JP2005043306A - 振動ジャイロセンサ - Google Patents
振動ジャイロセンサ Download PDFInfo
- Publication number
- JP2005043306A JP2005043306A JP2003279937A JP2003279937A JP2005043306A JP 2005043306 A JP2005043306 A JP 2005043306A JP 2003279937 A JP2003279937 A JP 2003279937A JP 2003279937 A JP2003279937 A JP 2003279937A JP 2005043306 A JP2005043306 A JP 2005043306A
- Authority
- JP
- Japan
- Prior art keywords
- support
- gyro sensor
- vibration gyro
- piezoelectric vibrator
- crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000010453 quartz Substances 0.000 claims abstract description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000013078 crystal Substances 0.000 claims description 26
- 239000000463 material Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 abstract description 9
- 239000002184 metal Substances 0.000 abstract description 9
- 239000000853 adhesive Substances 0.000 abstract description 6
- 230000001070 adhesive effect Effects 0.000 abstract description 6
- 238000001514 detection method Methods 0.000 description 16
- 230000005484 gravity Effects 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 3
- 230000035882 stress Effects 0.000 description 3
- 238000001039 wet etching Methods 0.000 description 3
- 230000032683 aging Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000002889 sympathetic effect Effects 0.000 description 1
Images
Landscapes
- Gyroscopes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003279937A JP2005043306A (ja) | 2003-07-25 | 2003-07-25 | 振動ジャイロセンサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003279937A JP2005043306A (ja) | 2003-07-25 | 2003-07-25 | 振動ジャイロセンサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005043306A true JP2005043306A (ja) | 2005-02-17 |
| JP2005043306A5 JP2005043306A5 (enExample) | 2006-08-17 |
Family
ID=34265906
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003279937A Withdrawn JP2005043306A (ja) | 2003-07-25 | 2003-07-25 | 振動ジャイロセンサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005043306A (enExample) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006038788A (ja) * | 2004-07-30 | 2006-02-09 | Epson Toyocom Corp | 双音さ型振動ジャイロセンサ |
| JP5655863B2 (ja) * | 2010-12-15 | 2015-01-21 | 株式会社村田製作所 | 振動ジャイロ |
| JP2016176763A (ja) * | 2015-03-19 | 2016-10-06 | 京セラクリスタルデバイス株式会社 | 角速度センサ |
| CN113790715A (zh) * | 2021-11-16 | 2021-12-14 | 北京晨晶电子有限公司 | 表贴石英音叉陀螺及其加工方法 |
-
2003
- 2003-07-25 JP JP2003279937A patent/JP2005043306A/ja not_active Withdrawn
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006038788A (ja) * | 2004-07-30 | 2006-02-09 | Epson Toyocom Corp | 双音さ型振動ジャイロセンサ |
| JP5655863B2 (ja) * | 2010-12-15 | 2015-01-21 | 株式会社村田製作所 | 振動ジャイロ |
| JP2016176763A (ja) * | 2015-03-19 | 2016-10-06 | 京セラクリスタルデバイス株式会社 | 角速度センサ |
| CN113790715A (zh) * | 2021-11-16 | 2021-12-14 | 北京晨晶电子有限公司 | 表贴石英音叉陀螺及其加工方法 |
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Legal Events
| Date | Code | Title | Description |
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| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20081028 |
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| A761 | Written withdrawal of application |
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