JP2005020037A5 - - Google Patents
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- Publication number
- JP2005020037A5 JP2005020037A5 JP2004303592A JP2004303592A JP2005020037A5 JP 2005020037 A5 JP2005020037 A5 JP 2005020037A5 JP 2004303592 A JP2004303592 A JP 2004303592A JP 2004303592 A JP2004303592 A JP 2004303592A JP 2005020037 A5 JP2005020037 A5 JP 2005020037A5
- Authority
- JP
- Japan
- Prior art keywords
- laser device
- semiconductor laser
- waveguide
- separation groove
- stripe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 5
- 238000000926 separation method Methods 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 3
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 1
- 238000010030 laminating Methods 0.000 claims 1
- 150000004767 nitrides Chemical class 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004303592A JP3849876B2 (ja) | 2000-06-08 | 2004-10-18 | 半導体レーザ素子及びその製造方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000172797 | 2000-06-08 | ||
| JP2001116197 | 2001-04-13 | ||
| JP2004303592A JP3849876B2 (ja) | 2000-06-08 | 2004-10-18 | 半導体レーザ素子及びその製造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001125215A Division JP3716974B2 (ja) | 2000-06-08 | 2001-04-24 | 半導体レーザ素子及びその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005020037A JP2005020037A (ja) | 2005-01-20 |
| JP2005020037A5 true JP2005020037A5 (enExample) | 2005-07-21 |
| JP3849876B2 JP3849876B2 (ja) | 2006-11-22 |
Family
ID=34198642
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004303592A Expired - Lifetime JP3849876B2 (ja) | 2000-06-08 | 2004-10-18 | 半導体レーザ素子及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3849876B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4952376B2 (ja) | 2006-08-10 | 2012-06-13 | 三菱電機株式会社 | 光導波路と半導体光集積素子の製造方法 |
| JP7573837B2 (ja) * | 2020-01-08 | 2024-10-28 | 旭化成株式会社 | 光学装置の製造方法及び光学装置 |
-
2004
- 2004-10-18 JP JP2004303592A patent/JP3849876B2/ja not_active Expired - Lifetime
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