of the flow channel groove 21 of the first lid substrate 2 is formed by photolithography. Resist patterning is performed so that positions corresponding to both end portions 21a and 21b are opened, and the SiO ₂ film 14 corresponding to both end portions 21a and 21b is removed using CF ₄ (see FIG. 5C). . In this state, when the substrate 13 is anodized using hydrogen fluoride, ethanol and water, only the portion where the dry film photoresist 15 is not patterned is made porous to form porous portions 11a and 11b (FIG. 5 (d)). The thickness of the porous portions 11a and 11b is preferably about 15 μm. Further, after the dry film photoresist 15 is peeled off, the SiO ₂ film 14 remaining on the upper surface 13a and the lower surface 13b of the substrate 13 is removed using CF ₄ (see FIG. 5E). Next, dry film photoresist 17 is affixed to the lower surface 13b of the flow path substrate 13 other than the portion corresponding to the upper surface 13a of the substrate 13 and the lower surfaces of the porous portions 11a and 11b (see FIG. 5 (f)). Then, wet anisotropic etching is performed in a tetramethylammonium hydroxide (TMAH) aqueous solution (see FIG. 5G). Thereafter, by removing the dry film photoresist 17 again, the flow path substrate 1 having the porous portions 11a and 11b in the flow path is formed (see FIG. 5 (h)).

On the other hand, the first lid substrate 2 is manufactured by the following procedure.
Although not shown, for example, first, the thin film heater 23 is formed on the upper surface (surface opposite to the flow channel) of the substrate by a photolithography method. After that, the channel grooves 21 are formed in a predetermined shape on the lower surface of the glass substrate or the like in advance by sandblasting or the like, and a dry film photoresist is attached to the lower surface where the channel grooves 21 are provided. Next, the portion corresponding to the channel groove 21 of the dry film photoresist is removed by photolithography. Next, the catalyst layer 22 is formed on the upper surface of the substrate. The catalyst layer 22 is formed, for example, by coating the upper surface of the substrate with a catalyst solution in which catalyst particles made of a Pd / ZnO catalyst are dispersed in a dispersion medium. If necessary, the dispersion medium may include a dispersant for enhancing the dispersibility of the catalyst particles, a thickener that prevents the dispersed catalyst particles from aggregating and settling, and the like.
When the coated catalyst solution is dried, the catalyst layer attached to the upper surface of the dry film photoresist is peeled off from the substrate using a peeling (peeling) method. At this time, the catalyst supported on the inner wall of the flow channel 21 remains as the catalyst layer 22. After peeling, if necessary, a slight residue (scum) of dry film photoresist remaining by peeling method is removed by plasma ashing (discum). In this way, the first lid substrate 2 is formed.

  As shown in FIG. 4, the first lid substrate 2 is joined to the upper surface 1 a of the flow path substrate 1 formed as described above, and the second lid substrate 3 is joined to the lower surface 1 b of the flow path substrate 1. Thus, the reactor 10 is manufactured. The flow path substrate 1 and the first lid substrate 2 and the flow path substrate 1 and the second lid substrate 3 can be joined by a joining method such as anodic bonding or brazing.

(Modification)
The flow path substrate is not limited to the flow path substrate 1 described above, and may be a flow path substrate 1A manufactured by the following procedure. 6A to 6G are process diagrams showing a method for manufacturing the flow path substrate 1A.
As shown in FIG. 6 (g), the flow path substrate 1A is different from the flow path substrate 1 in that the pressure loss member has a large number of fine holes 17A, 17A,... Instead of the porous portions 11a, 11b. It has become. As such a flow path substrate 1A, it is preferable to use a silicon substrate, and the flow path substrate 1 may not be an n-type silicon substrate. The thickness is preferably about 600 μm, for example.
As a manufacturing method of the flow path substrate 1A, first, as shown in FIG. 6A, a dry film photoresist 15A is attached to the upper surface 13aA of the substrate 13A, and patterning is performed by a photolithography method (see FIG. 6B). . Then, deep etching is performed on a part of the upper surface 13aA of the substrate 13A as shown in FIG. 6C by deep RIE (Reactive Ion Etching). Thereby, fine holes 17A, 17A,... Are formed. Next, the dry film resist 15A is removed (see FIG. 6D). Next, the dry film photoresist 16A is pasted again on the upper surface 13aA and the lower surface 13bA of the substrate 13A, and resist patterning is performed so that the positions corresponding to the micro holes 17A, 17A,. (See (e)), wet anisotropic etching is performed in an aqueous solution of tetramethylammonium hydroxide (TMAH) (see FIG. 6 (f)). After that, by removing the dry film resist 16A on the upper and lower surfaces 13aA and 13bA again, the flow path substrate 1A having a large number of micro holes 17A, 17A,... Is formed in the flow path (see FIG. 6 (g)). .

