JP2005093707A - Method for manufacturing lamination ceramic electronic component - Google Patents

Method for manufacturing lamination ceramic electronic component Download PDF

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JP2005093707A
JP2005093707A JP2003324789A JP2003324789A JP2005093707A JP 2005093707 A JP2005093707 A JP 2005093707A JP 2003324789 A JP2003324789 A JP 2003324789A JP 2003324789 A JP2003324789 A JP 2003324789A JP 2005093707 A JP2005093707 A JP 2005093707A
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resin
sintered body
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electronic component
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JP4281489B2 (en
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Kaoru Tachibana
薫 立花
Takehiko Otsuki
健彦 大槻
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Murata Manufacturing Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a lamination ceramic electronic component in which a resin is uniformly filled in the hole of a ceramic sintered body 10 at a desired filling factor. <P>SOLUTION: The resin is permeated into the ceramic sintered body 10 under vacuum in a state that the viscosity of the resin is low, and the resin adhered to the surface of the ceramic sintered body is cleaned with a solvent in a state that the viscosity of the resin is high. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は積層インダクタや積層コンデンサなどの積層セラミック電子部品の製造方法に関する。   The present invention relates to a method for manufacturing a multilayer ceramic electronic component such as a multilayer inductor or a multilayer capacitor.

セラミック焼結体の内部に所定形状の内部電極を備えた、積層インダクタや積層コンデンサなどの積層セラミック電子部品において、セラミック焼結体に樹脂を含浸させるものがある。   2. Description of the Related Art Some multilayer ceramic electronic components such as multilayer inductors and multilayer capacitors having an internal electrode of a predetermined shape inside a ceramic sintered body impregnate a ceramic sintered body with a resin.

例えば特許文献1に記載された発明では、焼結体の表面に存在する細孔に樹脂を含浸させることによって電気的特性の劣化を防止している。この発明では、溶剤(ガソリン)とシリコーン樹脂の混合液にチップを浸漬して真空含浸した後、ガソリンで表面を洗浄している。   For example, in the invention described in Patent Document 1, the electrical characteristics are prevented from deteriorating by impregnating the pores present on the surface of the sintered body with a resin. In the present invention, the surface is washed with gasoline after the chip is immersed in a mixed solution of a solvent (gasoline) and a silicone resin and vacuum impregnated.

また、未だ公開されていないが、本出願人は特願2003−91063において、セラミック焼結体に35〜80vol%の割合で空孔を形成し、空孔に樹脂を充填した積層セラミック電子部品を提案している。
特開平5−326316号公報
In addition, although not disclosed yet, in the Japanese Patent Application No. 2003-91063, the present applicant has obtained a multilayer ceramic electronic component in which pores are formed in a ceramic sintered body at a rate of 35 to 80 vol%, and the pores are filled with a resin. is suggesting.
JP-A-5-326316

特許文献1に記載された技術では、樹脂の含浸はセラミック焼結体の表面に形成された細孔をふさぐために行われている。これに対して特願2003−91063では、グリーンシートに焼失材を混練して焼成することによってセラミック焼結体の内部にも積極的に空孔を形成し、さらに空孔に樹脂やガラスを含浸させることによって、電気的特性を向上させることができることを見出した。   In the technique described in Patent Document 1, the impregnation of the resin is performed to close the pores formed on the surface of the ceramic sintered body. On the other hand, in Japanese Patent Application No. 2003-91063, voids are positively formed in the ceramic sintered body by kneading and burning the burned material into the green sheet, and the voids are impregnated with resin or glass. It has been found that the electrical characteristics can be improved.

特願2003−91063に記載された発明では、空孔率が35〜80vol%と比較的空孔率が高いため、空孔に対して所望の割合で樹脂を充填することがこれまで以上に、電気的特性および抗折強度確保の点から重要であり、チップ表面の空孔のみならず、チップ中心部の空孔にも十分な樹脂充填を行うことが特に重要である。   In the invention described in Japanese Patent Application No. 2003-91063, since the porosity is relatively high as 35 to 80 vol%, it is more than ever to fill the resin at a desired ratio with respect to the pores. It is important from the viewpoint of securing electrical characteristics and bending strength, and it is particularly important to sufficiently fill not only the holes on the chip surface but also the holes in the center of the chip.

