JP2005083937A5 - - Google Patents

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Publication number
JP2005083937A5
JP2005083937A5 JP2003317267A JP2003317267A JP2005083937A5 JP 2005083937 A5 JP2005083937 A5 JP 2005083937A5 JP 2003317267 A JP2003317267 A JP 2003317267A JP 2003317267 A JP2003317267 A JP 2003317267A JP 2005083937 A5 JP2005083937 A5 JP 2005083937A5
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JP
Japan
Prior art keywords
movable element
electrodes
phase input
signal
drive signal
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Application number
JP2003317267A
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Japanese (ja)
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JP4303545B2 (en
JP2005083937A (en
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Priority to JP2003317267A priority Critical patent/JP4303545B2/en
Priority claimed from JP2003317267A external-priority patent/JP4303545B2/en
Publication of JP2005083937A publication Critical patent/JP2005083937A/en
Publication of JP2005083937A5 publication Critical patent/JP2005083937A5/ja
Application granted granted Critical
Publication of JP4303545B2 publication Critical patent/JP4303545B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Claims (3)

接地された可動エレメントと、
静電気力により該可動エレメントを動作させる第１および第２の電極とを備え、
該可動エレメントの共振周波数より周波数の低い第１および第２の駆動信号をそれぞれ該第１および該第２の電極に印加し該可動エレメントの動作を制御するとともに、該共振周波数より周波数の高い検出信号を該第１および第２の電極に印加し該可動エレメントと該第１および第２の電極との間の静電容量を検出することを特徴とする可動エレメント装置。 A grounded movable element;
First and second electrodes for operating the movable element by electrostatic force,
The first and second drive signals having a frequency lower than the resonance frequency of the movable element are applied to the first and second electrodes, respectively, to control the operation of the movable element, and the detection has a frequency higher than the resonance frequency. A movable element device characterized in that a signal is applied to the first and second electrodes to detect a capacitance between the movable element and the first and second electrodes. 該駆動信号および該検出信号を正相入力より入力し、該電極を逆相入力に接続し、出力を該逆相入力に帰還させた差動増幅部を備え、
該差動増幅部の帰還容量および帰還抵抗は、該駆動信号に対する該差動増幅部の利得が略１であり、
該検出信号に対する該作動増幅部の利得が該静電容量の変化により変化する値であり、
該差動増幅部の出力に基づき該可動エレメントの動作を検出することを特徴とする請求項１記載の可動エレメント装置。 The drive signal and the detection signal are input from a positive phase input, the electrode is connected to a negative phase input, and a differential amplification unit that feeds back an output to the negative phase input is provided.
The feedback capacitor and feedback resistor of the differential amplifier have a gain of approximately 1 for the drive signal,
The gain of the operation amplification unit with respect to the detection signal is a value that changes due to a change in the capacitance,
Movable element according to claim 1, wherein the detecting the operation of the movable element based on the output of the differential amplifier unit. 該該可動エレメントの位置および方向を変化させる際に、該駆動信号の変化に連動して該差動増幅部の帰還抵抗を減少させることを特徴とする請求項２記載の可動エレメント装置。 3. The movable element device according to claim 2 , wherein when changing the position and direction of the movable element, the feedback resistance of the differential amplifying unit is decreased in conjunction with the change of the drive signal.
JP2003317267A 2003-09-09 2003-09-09 Movable element device Expired - Fee Related JP4303545B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003317267A JP4303545B2 (en) 2003-09-09 2003-09-09 Movable element device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003317267A JP4303545B2 (en) 2003-09-09 2003-09-09 Movable element device

Publications (3)

Publication Number Publication Date
JP2005083937A JP2005083937A (en) 2005-03-31
JP2005083937A5 true JP2005083937A5 (en) 2006-09-28
JP4303545B2 JP4303545B2 (en) 2009-07-29

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ID=34416908

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003317267A Expired - Fee Related JP4303545B2 (en) 2003-09-09 2003-09-09 Movable element device

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JP (1) JP4303545B2 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4499447B2 (en) * 2004-03-01 2010-07-07 日本電信電話株式会社 Electronic component equipment
JP4287324B2 (en) * 2004-04-28 2009-07-01 日本電信電話株式会社 Electronic component equipment
US8164352B2 (en) 2006-02-07 2012-04-24 Pioneer Corporation Capacitance detecting apparatus
JP2007249174A (en) * 2006-02-16 2007-09-27 Olympus Corp Variable geometry mirror
CN100593767C (en) * 2006-06-30 2010-03-10 深圳市大族激光科技股份有限公司 Control method of capacity transducer
JP5103876B2 (en) * 2006-11-16 2012-12-19 株式会社デンソー Two-dimensional optical scanning device
JP5362469B2 (en) * 2009-02-26 2013-12-11 ラピスセミコンダクタ株式会社 LCD panel drive circuit
JP6306820B2 (en) * 2010-03-09 2018-04-04 シーウェア システムズＳｉ−Ｗａｒｅ Ｓｙｓｔｅｍｓ Techniques for determining mirror position in optical interferometers.
DE102012218219A1 (en) * 2012-10-05 2014-04-10 Carl Zeiss Smt Gmbh Method for controlling the tilting of a mirror element
JP7006189B2 (en) * 2017-11-28 2022-01-24 株式会社アイシン Capacitance detector
CN112817144B (en) * 2020-12-31 2023-04-14 歌尔股份有限公司 MEMS scanning mirror and laser projector

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59173703A (en) * 1983-03-23 1984-10-01 Yokogawa Hokushin Electric Corp Capacity type converting device
JP2950011B2 (en) * 1992-04-06 1999-09-20 松下電器産業株式会社 Mirror drive
US5526172A (en) * 1993-07-27 1996-06-11 Texas Instruments Incorporated Microminiature, monolithic, variable electrical signal processor and apparatus including same
JP3389528B2 (en) * 1999-04-16 2003-03-24 住友金属工業株式会社 Impedance / voltage converter
JP2001142009A (en) * 1999-11-16 2001-05-25 Sony Corp Micromirror device and optical disk device
JP2001249151A (en) * 2000-03-02 2001-09-14 Denso Corp Capacity detection circuit
JP2001289607A (en) * 2000-04-05 2001-10-19 Fujitsu Ltd Method and device for detecting oscillating angle and optical disk device
JP4373034B2 (en) * 2001-07-11 2009-11-25 富士通株式会社 Light switch
JP3800161B2 (en) * 2001-10-11 2006-07-26 株式会社デンソー Micro movable mechanism system and control method of micro movable mechanism

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