[Power generation system]
Next, the power generation system 200 using the reactor 10 will be described.
FIG. 7 is a block diagram illustrating a schematic configuration of the power generation system 200.
The power generation system 200 is provided in a notebook personal computer, a mobile phone, a PDA (Personal Digital Assistant), an electronic notebook, a wristwatch, a digital still camera, a digital video camera, a game device, a game machine, and other electronic devices. Yes, it is used as a power source for operating the electronic device main body 210.

  The power generation system 200 is supplied from a fuel container 201 that stores fuel such as methanol and water separately or in a mixed state, a vaporizer 202 that vaporizes fuel and water supplied from the fuel container 201, and a vaporizer 202. A reformer (reactor) 203 that generates a reformed gas containing hydrogen from a mixture of fuel and water according to the following chemical reaction formula (1), and a by-product in the reformed gas supplied from the reformer 203 The carbon monoxide remover 204 for removing carbon monoxide contained in the reformed gas by oxidizing the carbon monoxide of the product as shown in the following chemical reaction formula (2), and the carbon monoxide remover 204 to be described later. By an electrochemical reaction between hydrogen gas contained in the product gas (reformed gas from which carbon monoxide has been removed by the carbon monoxide remover 204) supplied through the third ON-OFF valve V3 and oxygen gas in the outside air Electric energy Is a combustion catalyst that heats the power generation cell 205 that generates hydrogen, the reformer 203, and the carbon monoxide remover 204, and sets the temperature to a temperature necessary to perform the reactions of the chemical reaction formulas (1) and (2) satisfactorily. And an air pump P2 for sucking outside air and supplying the sucked air to the carbon monoxide remover 204 and the fuel cell type power generation cell 205.

CH ₃ OH + H ₂ O → 3H ₂ + CO ₂ (1)
2CO + O ₂ → 2CO ₂ (2)

  The above reactor 10 can be used as the reformer 203 in which the reaction represented by the chemical reaction formula (1) occurs.

  As the fuel stored in the fuel container 201, an organic compound containing hydrogen atoms such as alcohols such as ethanol, ethers such as dimethyl ether, and hydrocarbons such as gasoline can be used instead of methanol.

Although not shown, the power generation cell 205 includes a fuel electrode carrying catalyst fine particles, an air electrode carrying catalyst fine particles, a film-like solid polymer electrolyte membrane interposed between the fuel electrode and the air electrode, It has. The generated gas is supplied to the fuel electrode of the power generation cell 205 from the carbon monoxide remover 204 via the third ON-OFF valve V3. Air from the air pump P2 is supplied to the air electrode of the power generation cell 205. Have been supplied. At the fuel electrode, as shown in the electrochemical reaction formula (3), hydrogen in the product gas is separated into hydrogen ions and electrons by the action of the catalyst particles of the fuel electrode. Hydrogen ions are conducted to the oxygen electrode through the solid polymer electrolyte membrane, and electrons are taken out by the fuel electrode. In the oxygen electrode, as shown in the electrochemical reaction formula (4), hydrogen ions that have passed through the solid polymer electrolyte membrane, electrons that have moved from the fuel electrode to the oxygen electrode through an external circuit, and oxygen in the air are Reaction produces water. The movement of electrons at this time becomes electric energy.
On the fuel electrode side, a lot of unreacted hydrogen is sent to the catalytic combustor 206 as off-gas and burned.
H ₂ → 2H ⁺ + 2e ⁻ (3)
2H ⁺ + 1 / 2O ₂ + 2e ⁻ → H ₂ O (4)

