JP2005074551A - Vacuum suction device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vacuum suction apparatus having a vacuum suction part comprising a large number of micro protrusions of extremely low height, positively sucking a sample in spite of supporting only with protrusions, correcting the sample into a plane without being influenced by dust or the like, prevented from chipping off all the protrusions and hardly causing the breakage of the protrusions. <P>SOLUTION: In this vacuum suction device, the vacuum suction part 1 communicating with a vacuum exhaust hole 3 is formed of a porous ceramics material having a maximum pore diameter not larger than 1/2 of the diameter of the protrusions, and the upper face is provided with the large number of micro protrusions 2. The height of the protrusions 2 is set to the extremely low height of about several μm to form a micro clearance 12 between the vacuum suction part 1 and the sample 10, and the pores existing in the outer peripheral part of the vacuum suction part are sealed with a fine material up to a region 21 slightly inward from the outer diameter of the sample. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a pattern transfer device, a drawing device, various process manufacturing devices, an inspection length measuring device, and a vacuum suction device used for a sample holding device and a sample transport device of a processing device such as grinding, polishing, and cutting in an LSI manufacturing device. In particular, the vacuum adsorber.

  Conventionally, a general vacuum suction device used for processing includes a porous vacuum suction device 14 as shown in FIGS. 9 (a) and 9 (b). The apparatus includes a vacuum adsorbing portion 1 made of porous ceramics having a porosity of several tens to 40%, a base portion 5 made of dense ceramics having a planar land portion 11 disposed outside thereof, and vacuum exhaust. Evacuation holes 3 for performing the above, vacuum evacuation grooves 4 provided on the lower surface of the vacuum suction portion 1 and extending radially from the center, and evacuation grooves 4 ′ arranged annularly on the outer peripheral side. The evacuation grooves 4 and 4 'are connected to the evacuation hole 3 and further connected to a vacuum pump (not shown). The vacuum suction portion 1 and the land portion 11 are finished with high precision on the same plane.

  When a vacuum pump is operated after placing a sample 10 such as a silicon wafer on the upper surface of the vacuum suction device, air passes through the vacuum exhaust grooves 4 and 4 ′ as shown by arrows from the vacuum exhaust holes 3. The vacuum suction unit 1 and the sample 10 are evacuated, and the sample 10 is pressed onto the vacuum suction unit 1 by the atmospheric pressure. Therefore, the sample 10 follows the high-precision plane of the vacuum suction unit 1 and the warping and bending of the sample are corrected.

  On the other hand, the vacuum suction apparatus described in the following Patent Document 1 or 2 used in LSI manufacturing has a vacuum suction device 14 as shown in FIGS. 10 (a) and 10 (b) or FIGS. 11 (a) and 11 (b). I have.

  On the upper surface of the conventional vacuum suction device 14, the vacuum suction portion 1 made of the aforementioned porous ceramics integrally having a large number of minute protrusions 2, and a land portion that is formed by an annular projection and surrounds the vacuum suction portion 1. 11 is provided. Further, a vacuum exhaust groove 4 extending radially from the center and a vacuum exhaust groove 4 ′ arranged annularly on the outer peripheral side are provided on the lower surface of the vacuum suction portion 1 and connected to the vacuum exhaust hole 3 at the center. .

In such a vacuum suction device 14, after a sample 10 such as a silicon wafer is placed on the upper surface of the vacuum suction device 14, a vacuum pump (not shown) is operated so that the air below the sample 10 is evacuated to the vacuum exhaust hole 3. Since the vacuum suction part 1 becomes a negative pressure and the minute gap 12 between the protrusions 2 becomes a vacuum when the air is exhausted from, the sample 10 is not shown in the protrusions 2 and the land parts 11 (FIGS. 11A and 11B). ) Adsorbed on top. The upper surface of the land portion 11 forms the same plane as the upper surface of the protrusion 2, and the vacuum outer periphery portion of the sample 10 is in close contact with each other, whereby the vacuum suction portion 1 is vacuum-sealed. When the sample 10 is vacuum-sucked, the sample 10 follows the protrusion 2 and the upper surface of the land portion 11, and the warpage and the bending are corrected.
JP-A-10-128633 Japanese Examined Patent Publication No. 62-45696

  The conventional porous vacuum adsorber 14 shown in FIGS. 9A and 9B has a high contact rate with the back surface of the sample 10 due to the porosity of several tens to 40% as described above. There is a high probability of dust adhering to the vacuum suction part 1, and it is difficult to remove the dust when adhering, and the flatness of the sample is deteriorated.

