WO2013136970A1 - Flow path chip - Google Patents

Flow path chip Download PDF

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Publication number
WO2013136970A1
WO2013136970A1 PCT/JP2013/054938 JP2013054938W WO2013136970A1 WO 2013136970 A1 WO2013136970 A1 WO 2013136970A1 JP 2013054938 W JP2013054938 W JP 2013054938W WO 2013136970 A1 WO2013136970 A1 WO 2013136970A1
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WO
WIPO (PCT)
Prior art keywords
base material
porous body
flow path
channel
fluid
Prior art date
Application number
PCT/JP2013/054938
Other languages
French (fr)
Japanese (ja)
Inventor
信俊 畚野
淳子 伊藤
Original Assignee
アルプス電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by アルプス電気株式会社 filed Critical アルプス電気株式会社
Publication of WO2013136970A1 publication Critical patent/WO2013136970A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502753—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by bulk separation arrangements on lab-on-a-chip devices, e.g. for filtration or centrifugation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/40—Static mixers
    • B01F25/45—Mixers in which the materials to be mixed are pressed together through orifices or interstitial spaces, e.g. between beads
    • B01F25/452—Mixers in which the materials to be mixed are pressed together through orifices or interstitial spaces, e.g. between beads characterised by elements provided with orifices or interstitial spaces
    • B01F25/4522—Mixers in which the materials to be mixed are pressed together through orifices or interstitial spaces, e.g. between beads characterised by elements provided with orifices or interstitial spaces the components being pressed through porous bodies, e.g. flat plates, blocks or cylinders, which obstruct the whole diameter of the tube
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F33/00—Other mixers; Mixing plants; Combinations of mixers
    • B01F33/30—Micromixers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0093—Microreactors, e.g. miniaturised or microfabricated reactors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00788—Three-dimensional assemblies, i.e. the reactor comprising a form other than a stack of plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00788—Three-dimensional assemblies, i.e. the reactor comprising a form other than a stack of plates
    • B01J2219/00792—One or more tube-shaped elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00819—Materials of construction
    • B01J2219/00833—Plastic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00819—Materials of construction
    • B01J2219/00835—Comprising catalytically active material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00819—Materials of construction
    • B01J2219/00844—Comprising porous material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00889—Mixing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/06—Fluid handling related problems
    • B01L2200/0689—Sealing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/06—Auxiliary integrated devices, integrated components
    • B01L2300/0681—Filter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0809—Geometry, shape and general structure rectangular shaped
    • B01L2300/0816—Cards, e.g. flat sample carriers usually with flow in two horizontal directions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
    • B01L2300/0874—Three dimensional network
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/12—Specific details about materials
    • B01L2300/123—Flexible; Elastomeric

Definitions

  • the present invention relates to a flow path chip in which a porous body is disposed in a flow path formed between a first base material and a second base material.
  • a flow channel chip is used as a device for mixing, reacting or separating a small amount of fluid.
  • the channel chip has a configuration in which a porous body is disposed in a channel formed between substrates. In the porous body, the liquid is mixed and the components in the fluid are separated.
  • the dimensional accuracy of the porous body is not sufficient, and a gap is formed between the porous body and the base material facing in the height (thickness) direction, so that high-precision fluid treatment via the porous body is possible. There was a problem that could not be done.
  • the present invention solves the above-described conventional problems, and in particular, a flow path capable of making the gap between the porous body and the substrate smaller than before or eliminating the gap, and capable of highly accurate fluid processing.
  • the purpose is to provide chips.
  • the flow channel chip in the present invention includes a first base material, a second base material, a concave flow channel formed between the first base material and the second base material, and the flow A porous body disposed in a channel, and the porous body disposed between the first base and the second base via the porous body, the first base or the first base And an urging member for pressing against one of the two substrates.
  • a flat surface is formed in the porous body, and an input / output surface having an opening having at least one of an input port and an output port is formed in the flow path.
  • the force member preferably presses the flat surface of the porous body against the input / output surface so as to cover the opening. Thereby, the fluid entering and exiting from the input / output port easily passes through the inside of the porous body.
  • the flow path is formed in at least the first base material, the urging member is disposed between the porous body and the second base material, and the porous material is disposed in the first base material. It is preferable to adopt a configuration in which the substrate is pressed against the substrate.
  • the urging member is preferably a heat-shrinkable film or an elastic body.
  • a foam is preferably used as the elastic body. This effectively prevents a gap from being formed between the porous body and the substrate.
  • silica monolith can be selected as the porous body.
  • the gap between the porous body and the substrate can be reduced or eliminated compared to the conventional case, and highly accurate fluid processing is possible.
  • FIG. 1A is a plan view of the flow channel chip according to the first embodiment of the present invention, and FIG. 1B is a right side view thereof.
  • FIG. 2A is a plan view showing a second substrate (main body plate) of the flow path chip, and FIG. 2B is a right side view.
  • FIG. 3A is a plan view showing a first substrate (main body plate) of the flow path chip, and FIG. 3B is a right side view.
  • FIG. 4A is a plan view showing a third substrate (main body plate) of the flow path chip, and FIG. 4B is a right side view.
  • FIG. 5 is an enlarged cross-sectional view of the flow channel chip taken along line VV in FIG. FIG.
  • FIG. 6 is an enlarged cross-sectional view of the flow path chip taken along line VI-VI in FIG.
  • FIG. 7 is an enlarged cross-sectional view of the flow path chip according to the second embodiment of the present invention.
  • FIG. 8 is an enlarged cross-sectional view of the flow path chip according to the third embodiment of the present invention.
  • FIG. 1 (A) is a plan view of a flow path chip according to the first embodiment of the present invention
  • FIG. 1 (B) is a right side view thereof.
  • the flow path chip 1 As shown in FIG. 1 (B), the flow path chip 1 according to the first embodiment of the present invention has the plate thickness of the first base material 10, the second base material 20, and the third base material 30.
  • the main body is configured by being stacked in the direction.
  • the first base material 10, the second base material 20, and the third base material 30 are all formed of the same synthetic resin material.
  • a preferred synthetic resin material is a cyclic polyolefin resin (cycloolefin polymer; COP) having resistance to chemicals and low fluorescence.
  • COP cycloolefin polymer
  • the synthetic resin can be freely selected according to the physical properties of the fluid used.
  • the first base material 10, the second base material 20, and the third base material 30 have, for example, the same thickness t.
  • the thickness dimension t is about 0.3 to 3.0 mm.
  • the first base material 10, the second base material 20, and the third base material 30 are all quadrangular in planar shape, but the shape is not limited.
  • the second base material 20 has a quadrangular planar shape, and has a joining surface 20a and an outer surface 20b as shown in FIG. 2B.
  • Positioning holes 21 are formed in the four corners of the quadrangular plane of the second base material 20 so as to penetrate in the plate thickness direction.
  • Holes to be the inlets 22 and 23 are formed in two positions on the upper side of the second base material 20 in the plate thickness direction, and a hole to be the outlet 24 is formed to have a plate thickness at one position on the lower side of the drawing. It is formed to penetrate in the direction.
  • the first base material 10 has a quadrangular planar shape, and has a first bonding surface 10a and a second bonding surface 10b as shown in FIG. is doing.
  • Positioning holes 11 are formed through the four corners of the quadrangular plane of the first base material 10.