ここで特願2003−91063の積層セラミック電子部品において、特許文献1と同様の方法、すなわち溶剤で希釈した樹脂を真空含浸させ、表面に付着した樹脂を溶剤で洗浄するという方法を適用した場合、以下の問題が発生した。   Here, in the multilayer ceramic electronic component of Japanese Patent Application No. 2003-91063, when a method similar to Patent Document 1, that is, a method of vacuum impregnating a resin diluted with a solvent and washing the resin adhering to the surface with a solvent, The following problems occurred:

すなわち、一般に樹脂の粘度が低いほど焼結体内部の空孔にまで十分に含浸されやすく、樹脂の粘度が高いほど洗浄工程での溶出が少ない。よって、粘度が低い樹脂を用いた場合、真空含浸工程では焼結体の中心付近にまで樹脂が所望の割合で比較的均一に含浸されやすいが、溶剤による洗浄によって溶出しやすく、特に焼結体に表面付近で樹脂含浸率が低下したり不均一になったりするという問題が発生する。一方、溶剤による不所望な溶出が起こりにくい高粘度の樹脂を用いた場合には、真空含浸工程において焼結体の中心付近にまで十分かつ均一に樹脂が含浸されないという問題が発生する。   That is, in general, the lower the viscosity of the resin, the more easily the pores inside the sintered body are sufficiently impregnated, and the higher the viscosity of the resin, the less elution in the washing step. Therefore, when a resin with low viscosity is used, the resin is likely to be impregnated relatively uniformly at a desired ratio up to the vicinity of the center of the sintered body in the vacuum impregnation step, but it is likely to be eluted by washing with a solvent. In addition, there is a problem that the resin impregnation rate decreases or becomes non-uniform near the surface. On the other hand, when a high-viscosity resin that hardly causes undesired elution by a solvent is used, there is a problem that the resin is not sufficiently and uniformly impregnated to the vicinity of the center of the sintered body in the vacuum impregnation step.

このように、セラミック焼結体に比較的高い割合で空孔を形成した場合には、所望の割合で均一に樹脂を含浸させることが困難で、樹脂の粘度の選択や洗浄に用いる溶剤の選択が難しく、所望の特性を得にくいという問題があった。   Thus, when pores are formed at a relatively high rate in the ceramic sintered body, it is difficult to impregnate the resin uniformly at the desired rate, and the selection of the viscosity of the resin and the selection of the solvent used for cleaning are difficult. It is difficult to obtain desired characteristics.

よって本発明の目的は、樹脂が焼結体の中心付近まで十分かつ均一に充填されつつ、溶剤による洗浄工程で焼結体の表面付近の樹脂が不所望な溶出を起こしにくい積層セラミック電子部品の製造方法を提供することである。   Accordingly, an object of the present invention is to provide a multilayer ceramic electronic component in which the resin near the center of the sintered body is sufficiently and uniformly filled, and the resin near the surface of the sintered body is less likely to cause undesired elution in a solvent cleaning process. It is to provide a manufacturing method.

上記問題点を解決するために本発明に係る積層セラミック電子部品の製造方法は、セラミックグリーンシートを所定枚数積層して積層体を形成する工程と、前記積層体を焼成してセラミック焼結体を形成する工程と、前記セラミック焼結体に存在する空孔に樹脂を含浸する工程と、前記セラミック焼結体の表面に付着した前記樹脂を洗浄する工程と、を含み、前記樹脂を含浸する工程における前記樹脂の粘度は、前記樹脂を洗浄する工程における前記樹脂の粘度よりも低くされていることを特徴とする。   In order to solve the above problems, a method of manufacturing a multilayer ceramic electronic component according to the present invention includes a step of laminating a predetermined number of ceramic green sheets to form a multilayer body, and firing the multilayer body to form a ceramic sintered body. A step of impregnating the resin, including a step of forming, a step of impregnating a resin in pores existing in the ceramic sintered body, and a step of cleaning the resin adhering to the surface of the ceramic sintered body The viscosity of the resin in is lower than the viscosity of the resin in the step of washing the resin.