  On the other hand, in the vacuum suction device 14 of the vacuum suction device shown in FIG. 10 (a), (b) or FIG. 11 (a), (b), in which the protrusion 2 is integrally formed on the vacuum suction portion 1, The sample 10 is adsorbed on the upper surface of the protrusion 2 and the land 11 (not shown in FIGS. 11 (a) and 11 (b)) of the vacuum suction unit 1 by evacuation, thereby correcting the warp and deformation of the sample 10. Can be flat. Further, since the contact area between the vacuum suction portion 1 and the sample 10 can be made extremely small by the protrusions 2, the flatness due to dust or the like hardly occurs. However, since the land portion 11 is provided for the purpose of complete vacuum sealing, there is a high possibility that dust or the like will adhere to the land portion 11, and the outer peripheral portion of the sample 10 is highly accurate like the porous chuck. There was a problem that it could not be corrected to a flat surface.

  Further, as shown in FIGS. 11A and 11B, since the protrusion 2 is also made of the same porous material as that of the vacuum suction portion 1, the surface of the protrusion formed on the upper surface thereof has pores of several tens μm to several hundreds μm. Therefore, when the pore diameter is larger than the protrusion diameter, the protrusion cannot be formed, or even if it can be formed, the number of chipped portions increases, and there is a disadvantage that it is broken by a small external force. Further, since the area distribution is different between the protrusion 2 and the land portion 11 provided on the outer peripheral portion, the protrusion 2 is processed to be lower than the land portion 11 by processing, and the flatness is deteriorated.

  The present invention has been made in view of the above-described conventional problems, and the object of the present invention is to reliably adsorb a sample despite being supported only by protrusions, and to avoid the influence of dust and the like. To provide a vacuum suction device having a vacuum suction part made up of a large number of very low-profile projections, in which all projections are not missing, and the projections are not easily broken. It is in.

  In order to achieve the above object, the present invention provides a sample 10 that includes only a large number of protrusions 2 whose upper surfaces are on the same plane as shown in the first embodiment of FIGS. 1 (a), 1 (b) and FIG. In the vacuum suction apparatus having the vacuum suction device 14 provided with the vacuum exhaust hole 3 connected to the vacuum pump inside, the vacuum suction portion 1 communicating with the vacuum exhaust hole 3 is set to 1/2 of the projection diameter. The vacuum suction portion is made of a porous ceramic material having the following maximum pore diameter, provided with a large number of fine protrusions 2 on the upper surface thereof, and the height of the protrusions 2 is set to a very low height of about several μm. 1 and the sample 10, a minute gap 12 is formed, and the pores existing in the outer peripheral portion of the vacuum suction portion are slightly inside the sample outer diameter (preferably about 0.5 mm to 1 mm) to the region 21. Specially sealed with a dense material It is set to.

  As shown in the second embodiment of FIGS. 3 (a), 3 (b) and 4, the sample 10 is supported only by a large number of protrusions 2 whose upper surfaces are on the same plane and connected to a vacuum pump inside. In the vacuum suction apparatus provided with the vacuum suction device 14 provided with the vacuum exhaust hole 3, the vacuum suction part 1 communicating with the vacuum exhaust hole 3 is made of a porous ceramic material having a maximum pore diameter of 1/2 or less of the projection diameter. Glass, metal that is easier to work with, and is provided with an annular seal part 24 surrounding the vacuum suction part. In addition, by forming a dense material such as an inorganic or organic material and setting it to be about several μm lower than the protrusion, a very small gap is formed between the protrusion and the sample. Existing in the outer periphery Up area 21 slightly inside the specimen-diameter (preferably about 0.5 mm to 1 mm), it is characterized in that sealed with the dense material.

  As shown in the third embodiment of FIGS. 5A and 5B, the sample 10 is supported only by a large number of protrusions 2 whose upper surfaces are on the same plane, and the vacuum exhaust is connected to a vacuum pump inside. In a vacuum suction apparatus including a vacuum suction device 14 provided with holes 3, the vacuum suction portion 1 communicating with the vacuum exhaust hole 3 is made of a porous material, and a large number of materials made of a material denser than the vacuum suction portion 1 are formed on the upper surface thereof. The minute protrusions 2 are fixedly provided, and the height of the protrusions 2 is set to a very low height of about several μm, thereby forming a minute gap 12 between the vacuum suction portion 1 and the sample 10. The pores existing in the outer peripheral portion of the vacuum suction portion are sealed with a dense material up to a region 21 slightly inside (desirably about 0.5 mm to 1 mm) from the outer diameter of the sample.