  • the positioning holes 21 formed in the second base material 20 and the positioning holes 11 formed in the first base material 10 are formed with the same opening diameter and the same arrangement pitch.
  • the first base material 10 is formed with two holes 12 and 13 penetrating in the thickness direction.
  • the inlets 22 and 23 of the second substrate 20 and the inlets 12 and 13 of the first substrate 10 are formed with the same opening diameter and the same arrangement pitch.
  • the first base material 10 has an opening formed on the first bonding surface 10a and formed in a concave shape toward the second bonding surface 10b.
  • a bottom processing channel 15 (processing tank) is formed.
  • the processing flow path 15 has a perfect circular opening shape opened to the first bonding surface 10a.
  • the processing flow path 15 has a circular bottom surface 15a and a tapered side surface that rises from the periphery of the bottom surface 15a and gradually increases the opening area toward the first bonding surface 10a. 15b is formed.
  • the processing flow channel 15 is formed with a concave output channel 14 extending radially from one portion of the tapered side surface 15b.
  • the output flow path 14 is formed at a position where it can communicate with the outflow port 24 formed in the second base material 20.
  • An input port 16 is formed at the center of the true circular diameter of the bottom surface 15a (input / output surface) of the processing flow path 15. As shown in FIG. 6, the input port 16 is a hole that penetrates from the bottom surface 15 a of the processing channel 15 to the second bonding surface 10 b.
  • the third base material 30 has a quadrangular planar shape, and has a joining surface 30a and an outer surface 30b as shown in FIG. 4 (B).
  • Positioning holes 31 are formed through the four corners of the rectangular plane of the third base material 30.
  • the positioning hole 21 formed in the second base material 20, the positioning hole 11 formed in the first base material 10, and the positioning hole 31 formed in the third base material 30 have the same opening diameter. They are formed with the same arrangement pitch.
  • the joining surface 30a of the third base material 30 is provided with inflow channels 32 and 33 formed by two concave portions extending obliquely.
  • the start end 32 a of one inflow channel 32 is located directly below the inlet 12 formed in the first base material 10, and the start end 33 a of the other inflow channel 33 is formed in the first base material 10. It is located directly below the inlet 13.
  • the input flow path 36 formed of a linearly extending recess is formed on the bonding surface 30a of the third base material 30.
  • a terminal end 36 a of the input flow path 36 is directly opposite to the input port 16 communicating with the processing flow path 15 of the first substrate 10.
  • the depth dimension from the joint surface 30a of the inflow channels 32 and 33 and the input channel 36 is substantially the same as the depth dimension of the output channel 14.
  • the end 32b of the inflow channel 32, the end 33b of the inflow channel 33, and the start end 36b of the input channel 36 are communicated with each other via the mixing channel 35.
  • the porous body 41 is accommodated in the processing flow path 15 formed in the first base material 10.
  • an output space 15c is formed by the shape of the side surface of the porous body 41 and the tapered side surface 15b around the entire periphery of the processing channel 15 formed in the first base material 10.
  • an urging member 42 for pressing the porous body 41 against the first base material 10 is provided between the porous body 41 and the second base material 20.
  • a heat-shrinkable film can be preferably applied to the urging member 42.
  • the heat-shrinkable film preferably has chemical resistance as well as shrink performance.
  • the heat-shrinkable film shrinks in the plane direction and slightly expands in the thickness direction (height direction) when the first base material 10 and the second base material 20 are heated and pressed and joined together.
  • the porous body 41 can be pressed against the first substrate 10 by the film.
  • As the heat-shrinkable film a film made of the same material as each substrate can be applied. As a result, the biasing member 42 and the second base material 20 can be brought into close contact with each other.
  • the urging member 42 can be an elastic body.
  • the elastic bodies it is preferable to use a foam.
  • a resin sheet having both chemical resistance and elasticity can be applied to the foam, such as cycloolefin copolymer (COC).
  • COC cycloolefin copolymer
  • the porous body 41 can be pressed against the first base material 10 by sandwiching the foam between the porous body 41 and the second base material 20. Further, by using a cycloolefin polymer as the base material and using the same cyclic polyolefin-based cycloolefin copolymer as the cycloolefin polymer as the biasing member 42, the biasing member 42 and the second base material 20 are brought into close contact with each other. Can be joined.
  • the biasing member 42 described above is interposed between the porous body 41 and the second base material 20, so that the porous body 41 and the first base material 10, and the porous body 41.
  • the gap formed between the second base material 20 can be made smaller than before, or the gap can be eliminated.
  • the porous body 41 is used for mixing liquids, promoting chemical reactions, or separating components in a fluid.
  • the porous body 41 can be made of various materials such as ceramics and polymers. You can choose.
  • a porous body of sintered ceramics having a monolith structure is preferable because high-performance separation and mixing can be performed with low flow path loss.
  • a silica monolith formed entirely of integral silica gel is suitable.
  • a product manufactured by Kyoto Monotech Co., Ltd. can be used.
  • the porous body 41 Since the porous body 41 is manufactured through a process such as sintering, the dimensional accuracy can be increased as compared with the base materials 10 and 20 that can be manufactured by molding using a mold. difficult. If the thickness dimension of the porous body 41 is determined with a minus tolerance so that the porous body 41 can be reliably stored in the flow path, a gap between the porous 41 and the base materials 10 and 20 often occurs. Therefore, by arranging the urging member 42 between the porous body 41 and the second base material 20 and pressing the porous body 41 against the first base material 10, It is possible to effectively reduce the gap between the base materials 10 and 20 facing in the vertical direction, or to eliminate the gap.
  • the biasing member 42 is interposed between the porous body 41 and the second substrate 20, and the porous body 41 is pressed against the first substrate 10.
  • the lower surface 41a of the porous body 41 facing the bottom surface 15a of the path 15 is preferably formed as a highly accurate flat surface.
  • the bottom surface 15a of the processing flow path 15 is an input / output surface having an opening (an opening having one or both of an input port and an output port and corresponding to the input port 16 in FIG. 6).
  • the urging member 42 preferably presses the lower surface 41a of the flat porous body 41 against the bottom surface 15a of the processing channel 15 so as to cover the opening. Thereby, the fluid entering and exiting from the opening portion can easily pass through the inside of the porous body 41 appropriately.
  • the upper surface 41b side of the porous body 41 facing the urging member 42 may be a surface with a lower accuracy than the lower surface 41a. That is, of the surfaces 41a and 41b facing in the height direction of the porous body 41, the surface side formed with high accuracy is made to oppose the bottom surface 15a side of the processing channel 15, and the surface with low accuracy is set on the biasing member 42 side. It is preferable to oppose to.
  • an obliquely inclined surface or a surface with large irregularities is a surface with poor accuracy, and is preferably opposed to the biasing member 42 side.
  • fluid such as liquid or gas is injected from the inlet 22 and the inlet 23 that open to the outer surface 20b of the second substrate 20. At this time, it is preferable to give an injection pressure to the fluid.
  • the fluid given to the inlet 22 shown in FIG. 5 passes through the inlet 12 of the first substrate 10 and is given to the inflow channel 32 of the third substrate 30.
  • the fluid given to the inflow port 23 passes through the inflow port 13 of the first base material 10 and is given to the inflow channel 33 of the third base material 30.