これにより、空孔に樹脂を含浸する工程においては樹脂が十分に含浸され、かつ、樹脂を洗浄する工程においては含浸された樹脂の不所望な溶出を招くことがなく、所望の割合で樹脂が含浸された積層セラミック電子部品を得ることができる。   Thus, the resin is sufficiently impregnated in the step of impregnating the resin into the pores, and the resin is impregnated at a desired ratio without causing undesired elution of the impregnated resin in the step of washing the resin. An impregnated laminated ceramic electronic component can be obtained.

また本発明に係る積層セラミック電子部品の製造方法は、前記樹脂を含浸する工程においては、前記樹脂を加熱することによって、前記樹脂を洗浄する工程よりも前記樹脂の粘度が低くされていることを特徴とする。   In the method for manufacturing a multilayer ceramic electronic component according to the present invention, in the step of impregnating the resin, the viscosity of the resin is made lower by heating the resin than in the step of washing the resin. Features.

すなわち、温度によって樹脂の粘度を変化させることによって、樹脂の粘度を容易に変化させることができる。   That is, the viscosity of the resin can be easily changed by changing the viscosity of the resin according to the temperature.

さらにまた、本発明に係る積層セラミック電子部品の製造方法は、前記セラミックグリーンシートの少なくとも一部には焼失材が混練されていることを特徴とする。   Furthermore, the method for manufacturing a multilayer ceramic electronic component according to the present invention is characterized in that a burned-out material is kneaded in at least a part of the ceramic green sheet.

グリーンシートに焼失材を混練して意図的に空孔を形成した積層セラミック電子部品では、焼結体の中心付近にまで十分に樹脂を含浸させつつ、洗浄工程における不所望な樹脂の溶出を防ぐことが難しかった。よって本発明をこのような積層セラミック電子部品に適用することにより、本発明はより実効あるものとなる。   In multilayer ceramic electronic parts that are intentionally formed with pores by kneading the burned material into the green sheet, the resin is sufficiently impregnated to the vicinity of the center of the sintered body, while preventing unwanted elution of the resin in the cleaning process. It was difficult. Therefore, the present invention becomes more effective by applying the present invention to such a multilayer ceramic electronic component.

また、本発明に係る積層セラミック電子部品の製造方法は、少なくとも一部に焼失材が混練されたセラミックグリーンシートを所定枚数積層して積層体を形成する工程と、前記積層体を焼成してセラミック焼結体を形成する工程と、前記セラミック焼結体に存在する空孔に樹脂を含浸する工程と、前記セラミック焼結体の表面に付着した前記樹脂を洗浄する工程と、を含み、前記樹脂を含浸する工程における前記樹脂の粘度は、100〜350mPa・sであり、前記樹脂を洗浄する工程における前記樹脂の粘度は1200〜1500mPa・sであることを特徴とする。   The method for manufacturing a multilayer ceramic electronic component according to the present invention includes a step of laminating a predetermined number of ceramic green sheets kneaded with at least a part of a fired material to form a multilayer body, and firing the multilayer body to form a ceramic. A step of forming a sintered body, a step of impregnating a resin in pores existing in the ceramic sintered body, and a step of cleaning the resin adhering to the surface of the ceramic sintered body. The viscosity of the resin in the step of impregnating the resin is 100 to 350 mPa · s, and the viscosity of the resin in the step of washing the resin is 1200 to 1500 mPa · s.

これにより、グリーンシートに焼失材を混練して意図的に空孔を形成した積層セラミック電子部品において、焼結体の中心付近にまで十分に樹脂を含浸させつつ、洗浄工程における不所望な樹脂の溶出を防ぐことができる。   As a result, in the multilayer ceramic electronic component in which pores are intentionally formed by kneading the burned material into the green sheet, the resin is sufficiently impregnated to the vicinity of the center of the sintered body, and undesired resin in the cleaning process is removed. Elution can be prevented.