  The vacuum suction part 1 is made of a porous ceramic material having a porosity of about several tens to 40%. The protrusion 2 has a height of about several μm (desirably about 1 μm to 5 μm) and a diameter of about several tens to several hundreds of μm (desirably about 10 μm to 200 μm), glass, metal, inorganic or organic material. It can be formed of other materials with a dense structure such as Alternatively, the protrusion 2 is a porous ceramic material of the same shape as the vacuum suction portion 1 having the same shape as described above, and the maximum pore diameter is ½ or less of the protrusion diameter and the porosity is about several tens to 40%. It can be formed of a porous ceramic material having a pore diameter smaller than that of the vacuum suction portion 1. The pore sealing material can be formed of other materials having a dense structure such as glass or metal and inorganic or organic materials.

Furthermore, in order to achieve the above-described object, the present invention provides a sample 10 by using only a large number of microprotrusions 102a whose upper surfaces are on the same plane as shown in the fourth embodiment in FIGS. 6 (a) and 6 (b). In a vacuum suction device provided with a vacuum suction device 14 provided with a vacuum exhaust hole 3 connected to the vacuum pump 7 inside,
The vacuum suction portion 1 communicating with the vacuum exhaust hole 3 is made of a porous material, and the upper surface thereof is made of a porous material having a pore diameter smaller than that of the vacuum suction portion 1, and a large number of minute protrusions 102a are formed on the upper surface of the thin plate-like substrate 102b. Are formed in layers, and the height of the protrusion 102a is set to a very low height of about several μm, whereby a minute gap 12 is provided between the vacuum suction portion 1 and the sample 10. And the pores existing in the outer peripheral portion of the vacuum suction portion are sealed with a dense material up to a region 21 slightly inside (preferably about 0.5 mm to 1 mm) from the outer diameter of the sample. Yes.

  The vacuum suction portion 1 is made of a porous ceramic material having a porosity of about several tens to 40%, and the protruding plate 102 is a porous ceramic material having a composition structure having a pore size smaller than that of the vacuum suction portion 1. That is, a dense material that seals pores existing in the outer peripheral portion of the vacuum suction portion from a porous ceramic material having a porosity of about several tens to 40% with a maximum pore diameter of 1/2 or less of the projection diameter is It is characterized by being made of selected materials such as glass or metal and inorganic or organic materials.

Furthermore, as shown in the fifth and sixth embodiments of FIGS. 7 (a), 7 (b), 8 (a), and 8 (b), the present invention provides a large number of microprojections whose upper surfaces are on the same plane. In a vacuum adsorption apparatus provided with a vacuum adsorber 14 that supports a sample 10 only by 2 and has a vacuum exhaust hole 3 connected to a vacuum pump 7 inside.
In the vicinity of the center of the vacuum suction part 1, a hole 15 through which a lift mechanism for lifting the sample 10 adsorbed to the vacuum suction part 1 is passed, or a notch 16 is provided in the peripheral part, and the periphery 23 of the hole or notch (preferably, The pores present in the outer periphery 21 of the vacuum suction part (preferably about 0.5 mm to 1 mm from the outer diameter of the sample) from the outer peripheral edge of the hole or notch are glass, metal, inorganic Alternatively, it is sealed with a dense material such as an organic material.

In the present invention, the protrusion 2 is provided on the vacuum suction portion 1 made of a porous ceramic material having a maximum pore diameter of ½ or less of the protrusion diameter, or on the vacuum suction portion 1 made of a porous material. By providing the protrusions 2 (102a) made of a porous material, which is the same type or different type, which is denser than the vacuum adsorbing portion 1 or has a smaller pore diameter, the contact area with the back surface of the sample 10 is extremely reduced, Since the influence can be reduced, the entire surface of the sample 10 can be easily corrected to a highly accurate plane. Further, as shown in FIG. 2 , by sealing the pores 19 existing in the outer peripheral portion of the vacuum suction portion 1 to a region 21 slightly inside the outer diameter of the sample with a dense material, the outer end of the sample can be reduced. Even if it is slightly chamfered and rounded, air does not leak from the sealed pores 19, and the region 22 having the unsealed pores 20 serving as the vacuum suction portion 1 has a high degree of vacuum. Can be held.

