JP2005065160A5 - - Google Patents

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Publication number
JP2005065160A5
JP2005065160A5 JP2003296030A JP2003296030A JP2005065160A5 JP 2005065160 A5 JP2005065160 A5 JP 2005065160A5 JP 2003296030 A JP2003296030 A JP 2003296030A JP 2003296030 A JP2003296030 A JP 2003296030A JP 2005065160 A5 JP2005065160 A5 JP 2005065160A5
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JP
Japan
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Application number
JP2003296030A
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JP2005065160A (ja
JP4158650B2 (ja
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Priority to JP2003296030A priority Critical patent/JP4158650B2/ja
Priority claimed from JP2003296030A external-priority patent/JP4158650B2/ja
Priority to US10/911,625 priority patent/US7336016B2/en
Priority to CNB200410058248XA priority patent/CN100477516C/zh
Publication of JP2005065160A publication Critical patent/JP2005065160A/ja
Publication of JP2005065160A5 publication Critical patent/JP2005065160A5/ja
Application granted granted Critical
Publication of JP4158650B2 publication Critical patent/JP4158650B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003296030A 2003-08-20 2003-08-20 弾性表面波デバイス及びその製造方法 Expired - Fee Related JP4158650B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2003296030A JP4158650B2 (ja) 2003-08-20 2003-08-20 弾性表面波デバイス及びその製造方法
US10/911,625 US7336016B2 (en) 2003-08-20 2004-08-05 Surface-acoustic wave device and method of manufacturing same
CNB200410058248XA CN100477516C (zh) 2003-08-20 2004-08-20 表面声波器件及其制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003296030A JP4158650B2 (ja) 2003-08-20 2003-08-20 弾性表面波デバイス及びその製造方法

Publications (3)

Publication Number Publication Date
JP2005065160A JP2005065160A (ja) 2005-03-10
JP2005065160A5 true JP2005065160A5 (ja) 2005-09-22
JP4158650B2 JP4158650B2 (ja) 2008-10-01

Family

ID=34308372

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003296030A Expired - Fee Related JP4158650B2 (ja) 2003-08-20 2003-08-20 弾性表面波デバイス及びその製造方法

Country Status (3)

Country Link
US (1) US7336016B2 (ja)
JP (1) JP4158650B2 (ja)
CN (1) CN100477516C (ja)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7382217B2 (en) * 2004-12-03 2008-06-03 Epson Toyocom Corporation Surface acoustic wave device
JP4001157B2 (ja) * 2005-07-22 2007-10-31 株式会社村田製作所 弾性境界波装置
JP4581099B2 (ja) * 2006-01-31 2010-11-17 国立大学法人 千葉大学 弾性表面波装置
JP4975377B2 (ja) * 2006-06-06 2012-07-11 太陽誘電株式会社 弾性境界波素子、共振器およびフィルタ
WO2008081695A1 (ja) * 2006-12-27 2008-07-10 Murata Manufacturing Co., Ltd. 弾性表面波装置
US7911111B2 (en) 2008-04-15 2011-03-22 Ngk Insulators, Ltd. Surface acoustic wave devices
US8115365B2 (en) 2008-04-15 2012-02-14 Ngk Insulators, Ltd. Surface acoustic wave devices
CN102204092B (zh) * 2009-02-25 2014-03-12 松下电器产业株式会社 弹性波元件和弹性波滤波器
JP2012060421A (ja) * 2010-09-09 2012-03-22 Seiko Epson Corp 弾性表面波デバイス、電子機器及びセンサー装置
WO2012100813A1 (en) 2011-01-24 2012-08-02 Epcos Ag Surface acoustic wave filter
CN102437832A (zh) * 2012-01-05 2012-05-02 西安工业大学 一种混合集成的声表面波器件结构
WO2016051025A1 (en) * 2014-10-03 2016-04-07 Teknologian Tutkimuskeskus Vtt Oy Temperature compensated plate resonator
CN104359584A (zh) * 2014-11-12 2015-02-18 中国科学院微电子研究所 一种高温声表面波温度传感器
CN108292913B (zh) * 2015-12-25 2021-08-31 株式会社村田制作所 弹性波装置
JP7080671B2 (ja) 2018-02-27 2022-06-06 ＮＤＫ ＳＡＷ ｄｅｖｉｃｅｓ株式会社 弾性表面波デバイス
FR3079101B1 (fr) * 2018-03-16 2020-11-06 Frecnsys Structure de transducteur pour suppression de source dans les dispositifs de filtres a ondes acoustiques de surface
CN111879853A (zh) * 2020-07-16 2020-11-03 中国科学院声学研究所 一种剪切波模式的声表面波谐振式检测器
DE212021000552U1 (de) * 2021-04-20 2023-11-07 Murata Manufacturing Co., Ltd. Resonator
CN114112102B (zh) * 2021-11-24 2024-06-18 之江实验室 一种具有线性输出特性的声表面波温度传感器及制备方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6173409A (ja) 1984-09-18 1986-04-15 Nec Kansai Ltd 弾性表面波装置
JP3196678B2 (ja) 1997-02-07 2001-08-06 株式会社村田製作所 表面波装置
JP3339350B2 (ja) * 1997-02-20 2002-10-28 株式会社村田製作所 弾性表面波装置
JP3880150B2 (ja) * 1997-06-02 2007-02-14 松下電器産業株式会社 弾性表面波素子
JP2002076835A (ja) 2000-08-31 2002-03-15 Seiko Epson Corp 弾性表面波素子
JP3897229B2 (ja) * 2001-04-27 2007-03-22 株式会社村田製作所 表面波フィルタ
JP3885824B2 (ja) * 2003-10-03 2007-02-28 株式会社村田製作所 弾性表面波装置

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