Further, between the fuel container 201 and the carburetor 202, a fuel pump P1, a flow rate sensor S, and a first ON-OFF valve V1 for sending fuel from the fuel container 201 to the carburetor 202 are connected in order, and carbon monoxide. A second ON-OFF valve V2 is connected between the remover 204 and the catalytic combustor 206, and a third ON-OFF valve V3 is connected between the carbon monoxide remover 204 and the power generation cell 205. Has been. Further, an air pump P2 for supplying air to the power generation cell 205, the carbon monoxide remover 204, and the catalytic combustor 206 is provided. Between the air pump P2 and the carbon monoxide remover 204, a first variable valve V11 and an air pump P2 are provided. The second variable valve V <b> 12 is connected between the first combustor 206 and the catalytic combustor 206.
The first ON-OFF valve V1 is configured to shut off or allow the flow of fuel from the fuel container 201 to the vaporizer 202 by its opening / closing operation, and is opened when the power generation system 200 is started to flow the fuel. Closed when stopped, shuts off fuel flow.
The second ON-OFF valve V2 is configured to shut off or permit the flow of hydrogen gas from the carbon monoxide remover 204 to the catalytic combustor 206 by its opening / closing operation, and is closed when the power generation system 200 is started. The flow of hydrogen gas is shut off, and the hydrogen gas is circulated by opening it when stopped.
The third ON-OFF valve V3 is configured to shut off or permit the flow of hydrogen gas from the carbon monoxide remover 204 to the power generation cell 205 by its opening / closing operation, and is opened when the power generation system 200 is started. Hydrogen gas is circulated and closed when shut down to shut off the hydrogen gas flow.
Also, the first variable valve V11 shuts off or adjusts the flow of air from the air pump P2 to the carbon monoxide remover 204 by its opening / closing operation, and the second variable valve V12 is opened / closed by the opening / closing operation. The air flow from the air pump P2 to the power generation cell 205 is blocked or the flow rate is adjusted.

The fuel pump P1 and the air pump P2 are electrically connected to the control unit 209 via a driver. The control unit 209 includes, for example, a general-purpose CPU (Central Processing Unit), RAM (Random Access Memory), ROM (Read Only Memory), and the like, and transmits control signals to the fuel pump P1 and the air pump P2. Each pumping operation (including adjustment of the delivery amount) of the fuel pump P1 and the air pump P2 is controlled.
The control unit 209 is electrically connected to the first to third ON-OFF valves V1 to V3, the first and second variable valves V11 and V12 via a driver, and the flow sensor S is also electrically connected. It is connected to the. The control unit 209 can recognize the flow rates of the fuel and water in response to the measurement result of the flow rate sensor S, and the first to third ON-OFF valves V1 to V3, the first and second variable valves V11, The opening / closing operation (including adjustment of the opening amount) of V12 can be controlled.
Furthermore, an electric heater for heating the vaporizer 202, the reformer 203, the carbon monoxide remover 204, and the catalytic combustor 206 is electrically connected to the control unit 209 via a driver. The temperature of each of the reactors 202, 203, 204, and 206 is detected by measuring the electrical characteristics such as the resistance value of the electric heater that changes depending on the temperature.

The power generation system 200 also includes a DC / DC converter 207 that converts electric energy generated by the power generation cell 205 into an appropriate voltage, and a secondary battery 208 connected to the DC / DC converter 207. The DC / DC converter 207 and the secondary battery 208 are connected to the control unit 209 and controlled so that electric energy is stably supplied to the electronic device main body 210.
The DC / DC converter 207 converts the electric energy generated by the power generation cell 205 into an appropriate voltage, and then supplies the electric energy generated by the power generation cell 205 to the secondary battery 208. When the power generation cell 205 side is not operated, the function of supplying electric energy from the secondary battery 208 side to the electronic device main body 210 can also be achieved.

Next, the operation of the power generation system 200 will be described.
The power generation system 200 is activated, the control unit 209 activates the fuel pump P1 and the air pump P2, and further heats the electric heater. Here, the operation of the power generation system 200 starts when an operation signal is input from the external electronic device to the control unit 209 via the communication terminal and the communication electrode.