  Further, in order to vacuum-suck a thin sample, it is necessary that the projection pitch is small and constant, but it is integrally formed on a porous material having pores larger than the projection diameter as in the conventional case. In the protrusions, the protrusions in the pores may be missing as a whole or a half or more, and the flatness deteriorates because the sample cannot be supported at regular intervals. In the present invention, protrusions are formed on the vacuum suction portion 1 made of a porous ceramic material whose maximum pore diameter is 1/2 or less of the protrusion diameter, or from a porous material that is denser or smaller in pore diameter than the vacuum suction portion 1. Since the protrusion 2 (102a) is formed so as to be fixed on the porous material of the vacuum suction portion 1, the protrusion 2 (102a) can be formed also in the pore portion, and the height of the interval is constant. Can be formed.

  Furthermore, since the material of the projection can be selected, it is possible to form the projection with a diameter of several tens of μm or less, for example, a few tens of μm or less by using a lithography technique instead of sandblasting, and forming it extremely small and low. . Therefore, even if the interval between the protrusions is reduced, the contact area with the wafer is not increased, and the minute gap between the sample 10 and the vacuum suction portion 1 can be extremely reduced. In addition, since the pores existing in the outer peripheral portion of the vacuum suction portion 1 are sealed with a dense material up to a region slightly inside the outer diameter of the sample, there is no vacuum leak from the pores. As described above, it is possible to suppress the vacuum leak to the limit, and the land portion for sealing the vacuum becomes unnecessary.

  Further, as shown in FIGS. 7 and 8, it is only necessary to add a process for sealing pores existing around the hole 15 and the notch 16 through which the lift mechanism for lifting the wafer is passed. Since it is possible to build up without forming a land portion that seals the surrounding vacuum, the portion for supporting the sample 10 can be only a protrusion, and the contact area distribution with the tool is equal in any portion when processing the protrusion surface. Therefore, it becomes easy to improve the flatness of the entire adsorption portion.

  As described above, in the vacuum suction apparatus according to the present invention, since the contact area between the upper surface of the protrusion and the back surface of the material is extremely small, the influence of dust can be reduced, and the entire surface of the sample can be easily and accurately Can be corrected to a flat surface. In addition, since the height of the protrusions can be extremely low and can be formed on the pores of the porous material, the strength of the protrusions can be improved several times and the durability can be increased, and at the same time, the constant pitch is extremely small. By forming protrusions arranged at intervals, it becomes possible to adsorb a sample thinner than 200 μm without deformation.

(First embodiment)
1A and 1B are a plan view and a front sectional view showing a first embodiment of a vacuum suction apparatus according to the present invention. FIG. 2 is an enlarged cross-sectional view of the main part.
As shown in the figure, vacuum adsorption made of porous ceramics having a porosity of several tens to 40% and a maximum pore diameter smaller than 1/2 of the protrusion diameter on the upper part of the base 5 of the apparatus made of dense ceramics. Part 1 is welded with a glass agent or the like. Further, a plurality of pin-shaped microprojections 2 having a circular cross section are provided on the upper surface of the vacuum suction portion 1, and the microprojections 2 have a pitch according to the thickness of the sample 10 so that the sample 10 does not bend during vacuum suction. And are made as small as possible in order to reduce the contact area. Further, pores existing in the outer peripheral portion of the vacuum suction portion 1 are sealed with a dense material up to a region 21 slightly inside (desirably about 0.5 mm to 1 mm) from the outer diameter of the sample.
In the present embodiment, the protrusion 2 is formed on the vacuum suction portion 1 made of a porous ceramic material having a maximum pore diameter of ½ or less of the protrusion diameter. Therefore, the protrusion 2 is made of a porous material having a maximum pore diameter larger than the protrusion diameter. It is hard to break as compared with the protrusion, and the protrusion may be partially chipped, but the whole is not chipped. Therefore, it is possible to make protrusions arranged at regular intervals, and it is possible to adsorb the thin sample 10 without deformation.

