JP2005049058A - Heat treatment equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve problems in conventional heat treatment equipment that environmental pollution is caused when the recovery of an atmospheric sublimate generated by the heat treatment equipment is not necessarily good, the man-hour for maintenance of factory internal piping is increased by desorption and coagulation of the sublimate in the middle of exhaust system piping, and the atmospheric sublimate of the heat treatment equipment cannot be efficiently recovered. <P>SOLUTION: This heat treatment equipment comprises a primary exhaust pipe 2 communicating with the internal space 1a of a heat treatment tank 1; an outside air intake port 3 combined with the middle of the primary exhaust pipe 2; a sprinkler nozzle 4 for injecting water at the vicinity of a combined point P between the primary exhaust pipe 2 and the outside air intake port 3; a cyclone cylinder 5 for receiving a mixture of exhaust gas, outside air, and sprayed water; an exhaust sucking blower 8 for sucking the exhaust gas in the cyclone cylinder through a secondary exhaust pipe 6; and a water tank 7 for receiving the water sprayed from the sprinkler nozzle 4 which contains the sublimate. The inflow quantity of the outside air is adjusted by the flow regulating valve 9 of the outside air intake port 3. The sprinkler nozzle 3 may not be used. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a heat treatment apparatus for removing mainly sublimates of organic evaporants such as a binder released into the surrounding atmosphere and treating it as a clean exhaust gas when heat-treating an electronic component such as a liquid crystal panel.

  When manufacturing electronic components such as liquid crystal panels, there is a process of heat treatment using a heat treatment device, and the pigment (resist) or binder applied to the liquid crystal panel surface evaporates when heated, and the atmosphere in the treatment chamber is formed as a sublimated product. Released into. The heat treatment chamber usually needs to be kept in a clean space in order to prevent adhesion and mixing of impurities, and air in the atmosphere in the heat treatment chamber is exhausted by an exhaust device through an exhaust duct. However, although the sublimate in the exhaust gas evaporates at a high temperature and exists in the atmospheric gas, when the temperature of the exhaust gas falls below a certain temperature, the sublimate is separated from the atmospheric gas and solidifies. Thus, there is a problem that the sublimate that has been detached and solidified in the middle adheres to a filter or a pipe passage in the middle of the exhaust gas pipe, thereby lowering the filter function or contaminating the inside of the pipe. In addition, there is a problem that when discharged to the outdoors without solidifying, it adversely affects the surrounding living environment.

  As described above, as a conventional heat treatment apparatus that discharges atmospheric gas mixed with sublimates generated by the operation of the heat treatment apparatus, as an exhaust system that sucks the atmosphere (gas) in the heat treatment chamber, A gas line that sucks air in the processing chamber at a predetermined pressure from an opening provided therebetween, an outside air line that sucks outside air, a damper that adjusts the outside air intake amount, an intake fan with a drive device, and an adjacent machine With sublimation removal function composed of a control device configured to maintain a constant differential pressure between the chamber and the processing chamber, a contact water cooler that cools the sucked gas to a temperature at which the sublimation solidifies, etc. A heat treatment apparatus has been proposed (Patent Document 1).

JP 07-242412 A

  When removing the sublimate generated in the heat treatment apparatus, the collection efficiency of the sublimate is better when it is quickly removed at a position adjacent to the heat treatment apparatus. However, many of the conventional ones have relatively long pipes and the collection efficiency is not necessarily good. Further, when using a differential pressure measurement control device, the configuration is complicated and requires a considerable space, and the operation is complicated and tends to be expensive. Some sublimates do not necessarily require cooling water, and if the sublimates can be efficiently recovered without using cooling water, the subsequent processing becomes relatively easy. Furthermore, if the sublimate can be collected at high speed and high efficiency, the degree of environmental pollution is further reduced.

  The present invention is environmental pollution that occurs when recovery of sublimates in the atmosphere generated by the heat treatment device is not necessarily good, filter clogging due to sublimates in the factory and the removal of sublimates during the exhaust system piping, An object of the present invention is to solve the problems that the maintenance man-hours of the piping in the factory caused by solidification and the high-efficiency recovery of sublimates in the atmosphere of the heat treatment apparatus cannot be performed.