以上のように本発明によれば、空孔に十分に樹脂を含浸させつつ、洗浄工程において空孔に含浸された樹脂が不所望に溶出することを防ぐことができ、セラミックグリーンシートに焼失材を混練して意図的に空孔を形成した積層セラミック電子部品に適用すれば、本発明は特に有効である。   As described above, according to the present invention, it is possible to prevent the resin impregnated in the pores in the washing step from being undesirably eluted while sufficiently impregnating the pores with the resin, and to burn out the ceramic green sheet. The present invention is particularly effective when applied to a multilayer ceramic electronic component in which pores are intentionally formed by kneading.

以下において本発明の実施例について説明する。図1は本発明に係る積層セラミック電子部品の一例としての積層コイルを模式的に示す断面図である。   Examples of the present invention will be described below. FIG. 1 is a cross-sectional view schematically showing a multilayer coil as an example of a multilayer ceramic electronic component according to the present invention.

積層コイルは、内部にコイル導体20を備えたセラミック焼結体10と、セラミック焼結体10の両端面に形成され、コイル導体20と導通している外部電極30とからなる。図2はセラミック焼結体の断面を示す図である。セラミック焼結体10には35〜80vol%の空孔40が形成されており、空孔40には樹脂50が充填されている。本発明において空孔率は以下の式(1)によって与えられるものとする。   The laminated coil includes a ceramic sintered body 10 provided with a coil conductor 20 therein, and external electrodes 30 formed on both end surfaces of the ceramic sintered body 10 and electrically connected to the coil conductor 20. FIG. 2 is a view showing a cross section of the ceramic sintered body. The ceramic sintered body 10 is formed with 35 to 80 vol% voids 40, and the voids 40 are filled with a resin 50. In the present invention, the porosity is given by the following formula (1).

空孔率=1−{(X/Y)/Z} ・・・(1)
ここで、Xはセラミック焼結体10の重量、Yはセラミック焼結体10の体積、Zはセラミック焼結体10の理論密度である。なお、この式によって求めた空孔率は、後述するように焼失材を添加することによって意図的に形成された空孔40に加えて、意図せざる空孔40(焼結によって不可避的に発生する気泡など)をも含む。
Porosity = 1-{(X / Y) / Z} (1)
Here, X is the weight of the ceramic sintered body 10, Y is the volume of the ceramic sintered body 10, and Z is the theoretical density of the ceramic sintered body 10. Note that the porosity determined by this equation is not unavoidably generated by sintering in addition to the pores 40 intentionally formed by adding a burned-out material as will be described later. Air bubbles).

空孔40は、その平均径が5〜20μmとされている。なお、空孔40は、開空孔(オープンポア)及び閉空孔(クローズドポア)を含む。そしてこの空孔40のうち、30〜70vol%は、樹脂50で充填されている。空孔40に対する樹脂50の充填率(vol%)は、まず、樹脂50含浸前のセラミック焼結体10の空孔率を前記の式から求め、樹脂50含浸後のセラミック焼結体10の重量増加分とセラミック焼結体10の体積、樹脂50の比重から、セラミック焼結体10の体積に対する樹脂50含浸の体積を求め、これを空孔率で割って求める。   The pores 40 have an average diameter of 5 to 20 μm. The holes 40 include open holes (open pores) and closed holes (closed pores). Of the holes 40, 30 to 70 vol% is filled with the resin 50. The filling rate (vol%) of the resin 50 with respect to the pores 40 is obtained by first obtaining the porosity of the ceramic sintered body 10 before impregnation of the resin 50 from the above formula, and the weight of the ceramic sintered body 10 after impregnation of the resin 50 From the increase, the volume of the ceramic sintered body 10 and the specific gravity of the resin 50, the volume of the resin 50 impregnated with respect to the volume of the ceramic sintered body 10 is obtained, and this is divided by the porosity.