  • the fluid supplied to the inflow channel 32 and the fluid supplied to the inflow channel 33 are mixed in the mixing channel 35 shown in FIG. 4 and supplied to the input channel 36 as a mixed fluid.
  • the mixed fluid applied to the input flow path 36 passes through the input port 16 formed in the first base material 10 from the input flow path 36 shown in FIG. 6 and is stored in the processing flow path 15. It is given to the mass 40.
  • the porous body 41 accommodated in the processing channel 15 is pressed against the first substrate 10 by the urging member 42, and the lower surface 41 a of the porous body 41 is in close contact with the bottom surface 15 a of the processing channel 15, and the boundary The part is airtight and liquidtight. Further, the upper surface 41b of the porous body 41 is in close contact with the urging member 42, and the boundary portion is airtight and liquid tight. Therefore, the mixed fluid that has passed through the input port 16 and has reached the lower surface 41a of the porous body 41 oozes into the boundary portion between the lower surface 41a and the bottom surface 15a and the boundary portion between the upper surface 41b and the biasing member 42.
  • the mixed fluid moves through the pores while diffusing in the radial direction. In the process, the mixed fluid is further evenly mixed inside the porous body 41 and leached into the output space 15c.
  • the mixed fluid leached into the output space 15 c is taken out through the output flow path 14 shown in FIG. 6 and the outlet 24 formed in the second base material 20.
  • fluids separately supplied to the inlet 22 and the inlet 23 are mixed inside the porous body 41.
  • a catalyst or a reactant is contained in the pores of the porous body 41.
  • a single fluid or a mixed fluid supplied to the porous body 41 may cause a chemical reaction.
  • the channel chip 1 can be used for liquid mixing, separation, solid phase extraction, and the like.
  • the gap between the porous body 41 and the base materials 10 and 20 can be made smaller than before, or the gap can be eliminated. Therefore, according to the flow path chip 1 of the present embodiment, compared to the conventional case. Highly accurate fluid processing is possible.
  • the first base material 10, the second base material 20, and the third base material 30 are joined without using an adhesive. Therefore, the fluid that is supplied to the inside of the flow path chip 1 and mixed and reacted is not affected by the adhesive.
  • each bonding surface is irradiated with vacuum infrared light (VUV) to activate the plate surface.
  • VUV vacuum infrared light
  • each base material 10,20,30 is heated and pressurized, and the joining surfaces of each base material 10,20,30 are closely_contact
  • the heat-shrinkable film when used as the urging member 42, the heat-shrinkable film is shrunk in the plane direction at the same time by the heat treatment when joining the joining surfaces of the base materials, thereby heat-shrinkable film Swells slightly in the thickness direction, and the porous body 41 can be pressed against the first substrate 10.
  • the urging member 42 can also be disposed between the porous body 41 and the bottom surface 15 a of the processing flow channel 15.
  • the porous body 41 is pressed against the second substrate 20 by the urging member 42.
  • the urging member 42 is formed with a hole 42 a at a position facing the input port 16, and fluid supply from the input port 16 to the porous body 41 is not hindered by the urging member 42. It is like that.
  • the urging member 42 is close to the bonding surface as shown in FIG.
  • Interposing between the first base material 10 and the second base material 20 can appropriately transfer the heat applied during the joining between the first base material 10 and the second base material 20 to the biasing member 42, too.
  • the adhesion between the force member 42 and the second substrate 20 can be improved, which is preferable.
  • the flow path chip 1 is configured using three base materials (plates). However, as illustrated in FIG. 8, the flow paths are formed using two base materials 51 and 52.
  • the chip 50 may be configured.
  • a concave channel 53 is formed in the first base material 51, and a porous body 54 is accommodated in the channel 53.
  • An urging member 55 formed of a heat-shrinkable film or an elastic body (foam) is disposed between the porous body 54 and the second base material 52, and the urging member 55 makes the porous member porous. The body 54 is pressed against the first substrate 51.
  • the shape of the flow path shown in FIG. 1 and the like is merely an example. Moreover, it can also be set as the structure which accommodated the porous body between the flow paths formed in both the 1st base material and the 2nd base material.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Hematology (AREA)
  • Clinical Laboratory Science (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

[Object] An object of the present invention is to provide a flow path chip that is capable of narrowing or removing a gap between a porous body and a base material in particular when compared to the related art, and is capable of a high-precision fluid treatment. [Solution] A flow path chip (1) according to the present invention comprises a first base material (10), a second base material (20), a concave-shaped treatment flow path (15) that is formed in the first base material, a porous body (41) that is arranged in the treatment flow path (15), and a biasing member (42) that is disposed between the porous body (41) and the second base material (20) to press the porous body (41) onto the first base material (10).

Description

流路チップChannel chip
　本発明は、第１の基材と第２の基材との間に形成された流路内に多孔質体が配置された流路チップに関する。 The present invention relates to a flow path chip in which a porous body is disposed in a flow path formed between a first base material and a second base material.
　少量の流体を混合しまたは反応させあるいは分離する装置として流路チップが使用されている。 A flow channel chip is used as a device for mixing, reacting or separating a small amount of fluid.
　特許文献１や特許文献２に記載されているように、流路チップは基材間に形成された流路内に多孔質体が配置された構成となっている。多孔質体では、液体の混合や流体中の成分の分離等を行う。 As described in Patent Document 1 and Patent Document 2, the channel chip has a configuration in which a porous body is disposed in a channel formed between substrates. In the porous body, the liquid is mixed and the components in the fluid are separated.
特表２００５－５３２９０３号公報JP 2005-532903 A 特表２００５－５３８８４０号公報JP-T-2005-538840
　しかしながら多孔質体の寸法精度が十分に出ず、多孔質体と高さ（厚さ）方向で対向する基材との間に隙間が生じて、多孔質体を介した高精度な流体処理が行えない問題があった。 However, the dimensional accuracy of the porous body is not sufficient, and a gap is formed between the porous body and the base material facing in the height (thickness) direction, so that high-precision fluid treatment via the porous body is possible. There was a problem that could not be done.
　そこで本発明は上記従来の課題を解決するものであり、特に、多孔質体と基材間の隙間を従来よりも小さくできあるいは隙間を無くすことができ、高精度な流体処理が可能な流路チップを提供することを目的としている。 Therefore, the present invention solves the above-described conventional problems, and in particular, a flow path capable of making the gap between the porous body and the substrate smaller than before or eliminating the gap, and capable of highly accurate fluid processing. The purpose is to provide chips.
　本発明における流路チップは、第１の基材と、第２の基材と、前記第１の基材と前記第２の基材との間に形成された凹状の流路と、前記流路内に配置された多孔質体と、前記多孔質体を介して前記第１基材と前記第２の基材との間に配置され前記多孔質体を前記第１の基材あるいは前記第２の基材の一方に押し付けるための付勢部材と、を有することを特徴とするものである。これにより、多孔質体と高さ（厚さ）方向で対向する第１の基材及び第２の基材間の隙間を従来よりも小さくできあるいは前記隙間を無くすことができ、高精度な流体処理が可能となる。 The flow channel chip in the present invention includes a first base material, a second base material, a concave flow channel formed between the first base material and the second base material, and the flow A porous body disposed in a channel, and the porous body disposed between the first base and the second base via the porous body, the first base or the first base And an urging member for pressing against one of the two substrates. Thereby, the gap between the first base material and the second base material facing the porous body in the height (thickness) direction can be made smaller than before, or the gap can be eliminated, and a highly accurate fluid Processing is possible.