(Second Embodiment)
FIGS. 3A and 3B are a plan view and a front sectional view showing a second embodiment of the vacuum suction device according to the present invention. FIG. 4 is an enlarged cross-sectional view of the main part.
As shown in the figure, vacuum adsorption made of porous ceramics having a porosity of several tens to 40% and a maximum pore diameter smaller than 1/2 of the protrusion diameter on the upper part of the base 5 of the apparatus made of dense ceramics. Part 1 is formed. Further, a plurality of pin-shaped microprojections 2 having a circular cross section are provided on the upper surface of the vacuum suction portion 1, and the microprojections 2 have a pitch according to the thickness of the sample 10 so that the sample 10 does not bend during vacuum suction. And are made as small as possible in order to reduce the contact area. An annular seal portion 24 surrounding the vacuum suction portion 1 is provided. The seal portion 24 is formed of a dense material such as glass, metal, inorganic, or organic material that is easier to process, and is approximately several μm lower than the protrusion. By setting, a very small gap is formed between the protrusion and the sample, and the pores existing in the outer peripheral portion of the vacuum suction portion 1 are slightly inside the sample outer diameter (preferably about 0.5 mm to 1 mm). The region 21) is sealed with a dense material.
In this embodiment, the protrusion 2 is made on the vacuum suction portion 1 made of a porous ceramic material having a maximum pore diameter of 1/2 or less of the protrusion diameter, and the height is as low as 1/2 or less of the protrusion diameter. Compared with a projection made of a porous material having a maximum pore diameter larger than the projection diameter and a height larger than the projection diameter, the projection is hardly broken, and the projection may be partially chipped, but the whole is not chipped. Therefore, it is possible to make protrusions arranged at regular intervals, and it is possible to adsorb the thin sample 10 without deformation.

(Third embodiment)
FIGS. 5A and 5B are a plan view and a front sectional view showing a third embodiment of the vacuum suction device according to the present invention.
As shown in the drawing, a vacuum adsorbing portion 1 made of porous ceramics having a porosity of several tens to 40% is welded to a top portion of a base portion 5 of a device made of dense ceramics with a glass agent or the like. Furthermore, pin-like microprojections 2 made of a porous material that is denser or smaller in pore diameter than the different or similar vacuum suction portions 1 having a large number of circular cross sections are fixedly provided on the upper surface of the vacuum suction portion 1. The protrusions 2 are discretely arranged at a pitch corresponding to the thickness of the sample 10 so as not to bend during the vacuum suction, and are made as small as possible in order to reduce the contact area. The pores existing in the outer peripheral portion of the vacuum suction portion 1 are sealed with a dense material up to the region 21 slightly inside (desirably about 0.5 mm to 1 mm) from the sample outer diameter.

  As a method for fixing the protrusion 2 to the vacuum suction portion 1, a process is used in which a thin film is formed by a known method such as a spin coating method, a CVD sputtering method, or a dip method, and then the protrusion is manufactured by a lithographic technique or a sand blast method. be able to.

  Vacuum exhaust grooves 4, 4 ′ are provided in a portion of the upper surface of the base 5 that is in contact with the vacuum suction portion 1. The evacuation grooves 4 are arranged radially from the center, and the evacuation grooves 4 ′ are annularly arranged on the outer peripheral portion of the vacuum suction portion 1, and they communicate with each other. The vacuum exhaust groove 4 communicates with the vacuum exhaust hole 3, and the vacuum exhaust hole 3 is connected to a vacuum pump 7.

In the vacuum adsorber 14, by discharging air from the vacuum exhaust hole 3, the air flows as indicated by the arrows shown in FIG. 5 , and the air in the minute gap 12 between the sample 10 and the vacuum adsorption unit 1 is discharged. . Since the protrusion 2 is made extremely low and the pores on the porous region 21 are sealed, the inflow of air from the outer periphery of the sample is suppressed even without the land portion, and the pressure of the minute gap 12 is reduced. The sample 10 is pressed against the upper surface of the microprojection 2 by atmospheric pressure, and the sample 10 is corrected to a flat surface.

  In such a vacuum suction device, since the minute protrusions 2 are fixedly provided on the upper surface of the vacuum suction portion 1 made of porous ceramics, the contact area between the upper surface of the minute protrusions 2 and the back surface of the sample 10 is extremely high. The contact ratio between the top surface of the microprojection 2 and the back surface of the sample 10 is small, and can be reduced to 1/10 or less as compared with a conventional porous vacuum suction device.