ここでこの積層コイルの製造方法について説明する。まず、所定の比率でFe,Ni,Cu,Znなどの酸化物を混合して800℃で1時間仮焼し、ボールミルによって粉砕して乾燥させることにより、フェライト粉末原料を得る。得られたフェライト粉末原料に、バインダー、分散剤、溶媒を添加し、さらに市販の球状ポリマー(焼失材)を所定の空孔率(ここでは35vol%とした)となるように添加して混合し、ドクターブレード法により厚さ40μmのセラミックグリーンシートを作製した。焼失材は平均粒径が7〜8μmのものを用いた。   Here, the manufacturing method of this laminated coil is demonstrated. First, an oxide such as Fe, Ni, Cu, and Zn is mixed at a predetermined ratio, calcined at 800 ° C. for 1 hour, pulverized by a ball mill, and dried to obtain a ferrite powder raw material. To the obtained ferrite powder raw material, a binder, a dispersant, and a solvent are added, and a commercially available spherical polymer (burned material) is added and mixed so as to have a predetermined porosity (35 vol% here). A ceramic green sheet having a thickness of 40 μm was prepared by a doctor blade method. The burned-out material used had an average particle size of 7-8 μm.

空孔を形成するための焼失材として、表面積や保形性が大きく、バインダーに
対する接着性に優れた球状ポリマーを採用することにより、歩留まりを低下させ
ることなく、バインダーの割合を減らして焼失材の割合を増やすことが可能にな
り、空孔率を高めることができる。
By adopting a spherical polymer with a large surface area and shape retaining property and excellent adhesion to the binder as a burned-out material for forming pores, the ratio of the burned-out material can be reduced by reducing the binder ratio without reducing the yield. The ratio can be increased, and the porosity can be increased.

次に、図3に示すように、前記セラミックグリーンシート11上に所定形状の導体パターン21やビアホール22を導電ペーストにて形成する。導体パターン21と、導体パターン21の所定の端部同士を接続するビアホール22とによってコイル導体20が形成されている。また、コイル導体20の両端はビアホール23によってセラミック焼結体10の端面まで引き出される。これらのセラミックグリーンシート11を積層し、圧着して所定サイズにカットする。   Next, as shown in FIG. 3, a conductor pattern 21 and a via hole 22 having a predetermined shape are formed on the ceramic green sheet 11 with a conductive paste. A coil conductor 20 is formed by the conductor pattern 21 and the via hole 22 that connects predetermined ends of the conductor pattern 21. Further, both ends of the coil conductor 20 are drawn out to the end face of the ceramic sintered body 10 by the via holes 23. These ceramic green sheets 11 are laminated, pressed and cut into a predetermined size.

ここでは、すべてのセラミックグリーンシート11に焼失材を混練しているが、焼失材を混練しないセラミックグリーンシート11を併用してもよい。   Here, all the ceramic green sheets 11 are kneaded with the burned material, but ceramic green sheets 11 that are not kneaded with the burned material may be used in combination.

得られた積層体を400℃で3時間熱処理して脱バインダーを行った後、92
5℃で2時間焼成することにより、35vol%の空孔率を有するセラミック焼
結体を得た。空孔の割合は、混合する有機材料(特に、焼失材)の量を変化させ
ることにより、調整することができる。
The resulting laminate was heat treated at 400 ° C. for 3 hours to remove the binder,
By firing at 5 ° C. for 2 hours, a ceramic sintered body having a porosity of 35 vol% was obtained. The ratio of the pores can be adjusted by changing the amount of the organic material (particularly the burned-out material) to be mixed.

次にセラミック焼結体10の両端面にAgを主成分とする導電ペーストを850℃で焼きつけて外部電極30の下地とする。   Next, a conductive paste containing Ag as a main component is baked at 850 ° C. on both end faces of the ceramic sintered body 10 as a base for the external electrode 30.

次に、エポキシ樹脂50を、所定の粘度になるように有機溶剤で希釈した溶剤中に、前記積層体10を浸漬し、真空ポンプを用いて脱泡する。この状態でおよそ10分間にわたって真空含浸を行い、空孔40にエポキシ樹脂を充填した。このとき、エポキシ樹脂は50℃に加熱して粘度を下げて含浸させた。   Next, the laminate 10 is immersed in a solvent in which the epoxy resin 50 is diluted with an organic solvent so as to have a predetermined viscosity, and defoamed using a vacuum pump. In this state, vacuum impregnation was performed for about 10 minutes, and the pores 40 were filled with epoxy resin. At this time, the epoxy resin was impregnated by heating to 50 ° C. to lower the viscosity.