  According to the first aspect of the present invention, the heat treatment apparatus includes a primary exhaust pipe that communicates with the internal space of the heat treatment tank, an outside air intake port that joins in the middle of the primary exhaust pipe, and an exhaust from the exhaust pipe and the outside air intake port. A cyclone cylinder for receiving gas from an inlet, a secondary exhaust pipe for discharging exhaust gas from the cyclone cylinder, an exhaust suction blower for sucking exhaust gas in the cyclone cylinder through the secondary exhaust pipe, and a cyclone cylinder And a sublimate storage container for storing the separated sublimate.

  The invention of claim 2 is characterized in that the heat treatment apparatus has a primary exhaust pipe that communicates with the internal space of the heat treatment tank, an outside air suction port that joins in the middle of the primary exhaust pipe, and a joining of the primary exhaust pipe and the outside air suction port. A water spray nozzle for injecting water in the vicinity of the point, a cyclone cylinder for receiving the exhaust gas, the outside air and the water spray mixture from the primary exhaust pipe and the outside air intake port, and a secondary exhaust pipe for sucking the exhaust gas from the cyclone cylinder; An exhaust suction blower that sucks exhaust gas in the cyclone cylinder through the secondary exhaust pipe, and a water tank that is disposed at a lower portion of the cyclone cylinder and that receives water containing water and sublimated water sprayed from a water spray nozzle. It is characterized by that.

  The invention of claim 3 is characterized in that the outside air intake port is provided with an outside air flow rate adjusting valve in the middle.

  According to the heat treatment apparatus of the present invention, when exhausting the atmospheric gas containing the sublimate generated by the heat treatment, the sublimate can be separated, solidified and separated and recovered with high efficiency. Therefore, clogging of sublimates in the exhaust system (inside the apparatus and in the factory) and adhesion on the way can be greatly suppressed and prevented, and maintenance man-hours can be reduced. In addition, since the sublimate collection efficiency is high, it is possible to suppress or prevent the environmental impact load of the surroundings due to the exhaust of harmful substances. Further, the heat treatment apparatus of the present invention makes it easy to handle as waste by solidifying and sublimating and solidifying the gas sublimate and using cooling water or discharging it in the form of a solid. Furthermore, since the exhaust gas can be processed at a reduced temperature, there is no need to consider the heat resistance of the exhaust system in the factory as in the prior art. Furthermore, since the outside air is sucked and the air volume is increased, the swirling wind speed in the cyclone cylinder is increased and the centrifugal force is increased, so that the collection efficiency is greatly improved.

  The best mode for carrying out the present invention will be described below with reference to the drawings.

  FIG. 1 shows a first embodiment of the heat treatment apparatus of the present invention. The heat treatment apparatus includes a primary exhaust pipe 2 that communicates with the internal space 1a of the heat treatment tank 1, an outside air intake port 3 that takes in outside air for cooling that merges in the middle of the primary exhaust pipe 2, and the primary exhaust pipe 2 and the outside air intake. A cyclone cylinder 5 for receiving the exhaust gas from the port 3 through the introduction port 5 a, a secondary exhaust pipe 6 for exhausting the exhaust gas from the cyclone cylinder 5, and a sublimation product in the cyclone cylinder 5 through the secondary exhaust pipe 6. An exhaust suction blower 8 that sucks exhaust gas that has been separated and solidified and removed, and a sublimate storage container 10 that stores solidified sublimate separated in the cyclone cylinder 5. The outside air intake port 3 is provided with a flow rate adjusting valve 9 in the middle to adjust the inflow amount of outside air.

1st Embodiment of the heat processing apparatus of this invention comprised as mentioned above removes a sublimation by the following operation | movement.
The exhaust gas discharged from the primary exhaust pipe 2 communicating with the internal space 1a of the heat treatment tank 1 is high in temperature, and mainly organic evaporating gas such as resist generated during the heat treatment is contained in the exhaust gas as a sublimation product. The high-temperature sublimate mixed exhaust gas joins the cold outside air introduced from the outside air suction port 3 in the vicinity of the junction point P between the primary exhaust pipe and the outside air suction port 3, and is rapidly cooled. Thus, the exhaust gas that has passed through the primary exhaust pipe 2 is lowered to the solidification temperature, and the sublimate in the exhaust gas is separated and solidified to become a powdery solidified product, which is sucked into the cyclone cylinder 5 together with the exhaust gas. In this case, since the vicinity P of the junction is cooled by the outside air, the separation and solidification of the sublimate are promoted.

