JP2005060145A - 酸化亜鉛超微粒子および酸化亜鉛超微粒子の製造方法 - Google Patents
酸化亜鉛超微粒子および酸化亜鉛超微粒子の製造方法 Download PDFInfo
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- JP2005060145A JP2005060145A JP2003290248A JP2003290248A JP2005060145A JP 2005060145 A JP2005060145 A JP 2005060145A JP 2003290248 A JP2003290248 A JP 2003290248A JP 2003290248 A JP2003290248 A JP 2003290248A JP 2005060145 A JP2005060145 A JP 2005060145A
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- zinc oxide
- ultrafine particles
- zinc
- oxide ultrafine
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- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 title claims abstract description 108
- 239000011787 zinc oxide Substances 0.000 title claims abstract description 54
- 239000002245 particle Substances 0.000 title claims abstract description 12
- 238000000034 method Methods 0.000 title description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 30
- 239000007789 gas Substances 0.000 claims abstract description 18
- 239000013078 crystal Substances 0.000 claims abstract description 15
- 239000011701 zinc Substances 0.000 claims abstract description 14
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 13
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims abstract description 11
- 229910052725 zinc Inorganic materials 0.000 claims abstract description 11
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 5
- 239000001301 oxygen Substances 0.000 claims abstract description 5
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 5
- 239000011882 ultra-fine particle Substances 0.000 claims description 54
- 238000004519 manufacturing process Methods 0.000 claims description 27
- 238000001704 evaporation Methods 0.000 claims description 9
- 239000010419 fine particle Substances 0.000 claims description 5
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 4
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 4
- 229910001882 dioxygen Inorganic materials 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 abstract description 6
- 230000000704 physical effect Effects 0.000 abstract description 4
- 230000008016 vaporization Effects 0.000 abstract 1
- 239000002994 raw material Substances 0.000 description 12
- 206010021143 Hypoxia Diseases 0.000 description 8
- 239000010409 thin film Substances 0.000 description 7
- 238000010891 electric arc Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000005424 photoluminescence Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Abstract
【解決手段】 結晶中の窒素濃度が1016cm−3〜1020cm−3であって、粒子径が50nm〜200nmである酸化亜鉛超微粒子。特に、室温で375nm付近の蛍光を示し、可視光域の蛍光強度の積分値が紫外光域の発光強度の積分値の100分の一以下である酸化亜鉛超微粒子。または、極低温にて波長368nm付近で観測されるドナーに基づく発光強度に比して、波長375nm付近で観測されるアクセプタに基づく発光強度が3倍以上大きな酸化亜鉛超微粒子。これは、酸素ガスと窒素ガスとを含む混合ガスを雰囲気ガスとし、その中で亜鉛を加熱して蒸発させることにより製造できる。
Description
すなわち、MBE法は実験ないし研究段階に適した製造方法であり、量産には適さないという問題点があった。具体的には、電気的に活性な不純物を低減させるために原料全てに高純度が要求され、例えば、6N〜7N(純度99.9999%〜99.99999%)の純度が必要であるという問題点があった。また、装置も大がかりであり、原料単価とも相まって、製造コストが極めて高いという問題点もあった。
Claims (7)
- 結晶中の窒素濃度が1016cm−3〜1020cm−3であって、粒子径が50nm〜200nmである酸化亜鉛超微粒子。
- 室温で375nm付近の蛍光を示し、可視光域の蛍光強度の積分値が紫外光域の発光強度の積分値の100分の一以下である請求項1に記載の酸化亜鉛超微粒子。
- 極低温にて波長368nm付近で観測されるドナーに基づく発光強度に比して、波長375nm付近で観測されるアクセプタに基づく発光強度が3倍以上大きな請求項1または2に記載の酸化亜鉛超微粒子。
- 酸素ガスと窒素ガスとを含む混合ガスを雰囲気ガスとし、その中で亜鉛を加熱して蒸発させることにより請求項1〜3のいずれか一つに記載の酸化亜鉛超微粒子を製造する酸化亜鉛超微粒子製造方法。
- 純度99.99%以下の亜鉛を用いる請求項4に記載の酸化亜鉛超微粒子製造方法。
- 雰囲気ガスとして特に精製しない空気を用いる請求項4または5に記載の酸化亜鉛超微粒子製造方法。
- 亜鉛蒸発量が過多となり、酸素欠損の存在する超微粒子とならないように亜鉛蒸発量を抑制する請求項4、5または6に記載の酸化亜鉛超微粒子製造方法。
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JP2003290248A JP4072620B2 (ja) | 2003-08-08 | 2003-08-08 | 酸化亜鉛超微粒子および酸化亜鉛超微粒子の製造方法 |
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JP2003290248A JP4072620B2 (ja) | 2003-08-08 | 2003-08-08 | 酸化亜鉛超微粒子および酸化亜鉛超微粒子の製造方法 |
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JP2005060145A true JP2005060145A (ja) | 2005-03-10 |
JP4072620B2 JP4072620B2 (ja) | 2008-04-09 |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008066138A1 (fr) | 2006-12-01 | 2008-06-05 | National University Corporation Shimane University | Agent de marquage fluorescent et procédé de marquage fluorescent |
JP2008244387A (ja) * | 2007-03-29 | 2008-10-09 | Shimane Univ | 酸化亜鉛系発光素子 |
JP2013175506A (ja) * | 2012-02-23 | 2013-09-05 | Shimane Univ | 光散乱膜及びその製造方法、太陽電池 |
JP2013175507A (ja) * | 2012-02-23 | 2013-09-05 | Shimane Univ | 光電変換素子及びその製造方法 |
US8647679B2 (en) | 2008-02-07 | 2014-02-11 | National Institute Of Advanced Industrial Science And Technology | Core-shell type zinc oxide microparticle or dispersion containing the microparticle, and production process and use of the microparticle or the dispersion |
JP2016075863A (ja) * | 2014-10-09 | 2016-05-12 | コニカミノルタ株式会社 | 電子写真感光体、電子写真画像形成装置及びプロセスカートリッジ |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015174517A1 (ja) | 2014-05-16 | 2015-11-19 | 国立大学法人名古屋工業大学 | p型酸化亜鉛膜の製造方法 |
-
2003
- 2003-08-08 JP JP2003290248A patent/JP4072620B2/ja not_active Expired - Lifetime
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008066138A1 (fr) | 2006-12-01 | 2008-06-05 | National University Corporation Shimane University | Agent de marquage fluorescent et procédé de marquage fluorescent |
JPWO2008066138A1 (ja) * | 2006-12-01 | 2010-03-11 | 国立大学法人島根大学 | 蛍光標識剤および蛍光標識方法 |
JP2008244387A (ja) * | 2007-03-29 | 2008-10-09 | Shimane Univ | 酸化亜鉛系発光素子 |
US8647679B2 (en) | 2008-02-07 | 2014-02-11 | National Institute Of Advanced Industrial Science And Technology | Core-shell type zinc oxide microparticle or dispersion containing the microparticle, and production process and use of the microparticle or the dispersion |
JP2013175506A (ja) * | 2012-02-23 | 2013-09-05 | Shimane Univ | 光散乱膜及びその製造方法、太陽電池 |
JP2013175507A (ja) * | 2012-02-23 | 2013-09-05 | Shimane Univ | 光電変換素子及びその製造方法 |
JP2016075863A (ja) * | 2014-10-09 | 2016-05-12 | コニカミノルタ株式会社 | 電子写真感光体、電子写真画像形成装置及びプロセスカートリッジ |
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