常温(25℃)に放冷したのち、アルコールを用いてセラミック焼結体の表面に付着した樹脂を洗浄した。このとき、エポキシ樹脂は常温であるので前述の真空含浸時よりも粘度が高くされている。   After cooling to room temperature (25 ° C.), the resin adhering to the surface of the ceramic sintered body was washed with alcohol. At this time, since the epoxy resin is at room temperature, the viscosity is higher than that during the above-described vacuum impregnation.

洗浄後、120℃で数時間かけてエポキシ樹脂を硬化させ、外部電極の下地にNiめっき、Snめっきを施して図1に示した積層コイルが完成する。   After cleaning, the epoxy resin is cured for several hours at 120 ° C., and Ni plating and Sn plating are applied to the base of the external electrode to complete the laminated coil shown in FIG.

ここで本発明の効果を確認するため次のような実験を行った。まず50℃加熱時における粘度、すなわち樹脂含浸時の粘度が320mPa・s、常温(25℃)における粘度、すなわち洗浄時における粘度が1000mPa・sであるエポキシ樹脂を用いて上記の工程で積層コイルを作成した(実施例1)。また、50℃加熱時における粘度が250mPa・s、常温における粘度が1200mPa・sであるエポキシ樹脂を用いて上記の工程で積層コイルを作成した(実施例2)。さらに比較例として、常温における粘度が1200mPa・sである樹脂を用いて、真空含浸と洗浄をともに常温で行って積層コイルを作成した(比較例)。   Here, the following experiment was conducted to confirm the effect of the present invention. First, the laminated coil is formed by the above-described process using an epoxy resin having a viscosity at the time of heating at 50 ° C., that is, a viscosity at the time of resin impregnation of 320 mPa · s and a viscosity at room temperature (25 ° C.), that is, a viscosity at the time of washing of 1000 mPa · s. Created (Example 1). In addition, a laminated coil was formed by the above-described process using an epoxy resin having a viscosity of 250 mPa · s when heated at 50 ° C. and a viscosity of 1200 mPa · s at room temperature (Example 2). Furthermore, as a comparative example, using a resin having a viscosity at room temperature of 1200 mPa · s, both vacuum impregnation and cleaning were performed at room temperature to prepare a laminated coil (comparative example).

これらのそれぞれについて、樹脂含浸率、抗折強度、特性変化率を測定した。特性変化率は、120℃、湿度100%、2atmの条件で100時間の耐湿試験を行い、耐湿試験前と試験後に100MHzにおけるインピーダンスを測定して、以下の式(2)によって求めた。   About each of these, the resin impregnation rate, the bending strength, and the characteristic change rate were measured. The characteristic change rate was obtained by the following equation (2) by performing a humidity resistance test for 100 hours under the conditions of 120 ° C., humidity 100%, and 2 atm, measuring the impedance at 100 MHz before and after the moisture resistance test.

特性変化率=(B−A)/A ・・・(2)
ここでAは耐湿試験前のインピーダンスであり、Bは耐湿試験後のインピーダンスである。
Characteristic change rate = (B−A) / A (2)
Here, A is the impedance before the moisture resistance test, and B is the impedance after the moisture resistance test.

実施例1、2および比較例の樹脂含浸率、抗折強度、特性変化率を表1に示す。   Table 1 shows the resin impregnation rate, bending strength, and property change rate of Examples 1 and 2 and Comparative Example.

Figure 2005093707
Figure 2005093707

実施例1、2ともに、比較例よりも樹脂含浸率が高かったが、これは真空含浸時の粘度が比較例よりも低いため、セラミック焼結体の中心付近にある空孔にまで均一に樹脂が含浸されたことによる。中心付近の空孔にまで均一に樹脂が含浸されたため、抗折強度、耐湿性ともに高まったことがわかる。   In both Examples 1 and 2, the resin impregnation rate was higher than that of the comparative example, but this is because the viscosity at the time of vacuum impregnation is lower than that of the comparative example. Is due to impregnation. It can be seen that since the resin was uniformly impregnated into the pores near the center, both the bending strength and the moisture resistance were increased.