  The mixture of the exhaust gas discharged into the cyclone cylinder 5 and the sublimated powdered solidified product is introduced into the cyclone cylinder 5 from the inlet 5 a provided in the cyclone cylinder 5 by the suction force of the exhaust blower 8. Is discharged with a large flow velocity in the circumferential direction. Then, a forced vortex flow is generated in the cyclone cylinder 5 and a centrifugal force is generated. The sublimate powder solidified product M in the mixture hits the inner wall 5b of the cyclone cylinder 5 and falls downward. Thus, the solidified product of the sublimate is discharged into the sublimate storage container 10 provided in the discharge port 5c of the cyclone cylinder 5.

  FIG. 2 is a diagram showing an outline of the configuration of the second embodiment of the heat treatment apparatus of the present invention. The heat treatment apparatus includes a primary exhaust pipe 2 that communicates with the internal space 1a of the heat treatment tank 1, an outside air intake port 3 that takes in cooling outside air that joins in the middle of the primary exhaust pipe 2, and the primary exhaust pipe 2 and the outside air intake. A water spray nozzle 4 for injecting water in the vicinity of a junction P with the working port 3, and a cyclone cylinder 5 for receiving the exhaust gas, the outside air and the water sprinkled mixture from the primary exhaust pipe 2 and the outside air suction port 3 from the inlet 5 a A secondary exhaust pipe 6 that exhausts exhaust gas from the cyclone cylinder 5, an exhaust suction blower 8 that sucks exhaust gas that has been subjected to sublimation removal processing in the cyclone cylinder through the secondary exhaust pipe 6, and a water spray nozzle 4 and a water tank 7 for receiving water that has been sprinkled with water and containing sublimation. The outside air intake port 3 is provided with a flow rate adjusting valve 9 in the middle to adjust the inflow amount of outside air.

The heat treatment apparatus with a sublimate removal function configured as described above removes the sublimate by the following operation.
The exhaust gas discharged from the primary exhaust pipe 2 communicating with the internal space 1a of the heat treatment tank 1 is at a high temperature, and evaporates such as resist generated during the heat treatment are contained in the exhaust gas as sublimates. The exhaust gas of the high-temperature sublimate mixture merges with the cold outside air introduced from the outside air intake port 3 in the vicinity P of the junction point between the primary exhaust pipe and the outside air intake port 3, and further the water spray from the water spray nozzle 4. Cools quickly with moisture. Thus, the exhaust gas that has passed through the primary exhaust pipe 2 is lowered to the solidification temperature, and the sublimate in the exhaust gas is separated and solidified to become a powdery solidified product. The exhaust gas from the heat treatment tank 1, the outside air, It is sucked into the cyclone cylinder 5 together with the water mixture. In this case, since the vicinity P of the junction is cooled by the outside air and the cooling water, the separation and solidification of the sublimate are further promoted.

  The exhaust gas discharged into the cyclone cylinder 5, the mixture of the sublimated powdery solidified substance and the water is supplied to the cyclone cylinder 5 from the inlet 5 a provided in the cyclone cylinder 5 by the suction force of the exhaust blower 8. Is discharged with a large flow velocity in the circumferential direction. By this discharge, a forced vortex is generated in the cyclone cylinder 5 and a centrifugal force is generated. The sublimated solidified substance M in the mixture is separated, hits the inner wall 5b of the cyclone cylinder 5 and falls. And it falls to the lower part of this cyclone cylinder 5 with a water | moisture content, and is discharged | emitted in the water tank 7 from the discharge port 5c.

  In any embodiment of the heat treatment apparatus of the present invention having the above-described configuration, in particular, the exhaust blower 8 for suction has its exhaust capability in order to maximize the centrifugal force generated in the cyclone cylinder 5. Can be improved. And even if the turning speed in the cyclone cylinder 5 is increased, the exhaust amount from the heat treatment tank 1 does not fluctuate, and only the intake of the outside air can be increased by the flow rate adjusting valve 9 disposed in the outside air intake port 3. it can. Therefore, even if the exhaust after treatment is discharged to the outside of the factory, there is no influence on the external environment, and the degree of freedom of adjustment can be greatly increased.