　本発明では、前記多孔質体には平坦面が形成されており、前記流路内には入力口、あるいは出力口の少なくとも一方を備える開口部を有する入出力面が形成されており、前記付勢部材は、前記多孔質体の前記平坦面を、前記開口部を覆うように前記入出力面に押しつけることが好ましい。これにより、入出力口から出入りする流体が多孔質体の内部を通過しやすくなる。 In the present invention, a flat surface is formed in the porous body, and an input / output surface having an opening having at least one of an input port and an output port is formed in the flow path. The force member preferably presses the flat surface of the porous body against the input / output surface so as to cover the opening. Thereby, the fluid entering and exiting from the input / output port easily passes through the inside of the porous body.
　本発明では、前記流路は少なくとも前記第１の基材に形成され、前記付勢部材は、前記多孔質体と前記第２の基材との間に配置され、前記多孔質を前記第１の基材に押し付けている構成とすることが好ましい。 In the present invention, the flow path is formed in at least the first base material, the urging member is disposed between the porous body and the second base material, and the porous material is disposed in the first base material. It is preferable to adopt a configuration in which the substrate is pressed against the substrate.
　また本発明では、前記付勢部材は、熱収縮性フィルムであり、あるいは、弾性体であることが好ましい。弾性体には発泡体を用いることが好ましい。これにより、効果的に多孔質体と基材間に隙間が形成されないようにできる。
　また本発明では、前記多孔質体に、シリカモノリスを選択することができる。 In the present invention, the urging member is preferably a heat-shrinkable film or an elastic body. A foam is preferably used as the elastic body. This effectively prevents a gap from being formed between the porous body and the substrate.
In the present invention, silica monolith can be selected as the porous body.
　本発明の流路チップによれば、従来に比べて多孔質体と基材間の隙間を小さくできあるいは隙間を無くすことができ、高精度な流体処理が可能となる。 According to the flow channel chip of the present invention, the gap between the porous body and the substrate can be reduced or eliminated compared to the conventional case, and highly accurate fluid processing is possible.
図１（Ａ）は本発明の第１実施の形態の流路チップの平面図であり、図１（Ｂ）は右側面図である。FIG. 1A is a plan view of the flow channel chip according to the first embodiment of the present invention, and FIG. 1B is a right side view thereof. 図２（Ａ）は流路チップの第２の基材（本体プレート）を示す平面図であり、図２（Ｂ）は右側面図である。FIG. 2A is a plan view showing a second substrate (main body plate) of the flow path chip, and FIG. 2B is a right side view. 図３（Ａ）は流路チップの第１の基材（本体プレート）を示す平面図であり、図３（Ｂ）は右側面図である。FIG. 3A is a plan view showing a first substrate (main body plate) of the flow path chip, and FIG. 3B is a right side view. 図４（Ａ）は流路チップの第３の基材（本体プレート）を示す平面図であり、図４（Ｂ）は右側面図である。FIG. 4A is a plan view showing a third substrate (main body plate) of the flow path chip, and FIG. 4B is a right side view. 図５は、流路チップを、図１（Ａ）のＶ－Ｖ線で切断した拡大断面図である。FIG. 5 is an enlarged cross-sectional view of the flow channel chip taken along line VV in FIG. 図６は、流路チップを、図１（Ａ）のＶＩ－ＶＩ線で切断した拡大断面図である。FIG. 6 is an enlarged cross-sectional view of the flow path chip taken along line VI-VI in FIG. 図７は、本発明の第２実施の形態の流路チップの拡大断面図である。FIG. 7 is an enlarged cross-sectional view of the flow path chip according to the second embodiment of the present invention. 図８は、本発明の第３実施の形態の流路チップの拡大断面図である。FIG. 8 is an enlarged cross-sectional view of the flow path chip according to the third embodiment of the present invention.
　図１（Ａ）は本発明の第１実施の形態の流路チップの平面図であり、図１（Ｂ）は右側面図である。 FIG. 1 (A) is a plan view of a flow path chip according to the first embodiment of the present invention, and FIG. 1 (B) is a right side view thereof.
　図１（Ｂ）に示すように、本発明の第１の実施の形態の流路チップ１は、第１の基材１０と第２の基材２０および第３の基材３０がその板厚方向に重ねられて本体部が構成されている。 As shown in FIG. 1 (B), the flow path chip 1 according to the first embodiment of the present invention has the plate thickness of the first base material 10, the second base material 20, and the third base material 30. The main body is configured by being stacked in the direction.
　第１の基材１０、第２の基材２０および第３の基材３０は、いずれも同じ合成樹脂材料で形成されている。好ましい合成樹脂材料は、薬品に対する耐性を有し且つ蛍光性の低い環状ポリオレフィン樹脂（シクロオレフィンポリマー；ＣＯＰ）である。ただし、使用する流体の物性などに応じて前記合成樹脂を自由に選択することが可能である。 The first base material 10, the second base material 20, and the third base material 30 are all formed of the same synthetic resin material. A preferred synthetic resin material is a cyclic polyolefin resin (cycloolefin polymer; COP) having resistance to chemicals and low fluorescence. However, the synthetic resin can be freely selected according to the physical properties of the fluid used.
　第１の基材１０と第２の基材２０および第３の基材３０は、例えば同じ厚み寸法ｔを有している。厚み寸法ｔは０．３～３．０ｍｍ程度である。本実施形態では、第１の基材１０と第２の基材２０および第３の基材３０は共に平面形状が四角形であるが、形状を限定するものでない。 The first base material 10, the second base material 20, and the third base material 30 have, for example, the same thickness t. The thickness dimension t is about 0.3 to 3.0 mm. In the present embodiment, the first base material 10, the second base material 20, and the third base material 30 are all quadrangular in planar shape, but the shape is not limited.
　図２（Ａ）に示すように、第２の基材２０は、平面形状が四角形であり、図２（Ｂ）に示すように、接合表面２０ａと外表面２０ｂとを有している。第２の基材２０の四角形の平面の４つの角部に位置決め穴２１が板厚方向に貫通して形成されている。第２の基材２０の図示上方の２箇所に、流入口２２，２３となる穴が板厚方向に貫通して形成されており、図示下方の１箇所に流出口２４となる穴が板厚方向に貫通して形成されている。 As shown in FIG. 2A, the second base material 20 has a quadrangular planar shape, and has a joining surface 20a and an outer surface 20b as shown in FIG. 2B. Positioning holes 21 are formed in the four corners of the quadrangular plane of the second base material 20 so as to penetrate in the plate thickness direction. Holes to be the inlets 22 and 23 are formed in two positions on the upper side of the second base material 20 in the plate thickness direction, and a hole to be the outlet 24 is formed to have a plate thickness at one position on the lower side of the drawing. It is formed to penetrate in the direction.