  When the fuel pump P1 is operated, the fuel in the fuel container 201 is sent to the vaporizer 202 via the first ON-OFF valve V1, and then the fuel supplied by the vaporizer 202 is heated and vaporized ( Evaporate) to be supplied to the reformer 203 as a mixture of methanol and water (steam). In the reformer 203, methanol and water vapor in the gas mixture react with each other by a catalyst to generate a reformed gas containing carbon dioxide and hydrogen (see the above chemical reaction formula (1)). In the reformer 203, carbon monoxide is sequentially generated following the chemical reaction formula (1) (see the chemical reaction formula (2)). Then, the reformed gas composed of carbon monoxide, carbon dioxide, hydrogen, and the like generated in the reformer 203 is supplied to the carbon monoxide remover 204.

  In the carbon monoxide remover 204, carbon monoxide in the reformed gas supplied from the reformer 203 reacts with oxygen contained in the air supplied via the first variable valve V11, and carbon dioxide. (See the above chemical reaction formula (3)).

In this way, a product gas containing hydrogen, carbon dioxide and the like is generated through the vaporizer 202, the reformer 203, and the carbon monoxide remover 204, and the product gas passes through the opened third ON-OFF valve V3. After being humidified by a humidifier (not shown), it is supplied to the fuel electrode of the power generation cell 205.
Hydrogen in the product gas supplied to the fuel electrode of the power generation cell 205 is separated into hydrogen ions and electrons as shown in the electrochemical reaction formula (4).

  On the other hand, air humidified by a humidifier (not shown) is supplied to the oxygen electrode of the power generation cell 205 via the air pump P2. In the air supplied to the oxygen electrode, oxygen in the air reacts with hydrogen ions and electrons as shown in the electrochemical reaction formula (5) to generate water.

Here, on the fuel electrode side, unreacted hydrogen is sent to the catalytic combustor 206 as off-gas, burned, and discharged to the outside.
On the oxygen electrode side, the supplied air is discharged to the outside together with water as a by-product.
The electric energy generated by the power generation cell 205 is supplied to the DC / DC converter 207, converted into a predetermined voltage of direct current by the DC / DC converter 207, supplied to the external electronic device, and also to the secondary battery 208. Charged. The external electronic device operates with the supplied electric energy.

  On the other hand, when the power generation system 200 is stopped, the first ON-OFF valve V1 is closed to stop the fuel supply, and the third ON-OFF valve V3 is closed to close the second ON-OFF valve V2. Open. As a result, the flow of the product gas sent from the carbon monoxide remover 204 to the power generation cell 205 is blocked and sent to the catalytic combustor 206. Only the air from the air pump P <b> 2 is supplied to the power generation cell 205.

As described above, the flow path substrate 1 and the first and second lid substrates 2 and 3 are provided, and are formed by joining the flow path substrate 1 and the first and second lid substrates 2 and 3. Since the porous portions 11a and 11b are provided on the supply port 19a and the discharge port 19b side of the reaction channel 12, the supply of fuel is stopped when the power generation system 200 is stopped, and the third ON-OFF valve V3 is opened. When the product gas is sent to the catalytic combustor 206 by closing and opening the second ON-OFF valve V2, even if the pressure loss on the rear stage side of the reformer 203 suddenly decreases, the discharge port The pressure fluctuation can be relieved by the porous portion 11b on the 19b side, and a rapid flow rate change of the reformed gas can be reduced. As a result, the reforming reaction is stable, and the catalyst layer 22 in the reformer 203 can be prevented from peeling off.
Further, even if the pressure loss on the front stage side of the reformer 203 suddenly decreases during steady operation, the pressure fluctuation can be alleviated by the porous portion 11a on the supply port 19a side, and the rapid flow rate of the reformed gas can be reduced. Changes can be reduced. As a result, the pulsation of the vaporizer 202 can be alleviated, the reforming reaction is stabilized, and the flow rate variation of the reformed gas is stabilized, so that the separation of the catalyst layer 22 can be prevented.
That is, even if a sudden change occurs in the pressure or flow rate of the fluid generated before and after the reaction using the reactor 10, the catalytic reaction in the reactor 10 can be stably performed, and the catalyst layer 22. Can be prevented from peeling.
Furthermore, porous portions 11a and 11b are provided by anodization on the supply port 19a side and the discharge port 19b side in the reaction flow channel 12, and the flow path substrate 1 provided with such porous portions 11a and 11b, By joining the first and second lid substrates 2 and 3, the reactor 10 can be easily manufactured, and the size can be reduced without increasing the size as in the prior art.