  The suction exhaust blower 8 can maximize the centrifugal force generated in the cyclone cylinder 5 to improve its exhaust capacity, and increase the turning speed in the cyclone cylinder 5. However, the amount of exhaust from the heat treatment tank 1 does not fluctuate, it is possible to increase only the suction of outside air, and even if the exhaust after treatment is discharged to the outside of the factory, there is no influence on the external environment and adjustment is free It is possible to make the degree extremely high as in the first embodiment.

  As described above in detail, according to the heat treatment apparatus of the present invention, the sublimate generated as vapor in the heat treatment tank can be separated, solidified and recovered with high efficiency, so the exhaust gas is cleaned and discharged to the outside. can do. Therefore, the environment around the factory is not deteriorated. In addition, industrial waste can be collected with a tank drain filter and only replaced, which greatly reduces man-hours. The device itself can be made compact without taking up space.

  In the embodiment of the present invention, the case where there is only one cyclone cylinder 5 has been described. However, as shown in FIG. 3, first, the exhaust gas from the primary exhaust pipe 2 and the outside air intake port 3 and the cold outside air are cooled. And a mixture of solidified sublimate that has been solidified and powdered at that time are introduced into the first cyclone cylinder 5, and after the sublimate is separated and removed, the mixture is further passed through the exhaust pipe 11. Thus, a cyclonic cylinder having two or more multiple connections may be arranged so as to be introduced into the second cyclone cylinder 5. Thus, if the cyclone cylinder 5 is made into a multiple connection, the solidified sublimate can be separated and removed with a higher yield.

  The present invention is applied to the field of manufacturing of a heat treatment apparatus capable of reducing the environmental burden by removing sublimates generated by heat treatment in the process of manufacturing liquid crystal panels and other electronic components, and the industrial field of electronic equipment. can do.

BRIEF DESCRIPTION OF THE DRAWINGS It is a structure schematic diagram of 1st Embodiment of the heat processing apparatus of this invention. It is a structure schematic diagram of 2nd Embodiment of the heat processing apparatus of this invention. It is a structure schematic diagram of embodiment at the time of making the cyclone cylinder which comprises the heat processing apparatus of this invention into 2 stations.

Explanation of symbols

1 Heat treatment tank
2 Primary piping 3 Outside air intake port 4 Sprinkling nozzle 5 Cyclone cylinder 6 Secondary piping 7 Water tank 8 Suction exhaust blower 9 Flow control valve 10 Sublimation storage container P Near junction

Claims (3)

  A primary exhaust pipe that communicates with the internal space of the heat treatment tank, an outside air intake port that joins in the middle of the primary exhaust pipe, a cyclone cylinder that receives exhaust gas from these exhaust pipe and the outside air intake port from an inlet, A secondary exhaust pipe that exhausts exhaust gas from the cyclone cylinder, an exhaust suction blower that sucks exhaust gas in the cyclone cylinder through the secondary exhaust pipe, and a sublimate storage that stores the sublimate separated in the cyclone cylinder A heat treatment apparatus comprising: a container;   A primary exhaust pipe that communicates with the internal space of the heat treatment tank, an outside air suction port that joins in the middle of the primary exhaust pipe, and a water spray nozzle that jets water in the vicinity of the junction of the primary exhaust pipe and the outside air suction port; A cyclone cylinder that receives the exhaust gas, the outside air, and the sprinkled mixture from the primary exhaust pipe and the outside air intake port, a secondary exhaust pipe that sucks the exhaust gas from the cyclone cylinder, and the cyclone cylinder in the cyclone cylinder through the secondary exhaust pipe A heat treatment apparatus comprising: an exhaust suction blower that sucks exhaust gas; and a water tank that is disposed at a lower portion of the cyclone cylinder and receives water containing water that is sublimated and sprayed from a water spray nozzle. The heat treatment apparatus according to claim 1 or 2, wherein the outside air intake port is provided with an outside air flow rate adjustment valve in the middle thereof.

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