　図３（Ａ）に示すように、第１の基材１０は、平面形状が四角形であり、図３（Ｂ）に示すように、第１の接合表面１０ａと第２の接合表面１０ｂを有している。第１の基材１０の四角形の平面の４つの角部に位置決め穴１１が貫通して形成されている。第２の基材２０に形成された位置決め穴２１と第１の基材１０に形成された位置決め穴１１は互いに同じ開口径で且つ同じ配列ピッチで形成されている。 As shown in FIG. 3A, the first base material 10 has a quadrangular planar shape, and has a first bonding surface 10a and a second bonding surface 10b as shown in FIG. is doing. Positioning holes 11 are formed through the four corners of the quadrangular plane of the first base material 10. The positioning holes 21 formed in the second base material 20 and the positioning holes 11 formed in the first base material 10 are formed with the same opening diameter and the same arrangement pitch.
　図３（Ａ）に示すように、第１の基材１０には、２つの流入口１２，１３となる穴が板厚方向に貫通して形成されている。第２の基材２０の流入口２２，２３と第１の基材１０の流入口１２，１３は、互いに同じ開口径で且つ同じ配列ピッチで形成されている。 As shown in FIG. 3A, the first base material 10 is formed with two holes 12 and 13 penetrating in the thickness direction. The inlets 22 and 23 of the second substrate 20 and the inlets 12 and 13 of the first substrate 10 are formed with the same opening diameter and the same arrangement pitch.
　図３（Ａ）と図６に示されているように、第１の基材１０には、第１の接合表面１０ａに開口して第２の接合表面１０ｂに向けて凹状に形成された有底の処理流路１５（処理槽）が形成されている。処理流路１５は第１の接合表面１０ａに開口している開口形状が真円形である。図３（Ａ）および図６に示すように、処理流路１５は円形の底面１５ａと、前記底面１５ａの周縁から立ち上がって第１の接合表面１０ａに向けて開口面積を徐々に広くするテーパ側面１５ｂが形成されている。 As shown in FIG. 3 (A) and FIG. 6, the first base material 10 has an opening formed on the first bonding surface 10a and formed in a concave shape toward the second bonding surface 10b. A bottom processing channel 15 (processing tank) is formed. The processing flow path 15 has a perfect circular opening shape opened to the first bonding surface 10a. As shown in FIGS. 3A and 6, the processing flow path 15 has a circular bottom surface 15a and a tapered side surface that rises from the periphery of the bottom surface 15a and gradually increases the opening area toward the first bonding surface 10a. 15b is formed.
　図１と図６に示すように、処理流路１５には、テーパ側面１５ｂの１箇所から半径方向へ延長された出力流路１４が凹状に形成されている。出力流路１４は、第２の基材２０に形成された流出口２４と連通できる位置に形成されている。 As shown in FIGS. 1 and 6, the processing flow channel 15 is formed with a concave output channel 14 extending radially from one portion of the tapered side surface 15b. The output flow path 14 is formed at a position where it can communicate with the outflow port 24 formed in the second base material 20.
　処理流路１５の底面１５ａ（入出力面）の真円径の中心に入力口１６が形成されている。図６に示すように、入力口１６は、処理流路１５の底面１５ａから第２の接合表面１０ｂまでを貫通する穴である。 An input port 16 is formed at the center of the true circular diameter of the bottom surface 15a (input / output surface) of the processing flow path 15. As shown in FIG. 6, the input port 16 is a hole that penetrates from the bottom surface 15 a of the processing channel 15 to the second bonding surface 10 b.
　図４（Ａ）に示すように、第３の基材３０は、平面形状が四角形であり、図４（Ｂ）に示すように、接合表面３０ａと外表面３０ｂとを有している。第３の基材３０の四角形の平面の４つの角部に位置決め穴３１が貫通して形成されている。第２の基材２０に形成された位置決め穴２１ならびに第１の基材１０に形成された位置決め穴１１と、第３の基材３０に形成された位置決め穴３１は、互いに同じ開口径で且つ同じ配列ピッチで形成されている。 As shown in FIG. 4 (A), the third base material 30 has a quadrangular planar shape, and has a joining surface 30a and an outer surface 30b as shown in FIG. 4 (B). Positioning holes 31 are formed through the four corners of the rectangular plane of the third base material 30. The positioning hole 21 formed in the second base material 20, the positioning hole 11 formed in the first base material 10, and the positioning hole 31 formed in the third base material 30 have the same opening diameter. They are formed with the same arrangement pitch.
　図４（Ａ）に示すように、第３の基材３０の接合表面３０ａには、斜めに延びる２つの凹部で形成された流入流路３２，３３が設けられている。一方の流入流路３２の始端３２ａは、第１の基材１０に形成された流入口１２の真下に位置し、他方の流入流路３３の始端３３ａは、第１の基材１０に形成された流入口１３の真下に位置している。 As shown in FIG. 4 (A), the joining surface 30a of the third base material 30 is provided with inflow channels 32 and 33 formed by two concave portions extending obliquely. The start end 32 a of one inflow channel 32 is located directly below the inlet 12 formed in the first base material 10, and the start end 33 a of the other inflow channel 33 is formed in the first base material 10. It is located directly below the inlet 13.
　第３の基材３０の接合表面３０ａには、直線的に延びる凹部で形成された入力流路３６が形成されている。入力流路３６の終端３６ａは、第１の基材１０の処理流路１５に通じる前記入力口１６の真下に対向している。 The input flow path 36 formed of a linearly extending recess is formed on the bonding surface 30a of the third base material 30. A terminal end 36 a of the input flow path 36 is directly opposite to the input port 16 communicating with the processing flow path 15 of the first substrate 10.
　流入流路３２，３３と入力流路３６の接合表面３０ａからの深さ寸法は、前記出力流路１４の深さ寸法とほぼ同じである。 The depth dimension from the joint surface 30a of the inflow channels 32 and 33 and the input channel 36 is substantially the same as the depth dimension of the output channel 14.
　図４（Ａ）に示すように、流入流路３２の終端３２ｂと流入流路３３の終端３３ｂおよび入力流路３６の始端３６ｂは、混合流路３５を介して連通されている。 As shown in FIG. 4A, the end 32b of the inflow channel 32, the end 33b of the inflow channel 33, and the start end 36b of the input channel 36 are communicated with each other via the mixing channel 35.
　図６に示すように、第１の基材１０に形成された処理流路１５に、多孔質体４１が収納されている。図６に示すように第１の基材１０に形成された処理流路１５の周囲全周に、多孔質体４１の側面とテーパ側面１５ｂの形状によって出力空間１５ｃが形成される。 As shown in FIG. 6, the porous body 41 is accommodated in the processing flow path 15 formed in the first base material 10. As shown in FIG. 6, an output space 15c is formed by the shape of the side surface of the porous body 41 and the tapered side surface 15b around the entire periphery of the processing channel 15 formed in the first base material 10.
　図６に示すように本実施形態では、多孔質体４１と第２の基材２０との間に多孔質体４１を第１の基材１０に押し付けるための付勢部材４２が設けられている。 As shown in FIG. 6, in this embodiment, an urging member 42 for pressing the porous body 41 against the first base material 10 is provided between the porous body 41 and the second base material 20. .