  Therefore, the influence of dust can be reduced, and the entire surface of the sample 10 can be easily corrected to a highly accurate plane. Further, the air existing between the microprotrusions 2 flows into the vacuum exhaust grooves 4 and 4 ′ through the pores of the porous material of the vacuum suction portion 1, so that the degree of vacuum can be reduced without increasing the height of the microprotrusions 2. The distribution can be made uniform. The height of the projection 2 is sufficient to drop dust, and can be as small as about 1 μm to 5 μm, that is, less than 1/20 of the pin diameter. Accordingly, since the height of the microprojections 2 can be reduced from several tens of minutes to nearly one hundredth of the cross-sectional diameter, the microprojections 2 are not easily damaged and the grooves between the microprojections 2 are shallow. Therefore, even if dust adheres, it can be easily removed by washing.

  Further, if the height of the microprojections 2 is reduced, the diameter of the microprojections 2 can be further reduced, so that the contact ratio between the back surface of the sample 10 and the top surface of the microprojections 2 can be further reduced, and dust The influence can be suppressed to the limit. Further, by reducing the pitch of the minute protrusions 2, it is possible to vacuum-suck the thin sample 10 without deforming it.

  Since the protrusion 2 is made of a material different from or the same kind of material that is denser than the vacuum suction portion 1, it is harder to break than a protrusion made of a porous material, and there are pores on the vacuum suction portion 1. It is also possible to make protrusions, and it is possible to make protrusions arranged at regular intervals on the upper surface of the vacuum suction portion 1 made of a porous material.

  The vacuum exhaust hole 3 is connected to a vacuum pump 7 and a clean air supply device 8 capable of supplying clean air via a connection hose 6, and a switching valve 9 is provided on the connection hose 6.

  In the vacuum suction apparatus, when the sample 10, that is, the semiconductor wafer is placed on the vacuum suction portion 1 and the switching valve 9 is switched to connect the vacuum pump 8 and the vacuum exhaust hole 3, the sample passes through the vacuum exhaust grooves 4 and 4 ′. Then, air is discharged from the vacuum exhaust hole 3 as indicated by an arrow, and the air between the protrusion 2 and the back surface of the sample 10 is discharged through the porous hole. As a result, the pressure between the sample 10 and the vacuum suction portion 1 decreases, the sample 10 is pressed against the upper surface of the microprojection 2 by atmospheric pressure, and the sample 10 is corrected to a flat surface. Next, when the switching valve 9 is switched to disconnect the vacuum pump 7 from the vacuum exhaust hole 3, the clean air supply device 8 is connected to the vacuum exhaust hole 3, and clean air is sent to the vacuum exhaust hole 3, Since air blows out from the upper surface of the vacuum suction part 1, the sample 10 is easily detached by air pressure. And it continues flowing clean air until the next sample 10 is mounted. In this state, when the sample 10 is placed on the upper surface of the vacuum suction unit 1, when the switching valve 9 is switched to connect the vacuum pump 7 and the vacuum exhaust hole 3, the sample 10 is vacuum-sucked.

  In the above-described embodiment, the pin-shaped microprojections 2 are provided as projections. However, as projections, annular projections arranged on a large number of concentric circles as shown in FIG. 3 of JP-A-7-302832 are provided. It may be provided. In the above-described embodiment, the microprojections 2 having a circular cross section are provided. However, microprojections having a rectangular cross section may be provided. In the above-described embodiment, the circular vacuum suction portion 1 is provided. However, a vacuum suction portion such as a rectangle or an ellipse may be provided. In the above embodiment, the vacuum suction portion 1 made of porous ceramics is used as the vacuum suction portion made of a porous material. However, the vacuum suction portion made of another porous material is used as the vacuum suction portion made of a porous material. May be used.

(Fourth embodiment)
6A and 6B are a plan view and a front sectional view showing a fourth embodiment of the vacuum suction device according to the present invention.
In the fourth embodiment, the upper surface of the vacuum suction portion 1 is made of a porous material having a pore diameter smaller than that of the vacuum suction portion 1, and a large number of microprojections 102a are integrally formed on the upper surface of the thin plate-like substrate 102b. The projecting plates 102 formed in the above are provided in layers. The vacuum suction portion 1 and the protruding plate 102 are fixed by partial welding with a glass agent or fitting. Alternatively, it is formed by a mud casting method. Further, pores existing in the outer peripheral portion of the vacuum suction portion 1 are sealed with a dense material up to a region 21 slightly inside (desirably about 0.5 mm to 1 mm) from the outer diameter of the sample.