なお実施例2のほうが実施例1よりも樹脂含浸率が高かったのは、洗浄時のエポキシ樹脂の粘度が実施例2のほうが高いため、セラミック焼結体表面付近の空孔から不所望な樹脂の溶出が起こり難くなったためである。   Note that the resin impregnation rate in Example 2 was higher than that in Example 1 because the viscosity of the epoxy resin at the time of washing was higher in Example 2, so that an undesired resin from the pores near the ceramic sintered body surface. This is because elution of is difficult to occur.

本発明においては、セラミックグリーンシートに焼失材を混連して空孔を形成した場合、樹脂含浸時の樹脂の粘度が100〜350mPa・sとされることが好ましい。これよりも粘度の低い樹脂を用いた場合には含浸された樹脂が流れ落ちてしまう虞があり、これよりも粘度の高い樹脂を用いた場合には焼結体の中心まで樹脂が含浸されない虞がある。   In the present invention, when the pores are formed by mixing the burned material with the ceramic green sheet, the viscosity of the resin when impregnated with the resin is preferably 100 to 350 mPa · s. If a resin with a lower viscosity is used, the impregnated resin may flow down, and if a resin with a higher viscosity is used, the resin may not be impregnated to the center of the sintered body. is there.

また、セラミックグリーンシートに焼失材を混連して空孔を形成した場合、洗浄時の樹脂の粘度が500〜1500mPa・sとされることが好ましく、洗浄時の樹脂の粘度は1200〜1500mPa・sとされることがより好ましい。樹脂の粘度がこれよりも低い場合には溶剤によって樹脂が不所望に溶出してしまう虞があり、樹脂の粘度がこれよりも高い場合には焼結体の表面に付着した樹脂が十分に除去されない虞がある。   In addition, when the pores are formed by mixing the burned material with the ceramic green sheet, the viscosity of the resin during the cleaning is preferably 500 to 1500 mPa · s, and the viscosity of the resin during the cleaning is 1200 to 1500 mPa · s. More preferably, s. If the viscosity of the resin is lower than this, the resin may be undesirably eluted by the solvent. If the viscosity of the resin is higher than this, the resin adhering to the surface of the sintered body will be sufficiently removed. There is a risk that it will not be.

上記の実施例ではセラミック焼結体はフェライト焼結体であるが、誘電体であってもよい。また、樹脂としてはエポキシ樹脂を用いたが、フェノール樹脂やシリコーン樹脂を用いてもよい。さらにまた、焼結体の表面に付着した樹脂を洗浄するためにアルコールを用いたが、樹脂を溶解させる作用があるものであれば、その他いかなる液体を用いてもよく、例えば公知の種々の有機溶剤を用いることができる。その他、本発明の趣旨の範囲内において上記の実施例に種々の変更を加えてもよいことはいうまでもない。   In the above embodiment, the ceramic sintered body is a ferrite sintered body, but may be a dielectric. Moreover, although epoxy resin was used as resin, you may use a phenol resin and a silicone resin. Furthermore, although alcohol was used to wash the resin adhering to the surface of the sintered body, any other liquid may be used as long as it has an action of dissolving the resin. A solvent can be used. In addition, it goes without saying that various modifications may be made to the above-described embodiments within the scope of the present invention.

本発明の積層コイルを模式的に示す断面図である。It is sectional drawing which shows the laminated coil of this invention typically. 本発明の積層コイルのセラミック焼結体を示す断面図である。It is sectional drawing which shows the ceramic sintered compact of the laminated coil of this invention. 本発明の積層コイルの積層構造を示す斜視図である。It is a perspective view which shows the laminated structure of the laminated coil of this invention.

符号の説明Explanation of symbols

10 セラミック焼結体
11 セラミックグリーンシート
20 コイル導体
21 導体パターン
22,23 ビアホール
30 外部電極
40 空孔
50 樹脂(エポキシ樹脂)
DESCRIPTION OF SYMBOLS 10 Ceramic sintered body 11 Ceramic green sheet 20 Coil conductor 21 Conductor pattern 22, 23 Via hole 30 External electrode 40 Hole 50 Resin (epoxy resin)

Claims (4)