　付勢部材４２には、熱収縮性フィルムを好ましく適用できる。熱収縮性フィルムにはシュリンク性能とともに耐薬品性能を備えることが好ましい。熱収縮フィルムは、第１の基材１０と第２の基材２０間を加熱し且つ加圧して接合した際に平面方向に縮むとともに厚さ方向（高さ方向）にやや膨らむため、熱収縮フィルムによって多孔質体４１を第１の基材１０に押し付けることができる。熱収縮性フィルムとしては各基材と同様の材質からなるフィルムを適用できる。これにより付勢部材４２と第２の基材２０間を密着して接合できる。 A heat-shrinkable film can be preferably applied to the urging member 42. The heat-shrinkable film preferably has chemical resistance as well as shrink performance. The heat-shrinkable film shrinks in the plane direction and slightly expands in the thickness direction (height direction) when the first base material 10 and the second base material 20 are heated and pressed and joined together. The porous body 41 can be pressed against the first substrate 10 by the film. As the heat-shrinkable film, a film made of the same material as each substrate can be applied. As a result, the biasing member 42 and the second base material 20 can be brought into close contact with each other.
　あるいは、付勢部材４２には、弾性体を用いることができる。弾性体の中でも発泡体を用いることが好適である。発泡体には、例えばシクロオレフィンコポリマー（ＣＯＣ）のように、耐薬品性と弾性を併せ持つ樹脂シートを適用できる。発泡体を多孔質体４１と第２の基材２０との間に挟みこむことで、多孔質体４１を第１の基材１０に押し付けることができる。また、基材に、シクロオレフィンポリマーを用い、付勢部材４２に、シクロオレフィンポリマーと同じ環状ポリオレフィン系のシクロオレフィンコポリマーを用いることで、付勢部材４２と第２の基材２０間を密着して接合できる。 Alternatively, the urging member 42 can be an elastic body. Among the elastic bodies, it is preferable to use a foam. A resin sheet having both chemical resistance and elasticity can be applied to the foam, such as cycloolefin copolymer (COC). The porous body 41 can be pressed against the first base material 10 by sandwiching the foam between the porous body 41 and the second base material 20. Further, by using a cycloolefin polymer as the base material and using the same cyclic polyolefin-based cycloolefin copolymer as the cycloolefin polymer as the biasing member 42, the biasing member 42 and the second base material 20 are brought into close contact with each other. Can be joined.
　なお各基材１０，２０，３０及び付勢部材４２には蛍光性の低い透明な樹脂を用いることが好ましい。 In addition, it is preferable to use transparent resin with low fluorescence for each of the base materials 10, 20, 30 and the biasing member 42.
　本実施形態では、上記した付勢部材４２を多孔質体４１と第２の基材２０との間に介在させることで、多孔質体４１と第１の基材１０間、及び多孔質体４１と第２の基材２０間に形成される隙間を従来よりも小さくでき、あるいは隙間を無くすことができる。 In the present embodiment, the biasing member 42 described above is interposed between the porous body 41 and the second base material 20, so that the porous body 41 and the first base material 10, and the porous body 41. And the gap formed between the second base material 20 can be made smaller than before, or the gap can be eliminated.
　多孔質体４１は、液体の混合や化学反応の促進、または流体中の成分の分離を行うためのものであり、要求される処理や使用する流体の種類によってセラミック、高分子など種々のものから選択することができる。特に、モノリス構造の焼結セラミックスの多孔質体は、低い流路損失で高性能の分離、混合ができるために好ましい。特に、全体が一体のシリカゲルで形成されたシリカモノリスが好適であり、例えば、株式会社京都モノテック製のものを用いることができる。 The porous body 41 is used for mixing liquids, promoting chemical reactions, or separating components in a fluid. Depending on the type of processing required and the type of fluid used, the porous body 41 can be made of various materials such as ceramics and polymers. You can choose. In particular, a porous body of sintered ceramics having a monolith structure is preferable because high-performance separation and mixing can be performed with low flow path loss. In particular, a silica monolith formed entirely of integral silica gel is suitable. For example, a product manufactured by Kyoto Monotech Co., Ltd. can be used.
　上記の多孔質体４１は、焼結などの工程を経て製造されるため、金型を用いた成型で製造することが可能な基材１０，２０と比較して、寸法精度を高くすることが難しい。流路内に確実に格納できるようマイナス公差で多孔質体４１の厚み寸法を決定すると、多孔質４１と基材１０，２０間での隙間が生じてしまう場合が多くなる。したがって多孔質体４１と第２の基材２０との間に付勢部材４２を配置して、多孔質体４１を第１の基材１０に押し付ける構造とすることで、多孔質体４１と高さ方向にて対向する基材１０，２０間での隙間を効果的に小さくできあるいは隙間を無くすことが可能になる。 Since the porous body 41 is manufactured through a process such as sintering, the dimensional accuracy can be increased as compared with the base materials 10 and 20 that can be manufactured by molding using a mold. difficult. If the thickness dimension of the porous body 41 is determined with a minus tolerance so that the porous body 41 can be reliably stored in the flow path, a gap between the porous 41 and the base materials 10 and 20 often occurs. Therefore, by arranging the urging member 42 between the porous body 41 and the second base material 20 and pressing the porous body 41 against the first base material 10, It is possible to effectively reduce the gap between the base materials 10 and 20 facing in the vertical direction, or to eliminate the gap.
　図６に示す構造では、付勢部材４２を多孔質体４１と第２の基材２０との間に介在させ、多孔質体４１を第１の基材１０に押し付ける構造であるため、処理流路１５の底面１５ａと対向する、多孔質体４１の下面４１ａは高精度な平坦面で形成されていることが好ましい。処理流路１５の底面１５ａは、開口部（入力口、出力口のいずれか一方、あるいは両方の機能を備える開口であり図６では、入力口１６に該当する）を有する入出力面であり、付勢部材４２は、平坦な多孔質体４１の下面４１ａを、前記開口部を覆うように処理流路１５の底面１５ａに押し付けることが好ましい。これにより開口部から出入りする流体が適切に多孔質体４１の内部を通過しやすくなる。 In the structure shown in FIG. 6, the biasing member 42 is interposed between the porous body 41 and the second substrate 20, and the porous body 41 is pressed against the first substrate 10. The lower surface 41a of the porous body 41 facing the bottom surface 15a of the path 15 is preferably formed as a highly accurate flat surface. The bottom surface 15a of the processing flow path 15 is an input / output surface having an opening (an opening having one or both of an input port and an output port and corresponding to the input port 16 in FIG. 6). The urging member 42 preferably presses the lower surface 41a of the flat porous body 41 against the bottom surface 15a of the processing channel 15 so as to cover the opening. Thereby, the fluid entering and exiting from the opening portion can easily pass through the inside of the porous body 41 appropriately.
　一方、付勢部材４２が対向する多孔質体４１の上面４１ｂ側は、下面４１ａよりも精度の悪い面であってもよい。すなわち多孔質体４１の高さ方向にて対向する面４１ａ，４１ｂのうち、精度良く形成された面側を処理流路１５の底面１５ａ側に対向させ、精度の悪い面を付勢部材４２側に対向させることが好ましい。例えば斜めに傾いた面や凹凸の大きい面は精度の悪い面であるため、付勢部材４２側に対向させることが好ましい。 On the other hand, the upper surface 41b side of the porous body 41 facing the urging member 42 may be a surface with a lower accuracy than the lower surface 41a. That is, of the surfaces 41a and 41b facing in the height direction of the porous body 41, the surface side formed with high accuracy is made to oppose the bottom surface 15a side of the processing channel 15, and the surface with low accuracy is set on the biasing member 42 side. It is preferable to oppose to. For example, an obliquely inclined surface or a surface with large irregularities is a surface with poor accuracy, and is preferably opposed to the biasing member 42 side.