  The protruding plate 102 has a porous ceramic material having a composition structure with a pore size smaller than that of the vacuum suction portion 1, that is, a porosity of about several tens to 40% with a maximum pore diameter of 1/2 or less of the protruding diameter. It is made of a porous ceramic material. The height of the protrusion 102a is set to an extremely low height of about 1 μm to 5 μm. Further, the height of the base body 102b is set to several hundred μm to several mm or less in order to suppress the flow resistance of air.

  In the description of the fourth embodiment, the same reference numerals are given to the drawings corresponding to the first embodiment, and the detailed description thereof is omitted.

(Fifth embodiment)
7A and 7B are a plan view and a cross-sectional view of AOA ′ showing a fifth embodiment of the vacuum suction device according to the present invention.
In the fifth embodiment, three holes 15 through which a lift mechanism for lifting the sample 10 passes are provided in the center of the vacuum suction unit 1. The sample 10 is lifted up through the hole 15, and the sample 10 is carried out by a transfer transfer arm inserted from the side surface. In the conventional ceramic vacuum pin chuck, the height of the protrusion is as large as several hundreds μm. Therefore, a land portion that seals the vacuum is provided around the hole 10 to prevent vacuum leakage. It is only necessary to seal the inner surface 17 (indicated by a thick line in the AOA ′ cross section) and the pores in the vicinity of the hole with a glass agent or a polymer resin, and it is not necessary to newly provide a land portion.

(Sixth embodiment)
FIGS. 8A and 8B are a plan view and a cross-sectional view of AOA ′ showing a sixth embodiment of the vacuum suction apparatus according to the present invention.
In the sixth embodiment, three cutouts 16 for passing a lift mechanism for lifting the sample 10 are provided around the vacuum suction unit 1. A lift mechanism rises from the lower side to the upper side of the notch 16 so that the sample 10 is lifted upward and carried out by a delivery transfer arm inserted from the side surface. In the conventional ceramic vacuum pin chuck, since the height of the protrusion is as large as several hundred μm, a land portion for sealing a vacuum is provided around the notch 16 to prevent vacuum leakage. However, in the present invention, the notch 16 It is only necessary to seal the pores existing in the vicinity of the side inner surface 18 (indicated by oblique hatching in the AOA 'cross section) and the notch with a glass agent or a polymer resin, and it is necessary to newly provide a land portion. Absent.

(A), (b) is the top view and front sectional view which show one Example of the vacuum suction device which comprises the vacuum suction apparatus which concerns on the 1st Embodiment of this invention. It is an expanded sectional view of the principal part. (A), (b) is the top view and front sectional view which show one Example of the vacuum suction device which comprises the vacuum suction apparatus which concerns on the 2nd Embodiment of this invention. It is an expanded sectional view of the principal part. (A), (b) is the top view and front sectional view which show one Example of the vacuum suction device which comprises the vacuum suction apparatus which concerns on the 3rd Embodiment of this invention. (A), (b) is the top view and front sectional view which show one Example of the vacuum suction device which comprises the vacuum suction apparatus which concerns on the 4th Embodiment of this invention. (A), (b) is the top view and AOA 'sectional drawing which show one Example of the vacuum suction device which comprises the vacuum suction apparatus which concerns on the 5th Embodiment of this invention. (A), (b) is the top view and AOA 'sectional drawing which show one Example of the vacuum suction device which comprises the vacuum suction apparatus which concerns on the 6th Embodiment of this invention. (A), (b) is the front view and front sectional drawing of the conventional porous type vacuum suction device. (A), (b) is the front view and front sectional view of a conventional porous vacuum adsorber having porous protrusions. (A), (b) is an enlarged front view and an enlarged front sectional view of a conventional porous vacuum adsorber having porous protrusions.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Vacuum adsorption part, 2 ... Protrusion, 3 ... Vacuum exhaust hole, 4, 4 '... Vacuum exhaust groove, 5 ... Base, 6 ... Connection hose, 7 ... Vacuum pump, 8 ... Clean air supply apparatus, 9 ... Switching valve DESCRIPTION OF SYMBOLS 10 ... Sample, 11 ... Land part, 12 ... Micro gap, 14 ... Vacuum suction device, 15 ... Hole through lift mechanism, 16 ... Notch through lift mechanism, 17 ... Side surface of hole through lift mechanism, 18 ... Lift Cut-out side through which the mechanism passes, 19 ... sealed pores, 20 ... pores, 21 ... region sealed to the inner side slightly from the sample outer diameter, 22 ... non-sealed region to be a vacuum suction part, 23 ... hole A region where the pores around the notch are sealed, 24: a seal portion, 102: a protruding plate, 102a: a protrusion, 102b: a base body.