セラミックグリーンシートを所定枚数積層して積層体を形成する工程と、
前記積層体を焼成してセラミック焼結体を形成する工程と、
前記セラミック焼結体に存在する空孔に樹脂を含浸する工程と、
前記セラミック焼結体の表面に付着した前記樹脂を洗浄する工程と、を含み、
前記樹脂を含浸する工程における前記樹脂の粘度は、前記樹脂を洗浄する工程における前記樹脂の粘度よりも低くされていることを特徴とする積層セラミック電子部品の製造方法。
A step of laminating a predetermined number of ceramic green sheets to form a laminate;
Firing the laminate to form a ceramic sintered body;
Impregnating a resin into pores present in the ceramic sintered body;
Cleaning the resin adhering to the surface of the ceramic sintered body,
The method for producing a multilayer ceramic electronic component, wherein the viscosity of the resin in the step of impregnating the resin is lower than the viscosity of the resin in the step of washing the resin.
請求項1に記載のセラミック電子部品の製造方法であって、前記樹脂を含浸する工程においては、前記樹脂を加熱することによって、前記樹脂を洗浄する工程よりも前記樹脂の粘度が低くされていることを特徴とする積層セラミック電子部品の製造方法。   2. The method of manufacturing a ceramic electronic component according to claim 1, wherein in the step of impregnating the resin, the resin is heated to lower the viscosity of the resin than in the step of washing the resin. A method for producing a multilayer ceramic electronic component. 請求項1あるいは2に記載のセラミック電子部品の製造方法であって、前記セラミックグリーンシートの少なくとも一部には焼失材が混練されていることを特徴とする積層セラミック電子部品の製造方法。   3. The method for manufacturing a ceramic ceramic electronic component according to claim 1, wherein at least a part of the ceramic green sheet is kneaded with a burned-out material. 少なくとも一部に焼失材が混練されたセラミックグリーンシートを所定枚数積層して積層体を形成する工程と、
前記積層体を焼成してセラミック焼結体を形成する工程と、
前記セラミック焼結体に存在する空孔に樹脂を含浸する工程と、
前記セラミック焼結体の表面に付着した前記樹脂を洗浄する工程と、を含み、
前記樹脂を含浸する工程における前記樹脂の粘度は、100〜350mPa・sであり、前記樹脂を洗浄する工程における前記樹脂の粘度は1200〜1500mPa・sであることを特徴とする積層セラミック電子部品の製造方法。
A step of forming a laminate by laminating a predetermined number of ceramic green sheets kneaded with at least a part of the burned material;
Firing the laminate to form a ceramic sintered body;
Impregnating a resin into pores present in the ceramic sintered body;
Cleaning the resin adhering to the surface of the ceramic sintered body,
In the multilayer ceramic electronic component, the viscosity of the resin in the step of impregnating the resin is 100 to 350 mPa · s, and the viscosity of the resin in the step of cleaning the resin is 1200 to 1500 mPa · s. Production method.
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JP2009049361A (en) * 2007-07-24 2009-03-05 Tdk Corp Stacked electronic part and method of manufacturing the same
JP2009049360A (en) * 2007-07-24 2009-03-05 Tdk Corp Stacked electronic part and method of manufacturing the same
US8009012B2 (en) 2007-07-24 2011-08-30 Tdk Corporation Stacked electronic part and method of manufacturing the same
JP2016207939A (en) * 2015-04-27 2016-12-08 株式会社村田製作所 Electronic component and its manufacturing method
JP2021174797A (en) * 2020-04-20 2021-11-01 株式会社村田製作所 Coil component and manufacturing method thereof

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009049361A (en) * 2007-07-24 2009-03-05 Tdk Corp Stacked electronic part and method of manufacturing the same
JP2009049360A (en) * 2007-07-24 2009-03-05 Tdk Corp Stacked electronic part and method of manufacturing the same
US8009012B2 (en) 2007-07-24 2011-08-30 Tdk Corporation Stacked electronic part and method of manufacturing the same
JP2016207939A (en) * 2015-04-27 2016-12-08 株式会社村田製作所 Electronic component and its manufacturing method
US10256029B2 (en) 2015-04-27 2019-04-09 Murata Manufacturing Co., Ltd. Electronic component and method for manufacturing the same
JP2021174797A (en) * 2020-04-20 2021-11-01 株式会社村田製作所 Coil component and manufacturing method thereof

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