　本実施形態における流路チップ１では、第２の基材２０の外表面２０ｂに開口する流入口２２と流入口２３から液体や気体などの流体が注入される。このとき流体に注入圧力を与えておくことが好ましい。 In the channel chip 1 in the present embodiment, fluid such as liquid or gas is injected from the inlet 22 and the inlet 23 that open to the outer surface 20b of the second substrate 20. At this time, it is preferable to give an injection pressure to the fluid.
　図５に示す流入口２２に与えられた流体は、第１の基材１０の流入口１２を通過し、第３の基材３０の流入流路３２に与えられる。同様に、流入口２３に与えられた流体は、第１の基材１０の流入口１３を通過して、第３の基材３０の流入流路３３に与えられる。流入流路３２に供給された流体と、流入流路３３に供給された流体は、図４に示す混合流路３５で混合されて混合流体となって入力流路３６に与えられる。 The fluid given to the inlet 22 shown in FIG. 5 passes through the inlet 12 of the first substrate 10 and is given to the inflow channel 32 of the third substrate 30. Similarly, the fluid given to the inflow port 23 passes through the inflow port 13 of the first base material 10 and is given to the inflow channel 33 of the third base material 30. The fluid supplied to the inflow channel 32 and the fluid supplied to the inflow channel 33 are mixed in the mixing channel 35 shown in FIG. 4 and supplied to the input channel 36 as a mixed fluid.
　入力流路３６に与えられた混合流体は、図６に示す入力流路３６から、第１の基材１０に形成された入力口１６を通過して、処理流路１５に収納されている多孔質体４０に与えられる。 The mixed fluid applied to the input flow path 36 passes through the input port 16 formed in the first base material 10 from the input flow path 36 shown in FIG. 6 and is stored in the processing flow path 15. It is given to the mass 40.
　処理流路１５に収納された多孔質体４１は、付勢部材４２により第１の基材１０に押し付けられ、前記多孔質体４１の下面４１ａが処理流路１５の底面１５ａに密着し、境界部が気密状態で且つ液密状態である。また、多孔質体４１の上面４１ｂは付勢部材４２と密着し、境界部が気密状態で且つ液密状態である。したがって、入力口１６を通過して多孔質体４１の下面４１ａに到達した混合流体は、前記下面４１ａと前記底面１５ａとの境界部および前記上面４１ｂと前記付勢部材４２との境界部に滲み出ることなく、ほとんどの流体が、多孔質体４１の内部を通過して、処理流路１５の外周領域である出力空間１５ｃに浸出する。多孔質体４１の内部では、混合流体が細孔を通過して放射方向へ拡散しながら移動する。その過程において、混合流体は多孔質体４１の内部でさらに均等に混合され、出力空間１５ｃに浸出する。 The porous body 41 accommodated in the processing channel 15 is pressed against the first substrate 10 by the urging member 42, and the lower surface 41 a of the porous body 41 is in close contact with the bottom surface 15 a of the processing channel 15, and the boundary The part is airtight and liquidtight. Further, the upper surface 41b of the porous body 41 is in close contact with the urging member 42, and the boundary portion is airtight and liquid tight. Therefore, the mixed fluid that has passed through the input port 16 and has reached the lower surface 41a of the porous body 41 oozes into the boundary portion between the lower surface 41a and the bottom surface 15a and the boundary portion between the upper surface 41b and the biasing member 42. Without exiting, most of the fluid passes through the inside of the porous body 41 and leaches into the output space 15 c which is the outer peripheral region of the processing flow channel 15. Inside the porous body 41, the mixed fluid moves through the pores while diffusing in the radial direction. In the process, the mixed fluid is further evenly mixed inside the porous body 41 and leached into the output space 15c.
　出力空間１５ｃに浸出した混合流体は、図６に示す出力流路１４と、第２の基材２０に形成された流出口２４を経て取り出される。 The mixed fluid leached into the output space 15 c is taken out through the output flow path 14 shown in FIG. 6 and the outlet 24 formed in the second base material 20.
　なお、上記の実施の形態では、流入口２２と流入口２３に別々に供給された流体が多孔質体４１の内部で混合されるが、例えば、多孔質体４１の細孔に触媒や反応物質を保持させ、または多孔質体４１を反応性物質で形成しておくことで、多孔質体４１に供給される単一の流体または混合流体に化学反応を生じさせてもよい。本実施形態では流路チップ１を液体の混合、分離、固相抽出等で用いることができる。 In the above-described embodiment, fluids separately supplied to the inlet 22 and the inlet 23 are mixed inside the porous body 41. For example, a catalyst or a reactant is contained in the pores of the porous body 41. Or by forming the porous body 41 with a reactive substance, a single fluid or a mixed fluid supplied to the porous body 41 may cause a chemical reaction. In this embodiment, the channel chip 1 can be used for liquid mixing, separation, solid phase extraction, and the like.
　本実施形態では、多孔質体４１と基材１０，２０間の隙間を従来よりも小さくでき、あるいは隙間を無くすことができるため、本実施形態の流路チップ１によれば、従来に比べて高精度な流体処理が可能となっている。 In the present embodiment, the gap between the porous body 41 and the base materials 10 and 20 can be made smaller than before, or the gap can be eliminated. Therefore, according to the flow path chip 1 of the present embodiment, compared to the conventional case. Highly accurate fluid processing is possible.
　本実施形態では、第１の基材１０と第２の基材２０および第３の基材３０は、接着剤を用いることなく接合される。したがって、流路チップ１の内部に供給されて混合され、反応させられる流体が接着剤の影響を受けることがない。 In the present embodiment, the first base material 10, the second base material 20, and the third base material 30 are joined without using an adhesive. Therefore, the fluid that is supplied to the inside of the flow path chip 1 and mixed and reacted is not affected by the adhesive.
　各基材１０，２０，３０間の接合は、例えば各接合表面に真空赤外光（ＶＵＶ）を照射してプレート表面を活性化させる。そして各基材１０，２０，３０を加熱し加圧して、各基材１０，２０，３０の接合表面同士を、接着剤を用いることなく密着して接合している。 In the bonding between the base materials 10, 20, and 30, for example, each bonding surface is irradiated with vacuum infrared light (VUV) to activate the plate surface. And each base material 10,20,30 is heated and pressurized, and the joining surfaces of each base material 10,20,30 are closely_contact | adhered and joined, without using an adhesive agent.
　本実施形態では付勢部材４２として熱収縮性フィルムを用いた場合、基材の接合表面間を接合する際の加熱処理で同時に、熱収縮フィルムを平面方向に収縮させ、それによって熱収縮性フィルムが厚さ方向にやや膨らみ、多孔質体４１を第１の基材１０に押し付けることができる。 In this embodiment, when a heat-shrinkable film is used as the urging member 42, the heat-shrinkable film is shrunk in the plane direction at the same time by the heat treatment when joining the joining surfaces of the base materials, thereby heat-shrinkable film Swells slightly in the thickness direction, and the porous body 41 can be pressed against the first substrate 10.