Claims (7)

In a vacuum adsorption apparatus equipped with a vacuum adsorber that supports a sample only by a large number of protrusions whose upper surfaces are on the same plane and is provided with a vacuum exhaust hole connected to a vacuum pump inside.
The vacuum suction part communicating with the evacuation hole is made of a porous ceramic material having a maximum pore diameter of 1/2 or less of the protrusion diameter, and a number of protrusions are provided on the upper surface, and the height of the protrusion is about several μm. Is set to a very low height to form a minute gap between the vacuum suction portion and the sample, and the pores existing in the outer peripheral portion of the vacuum suction portion to a region slightly inside the sample outer diameter. A vacuum suction apparatus characterized by being sealed with a dense material such as glass, metal, inorganic or organic material. In a vacuum adsorption apparatus equipped with a vacuum adsorber that supports a sample only by a large number of protrusions whose upper surfaces are on the same plane and is provided with a vacuum exhaust hole connected to a vacuum pump inside.
The vacuum suction part communicating with the vacuum exhaust hole is made of a porous ceramic material having a maximum pore diameter of 1/2 or less of the protrusion diameter, and a number of protrusions having a height of 1/2 or less of the protrusion diameter are provided on the upper surface. In addition, an annular seal portion surrounding the vacuum suction portion is provided, and the seal portion is formed of a dense material such as glass, metal, inorganic or organic material that is easier to process, and is set to be about several μm lower than the protrusion. By forming a very small gap between the protrusion and the sample, and further, the pores existing in the outer peripheral portion of the vacuum suction portion are sealed to a region slightly inside the sample outer diameter. Vacuum suction device. In a vacuum adsorption apparatus equipped with a vacuum adsorber that supports a sample only by a large number of protrusions whose upper surfaces are on the same plane and is provided with a vacuum exhaust hole connected to a vacuum pump inside.
The vacuum suction portion communicating with the vacuum exhaust hole is made of a porous material, and a large number of projections made of a material denser than the vacuum suction portion are fixedly provided on the upper surface thereof, and the height of the projection is about several μm. By setting a low height, a minute gap is formed between the vacuum suction part and the sample, and pores existing in the outer peripheral part of the vacuum suction part are sealed to a region slightly inside the sample outer diameter. A vacuum suction device characterized by that. 3. The vacuum according to claim 2, wherein the vacuum suction part is made of a porous ceramic material, and the sealing material for the protrusions and pores is made of a dense material such as glass, metal, inorganic, or organic material. Adsorption device. In a vacuum adsorption apparatus equipped with a vacuum adsorber that supports a sample only by a large number of protrusions whose upper surfaces are on the same plane and is provided with a vacuum exhaust hole connected to a vacuum pump inside.
The vacuum suction part communicating with the vacuum exhaust hole is made of a porous material, and the upper surface is made of a porous material having a pore diameter smaller than that of the vacuum suction part, and a large number of protrusions are integrally formed on the upper surface of the thin plate-like substrate. Protruding plates are provided in layers, and by setting the height of the protrusions to a very low height of about several μm, a minute gap is formed between the vacuum suction portion and the sample, and the outer peripheral portion of the vacuum suction portion The vacuum suction device is characterized in that pores existing in the sample are sealed to a region slightly inside the sample outer diameter. The vacuum adsorbing portion is made of a porous ceramic material, the protruding plate is made of a porous ceramic material having a maximum pore diameter of 1/2 or less of the protruding diameter, and the pore sealing material is glass, metal, inorganic or organic. The vacuum suction device according to claim 5, wherein the vacuum suction device is made of a dense material such as a material. In the vicinity of the center of the previous vacuum suction part, a hole through which the mechanism for lifting the sample adsorbed on the vacuum suction part is passed, or a notch in the peripheral part is provided, and the pores around the hole or notch are made of glass, metal, inorganic or organic The vacuum suction device according to claim 1, which is sealed with a dense material such as a material.

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