  In addition, although it explained in full detail in the electric power generation system which applied the reactor 10 to the reformer 203, of course, it is not limited to this, For example, it can apply also to the carbon monoxide remover 204 and the catalytic combustor 206. Porous portions 11a and 11b are formed in portions corresponding to the supply port 19a side and the discharge port 19b side of the reactor 10, but for example, a rapid pressure change, a flow rate change, and a flow rate change of the fluid are provided in the subsequent stage of the reactor 10. If it is not generated, only the porous portion 11a on the supply port 19a side may be used. If there is no sudden pressure change, flow rate change, or flow rate change of the fluid upstream of the reactor 10, the supply port 19b side Only the porous portion 11b may be used, that is, either one of the porous portions 11a and 11b may be used. Furthermore, although the power generation system 200 has been described in detail for the solid polymer fuel cell system, it may be used for a solid oxide fuel cell system.

(a) is a top view of the first lid substrate 2, and (b) is a bottom view of the first lid substrate 2. (a) is a top view of the flow path substrate 1, and (b) is a bottom view of the flow path substrate 1. It is arrow sectional drawing of the 1st cover board | substrate 2, the flow path board | substrate 1, and the 2nd cover board | substrate 3 at the time of cut | disconnecting along the cutting line II and the cutting line II-II. 1 is a cross-sectional view of a reactor 10. FIG. (a)-(h) is process drawing which showed the manufacturing method of the flow-path board | substrate 1. FIG. (a)-(g) is process drawing which showed the manufacturing method of 1 A of flow-path substrates. 2 is a block diagram illustrating a schematic configuration of a power generation system 200. FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Channel substrate 2 1st lid substrate 3 2nd lid substrate 10 Reactor 11a, 11b Porous part 12 Reaction channel 13 Substrate 1a, 13a Upper surface 1b, 13b Lower surface 17A Fine hole 18, 21 Channel groove 19a Supply Mouth (entrance)
19b Discharge port (exit)
200 power generation system 203 reformer 205 power generation cell

Claims (6)

In a reactor formed of multiple substrates and causing reaction of reactants,
A first substrate having at least one substrate of the plurality of substrates and having a groove formed on at least one surface;
A second substrate that is bonded to the one side surface of the first substrate and forms a reaction channel by covering the groove; and
At least one of the positions where the inlet side and the outlet side of the reaction channel of the second substrate are formed, the surface side of the second substrate to be bonded to the first substrate and the surface opposite to the surface to be bonded A reactor characterized by being provided with micropores through which the side passes.   The reactor according to claim 1, wherein the micropore is a porous body.   The reactor according to claim 2, wherein the second substrate is a silicon substrate, and the porous body is formed by an anodizing method or a deep etching method.   The reactor according to any one of claims 1 to 3, wherein the reactor is a reformer that generates reformed gas by supplying fuel. In a method of manufacturing a reactor formed of a plurality of substrates and causing reaction of reactants,
Forming a groove on at least one surface of the first substrate which is at least one of the plurality of substrates;
The reaction flow by joining the first substrate to the first substrate of the second substrate that forms a reaction flow path for causing the reaction by joining the first substrate and the surface on one side. At least one of the positions forming the inlet side and the outlet side of the path is formed with a fine hole through which the surface side of the second substrate to be bonded to the first substrate and the surface side opposite to the surface to be bonded penetrate. A process for producing a reactor characterized by comprising: Reactor according to any one of claims 1 to 4,
A power generation system comprising: a power generation cell that generates power by an electrochemical reaction.

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