　図７に示すように本実施形態では、付勢部材４２を、多孔質体４１と処理流路１５の底面１５ａ間に配置することもできる。図７では、付勢部材４２によって多孔質体４１が第２の基材２０に押し付けられる。また図７に示すように付勢部材４２には、入力口１６と対向する位置に穴４２ａが形成され、入力口１６から多孔質体４１への流体の供給が付勢部材４２によって妨げられないようになっている。ただし、付勢部材４２として熱収縮性フィルムを用いた場合や、各基材と同種の材質を用いた場合、図６に示すように、付勢部材４２を接合表面に近い、多孔質体４１と第２の基材２０間に介在させることが、第１の基材１０と第２の基材２０間の接合の際に付与される熱を付勢部材４２にも適切に伝達でき、付勢部材４２と第２の基材２０間の密着性を高めることができて好適である。 As shown in FIG. 7, in this embodiment, the urging member 42 can also be disposed between the porous body 41 and the bottom surface 15 a of the processing flow channel 15. In FIG. 7, the porous body 41 is pressed against the second substrate 20 by the urging member 42. Further, as shown in FIG. 7, the urging member 42 is formed with a hole 42 a at a position facing the input port 16, and fluid supply from the input port 16 to the porous body 41 is not hindered by the urging member 42. It is like that. However, when a heat-shrinkable film is used as the urging member 42, or when the same kind of material as that of each base material is used, the urging member 42 is close to the bonding surface as shown in FIG. Interposing between the first base material 10 and the second base material 20 can appropriately transfer the heat applied during the joining between the first base material 10 and the second base material 20 to the biasing member 42, too. The adhesion between the force member 42 and the second substrate 20 can be improved, which is preferable.
　上記に示した実施形態では、３枚の基材（プレート）を用いて流路チップ１を構成していたが、図８に示すように、２枚の基材５１，５２を用いて流路チップ５０を構成してもよい。 In the embodiment described above, the flow path chip 1 is configured using three base materials (plates). However, as illustrated in FIG. 8, the flow paths are formed using two base materials 51 and 52. The chip 50 may be configured.
　図８では、第１の基材５１に凹状の流路５３が形成され、この流路５３内に多孔質体５４が収納されている。そして、多孔質体５４と第２の基材５２との間に、熱収縮性フィルムあるいは弾性体（発泡体）等で形成された付勢部材５５が配置され、前記付勢部材５５により多孔質体５４が第１の基材５１に押し付けられた構造となっている。 In FIG. 8, a concave channel 53 is formed in the first base material 51, and a porous body 54 is accommodated in the channel 53. An urging member 55 formed of a heat-shrinkable film or an elastic body (foam) is disposed between the porous body 54 and the second base material 52, and the urging member 55 makes the porous member porous. The body 54 is pressed against the first substrate 51.
　なお図１等で示した流路の形状は一例にすぎない。また第１の基材と第２の基材との双方に形成された流路の間に多孔質体を収納した構造とすることもできる。 The shape of the flow path shown in FIG. 1 and the like is merely an example. Moreover, it can also be set as the structure which accommodated the porous body between the flow paths formed in both the 1st base material and the 2nd base material.
１　流路チップ
１０，５１　第１の基材
１２、１３、２２、２３　流入口
１４　出力流路
１５　処理流路
１５ｃ　出力空間
１６　入力口
２０、５２　第２の基材
２４　流出口
３０　第３の基材
３２，３３　流入流路
３５　混合流路
３６　入力流路
４１、５４　多孔質体
４２、５５　付勢部材
５３　流路 DESCRIPTION OF SYMBOLS 1 Flow path chip | tip 10,51 1st base material 12,13,22,23 Inflow port 14 Output flow path 15 Processing flow path 15c Output space 16 Input port 20,52 Second base material 24 Outflow port 30 3rd Substrate 32, 33 Inflow channel 35 Mixing channel 36 Input channel 41, 54 Porous body 42, 55 Energizing member 53 Channel

Claims (7)

  1. 　第１の基材と、第２の基材と、少なくとも前記第１の基材に形成された凹状の流路と、前記流路内に配置された多孔質体と、前記多孔質体を介して前記第１基材と前記第２の基材との間に配置され前記多孔質体を前記第１の基材あるいは前記第２の基材の一方に押し付けるための付勢部材と、を有することを特徴とする流路チップ。 A first base material, a second base material, a concave flow path formed in at least the first base material, a porous body disposed in the flow path, and the porous body And an urging member disposed between the first base material and the second base material for pressing the porous body against one of the first base material or the second base material. A flow path chip characterized by that.
  2. 　前記多孔質体には平坦面が形成されており、前記流路内には、入力口あるいは出力口の少なくとも一方を備える開口部を有する入出力面が形成されており、
    　前記付勢部材は、前記多孔質体の前記平坦面を、前記開口部を覆うように前記入出力面に押しつける請求項１記載の流路チップ。     A flat surface is formed in the porous body, and an input / output surface having an opening having at least one of an input port or an output port is formed in the flow path,
    The flow channel chip according to claim 1, wherein the biasing member presses the flat surface of the porous body against the input / output surface so as to cover the opening.
  3. 　前記付勢部材は、前記多孔質体と前記第２の基材との間に配置され、前記多孔質を前記第１の基材に押し付けている請求項１又は２に記載の流路チップ。 The flow channel chip according to claim 1 or 2, wherein the biasing member is disposed between the porous body and the second base material, and presses the porous material against the first base material.
  4. 　前記付勢部材は、熱収縮性フィルムである請求項１ないし３のいずれか１項に記載の流路チップ。 The flow path chip according to any one of claims 1 to 3, wherein the biasing member is a heat-shrinkable film.
  5. 　前記付勢部材は、弾性体である請求項１ないし３のいずれか１項に記載の流路チップ。 The flow path chip according to any one of claims 1 to 3, wherein the urging member is an elastic body.
  6. 　前記弾性体は、発泡体である請求項５記載の流路チップ。 The flow path chip according to claim 5, wherein the elastic body is a foam.
  7. 　前記多孔質体は、シリカモノリスである請求項１ないし６のいずれか１項に記載の流路チップ。 The channel chip according to any one of claims 1 to 6, wherein the porous body is a silica monolith.
PCT/JP2013/054938 2012-03-15 2013-02-26 Flow path chip WO2013136970A1 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004317128A (en) * 2003-04-10 2004-11-11 Kanagawa Acad Of Sci & Technol Microchannel structure and microchip device
JP2009095691A (en) * 2007-10-12 2009-05-07 Fuji Xerox Co Ltd Reaction apparatus
JP2009179525A (en) * 2008-01-31 2009-08-13 Casio Comput Co Ltd Reactor, method for manufacturing reactor, and power generation system
JP2009291758A (en) * 2008-06-09 2009-12-17 Sharp Corp Micro-fluid device and manufacturing method thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004317128A (en) * 2003-04-10 2004-11-11 Kanagawa Acad Of Sci & Technol Microchannel structure and microchip device
JP2009095691A (en) * 2007-10-12 2009-05-07 Fuji Xerox Co Ltd Reaction apparatus
JP2009179525A (en) * 2008-01-31 2009-08-13 Casio Comput Co Ltd Reactor, method for manufacturing reactor, and power generation system
JP2009291758A (en) * 2008-06-09 2009-12-17 Sharp Corp Micro-fluid device and manufacturing method thereof

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